CN205398715U - Seal device is spouted to gaseous phase - Google Patents
Seal device is spouted to gaseous phase Download PDFInfo
- Publication number
- CN205398715U CN205398715U CN201620119694.5U CN201620119694U CN205398715U CN 205398715 U CN205398715 U CN 205398715U CN 201620119694 U CN201620119694 U CN 201620119694U CN 205398715 U CN205398715 U CN 205398715U
- Authority
- CN
- China
- Prior art keywords
- gas
- substrate
- cooling
- jet printing
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Electroluminescent Light Sources (AREA)
Abstract
The utility model provides a seal device is spouted to gaseous phase, including gas injection mechanism and cooling body, gas injection mechanism is used for to waiting that the base plate that forms organic rete sprays process gas, the cooling body is used for rightly the base plate cools off, the cooling body includes a plurality of cooling portions, and is a plurality of cooling portion is used for rightly respectively a plurality of different zones of base plate cool off, the chilling temperature of cooling portion can the independent control. The utility model discloses can make the density distribution that sends of organic rete of forming on the base plate get more evenly.
Description
Technical field
This utility model relates to the making field of display device, is specifically related to a kind of gas phase jet printing appts.
Background technology
In the processing technology of organic electroluminescence device, the step of the normally off key of making right and wrong of organic film, the preparation method making organic film includes liquid phase method and vapor phase method, wherein, organic vapors jet printing (Organic-VaporJetPrinting, OVJP) method is typical a kind of gas phase Method of printing, and its deposit thickness is easily controlled.As shown in Figure 1 be existing a kind of gas phase jet printing appts schematic diagram, noble gas (e.g., nitrogen (N2)) vapor of organic material that provides as carrier gas and organic steam feeding chamber 1 mix in gas mixing chamber 5, wherein, carrier gas directly mixes in gas mixing chamber 5 with vapor of organic material on the one hand, and another aspect provides pressure for vapor of organic material chamber 1.Mixed gas is sprayed to the substrate 3 of cooling by trickle nozzle 2, when mixing the substrate 3 of gas impingement, spreads in carrier gas air towards periphery, and vapor of organic material is sublimated on the substrate 3, forms organic film 4.But, vapor of organic material is in the process sublimated, due to different with the atmosphere at substrate 3 edge in the middle part of substrate 3, so that the speed difference of sublimating of vapor of organic material, and then cause that on substrate 3, the compactness of the organic film 4 that diverse location is formed is different.
Utility model content
The purpose of this utility model is in that to provide a kind of gas phase jet printing appts, so that the consistency of the organic film formed on substrate is more uniform.
To achieve these goals, this utility model provides a kind of gas phase jet printing appts, and including gaseous jets structure and cooling body, described gaseous jets structure is used for the substrate spray technology gas to organic film to be formed；Described cooling body is for cooling down described substrate, and described cooling body includes multiple cooling end, and multiple described cooling ends are for cooling down multiple zoness of different of described substrate respectively, and the chilling temperature of described cooling end can independently control.
Preferably, described process gas includes vapor of organic material, and in multiple described cooling ends, the chilling temperature of described cooling end raises to the increase of the distance of described substrate center with the region that described cooling end is corresponding on substrate.
nullPreferably，Multiple zoness of different of described substrate include being positioned at the central area in the middle part of described substrate and multiple around described central area、And by the annular section set gradually to described substrate edges in the middle part of described substrate，Described cooling body is arranged on below described gaseous jets structure，Described cooling end includes matrix and the cooling line being arranged in described matrix，Described cooling body also includes the cooling source for providing cooling fluid，The outlet of described cooling line and described cooling source，Multiple matrixes of multiple described cooling ends include the center matrix corresponding with described central area and with multiple described annular sections multiple annular base one to one，The height of described center matrix is higher than the height of any one annular base，The height of described annular base reduces with the increase to the horizontal range of described center matrix of the described annular base.
Preferably, described center matrix and be provided with through hole on described annular base, described gas phase jet printing appts also includes being arranged on the air cooling mechanism below described cooling body, for drying to described through hole.
Preferably, in described center matrix, the distribution density of through hole is more than the distribution density of through hole on any one annular base, and on described annular base, the distribution density of through hole reduces with the increase of the distance of described annular base to center matrix.
Preferably, described air cooling mechanism includes multiple fan.
Preferably, described gaseous jets structure includes gas supply chamber and supplies multiple nozzles of chamber with described gas.
Preferably, described process gas includes vapor of organic material, and described gaseous jets structure also includes flow rate control unit, and described flow rate control unit is for controlling the flow velocity of the vapor of organic material of described nozzle injection.
Preferably, described nozzle includes the piezo nozzles being internally provided with piezoelectric element, described flow rate control unit includes the first controller electrically connected with the piezoelectric element of each described piezo nozzles, described first controller is for providing voltage to each piezoelectric element, and the volume of described piezoelectric element increases with the increase of voltage.
nullPreferably，Described process gas also includes carrier gas，Described gas supply chamber includes carrier gas and supplies sub-chamber、Organic steam supply sub-chamber and gas mix sub-chamber，Described gas mixing sub-chamber in be provided with and multiple described nozzles multiple gas mixing tube roads one to one，Described gas mixing tube road includes carrier gas inlet、Organic steam entrance and mixed gas outlet，Described carrier gas inlet supplies sub-chamber with described carrier gas and connects，Described organic steam entrance supplies sub-chamber with described organic steam and connects，Described mixed gas outlet connects with corresponding nozzle，Described carrier gas inlet place and described organic steam porch are provided with electrically operated valve，Described flow rate control unit includes the second controller electrically connected with each electrically operated valve，Described second controller is for providing voltage to each described electrically operated valve，The circulation area of described electrically operated valve increases with the increase of voltage.
Preferably, described gas phase jet printing appts also includes for described gas is mixed the heating arrangements that sub-chamber is heated.
In this utility model, the multiple described cooling end of described cooling body is corresponding with multiple regions of substrate respectively, and the chilling temperature of multiple cooling end can independently control, therefore, for the region near substrate center, it is possible to the chilling temperature making corresponding cooling end is relatively low；For the region away from substrate center, the chilling temperature that can make corresponding cooling end is of a relatively high, so that sublimate, the speed of sublimating of speed lower region originally improves, so that described vapor of organic material reduces in the difference sublimated between speed of the zones of different of substrate, the consistency making the organic film of formation is more uniform, when being formed with the substrate of organic film for organic electroluminescence display device and method of manufacturing same, the display effect of picture is better.
Accompanying drawing explanation
Accompanying drawing is used to offer and is further appreciated by of the present utility model, and constitutes a part for description, is used for explaining this utility model, but is not intended that restriction of the present utility model together with detailed description below.In the accompanying drawings:
Fig. 1 is the structural representation of existing gas phase jet printing appts；
Fig. 2 is the structural representation of the gas phase jet printing appts that this utility model provides；
Fig. 3 is the perspective view of cooling body；
Fig. 4 is the upward view of cooling body；
Wherein, accompanying drawing is labeled as:
1, organic steam feeding chamber of the prior art；2, nozzle of the prior art；3, substrate；4, organic film；5, gas mixing chamber of the prior art；10, gaseous jets structure；11, nozzle；12, organic steam supply sub-chamber；13, carrier gas supply sub-chamber；14, gas mixing sub-chamber；20, cooling body；21, center matrix；22, annular base；40, air cooling mechanism；41, fan；50, heating arrangements.
Detailed description of the invention
Below in conjunction with accompanying drawing, detailed description of the invention of the present utility model is described in detail.It should be appreciated that detailed description of the invention described herein is merely to illustrate and explains this utility model, it is not limited to this utility model.
This utility model provides a kind of gas phase jet printing appts, as in figure 2 it is shown, described gas phase jet printing appts includes gaseous jets structure 10 and cooling body 20, gaseous jets structure 10 is used for the substrate 3 spray technology gas to organic film to be formed；Cooling body 10 is for cooling down substrate 3.Wherein, cooling body 20 includes multiple cooling end, and multiple described cooling ends are for cooling down multiple zoness of different of substrate 3 respectively, and the chilling temperature of multiple described cooling ends can independently control.
Described gas phase jet printing appts may be used for making organic electroluminescence device, and substrate 3 can be array base palte；Utilize gaseous jets structure 10 to spray technology gas in the identical sub-pixel of multiple colors of substrate 3, described process gas can be the mixing gas of vapor of organic material and carrier gas, when mixing gas and touching cooled substrate 3, vapor of organic material in mixing gas is sublimated and is formed solid rete, and carrier gas is spread towards periphery.When gaseous jets structure 10 sprays the mixing gas of vapor of organic material and carrier gas to substrate 3, the closer to substrate 3 center, atmosphere is more dense, vapor of organic material speed of sublimating on the substrate 3 is more slow, edge the closer to substrate 3, atmosphere is more thin, vapor of organic material speed of sublimating on the substrate 3 is more slow, so that the consistency of the organic film of diverse location is different on substrate 3, when substrate 3 is for organic electroluminescence display device and method of manufacturing same, there is moire (mura) phenomenon in the uneven display picture that is easily caused of the consistency of organic film.The speed of sublimating of the vapor of organic material described in this utility model refers to, forms vapor of organic material amount that required rete uses and this part vapor of organic material in unit are on the substrate 3 and sublimates completely the ratio of time used by solid rete.
In this utility model, multiple described cooling ends are corresponding with multiple regions of substrate 3 respectively, and the chilling temperature of multiple cooling end can independently control, therefore, for the region near substrate 3 center, it is possible to the chilling temperature making corresponding cooling end is relatively low；For the region away from substrate 3 center, the chilling temperature that can make corresponding cooling end is of a relatively high, so that sublimate, the speed of sublimating of speed lower region originally improves, so that described vapor of organic material reduces in the difference sublimated between speed of the zones of different of substrate 3, the consistency making the organic film of formation is more uniform, when being formed with the substrate 3 of organic film for organic electroluminescence display device and method of manufacturing same, the display effect of picture is better.
As the first detailed description of the invention of the present utility model, described process gas includes vapor of organic material, in multiple described cooling ends, the chilling temperature of described cooling end raises to the increase of the distance at substrate 3 center with the region that described cooling end is corresponding on the substrate 3, so that the speed of sublimating that vapor of organic material is in multiple regions of substrate 3 is consistent.Owing to, under same chilling temperature, the closer to substrate 3 center, atmosphere is more dense, the closer to substrate 3 edge, atmosphere is more thin, and therefore, under same chilling temperature, by substrate 3 center to substrate 3 edge, the speed of sublimating of vapor of organic material gradually steps up.And owing to chilling temperature is more low, the speed of sublimating of vapor of organic material is more fast, therefore, when the edge by substrate 3 center to substrate 3, when chilling temperature gradually rises, it is possible to accelerate the speed of sublimating of the vapor of organic material at substrate 3 center, reduce the speed of sublimating of the vapor of organic material at substrate 3 edge, and then the vapor of organic material speed of sublimating in multiple regions of substrate 3 is reached unanimity so that the consistency of the organic film formed on whole substrate 3 is more uniform.
Although it should be appreciated that the chilling temperature of multiple described cooling end to have height to have low, but the chilling temperature of each cooling end all should enable to vapor of organic material and sublimate as solid rete at the respective regions of substrate 3.
It should be noted that the chilling temperature in this utility model refers to, the chilling temperature that substrate 3 receives.
So that the chilling temperature of described cooling end raises with the increase to the distance at substrate 3 center of the corresponding region, can realize by controlling the own temperature of described cooling end, the temperature of described cooling end is more low, and the temperature that the respective regions of substrate 3 is cooled is also more low；Or, it is also possible to realizing by controlling the distance between described cooling end and substrate 3, cooling end is more near to the distance of substrate 3, and the temperature that the respective regions of substrate 3 is cooled is more low.
nullAs a kind of detailed description of the invention of the present utility model，Multiple zoness of different of substrate 3 include being positioned at the central area in the middle part of substrate 3 and multiple around described central area、And by the annular section set gradually to substrate 3 edge in the middle part of substrate 3，As shown in Figures 2 to 4，Cooling body 20 is arranged on below gaseous jets structure 10，Described cooling end includes matrix and the cooling line (not shown) being arranged in described matrix，Described cooling body also includes the cooling source for providing cooling fluid，The outlet of described cooling line and described cooling source，Multiple matrixes of multiple described cooling ends include the center matrix 21 corresponding with described central area and with multiple described annular sections multiple annular base 22 one to one，The height of center matrix 21 is higher than the height of any one annular base 22，The height of annular base 22 reduces with the annular base 22 increase to the horizontal range of center matrix 21.The height of described matrix is more high, the position of distance substrate 3 is more near, so that the temperature of the relevant position of substrate 3 is more low, so that the temperature corresponding to the part of center matrix 21 of substrate 3 is minimum, the temperature of the part corresponding to multiple annular base 22 of substrate 3 raises with the annular base 22 increase to the horizontal range of center matrix 21, that is, the chilling temperature in multiple regions of substrate 3 raises with the increase to the distance at substrate 3 center of the described region.
Wherein, the shape of described central area can be circular, annular section be shaped as annulus；Or, described central area be shaped as rectangle, described annular section be shaped as straight-flanked ring；Correspondingly, the cross section of center matrix 21 can be cross section circular, annular base 22 can be annulus；Or, as shown in Figure 3 and Figure 4, the cross section of center matrix 21 be rectangle, annular base 22 cross section be straight-flanked ring.
Further, center matrix 21 and be provided with through hole on annular base 22, cooling body 20 also includes the air cooling mechanism 40 being arranged on below multiple cooling end, for drying to described through hole, so that multiple regions of substrate 3 quickly cool down.It should be understood that, the cooling line arranged in described through hole and described matrix is independent of each other.
When being arranged below air cooling mechanism 40 of cooling body 20, it is possible to by regulate through hole on each matrix (that is, center matrix 21 and each annular base 22) the gas flow that passes through control the chilling temperature of corresponding cooling end.Specifically, in center matrix 21, the distribution density of through hole is more than the distribution density of through hole on any one annular base 22, and on annular base 22, the distribution density of through hole reduces with the annular base 22 increase to the distance of center matrix 21.Therefore, maximum by the air flow rate of center matrix 21, the impact being subject to ambient temperature is minimum, and the temperature of the respective regions of substrate 3 is more low；For multiple annular base 22, distance center matrix 21 is more remote, more little by the air flow rate of annular base 22, and the impact by ambient temperature is more big, the temperature of the respective regions of substrate 3 is more high, so that the temperature of substrate 3 is gradually risen to edge by center.
Or, as in figure 2 it is shown, air cooling mechanism 40 includes multiple fan 41, in multiple fans 41 of air cooling mechanism 40, it is possible to the rotational frequency controlling fan 41 reduces with the fan 41 increase to center matrix 21 distance.The rotational frequency of fan 41 is more high, the cold blast rate produced is more many, so that it is maximum by the air flow rate of center matrix 21, and in multiple annular base 22, distance center matrix 21 is more remote, more little by the gas flow of annular base 22, the temperature of the appropriate section of substrate 3 is more low, so that the temperature of substrate 3 is gradually risen to edge by center.
It is of course also possible to utilize above two embodiment that the distribution density of described through hole and the rotational frequency of fan 41 are adjusted simultaneously.
As in figure 2 it is shown, gaseous jets structure 10 includes gas supply chamber and supplies multiple nozzles 11 of chamber with described gas.
As described above, substrate 3 may be used in organic electroluminescence display device and method of manufacturing same, and substrate 3 includes multiple sub-pixel, at this moment, and multiple sub-pixel one_to_one corresponding of multiple nozzles 11 and same color.When once spraying, the amount of the vapor of organic material of multiple nozzles 11 ejection is identical.
As the second detailed description of the invention of the present utility model, by regulating the speed of the injection vapor of organic material of the nozzle 11 corresponding to substrate 3 zones of different, thus regulating the speed of sublimating of the vapor of organic material in described region.Specifically, described process gas includes vapor of organic material, and gaseous jets structure 10 can also include flow rate control unit (not shown), and described flow rate control unit is for controlling the flow velocity of the vapor of organic material of nozzle 11 injection.Specifically, it is possible to control nozzle 11 and spray the flow velocity of vapor of organic material and reduce with the nozzle 11 increase to the distance at substrate 3 center, so that there being the vapor of organic material speed of sublimating in the multiple described region of substrate 3 consistent.
At identical conditions, when multiple nozzles 11 spray same amount of vapor of organic material, the vapor of organic material flow velocity of nozzle 11 ejection is more fast, and vapor of organic material is sublimated more fast on the substrate 3 of cooling.As described above, distance substrate 3 center is more near, and the speed of sublimating of vapor of organic material is more slow, and distance substrate 3 center is more remote, and the speed of sublimating of vapor of organic material is more fast.Therefore, when utilize described flow rate control unit control nozzle 11 spray the flow velocity of organic steam material reduce with the nozzle 11 increase to the distance at substrate 3 center time, the speed of sublimating of the vapor of organic material near substrate 3 center can be improved, reduce the speed of sublimating of the vapor of organic material near substrate 3 edge, so that the speed of sublimating that vapor of organic material is in multiple regions of substrate 3 reaches unanimity.
The first kind of way regulating the flow velocity that nozzle 11 sprays vapor of organic material can be the jet velocity directly regulating nozzle 11 itself.Specifically, as shown in Figure 2, nozzle 11 includes the piezo nozzles being internally provided with piezoelectric element 11a, described flow rate control unit includes the first controller (not shown) electrically connected with the piezoelectric element 11a of each described piezo nozzles, described first controller is for providing voltage to each piezoelectric element 11a, and the volume of piezoelectric element 11a increases with the increase of voltage.Therefore, described first controller is supplied to the voltage of piezoelectric element 11a and can increase with the piezoelectric element 11a increase to substrate 3 centre distance.When piezoelectric element 11a receive voltage more big time, volume is more big, thus the space taken inside nozzle 11 is more many so that the flow velocity ejecting vapor of organic material of nozzle 11 is more little.
Generally, described process gas also includes carrier gas, and the second way regulating the speed that nozzle 11 sprays vapor of organic material can be realized by the content of the vapor of organic material mixed in gas that adjustment nozzle 11 sprays.Specifically, as shown in Figure 2, described gas supply chamber include carrier gas supply sub-chamber 13, organic steam supply sub-chamber 12 and gas mixing sub-chamber 14, gas mixing sub-chamber 14 in be provided with and multiple nozzles 11 multiple gas mixing tube roads one to one, described gas mixing tube road includes carrier gas inlet, organic steam entrance and mixed gas outlet, described carrier gas inlet supplies sub-chamber 13 with carrier gas and connects, described organic steam entrance supplies sub-chamber 12 with organic steam and connects, and described mixed gas outlet connects with corresponding nozzle 11.Described carrier gas inlet place and described organic steam porch are provided with electrically operated valve, described flow rate control unit can include the second controller electrically connected with each electrically operated valve, described second controller is for providing voltage to each described electrically operated valve, and the circulation area of described electrically operated valve increases with the increase of voltage.Therefore, when spraying every time, can be controlled the circulation area of each electrically operated valve by second controller, and the ratio of the speed from carrier gas to the carrier gas inlet on described gas mixing tube road and the speed of the organic steam entrance input vapor of organic material to described gas mixing tube road that input is increased to the increase of the distance at substrate 3 center with the nozzle 11 that described gas mixing tube road is corresponding.Therefore, nozzle 11 is more near to the distance at substrate 3 center, and the content of the vapor of organic material in corresponding gas mixing tube road is more high；Nozzle 11 is more remote to the distance at substrate 3 center, and the content of the vapor of organic material in corresponding gas mixing tube road is more low.Therefore, when the jet velocity of nozzle 11 self is identical, the speed of the vapor of organic material of multiple nozzles 11 injection reduces with the nozzle 11 increase to substrate 3 centre distance.Specifically, the voltage that described second controller provides to the electromagnetic valve of each organic steam porch is identical, increases to the voltage of the offer of the electromagnetic valve at multiple carrier gas inlet places with the increase to the distance at substrate 3 center of the corresponding nozzle；Or, the voltage provided to the electromagnetic valve at each carrier gas inlet place is identical, reduces to the voltage of the offer of the electromagnetic valve of multiple organic steam porch with the increase to the distance at substrate 3 center of the corresponding nozzle.
It should be appreciated that when needing the rete forming multiple different colours (e.g., red, green, blue) on the substrate 3, described gas supply chamber can include multiple organic steam and supply sub-chamber 12.
During in order to prevent the temperature that gas mixes sub-chamber 14 from reducing, cause that the organic material gas that input mixes sub-chamber 14 to gas is sublimated, as in figure 2 it is shown, described gas phase jet printing appts also includes for gas is mixed the heating arrangements 50 that sub-chamber 14 is heated.
It is understandable that, spray to be formed in the process of required rete to substrate 3 utilizing described gas phase jet printing appts, substrate 3 remains stationary, the fixed form of substrate 3 is not construed as limiting by this utility model, as long as stablizing of substrate 3 can be kept, and do not affect the injection of described gaseous jets structure and the cooling of cooling body 20.Such as, substrate 3 can be supported directly on cooling body 20, or, when cooling body 20 includes multiple cooling end, when each cooling end includes matrix with the cooling line being arranged in base station, it is possible to arrange multiple support pin running through described matrix, to support substrate.
It is understood that embodiment of above is merely to illustrate that principle of the present utility model and the illustrative embodiments that adopts, but this utility model is not limited thereto.For those skilled in the art, when without departing from spirit of the present utility model and essence, it is possible to make various modification and improvement, these modification and improvement are also considered as protection domain of the present utility model.
Claims (11)
1. a gas phase jet printing appts, including gaseous jets structure and cooling body, described gaseous jets structure is used for the substrate spray technology gas to organic film to be formed；Described cooling body is for cooling down described substrate, it is characterized in that, described cooling body includes multiple cooling end, and multiple described cooling ends are for cooling down multiple zoness of different of described substrate respectively, and the chilling temperature of described cooling end can independently control.
2. gas phase jet printing appts according to claim 1, it is characterized in that, described process gas includes vapor of organic material, and in multiple described cooling ends, the chilling temperature of described cooling end raises to the increase of the distance of described substrate center with the region that described cooling end is corresponding on substrate.
null3. gas phase jet printing appts according to claim 2，It is characterized in that，Multiple zoness of different of described substrate include being positioned at the central area in the middle part of described substrate and multiple around described central area、And by the annular section set gradually to described substrate edges in the middle part of described substrate，Described cooling body is arranged on below described gaseous jets structure，Described cooling end includes matrix and the cooling line being arranged in described matrix，Described cooling body also includes the cooling source for providing cooling fluid，The outlet of described cooling line and described cooling source，Multiple matrixes of multiple described cooling ends include the center matrix corresponding with described central area and with multiple described annular sections multiple annular base one to one，The height of described center matrix is higher than the height of any one annular base，The height of described annular base reduces with the increase to the horizontal range of described center matrix of the described annular base.
4. gas phase jet printing appts according to claim 3, it is characterised in that described center matrix and be provided with through hole on described annular base, described gas phase jet printing appts also includes being arranged on the air cooling mechanism below described cooling body, for drying to described through hole.
5. gas phase jet printing appts according to claim 4, it is characterized in that, in described center matrix, the distribution density of through hole is more than the distribution density of through hole on any one annular base, and on described annular base, the distribution density of through hole reduces with the increase of the distance of described annular base to center matrix.
6. gas phase jet printing appts according to claim 4, it is characterised in that described air cooling mechanism includes multiple fan.
7. gas phase jet printing appts according to claim 1, it is characterised in that described gaseous jets structure includes gas supply chamber and supplies multiple nozzles of chamber with described gas.
8. gas phase jet printing appts according to claim 7, it is characterized in that, described process gas includes vapor of organic material, and described gaseous jets structure also includes flow rate control unit, and described flow rate control unit is for controlling the flow velocity of the vapor of organic material of described nozzle injection.
9. gas phase jet printing appts according to claim 8, it is characterized in that, described nozzle includes the piezo nozzles being internally provided with piezoelectric element, described flow rate control unit includes the first controller electrically connected with the piezoelectric element of each described piezo nozzles, described first controller is for providing voltage to each piezoelectric element, and the volume of described piezoelectric element increases with the increase of voltage.
null10. gas phase jet printing appts according to claim 8，It is characterized in that，Described process gas also includes carrier gas，Described gas supply chamber includes carrier gas and supplies sub-chamber、Organic steam supply sub-chamber and gas mix sub-chamber，Described gas mixing sub-chamber in be provided with and multiple described nozzles multiple gas mixing tube roads one to one，Described gas mixing tube road includes carrier gas inlet、Organic steam entrance and mixed gas outlet，Described carrier gas inlet supplies sub-chamber with described carrier gas and connects，Described organic steam entrance supplies sub-chamber with described organic steam and connects，Described mixed gas outlet connects with corresponding nozzle，Described carrier gas inlet place and described organic steam porch are provided with electrically operated valve，Described flow rate control unit includes the second controller electrically connected with each electrically operated valve，Described second controller is for providing voltage to each described electrically operated valve，The circulation area of described electrically operated valve increases with the increase of voltage.
11. gas phase jet printing appts according to claim 10, it is characterised in that described gas phase jet printing appts also includes for described gas is mixed the heating arrangements that sub-chamber is heated.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620119694.5U CN205398715U (en) | 2016-02-14 | 2016-02-14 | Seal device is spouted to gaseous phase |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620119694.5U CN205398715U (en) | 2016-02-14 | 2016-02-14 | Seal device is spouted to gaseous phase |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205398715U true CN205398715U (en) | 2016-07-27 |
Family
ID=56449894
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620119694.5U Active CN205398715U (en) | 2016-02-14 | 2016-02-14 | Seal device is spouted to gaseous phase |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205398715U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108754423A (en) * | 2018-06-25 | 2018-11-06 | 京东方科技集团股份有限公司 | A kind of organic steam precipitation equipment and its control method |
-
2016
- 2016-02-14 CN CN201620119694.5U patent/CN205398715U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108754423A (en) * | 2018-06-25 | 2018-11-06 | 京东方科技集团股份有限公司 | A kind of organic steam precipitation equipment and its control method |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102414863B (en) | Method and apparatus for organic vapor printing | |
| CN1751805B (en) | Ink-jet application method and display device producing method | |
| CN104786656B (en) | One kind printing base station and inkjet printing methods | |
| KR101055606B1 (en) | Organic dry jet printing head and printing apparatus and method using same | |
| CN107053870B (en) | A kind of inkjet printing methods and device | |
| WO2012118199A1 (en) | Vapor-deposition device, vapor-deposition method, organic el display, and lighting device | |
| CN101803462A (en) | Vapor emission device, organic thin-film vapor deposition apparatus and method of organic thin-film vapor deposition | |
| CN205398715U (en) | Seal device is spouted to gaseous phase | |
| KR101633112B1 (en) | Source for vacuum thermal evaporation of organic thin film | |
| CN105870359A (en) | Preparation method of thin film, temperature control device and system for preparing thin film | |
| CN205553568U (en) | Ink -jet printer | |
| WO2019237802A1 (en) | Dry box and control method therefor, and preparation method for organic electroluminescent device | |
| JP2004031070A (en) | Organic el material application device, its application method, and organic el display device | |
| CN110549747B (en) | Ink-jet printing device and method for preparing film | |
| US9348159B2 (en) | Ejection head for ejecting alignment film forming composition | |
| CN109148533A (en) | A kind of organic light emitting diode display | |
| JP2004330136A (en) | Method for drying liquid film and method for manufacturing organic el panel, electrooptic panel and electronic equipment, and apparatus for drying liquid film, electrooptic panel, electrooptic apparatus and electronic equipment | |
| CN106783589B (en) | Air supply and exhaust device | |
| CN106079897A (en) | Inkjet-printing device and inkjet printing methods | |
| CN100469464C (en) | Method of liquid-drop jet coating and method of producing display devices | |
| CN106591780A (en) | Vacuum evaporator and evaporation method thereof | |
| KR102643857B1 (en) | Dispersion flow path apparatus and Vacuum drying apparatus with the same | |
| WO2014034499A1 (en) | Vapor deposition device, vapor deposition method, organic el display, and organic el lighting device | |
| KR102128308B1 (en) | Oled display apparatus, deposition source and method for manufacturing thereof | |
| JP2006223988A (en) | Drying method and drying apparatus |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |