CN205463447U - Abluent gas curtain protector of laser - Google Patents
Abluent gas curtain protector of laser Download PDFInfo
- Publication number
- CN205463447U CN205463447U CN201620075097.7U CN201620075097U CN205463447U CN 205463447 U CN205463447 U CN 205463447U CN 201620075097 U CN201620075097 U CN 201620075097U CN 205463447 U CN205463447 U CN 205463447U
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- air outlet
- laser
- air
- inner chamber
- outlet array
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Abstract
The utility model provides an abluent gas curtain protector of laser can effectively collecting the pollutant in the laser washing to can guarantee that the laser camera lens is clean, prevent that camera lens glass crack from damaging. Abluent gas curtain protector of laser includes: the protection casing has for last thin lower thick tubaeform inner chamber, the upper end of inner chamber is cup jointed laser and is washd the camera lens, the lower extreme of inner chamber has the opening, first air outlet array sets up the lateral wall of inner chamber, first air outlet array exhaust compressed air with the lateral wall forms the protection space that surrounds the laser camera lens, the pump orifice sets up the side below of protection casing, second air outlet array sets up the periphery of inner chamber lower extreme, second air outlet array exhaust compressed air encircles by the laser irradiation region on cleaning workpiece surface, the air current of every air outlet of second air outlet array all points to in the projection of horizontal plane the pump orifice.
Description
Technical field
This utility model relates to the gas curtain preventer laser machining guard technology, particularly laser cleaning.
Background technology
Laser processing technology, is to utilize laser beam to interact with material, (material is included gold
Belong to nonmetal) carry out cutting, weld, surface processes, punch and micro-machined a special kind of skill.
Laser cleaning is the one in laser processing technology, and it is the short-pulse laser by high intensity and pollution layer
Between carry out optical physics reaction.Its physical principle can be summarized as follows:
A) light beam that laser instrument is launched is absorbed by the pollution layer in surface to be treated.
B) absorbing of big energy forms the plasma (the unstable gas of highly ionized) drastically expanded, and produces
Raw shock wave.
C) shock wave makes pollutant become fragment disallowable.
D) light impulse length must be the shortest, to avoid the heat accumulation making processed surface be destroyed.
E) experiment shows that, when there being oxide on metal surface, plasma results from metal surface.
Fig. 1 is laser cleaning operation principle schematic diagram, as it is shown in figure 1, the laser warp that laser instrument 1 produces can
The optical fiber 2 of bending is transferred to condenser lens 3, and after focusing, the endoporus from washer jet 4 arrives at cleaning workpiece 5
Surface, generally use blow-out nozzle, will there is certain pressure by means of the little hole nozzle with laser coaxial
Gas blows to cleaning area, and gas is by assisting source of the gas 6 to supply, and the Main Function of air blowing is to blow away vapour, and
Prevent camera lens by splash and smoke contamination, aoxidize institute's liberated heat at the same time it can also be take away or prevent table
Face aoxidizes, and plays purification surface, strengthening laser and the heat effect of material.
But, the setting of existing blow-out nozzle, the most rough blows off pollutant, difficult during blowing off
By definitely prevent a small amount of contaminant infiltration or by convection current in the way of travel back across near camera lens, and if laser mirror
It is attached to pollutant, it will absorb and assemble amount of heat, causing lens element to burst damage on the glass of head,
Cause production loss, and, do not carry out effective collection of pollutant, the pollution of cleaning metal surface gasification
Thing toxicity is very big, the health of operator can be brought infringement.
Utility model content
The purpose of this utility model is to provide for the gas curtain preventer of a kind of laser cleaning, can be to laser cleaning
In the carrying out of pollutant effectively collect, and be able to ensure that laser lens cleans, prevent lens element from bursting
Damage.
To achieve these goals, this utility model provides the gas curtain preventer of a kind of laser cleaning, bag
Include:
Protective cover, has for up-thin-low-thick tubaeform inner chamber, the upper end socket laser cleaning mirror of described inner chamber
Head, the lower end of described inner chamber has opening；
First air outlet array, is arranged on the sidewall of described inner chamber, the pressure that described first air outlet array is discharged
Contracting air and described sidewall form the protective zone surrounding laser lens；
Pump orifice, is arranged on the side-lower of described protective cover；
Second air outlet array, is arranged on the periphery of described inner chamber lower end, and described second air outlet array is discharged
Compressed air around being cleaned by the laser-irradiated domain of surface of the work；Described second air outlet array each
The air-flow of air outlet all points to described pump orifice in the projection of horizontal plane.
Preferably, in above-mentioned gas curtain preventer, described sidewall has and supplements in described protective zone
The wind-supplying mouth of air；
Described wind-supplying mouth has defecator.
Preferably, in above-mentioned gas curtain preventer, described pump orifice is fixing with described protective cover to be connected.
Preferably, in above-mentioned gas curtain preventer, described pump orifice is fixing with described laser cleaning camera lens even
Connect.
Preferably, in above-mentioned gas curtain preventer, also include: the 3rd air outlet array, be arranged on described
The sidewall of inner chamber, the compressed air that described 3rd air outlet array is discharged directly purges described laser cleaning mirror
Head.
Preferably, in above-mentioned gas curtain preventer, also include control unit, connect described 3rd air outlet
The air-out of array controls valve.
Preferably, in above-mentioned gas curtain preventer, the air-out direction of described first air outlet array dips down
Tiltedly, the compressed air that described first air outlet array is discharged is travel downwardly along described sidewall.
This utility model embodiment has following technical effect that
1), in this utility model embodiment, the first air outlet array 21 and the second air outlet array 22 are discharged
Compressed air composition cover the closing gas curtain of laser-irradiated domain 50, and will be closed by pump orifice 40
Particulate pollutant collection in gas curtain processes.Thus prevent pollutant to be diffused in environment, ensure operator
Health.
2) in this utility model embodiment, the compressed air that the first air outlet array 21 is discharged and described sidewall
Form the protective zone 210 surrounding laser lens, not only prevent pollutant to be diffused into from laser-irradiated domain 50
On laser lens, also can prevent the upper camera lens of pollutant contamination in external environment condition, prevent camera lens from polluting because of contamination
Thing and absorb heat and burst.Thus reduce production cost.
3), in this utility model embodiment, the compressed air that the 3rd air outlet array 23 is discharged directly purges institute
Stating laser cleaning camera lens, just in case there being pollutant at this by endothermic gasification, also will not rest on camera lens surface, anti-
Only camera lens bursts, and can also give camera lens surface cooling.The air blowing over camera lens surface can be swept along remittance to arrive
First air outlet array 21 produce air-flow in, after arriving at sidewall enter below closing gas curtain in, also
Being exactly that protective zone 210 has self-purification function, this greatly reduces camera lens and bursts because of pollutants
Risk.
According to below in conjunction with the accompanying drawing detailed description to this utility model specific embodiment, those skilled in the art
Will become more apparent from of the present utility model above-mentioned and other purposes, advantage and feature.
Accompanying drawing explanation
Describe in detail more of the present utility model the most by way of example, and not by way of limitation
Specific embodiment.Reference identical in accompanying drawing denotes same or similar parts or part.This area
It is to be understood by the skilled artisans that what these accompanying drawings were not necessarily drawn to scale.In accompanying drawing:
Fig. 1 is laser cleaning operation principle schematic diagram；
Fig. 2 is the operating diagram of the gas curtain preventer of this utility model laser cleaning；
Fig. 3 is the gas curtain perspective view of the gas curtain preventer of this utility model laser cleaning.
Detailed description of the invention
Fig. 2 is the operating diagram of the gas curtain preventer of this utility model laser cleaning, as in figure 2 it is shown,
This utility model embodiment provides the gas curtain preventer of a kind of laser cleaning, including:
Protective cover 20, has for up-thin-low-thick tubaeform inner chamber, the upper end socket laser cleaning of described inner chamber
Camera lens 30, the lower end of described inner chamber has opening；
First air outlet array 21, is arranged on the sidewall of described inner chamber, and described first air outlet array is discharged
Compressed air and described sidewall form the protective zone 210 surrounding laser lens；
Pump orifice 40, is arranged on the side-lower of described protective cover 20；
Second air outlet array 22, is arranged on the periphery of described inner chamber lower end, and Fig. 3 is this utility model laser
The gas curtain perspective view of the gas curtain preventer cleaned, as it is shown on figure 3, described second air outlet array row
The compressed air gone out is around the laser-irradiated domain 50 being cleaned by surface of the work；Described second air outlet array
The air-flow of each air outlet all points to described pump orifice 40 in the projection of horizontal plane.
Visible, in this utility model embodiment, the first air outlet array 21 and the second air outlet array 22 row
The compressed air composition gone out covers the closing gas curtain of laser-irradiated domain 50, and will envelope by pump orifice 40
The particulate pollutant collection in curtain of holding one's breath processes.
The compressed air that first air outlet array 21 is discharged and described sidewall form the protection surrounding laser lens
Space 210, not only prevents pollutant to be diffused into laser lens from laser-irradiated domain 50, outside also preventing
The upper camera lens of pollutant contamination in portion's environment, prevents camera lens from absorbing heat because of pollutants and bursts.
Wherein, the first air outlet array 21, for the one group of circular hole arranged along sidewall semicircular in shape.
Inner chamber lower end is circumferential, and the second air outlet array 22 arranges along inner chamber lower end the most circumferentially shape.
As in figure 2 it is shown, the air-out direction of described first air outlet array 21 is downward-sloping, described first goes out
After the compressed air that air port array is discharged arrives at sidewall, it is travel downwardly along described sidewall, for closing inside gas curtain
Carry out supplementing air.And in order to prevent the internal negative pressure that produces of protective zone 210, of the present utility model another
In individual embodiment, described sidewall has the wind-supplying mouth 24 supplementing air in described protective zone, described benefit
Air port has defecator, prevents the pollutant in external environment condition from entering.
Because laser cleaning camera lens 30 and protective cover 20 can move in cleaning process, in order to ensure envelope
Curtain of holding one's breath is corresponding with pump orifice, can be connected fixing to described pump orifice and described protective cover, or described
Pump orifice and described laser cleaning camera lens are fixing to be connected, thus pump orifice also with protective cover 20 synchronizing moving.
As in figure 2 it is shown, in another embodiment of the present utility model, also include: the 3rd air outlet array
23, it is arranged on the sidewall of described inner chamber, the compressed air that described 3rd air outlet array is discharged directly purges institute
State laser cleaning camera lens.This makes to produce air flowing on laser cleaning camera lens surface, just in case there being pollutant to exist
This is by endothermic gasification, also will not rest on camera lens surface, prevent camera lens from bursting, and can also give camera lens surface
Cooling.Further, the air blowing over camera lens surface can be swept along remittance to produce to the first air outlet array 21
In raw air-flow, enter after arriving at sidewall below closing gas curtain in, namely protective zone 210 has
Oneself's purification function, this greatly reduces the risk that camera lens bursts because of pollutants.
Because the probability that protective zone 210 enters pollutant is the least, the 3rd air outlet array need not be one straight
Row blowing, so control unit can also be arranged, the air-out connecting described 3rd air outlet array controls valve,
Open a valve at set intervals to clear up, to save the energy.
From the foregoing, it will be observed that this utility model has the advantage that
1), in this utility model embodiment, the first air outlet array 21 and the second air outlet array 22 are discharged
Compressed air composition cover the closing gas curtain of laser-irradiated domain 50, and will be closed by pump orifice 40
Particulate pollutant collection in gas curtain processes.Thus prevent pollutant to be diffused in environment, ensure operator
Health.
2) in this utility model embodiment, the compressed air that the first air outlet array 21 is discharged and described sidewall
Form the protective zone 210 surrounding laser lens, not only prevent pollutant to be diffused into from laser-irradiated domain 50
On laser lens, also can prevent the upper camera lens of pollutant contamination in external environment condition, prevent camera lens from polluting because of contamination
Thing and absorb heat and burst.Thus reduce production cost.
3), in this utility model embodiment, the compressed air that the 3rd air outlet array 23 is discharged directly purges institute
Stating laser cleaning camera lens, just in case there being pollutant at this by endothermic gasification, also will not rest on camera lens surface, anti-
Only camera lens bursts, and can also give camera lens surface cooling.The air blowing over camera lens surface can be swept along remittance to arrive
First air outlet array 21 produce air-flow in, after arriving at sidewall enter below closing gas curtain in, also
Being exactly that protective zone 210 has self-purification function, this greatly reduces camera lens and bursts because of pollutants
Risk.
So far, although those skilled in the art will appreciate that the most detailed to illustrate and describe this practicality new
Multiple exemplary embodiments of type, but, in the case of without departing from this utility model spirit and scope, still
Can directly determine according to this utility model disclosure or derive the many meeting this utility model principle
Other variations or modifications.Therefore, scope of the present utility model is it is understood that and regard as covering all these
Other variations or modifications.
Claims (7)
1. the gas curtain preventer of a laser cleaning, it is characterised in that including:
Protective cover, has for up-thin-low-thick tubaeform inner chamber, the upper end socket laser cleaning mirror of described inner chamber
Head, the lower end of described inner chamber has opening；
First air outlet array, is arranged on the sidewall of described inner chamber, the pressure that described first air outlet array is discharged
Contracting air and described sidewall form the protective zone surrounding laser lens；
Pump orifice, is arranged on the side-lower of described protective cover；
Second air outlet array, is arranged on the periphery of described inner chamber lower end, and described second air outlet array is discharged
Compressed air around being cleaned by the laser-irradiated domain of surface of the work；Described second air outlet array each
The air-flow of air outlet all points to described pump orifice in the projection of horizontal plane.
Gas curtain preventer the most according to claim 1, it is characterised in that
There is on described sidewall the wind-supplying mouth supplementing air in described protective zone；
Described wind-supplying mouth has defecator.
Gas curtain preventer the most according to claim 1, it is characterised in that
Described pump orifice is fixing with described protective cover to be connected.
Gas curtain preventer the most according to claim 1, it is characterised in that
Described pump orifice is fixing with described laser cleaning camera lens to be connected.
Gas curtain preventer the most according to claim 1, it is characterised in that also include: the 3rd air-out
Mouth array, is arranged on the sidewall of described inner chamber, and the compressed air that described 3rd air outlet array is discharged directly is blown
Wash described laser cleaning camera lens.
Gas curtain preventer the most according to claim 5, it is characterised in that also include control unit,
The air-out connecting described 3rd air outlet array controls valve.
Gas curtain preventer the most according to claim 1, it is characterised in that described first air outlet battle array
The air-out direction of row is downward-sloping, and the compressed air that described first air outlet array is discharged is downward along described sidewall
Advance.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620075097.7U CN205463447U (en) | 2016-01-27 | 2016-01-27 | Abluent gas curtain protector of laser |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620075097.7U CN205463447U (en) | 2016-01-27 | 2016-01-27 | Abluent gas curtain protector of laser |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205463447U true CN205463447U (en) | 2016-08-17 |
Family
ID=56618543
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620075097.7U Active CN205463447U (en) | 2016-01-27 | 2016-01-27 | Abluent gas curtain protector of laser |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205463447U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110554570A (en) * | 2018-05-31 | 2019-12-10 | 上海微电子装备（集团）股份有限公司 | Pollution control device and method, objective system and photoetching machine equipment |
-
2016
- 2016-01-27 CN CN201620075097.7U patent/CN205463447U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110554570A (en) * | 2018-05-31 | 2019-12-10 | 上海微电子装备（集团）股份有限公司 | Pollution control device and method, objective system and photoetching machine equipment |
| CN110554570B (en) * | 2018-05-31 | 2021-05-28 | 上海微电子装备（集团）股份有限公司 | Pollution control device and method, objective system and photoetching machine equipment |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |