CN205488046U - Testing arrangement suitable for wafer detects - Google Patents
Testing arrangement suitable for wafer detects Download PDFInfo
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- CN205488046U CN205488046U CN201620283678.XU CN201620283678U CN205488046U CN 205488046 U CN205488046 U CN 205488046U CN 201620283678 U CN201620283678 U CN 201620283678U CN 205488046 U CN205488046 U CN 205488046U
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- test
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- guiding gutter
- testing needle
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Abstract
The utility model relates to a testing arrangement suitable for wafer detects: including wafer test seat, the frame plate is drawn together to wafer test stationary ladle, test needle roof supporting, test needle supporting baseplate, spring test needle and sealing washer, test needle roof supporting sets up the bottom at the frame plate, be provided with the pilot hole in the frame plate, be provided with the boss on the test needle roof supporting, the boss cartridge is in the pilot hole, test needle supporting baseplate sets up in test needle roof supporting bottom, the position of corresponding boss is provided with a plurality of test pinholes and response hole on boss and the test supporting baseplate, be provided with spring test needle in the test pinhole, it goes up the guiding gutter to be provided with at least two around the pilot hole on the top surface of frame plate, be provided with two at least lower guiding gutters on the bottom surface of test needle roof supporting and test needle supporting baseplate, it goes up the guiding gutter and the air vent of guiding gutter down to be provided with on the wafer test seat to connect, it is provided with the seal groove to go up the guiding gutter periphery, the sealing washer clamps in the seal groove, the utility model provides a pair of testing arrangement suitable for wafer detects can can also improve the convenience and the reliability of test when guaranteeing test pressure.
Description
Technical field
This utility model relates to a kind of precise electronic instrument test device, particularly relates to one and is applicable to wafer inspection
The test device surveyed.
Background technology
It is known that the most increasing electronic product is full of each corner in human society, electronics produces
The various functions of product be unable to do without the development of integrated circuit, so in order to ensure its final performance, integrated circuit
The most particularly important in the test of early stage, i.e. wafer detection.Owing to wafer itself is the most fragile, therefore carrying out
During wafer detection, higher to pressure requirements, if test pressure is excessive, wafer can be damaged, pressure is too small
Then can affect test effect；Therefore to pressure environment when ensureing detection test, it is necessary to it is designed to connect
The test device of nearly constant voltage detection.
Utility model content
For solving above-mentioned technical problem, this utility model purpose is to provide a kind of survey being applicable to wafer detection
Electricity testing device.
To achieve these goals, this utility model provides a kind of test device being applicable to wafer detection,
Including wafer test bench, described wafer test bench includes that frame plate, testing needle roof supporting, testing needle support
Base plate, Spring test needle and sealing ring, described testing needle roof supporting is arranged on the bottom of described frame plate,
Being provided with pilot hole in described frame plate, described testing needle roof supporting is provided with boss, described boss is inserted
Being contained in described pilot hole, described testing needle support baseboard is arranged on bottom described testing needle roof supporting, institute
State the position of corresponding described boss on boss and test support baseboard and be provided with some test pin holes and sensing
Hole, is provided with described Spring test needle, around described dress on the end face of described frame plate in described test pin hole
Distribution is provided with guiding gutter at least two, described testing needle roof supporting and the bottom surface of testing needle support baseboard
On be provided with guiding gutter under at least two, described wafer test bench is provided with connection described upper guiding gutter and under
The airway of guiding gutter, described upper guiding gutter periphery is provided with seal groove, and described sealing ring is installed on described close
In sealing groove.
Further, described airway includes the first passage, the second passage and the 3rd passage, described
First passage is arranged in described upper guiding gutter, and described second passage is arranged on corresponding described first ventilation
In the described lower guiding gutter of hole site, described threeway gas cell distribution is in corresponding described first passage position
On the bottom surface of described testing needle roof supporting or testing needle support baseboard and be arranged on outside described lower guiding gutter.
Further, described frame plate and testing needle roof supporting are all distributed the described of some corresponding layouts
First fixing hole, described frame plate, testing needle roof supporting and testing needle support baseboard are all distributed some phases
Corresponding described second fixing hole arranged.
Concrete, the first fixing hole is the first bolt hole, and the second fixing hole is the second bolt hole.
Further, described sensing hole is two and lays respectively at the both sides of described test pin hole.
Further, described sealing ring is silicon rubber loop or EP rubbers circle.
Further, described upper guiding gutter is rectangular recess.
By such scheme, this utility model at least has the advantage that and is ensureing that wafer test pressure is uniform
While, improve convenience and the reliability of test.
Described above is only the general introduction of technical solutions of the utility model, in order to it is new to better understand this practicality
The technological means of type, and can be practiced according to the content of description, below with preferable reality of the present utility model
After executing example and coordinating accompanying drawing to describe in detail such as.
Accompanying drawing explanation
Fig. 1 shows the structural representation of a kind of test device being applicable to wafer detection of the present utility model；
Fig. 2 shows the axonometric chart of a kind of test device being applicable to wafer detection of the present utility model；
Fig. 3 shows the rearview of a kind of test device being applicable to wafer detection of the present utility model.
Detailed description of the invention
Below in conjunction with the accompanying drawings and embodiment, detailed description of the invention of the present utility model is described in further detail.
Following example are used for illustrating this utility model, but are not limited to scope of the present utility model.
Seeing Fig. 1 to 3, including wafer test bench, wafer test bench includes that frame plate 1, testing needle prop up support
Plate 2, testing needle support baseboard 3, Spring test needle 4 and sealing ring 5, testing needle roof supporting 2 is arranged on
The bottom of frame plate 1, is provided with pilot hole 6, testing needle roof supporting 2 is provided with boss in frame plate 1
7, boss 7 is inserted in pilot hole 6, and testing needle support baseboard 3 is arranged on bottom testing needle roof supporting 2,
On boss 7 and test support baseboard 3, the position of corresponding boss 7 is provided with some test pin holes 8 and sensing
Hole 9, is provided with Spring test needle 4 in test pin hole 8, the end face of frame plate 1 is arranged around pilot hole 6
There are guiding gutter 10 at least two, the bottom surface of testing needle roof supporting 2 and testing needle support baseboard 3 is arranged
There are guiding gutter 11 under at least two, wafer test bench is provided with the upper guiding gutter 10 of connection and lower guiding gutter 11
Airway, upper guiding gutter 10 periphery is provided with seal groove 17, and sealing ring 5 is installed in seal groove 17.
This utility model provide a kind of be applicable to wafer detection test device operation principle as follows:
Be applicable to wafer detection test device when wafer is tested, the end of wafer test bench
Portion is connected with pcb board by keeper, and the top of wafer test bench is provided with sealing ring 5, the most both ensures
Safe distance between wafer test bench and wafer, is possible to prevent again air-flow to expose, is not damaging wafer
Under premise, under certain stream pressure, carry out wafer detection；It is distributed on wafer test bench and runs through whole
The airway of wafer test bench, test pin hole 8 and sensing hole 9, and in order to ensure that air pressure is uniform, wafer is tested
The end face of seat is equipped with the upper guiding gutter being connected with airway, test pin hole 8 and sensing hole 9 with bottom surface
10 and lower guiding gutter 11, around airway, test pin hole 8 and sensing hole 9 on the end face of frame plate 1, increase
Add during sealing ring 5 prevents wafer detection and leaked gas.
In order to increase the quantity of passage, airway includes first passage the 12, second passage 13 and the 3rd
Passage 14, the first passage 12 is arranged in guiding gutter 10, and the second passage 13 is arranged on corresponding the
In the lower guiding gutter 11 of one passage 12 position, the 3rd passage 14 is distributed in corresponding first passage 12
On the testing needle roof supporting 2 of position or the bottom surface of testing needle support baseboard 3 and be arranged on outside lower guiding gutter 11；
So, forced draft average mark is scattered in each wafer of wafer, it is achieved that the equalization of pressure.
In order to fix the position of each parts of wafer test bench, frame plate 1 and testing needle roof supporting 2 are divided equally
First fixing hole 15 of the some corresponding layouts of cloth, frame plate 1, testing needle roof supporting 2 and testing needle prop up
All being distributed the second fixing hole 16 of some corresponding layouts on support base plate 3, the first fixing hole 15 is the first screw
Hole, the second fixing hole 16 is the second screw hole.
In order to accurately detect the test pressure of test probe 4, sensing hole 9 is two and lays respectively at testing needle
The both sides in hole 8；So, no matter the sensitivity of test sensor, test pressure can accurately be detected.
In order to prevent the test device for wafer detection from leaking during wafer is detected, seal
Circle 5 is silicon rubber loop or EP rubbers circle, and upper guiding gutter 10 is rectangular recess.
Below it is only preferred implementation of the present utility model, is not limited to this utility model, it should refer to
Go out, for those skilled in the art, before without departing from this utility model know-why
Putting, it is also possible to make some improvement and modification, these improve and modification also should be regarded as guarantor of the present utility model
Protect scope.
Claims (7)
1. being applicable to a test device for wafer, including wafer test bench, described wafer test bench includes frame
Frame plate, testing needle roof supporting, testing needle support baseboard, Spring test needle and sealing ring, described testing needle
Roof supporting is arranged on the bottom of described frame plate, is provided with pilot hole, described testing needle in described frame plate
Being provided with boss on roof supporting, described boss is inserted in described pilot hole, described testing needle support baseboard
It is arranged on bottom described testing needle roof supporting, corresponding described boss on described boss and test support baseboard
Position be provided with some test pin holes and sensing hole, be provided with described Spring test needle in described test pin hole,
On the end face of described frame plate, described pilot hole being provided with guiding gutter at least two, described testing needle props up
Guiding gutter under at least two, described wafer test bench it is provided with on the bottom surface of support plate and testing needle support baseboard
On be provided with connection described upper guiding gutter and the airway of lower guiding gutter, described upper guiding gutter periphery is provided with close
Sealing groove, described sealing ring is installed in described seal groove.
The test device being applicable to wafer the most according to claim 1, it is characterised in that: described ventilation
Road includes that the first passage, the second passage and the 3rd passage, described first passage are arranged on described
In guiding gutter, described second passage is arranged in the described lower guiding gutter of corresponding described first passage position,
The described threeway gas cell distribution described testing needle roof supporting in corresponding described first passage position or test
On the bottom surface of pin support baseboard and be arranged on outside described lower guiding gutter.
The test device being applicable to wafer the most according to claim 1, it is characterised in that: described framework
Described first fixing hole of some corresponding layouts all it is distributed on plate and testing needle roof supporting, described frame plate,
All it is distributed described the second of some corresponding layouts on testing needle roof supporting and testing needle support baseboard to fix
Hole.
The test device being applicable to wafer the most according to claim 3, it is characterised in that: described first
Fixing hole is the first bolt hole, and described second fixing hole is the second bolt hole.
The test device being applicable to wafer the most according to claim 1, it is characterised in that: described sensing
Hole is two and lays respectively at the both sides of described test pin hole.
The test device being applicable to wafer the most according to claim 1, it is characterised in that: described sealing
Circle is silicon rubber loop or EP rubbers circle.
The test device being applicable to wafer the most according to claim 1, it is characterised in that: lead on described
Chute is rectangular recess.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620283678.XU CN205488046U (en) | 2016-04-07 | 2016-04-07 | Testing arrangement suitable for wafer detects |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620283678.XU CN205488046U (en) | 2016-04-07 | 2016-04-07 | Testing arrangement suitable for wafer detects |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205488046U true CN205488046U (en) | 2016-08-17 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620283678.XU Active CN205488046U (en) | 2016-04-07 | 2016-04-07 | Testing arrangement suitable for wafer detects |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205488046U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113092982A (en) * | 2020-01-09 | 2021-07-09 | 珠海格力电器股份有限公司 | Test seat and test equipment |
-
2016
- 2016-04-07 CN CN201620283678.XU patent/CN205488046U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113092982A (en) * | 2020-01-09 | 2021-07-09 | 珠海格力电器股份有限公司 | Test seat and test equipment |
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| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |