CN205413806U - Plasma cleaning device suitable for can disturb bent material - Google Patents
Plasma cleaning device suitable for can disturb bent material Download PDFInfo
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- CN205413806U CN205413806U CN201520817210.XU CN201520817210U CN205413806U CN 205413806 U CN205413806 U CN 205413806U CN 201520817210 U CN201520817210 U CN 201520817210U CN 205413806 U CN205413806 U CN 205413806U
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- plasma
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- bent material
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Abstract
The utility model discloses a plasma cleaning device suitable for can disturb bent material, include: the vacuum cavity, but arrange the rolling wheel of the interior installation coil material of vacuum cavity in, the plasma gas pipeline, but conveying coil material makes the coil material obtain even abluent conveying subassembly. The utility model provides an according to plasma source structural design's belt cleaning device, can make things convenient for and efficient acquisition high density plasma, realize disturbing the high -efficient of bent material and comprehensive washing.
Description
Technical field
A kind of device that cleans, a kind of plasma washing equipment being applicable to disturb bent material.
Background technology
Plasma technique has been widely used in semiconductor applications, existing ion source mainly includes Kaufman ion source, radio-frequency ion source, cold-cathode source and gridless ion source, these ionogenic maximum features are can be drawn from plasma source by ion and be applied to the base material of needs, but ion need not be reached, from ion source extraction, the purpose cleaned with making or have much ado by equally for disturbing bent material.To this end, we have proposed a kind of brand-new plasma source structure and devise and clean device accordingly, high-density plasma can be obtained easily, it is achieved to the high-efficiency washing that can disturb bent material.
Utility model content
For solving the deficiencies in the prior art, the purpose of this utility model is to provide a kind of cleaning device according to plasma source structure design, can facilitate and obtain high-density plasma efficiently, it is achieved to disturbing efficiently and comprehensively cleaning of bent material.
In order to realize above-mentioned target, this utility model adopts the following technical scheme that:
Be applicable to disturb the plasma washing equipment of bent material, including vacuum cavity, in being placed in vacuum cavity and install can the rolling wheel of flexing material, plasma gas pipeline, transmission can flexing material make can the transfer assembly that uniformly cleaned of flexing material.
The aforesaid plasma washing equipment being applicable to disturb bent material, transfer assembly includes: at least one plasma source axle；Plasma gas pipeline outlet alignment plasma source axle can flexing material.
The aforesaid plasma washing equipment being applicable to disturb bent material, transfer assembly includes: the plasma source axle that two are placed in parallel；The tow sides that can disturb bent material are close to the upper end of a plasma source axle and the lower end of another plasma source axle respectively.
The aforesaid plasma washing equipment being applicable to disturb bent material, plasma source axle includes: rustless steel outer cylinder, the rustless steel inner cylinder being placed in rustless steel outer cylinder, the irony magnetic boots being placed in rustless steel inner cylinder, is placed in the magnet on irony magnetic boots.
The aforesaid plasma washing equipment being applicable to disturb bent material, is provided with space between rustless steel outer cylinder and rustless steel inner cylinder.
The aforesaid plasma washing equipment being applicable to disturb bent material, the thickness in space is 0.1mm ~ 3mm.
The aforesaid plasma washing equipment being applicable to disturb bent material, magnet be disposed adjacent to disturb the irony magnetic boots side of bent material.
The aforesaid plasma washing equipment being applicable to disturb bent material, plasma gas pipeline is right against the direction of plasma source axle and has a ventilation gaps.
The aforesaid plasma washing equipment being applicable to disturb bent material, the width of ventilation gaps is 1-1000um.
Of the present utility model have the beneficial effect that this utility model provides a kind of cleaning device according to plasma source structure design, can facilitate and obtain high-density plasma efficiently, it is achieved to disturbing song efficiently and comprehensively the cleaning of material.
Accompanying drawing explanation
Fig. 1 is the schematic cross-section of a kind of embodiment of the present utility model；
Fig. 2 is the schematic cross-section of a kind of embodiment of this utility model plasma source axle；
The implication of reference in figure:
1 vacuum cavity, 2 rolling wheels, 3 plasma gas pipelines, 4 plasma source axles, 41 rustless steel outer cylinder, 42 rustless steel inner cylinders, 43 irony magnetic boots, 44 magnets, 45 spaces, 5 can disturb bent material.
Detailed description of the invention
Below in conjunction with the drawings and specific embodiments, this utility model made concrete introduction.
Be applicable to disturb the plasma washing equipment of bent material 5, including vacuum cavity 1, in being placed in vacuum cavity 1 and install can the rolling wheel 2 of flexing material, plasma gas pipeline 3, transmission can flexing material make can the transfer assembly that uniformly cleaned of flexing material.Plasma gas pipeline 3 is right against the direction of plasma source axle 4 and has a ventilation gaps；The width of ventilation gaps is 1-1000um；Such design can make on the disturbed song material 5 that purge gas uniformly blows to be close on plasma source axle 4.
Transfer assembly includes: at least one plasma source axle 4；Plasma gas pipeline 3 outlet alignment plasma source axle 4 can flexing material.As another kind of embodiment, transfer assembly includes: the plasma source axle 4 that two are placed in parallel；The tow sides that can disturb bent material 5 are close to the upper end of a plasma source axle 4 and the lower end of another plasma source axle 4 respectively.It should be noted that the quantity of plasma source axle 4 be do not have conditional, preferred as one, select two.
Plasma source axle 4 includes: rustless steel outer cylinder 41, the rustless steel inner cylinder 42 being placed in rustless steel outer cylinder 41, the irony magnetic boots 43 being placed in rustless steel inner cylinder 42, is placed in the magnet 44 on irony magnetic boots 43.Space 45 it is provided with between rustless steel outer cylinder 41 and rustless steel inner cylinder 42.The thickness in space 45 is 0.1mm ~ 3mm.Being disposed adjacent to of magnet 44 can disturb irony magnetic boots 43 side of bent material 5.
The plasma washing equipment of bent material 5 can be disturbed operationally, can select directly to connect subsequent treatment cavity after vacuum cavity 1, as a example by magnetron sputtering plating, bent material 5 can be disturbed after Cement Composite Treated by Plasma, be directly entered follow-up cavity plated film, rolled by rolling wheel 2 in same vacuum cavity 1 again after having plated film, it is achieved the plasma cleaning of same vacuum and plated film.With reference to Fig. 1, rolling wheel 2 and plasma source axle 4 are all slave unit, rotate under the drive that can disturb bent material 5.Being passed through cooling water cooling in accessing radio-frequency power supply, and space 45 on plasma source axle, rustless steel inner cylinder 42 does not rotates as stator.Then achieve plasma bombardment when bent material 5 can be disturbed respectively through plasma source axle to clean.If having only to clean a face, then can use a plasma source axle 4.According to principles above, this utility model provides a kind of cleaning device according to plasma source structure design, can facilitate and obtain high-density plasma efficiently, it is achieved to disturbing efficiently and comprehensively cleaning of bent material 5.
Of the present utility model ultimate principle, principal character and advantage have more than been shown and described.Skilled person will appreciate that of the industry, above-described embodiment limits this utility model, the technical scheme that the mode of all employing equivalents or equivalent transformation is obtained the most in any form, all falls within protection domain of the present utility model.
Claims (7)
1. it is applicable to disturb the plasma washing equipment of bent material, it is characterized in that, including vacuum cavity, in being placed in above-mentioned vacuum cavity and installation can the rolling wheel of flexing material, plasma gas pipeline, transmit above-mentioned can flexing material make above-mentioned can the transfer assembly that uniformly cleaned of flexing material.
The plasma washing equipment being applicable to disturb bent material the most according to claim 1, it is characterised in that above-mentioned transfer assembly includes: at least one plasma source axle；Above-mentioned plasma gas pipeline outlet be directed at above-mentioned plasma source axle can flexing material.
The plasma washing equipment being applicable to disturb bent material the most according to claim 1, it is characterised in that above-mentioned transfer assembly includes: the plasma source axle that two are placed in parallel；The above-mentioned tow sides disturbing bent material are close to the upper end of said one plasma source axle and the lower end of another plasma source axle respectively.
The plasma washing equipment being applicable to disturb bent material the most according to claim 3, it is characterized in that, above-mentioned plasma source axle includes: rustless steel outer cylinder, it is placed in the rustless steel inner cylinder in above-mentioned rustless steel outer cylinder, the irony magnetic boots being placed in above-mentioned rustless steel inner cylinder, are placed in the magnet on above-mentioned irony magnetic boots.
The plasma washing equipment being applicable to disturb bent material the most according to claim 4, it is characterised in that being provided with space between above-mentioned rustless steel outer cylinder and rustless steel inner cylinder, above-mentioned gap thickness is 0.1mm ~ 3mm.
The plasma washing equipment being applicable to disturb bent material the most according to claim 4, it is characterised in that above-mentioned magnet is disposed adjacent to disturb the irony magnetic boots side of bent material.
The plasma washing equipment being applicable to disturb bent material the most according to claim 3, it is characterised in that above-mentioned plasma gas pipeline is right against the direction of above-mentioned plasma source axle and has a ventilation gaps, and the width of above-mentioned ventilation gaps is 1-1000um.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520817210.XU CN205413806U (en) | 2015-10-22 | 2015-10-22 | Plasma cleaning device suitable for can disturb bent material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520817210.XU CN205413806U (en) | 2015-10-22 | 2015-10-22 | Plasma cleaning device suitable for can disturb bent material |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205413806U true CN205413806U (en) | 2016-08-03 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520817210.XU Expired - Fee Related CN205413806U (en) | 2015-10-22 | 2015-10-22 | Plasma cleaning device suitable for can disturb bent material |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205413806U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105234130A (en) * | 2015-10-22 | 2016-01-13 | 苏州求是真空电子有限公司 | Plasma cleaning device suitable for deformable materials |
-
2015
- 2015-10-22 CN CN201520817210.XU patent/CN205413806U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105234130A (en) * | 2015-10-22 | 2016-01-13 | 苏州求是真空电子有限公司 | Plasma cleaning device suitable for deformable materials |
| CN105234130B (en) * | 2015-10-22 | 2017-10-27 | 苏州求是真空电子有限公司 | Plasma washing equipment suitable for bent material can be disturbed |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160803 Termination date: 20201022 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |