CN205484413U - A sample platform for scanning electron microscope EBSD test - Google Patents
A sample platform for scanning electron microscope EBSD test Download PDFInfo
- Publication number
- CN205484413U CN205484413U CN201620054539.XU CN201620054539U CN205484413U CN 205484413 U CN205484413 U CN 205484413U CN 201620054539 U CN201620054539 U CN 201620054539U CN 205484413 U CN205484413 U CN 205484413U
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- sample
- test
- electron microscope
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- ebsd
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Abstract
The utility model relates to an electron microscope back of the body scattered electron diffraction test technical field especially relates to a sample platform for scanning electron microscope EBSD test. The utility model provides a sample platform for scanning electron microscope EBSD test, this sample platform formula structure as an organic whole, including sloping platform and cascaded base, the sloping platform becomes 70 contained angles with the sloping platform tangent plane that cascaded base is connected with the notch cuttype base, and the intersecting line synchronism sample prescription of this sloping platform tangent plane and notch cuttype base is to being the contained angle to it pops one's head in to EBSD to guarantee the sample test every detail. The utility model discloses simple reliable, integrative sound construction is durable, simplifies electronic speculum laying -out flow, and measurable quantity large sample or once measure a plurality of samples can show the efficiency that improves EBSD and survey kind.
Description
Technical field
This utility model relates to ultramicroscope accessory technical field, particularly relates to a kind of for Hitachi's cold field emission scanning
Ultramicroscope does the sample stage of EBSD test.
Background technology
The sample stage that scanning electron microscope EBSD (abbreviation EBSD) is tested, in order to obtain stronger signal,
Relative to incident beam, sample needs 70 °, and simplest way is to be tilt 70 ° little, and sample is fixed
On little platform, bond to the most again on electron microscopic sample platform base, but this is it is difficult to ensure that the accuracy of location, it is also difficult to ensure viscous
The firmness connect.Also have a lot of patent to propose improvement for disadvantage mentioned above, they otherwise excessively complicated, or regulation is excessively
Loaded down with trivial details, or it is unsuitable for the sample stage of Hitachi's cold field emission scanning electron microscope.
Utility model content
For defect or deficiency present in prior art, technical problem to be solved in the utility model is: provide one
Planting the sample stage for Hitachi's cold field emission scanning electron microscope EBSD test, this sample stage is simple and reliable, it is not necessary to Electronic Speculum
Inclination and rotate adjust, large sample or the multiple sample of one-shot measurement can be measured, be used in Hitachi's cold field emission scanning electron show
The EBSD Special sample table of micro mirror (S4700, S4800, Su8000 series etc.).
To achieve these goals, the technical scheme that this utility model is taked is swept for Hitachi's cold field emission for providing one
Retouching the sample stage of ultramicroscope EBSD test, this sample stage is integral type structure, including sloping platform and staged base, it is simple to Gu
Location survey test agent streamline operation.The sloping platform tangent plane being positioned on described sloping platform becomes 70 ° of angles with notch cuttype base, to ensure
EBSD accepts the intensity of signal.This sloping platform tangent plane is angle with the intersection of staged base with sample introduction direction, to ensure that sample is surveyed
Pop one's head in towards EBSD in examination face.
As further improvement of the utility model, described staged base bottom is provided with screw, this screw and Electronic Speculum
Sample feeding rod connects.
As further improvement of the utility model, the both sides of described staged base are for all to have ladder, its top to be shorter than
Bottom, its both sides, top are semicircle, and its underpart is square.
As further improvement of the utility model, the plane projection of described sloping platform is less than the throwing of described staged base
Shadow, in order to sample is in the range of the test of Electronic Speculum.
Intersection as further improvement of the utility model, the tangent plane of described sloping platform and notch cuttype base is crossed at the bottom of staged
The round dot of seat projection circle, to guarantee to put the sample that thickness is bigger, ensures that the area of sloping platform tangent plane more greatly can many setting-outs simultaneously
Product.
As further improvement of the utility model, described sample stage uses aluminium material to make, in order to processes and reduces
Cost.
The beneficial effects of the utility model are: this utility model is simple and reliable, and sample stage itself is prone to processing, integrative-structure
Firm and durable, is greatly simplified Electronic Speculum setting-out flow process, can measure large sample or the multiple sample of one-shot measurement, can improve the effect of test sample
Rate, is used in the EBSD Special sample of Hitachi's cold field emission scanning electron microscope (S4700, S4800, Su8000 series etc.)
Platform.
Accompanying drawing explanation
Fig. 1 is structural representation of the present utility model；
Fig. 2 is the schematic diagram bottom this utility model；
Wherein numeral represents: 1, sloping platform；2, staged base；3, sloping platform tangent plane；4, screw.
Detailed description of the invention
This utility model is further illustrated by explanation and detailed description of the invention below in conjunction with the accompanying drawings.
As shown in Figure 1 and Figure 2, this utility model provides a kind of sample stage for the test of scanning electron microscope EBSD,
This sample stage is integral type structure, and including sloping platform 1 and staged base 2, this sloping platform 1 top is trapezoidal, and bottom is pentagon, tiltedly
The sloping platform tangent plane 3 that platform 1 is connected with staged base 2 becomes 70 ° of angles with notch cuttype base, to ensure that EBSD accepts the strong of signal
Degree, this sloping platform tangent plane 3 depends on EBSD probe present position with the angle in sample introduction direction, to ensure with the intersection of notch cuttype base
Popping one's head in towards EBSD in sample test face, is 55 ° of angles in this example.
As it is shown in figure 1, this staged base 2 bottom is provided with screw 4, this screw 4 is connected with the sample feeding rod of Electronic Speculum.
As it is shown in figure 1, the both sides of this staged base 2 are for all to have ladder, its top to be shorter than bottom, its both sides, top are half
Circle, its underpart is square.
As it is shown in figure 1, in order to ensure sample all in the range of the test of Electronic Speculum, sloping platform plane projection (shaded side) should be little
Projection (border circular areas) in staged base, in order to sample is in the range of the test of Electronic Speculum.
As it is shown in figure 1, sloping platform tangent plane crosses, with the intersection of notch cuttype base, the round dot that the projection of staged base is round, to guarantee
Put the sample that thickness is bigger, ensure that the area of sloping platform tangent plane more greatly can many setting-outs product simultaneously.
As it is shown in figure 1, described sample stage uses aluminium material to make.
This utility model is an entirety, and sloping platform tangent plane becomes 70 ° with notch cuttype base, and sloping platform tangent plane is directly toward EBSD and visits
Head, it is not necessary to adjusting, upper lower section parallel sample is adhered directly in the inclined plane of sample stage be then placed in Electronic Speculum and carries out EBSD table
Levy.Because inclined plane area is very big in addition to can putting relatively large sample, it is also possible to arranges a lot of sample, can put in the lump
Electronic Speculum, thus improve the efficiency of test sample.
Example 1 soldering ball (1mm diameter), cold inlay after polish, the long 1cm of inlaying samples, wide 5mm, high 8mm, upper lower section
Parallel, four samples two-by-two and are emitted on EBSD Special sample table, are EBSD and analyze.
Example 2 IF steel disc (long 5mm, wide 3mm, thick 1mm), upper lower section is parallel, can be by 12 samples by three row's arrangements
It is put on EBSD Special sample table, is EBSD and analyzes.
Example 3 magnesium alloy thin slice (long 1cm, wide 2mm), cold inlay after polish, a diameter of 2cm of inlaying samples, high 1cm, on
Lower section is parallel, two-by-two and is emitted on EBSD Special sample table by four samples, is EBSD and analyzes.
It is applicable to large sample, it is also possible to the sample that the multiple size of one-shot measurement is less.The letter of this utility model sample table device
Single practical, high efficient and reliable.
Above content is to combine concrete preferred implementation further detailed description of the utility model, it is impossible to
Assert that of the present utility model being embodied as is confined to these explanations.Ordinary skill for this utility model art
For personnel, without departing from the concept of the premise utility, it is also possible to make some simple deduction or replace, all should regard
For belonging to protection domain of the present utility model.
Claims (6)
1. the sample stage for the test of scanning electron microscope EBSD, it is characterised in that: this sample stage is integral type knot
Structure, including sloping platform and staged base, the sloping platform tangent plane being positioned on described sloping platform becomes 70 ° of angles, this sloping platform with notch cuttype base
Tangent plane is angle with the intersection of notch cuttype base with sample introduction direction.
Sample stage for the test of scanning electron microscope EBSD the most according to claim 1, it is characterised in that: described rank
Ladder type base bottom is provided with screw, and this screw is connected with the sample feeding rod of Electronic Speculum.
Sample stage for the test of scanning electron microscope EBSD the most according to claim 2, it is characterised in that: described rank
The both sides of ladder type base are for all to have ladder, its top to be shorter than bottom, and its both sides, top are semicircle, and its underpart is square.
Sample stage for the test of scanning electron microscope EBSD the most according to claim 1, it is characterised in that: described
The plane projection of sloping platform is less than the projection of described staged base.
The most according to claim 4 for scanning electron microscope EBSD test sample stage, it is characterised in that: described tiltedly
The tangent plane of platform crosses, with the intersection of described notch cuttype base, the round dot that the projection of staged base is round.
Sample stage for the test of scanning electron microscope EBSD the most according to claim 1, it is characterised in that: described sample
Sample platform uses aluminium material to make.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620054539.XU CN205484413U (en) | 2016-01-20 | 2016-01-20 | A sample platform for scanning electron microscope EBSD test |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620054539.XU CN205484413U (en) | 2016-01-20 | 2016-01-20 | A sample platform for scanning electron microscope EBSD test |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205484413U true CN205484413U (en) | 2016-08-17 |
Family
ID=56638941
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620054539.XU Expired - Fee Related CN205484413U (en) | 2016-01-20 | 2016-01-20 | A sample platform for scanning electron microscope EBSD test |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205484413U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109425315A (en) * | 2017-08-31 | 2019-03-05 | 长鑫存储技术有限公司 | The test loaded tool and test method of semiconductor structure |
| CN113433149A (en) * | 2021-05-26 | 2021-09-24 | 中国科学院金属研究所 | Method for realizing cross-scale continuous automatic characterization analysis and test of EBSD (electronic brake force sensor) system |
| CN113960082A (en) * | 2021-11-08 | 2022-01-21 | 东北大学 | Sample preparation method for hot-rolled strip steel iron scale EBSD analysis |
-
2016
- 2016-01-20 CN CN201620054539.XU patent/CN205484413U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109425315A (en) * | 2017-08-31 | 2019-03-05 | 长鑫存储技术有限公司 | The test loaded tool and test method of semiconductor structure |
| CN109425315B (en) * | 2017-08-31 | 2021-01-15 | 长鑫存储技术有限公司 | Test carrier and test method of semiconductor structure |
| CN113433149A (en) * | 2021-05-26 | 2021-09-24 | 中国科学院金属研究所 | Method for realizing cross-scale continuous automatic characterization analysis and test of EBSD (electronic brake force sensor) system |
| CN113960082A (en) * | 2021-11-08 | 2022-01-21 | 东北大学 | Sample preparation method for hot-rolled strip steel iron scale EBSD analysis |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160817 Termination date: 20170120 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |