CN205398722U - Apparatus for preparing diamond coating - Google Patents
Apparatus for preparing diamond coating Download PDFInfo
- Publication number
- CN205398722U CN205398722U CN201620158230.5U CN201620158230U CN205398722U CN 205398722 U CN205398722 U CN 205398722U CN 201620158230 U CN201620158230 U CN 201620158230U CN 205398722 U CN205398722 U CN 205398722U
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- CN
- China
- Prior art keywords
- diamond coatings
- sample stage
- heated filament
- preparing diamond
- base
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The utility model discloses an apparatus for preparing diamond coating, its include base and cover buckle in bell jar and vacuum pump on the base, the base with form a reaction chamber between the bell jar, a reaction gas conveyer pipe runs through the base accesss to in the reaction chamber, be equipped with the sample platform on the base, sample bench side has laid the heater, the heater intercommunication has the heater power, the sample platform with be equipped with sample platform cooling device between the base, the utility model discloses equipment has simple structure, coating effect ideal, by deposited product long service life's advantage.
Description
Technical field
This utility model relates to filming equipment technical field, particularly relates to a kind of equipment preparing diamond coatings.
Background technology
Chemical vapour deposition (CVD) (CVD) is the technology for depositing multiple materials being most widely used in semi-conductor industry, including large-scale insulant, most metals material and metal alloy compositions.In theory, it is very simple: two or more gaseous starting materials imports in a reative cell, and then chemical reaction occurs each other for they, forms a kind of new material, deposits in wafer surface.And the structure of the diamond coatings equipment of prior art is more complicated, it is easy to generate graphite, coating result product undesirable, coating is short for service life.
Summary of the invention
The purpose of this utility model is in that for the deficiencies in the prior art, and a kind of simple in construction, coating result are desirable, be applied long product lifecycle is provided prepare diamond coatings equipment.
For reaching above-mentioned purpose, a kind of equipment preparing diamond coatings of this utility model, it includes base and covers the bell jar and vacuum pump that are buckled on described base, a reaction chamber is formed between described base and described bell jar, one reacting gas conveying pipe runs through described base and leads in described reaction chamber, and described base is provided with sample stage, and described sample stage is routed over heated filament, described heated filament is communicated with heater supply, is provided with sample stage chiller between described sample stage and described base.
Wherein said bell jar is rustless steel bell jar.
Wherein said sample stage is provided with graphite flake.
It is connected to high temperature spring, it is ensured that heated filament level stretches between wherein said heated filament and described bell jar.
Wherein said sample stage chiller is cooling water container, and described cooling water container one end is cooling water inlet, and the other end is coolant outlet.
It is loaded with DC bias power, for increasing the deposition efficiency of coating between wherein said heated filament and described sample stage.
Wherein said heated filament is 10 and be arranged in parallel.
Wherein said heated filament is tantalum wire, molybdenum filament or tungsten filament.
Wherein said vacuum pump is mechanical pump, lobe pump, diffusion pump or molecular pump.
This utility model difference from prior art is in that this utility model achieves following technique effect:
Sample is positioned on the sample stage of equipment central authorities, by vacuum pump evacuation, then reacting gas methane, hydrogen and oxygen are passed into, recycling heated filament carbonization post-heating produces high temperature and hydrogen cracking is ionized into hydrogen atom and plasma, protium in methane is peeled off and is formed the carbon having activity chemistry key in a large number by hydrogen atom plasma again, carbon carbon is connected to form diamond, finally makes coated with CVD (chemical vapor deposition) diamond on sample；
The equipment preparing diamond coatings of utility model, it is possible to effective regulating and controlling temperature gradient and growth front gas-solid interface state, it is to avoid the generation of graphite, is derived from high-quality diamond film coating layer；
This utility model simple in construction, coating result is ideal, be applied diamond coatings good product performance, long service life.
Below in conjunction with accompanying drawing, the utility model is described in further detail.
Accompanying drawing explanation
Fig. 1 is the structural representation that this utility model prepares the equipment of diamond coatings.
Description of reference numerals: 1-rustless steel bell jar；2-reaction gas inlet；3-reaction chamber；4-heated filament；5-high temperature spring；6-sample stage；7-sample stage chiller；8-DC bias power；9-heater supply；10-drill bit；11-cooling water inlet；12-coolant outlet；13-graphite flake.
Detailed description of the invention
Below in conjunction with drawings and Examples, to this utility model, above-mentioned and other technical characteristic and advantage are described in more detail.
As it is shown in figure 1, prepare the equipment of diamond coatings, including base, rustless steel bell jar 1, reaction chamber 3, vacuum pump and heater supply 9, heater supply 9 is connected with heated filament 4, and the quantity of heated filament 4 is set to 10, and 10 heated filaments 4 be arranged in parallel；Heater supply 9 connects heated filament 4, provides power supply for heated filament 4 so that heated filament 4 heating carries out carbonization.nullHigh temperature spring 5 is connected with rustless steel bell jar 1 and heated filament 4，Ensure that heated filament 4 level stretches，DC bias power 8 is the power supply loading a direct current between heated filament 5 and sample stage 6，Contribute to increasing the deposition efficiency of coating，One reacting gas conveying pipe runs through described base and leads in reaction chamber 3，Described base is provided with sample stage 6，Sample stage 3 is provided with graphite flake 13，Graphite flake 13 is placed sample (drill bit 10)，Sample heated filament 4 routed over，Sample stage chiller 7 it is provided with between sample stage 6 and described base，In an embodiment, sample stage chiller 7 is cooling water container，Described cooling water container one end is cooling water inlet 11，The other end is coolant outlet 12，Heated filament 4 is refractory metal silk，It can be tantalum wire、Molybdenum filament or tungsten filament，Vacuum pump is mechanical pump、Lobe pump、Diffusion pump or molecular pump.
The work process that cutter is carried out plated film by use this utility model is:
A, processed cutter gone cobalt pretreatment: hard alloy (main component WC+Co) exists using metallic cobalt (Co) as the Binder Phase of WC particle in the fabrication process, strengthen the intensity of hard alloy, but in the process preparing diamond coatings, metallic cobalt often plays side effect, because metallic cobalt can promote the growth of graphite, suppress the preparation of diamond coatings, the existence of cobalt is totally unfavorable to preparing of diamond coatings, so before growth diamond coatings, pre-treatment must be done, remove by the cobalt on top layer；
B, deposition coating: after completing cobalt, processed cutter, temperature, gas etc. all have been provided with, and starting deposition prepares diamond coatings, maintains the temperature in certain limit, through reasonable time deposition growing, make diamond coatings reach certain thickness；
C, cooling: complete the preparation of diamond coatings, namely start cooling, because diamond coatings thermal stress is relatively larger, for making coating not ftracture, and must slow cooling.
The specifically used method of equipment is:
Open rustless steel bell jar 1,5-7mm place graphite flake 13 is placed complicated shape drill bit 10 below heated filament 4, close rustless steel bell jar 1 and carry out evacuation, when vacuum reaches 1Pa, carry in pipe 2 at reacting gas and pass into methane, hydrogen and oxygen, when reaction chamber 3 internal gas pressure reaches 3-5KPa, open heater supply 9, heated to 2400-2700 DEG C by heated filament 4, after reacting 6-20 hour, close heater supply 9.Being down to after room temperature until temperature, open rustless steel bell jar 1, take out drill bit 10, drill bit 10 surface deposition has one layer of uniform diamond coatings.
Embodiment described above is only that preferred implementation of the present utility model is described; not scope of the present utility model is defined; under the premise designing spirit without departing from this utility model; various deformation that the technical solution of the utility model is made by those of ordinary skill in the art and improvement, all should fall in the protection domain that this utility model claims are determined.
Claims (9)
1. the equipment preparing diamond coatings, it is characterized in that: it includes base and covers the bell jar and vacuum pump that are buckled on described base, a reaction chamber is formed between described base and described bell jar, one reacting gas conveying pipe runs through described base and leads in described reaction chamber, described base is provided with sample stage, described sample stage is routed over heated filament, and described heated filament is communicated with heater supply, is provided with sample stage chiller between described sample stage and described base.
2. the equipment preparing diamond coatings according to claim 1, it is characterised in that: described bell jar is rustless steel bell jar.
3. the equipment preparing diamond coatings according to claim 1, it is characterised in that: described sample stage is provided with graphite flake.
4. the equipment preparing diamond coatings according to claim 1, it is characterised in that: it is connected to high temperature spring between described heated filament and described bell jar, it is ensured that heated filament level stretches.
5. the equipment preparing diamond coatings according to claim 1, it is characterised in that: described sample stage chiller is cooling water container, and described cooling water container one end is cooling water inlet, and the other end is coolant outlet.
6. the equipment preparing diamond coatings according to claim 1, it is characterised in that: it is loaded with DC bias power between described heated filament and described sample stage, for increasing the deposition efficiency of coating.
7. the equipment preparing diamond coatings according to claim 1, it is characterised in that: described heated filament is 10 and be arranged in parallel.
8. the equipment preparing diamond coatings according to claim 1, it is characterised in that: described heated filament is tantalum wire, molybdenum filament or tungsten filament.
9. the equipment preparing diamond coatings according to claim 1, it is characterised in that: described vacuum pump is mechanical pump, lobe pump, diffusion pump or molecular pump.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620158230.5U CN205398722U (en) | 2016-03-02 | 2016-03-02 | Apparatus for preparing diamond coating |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620158230.5U CN205398722U (en) | 2016-03-02 | 2016-03-02 | Apparatus for preparing diamond coating |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205398722U true CN205398722U (en) | 2016-07-27 |
Family
ID=56947853
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620158230.5U Expired - Fee Related CN205398722U (en) | 2016-03-02 | 2016-03-02 | Apparatus for preparing diamond coating |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205398722U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106119808A (en) * | 2016-08-24 | 2016-11-16 | 张家港合升进出口有限公司 | Cutter diamond coatings preparation facilities |
-
2016
- 2016-03-02 CN CN201620158230.5U patent/CN205398722U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106119808A (en) * | 2016-08-24 | 2016-11-16 | 张家港合升进出口有限公司 | Cutter diamond coatings preparation facilities |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160727 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |