CN205329152U - Swivelling movement strutting arrangement of target - Google Patents
Swivelling movement strutting arrangement of target Download PDFInfo
- Publication number
- CN205329152U CN205329152U CN201620093579.5U CN201620093579U CN205329152U CN 205329152 U CN205329152 U CN 205329152U CN 201620093579 U CN201620093579 U CN 201620093579U CN 205329152 U CN205329152 U CN 205329152U
- Authority
- CN
- China
- Prior art keywords
- target
- workstation
- rail brackets
- screw
- worm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000005540 biological transmission Effects 0.000 claims abstract description 4
- 230000008878 coupling Effects 0.000 claims description 5
- 238000010168 coupling process Methods 0.000 claims description 5
- 238000005859 coupling reaction Methods 0.000 claims description 5
- 238000010884 ion-beam technique Methods 0.000 abstract description 8
- 238000000576 coating method Methods 0.000 abstract description 2
- 239000011248 coating agent Substances 0.000 abstract 1
- 238000000151 deposition Methods 0.000 description 7
- 239000000463 material Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 238000010276 construction Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
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- Physical Vapour Deposition (AREA)
Abstract
The utility model discloses a swivelling movement strutting arrangement of target, including rail brackets, the last slide steering of rail brackets is equipped with the workstation, and the screw drive assembly has the lead screw on the workstation, and rail brackets's one end is fixed with moving motor, and moving motor passes through reduction gear drive screw and rotates, rotates on the workstation and is equipped with rotary platform, and last the splining of rotary platform is equipped with the worm wheel, a worm wheel and a worm mesh transmission, the worm is by fixing the rotating motor driven on the workstation. The utility model discloses a workstation passes through screw actuation by the rotating electrical machines and removes along rail brackets, be used for carrying out position adjustment, and the rotary platform on the workstation passes through the drive of worm gear mechanism and rotates by rotating the motor, is used for carrying on angular adjustment for the target can satisfy different kinds of work pieces when carrying out the supplementary deposit coating film of ion beam to the requirement of the angle and the distance of target.
Description
Technical field
This utility model relates to a kind of in rotary moving support arrangement when ion beam assisted depositing plated film to target, belongs to a kind of fixture。
Background technology
Ion beam assisted depositing plated film is as the means of a kind of metal surface properties modification, it is possible to achieve injects any kind of element to metal material surface and is not subject to the restriction of solid solubility between element。Ion beam assisted depositing plated film is possible not only to change the surface characteristic of metal material, as: the mechanical property of material surface, physical property, corrosion resistance etc., it is also ensured that the fineness of material and precision, and do not affect the substrate performance of material。In ion beam assisted depositing coating process, the position of target and angle directly affect target to the distance of workpiece and angle, and then affect the surface characteristic of workpiece, additionally, position and the angle requirement of target are also not quite similar by different workpiece shapes and size。Of the prior art support arrangement cannot meet the requirement of angle and distance when different types of workpiece carries out ion beam assisted depositing plated film to target。
Utility model content
The purpose of this utility model is to provide in rotary moving support arrangement of a kind of target, to solve the problem that of the prior art support arrangement cannot meet when different types of workpiece carries out ion beam assisted depositing plated film the requirement of angle and distance to target。
In order to realize object above, this utility model adopts the following technical scheme that in rotary moving support arrangement of a kind of target, including rail brackets, on rail brackets, slide-and-guide is equipped with workbench, on workbench, screw-driven is equipped with leading screw, one end of rail brackets is fixed with mobile motor, mobile motor drives screw turns by decelerator, workbench is rotatably equipped with rotation platform, on rotation platform, spline is equipped with worm gear, worm gear and a worm engaging transmission, described worm screw is driven by the electric rotating machine fixed on the table。
Described worm gear is assemblied on rotation platform by rotating shaft spline, and the lower end of described rotating shaft is fixed on rotation platform, and worm gear spline is assemblied in rotating shaft。
Described worm gear is assemblied in rotating shaft by the spline that is wholely set with rotating shaft。
Described worm screw is connected with the output shaft of electric rotating machine by shaft coupling。
Workbench of the present utility model is moved along rail brackets by leading screw driving by electric rotating machine, it is used for carrying out position adjustment, and the rotation platform on workbench is driven rotation by rotary electric machine by worm-and-wheel gear, it is used for carrying out angle adjustment, target is arranged on the table, according to the different workpieces requirement to the angle and distance of target, adjust the position of workbench, the angle simultaneously adjusting rotation platform drives target rotation so that target can meet the requirement of angle and distance when different types of workpiece carries out ion beam assisted depositing plated film to target。Meanwhile, by adjusting the angle and distance of target, improve workpiece plated film efficiency and ensure that the uniformity of plated film；It addition, simple in construction of the present utility model, it is hardly damaged；Manufacturing simple, maintenance cost is low；Compact, can place multiple in the filming equipment vacuum chamber of limited space, and space availability ratio is high, and production efficiency is high。
Accompanying drawing explanation
Fig. 1 is the overall structure schematic diagram of this utility model embodiment；
Fig. 2 is the left view of Fig. 1；
Fig. 3 is the top view of Fig. 1。
Detailed description of the invention
A kind of embodiment of in rotary moving support arrangement of target, at Fig. 1, in Fig. 2 and Fig. 3, its rail brackets 4 slides and is provided with workbench 3, workbench 3 guiding is arranged on rail brackets 4, that is, the direction that workbench sets only along rail brackets 4 is moved, the centre of workbench 3 offers tapped through hole, in the tapped through hole of workbench 3, drive assembly has leading screw 9, the bearing of trend of leading screw 9 is the same with the bearing of trend of rail brackets 4, it is fixed with mobile motor 1 in one end of rail brackets 4, the output shaft of mobile motor 1 is connected with the power shaft of decelerator 2 by shaft coupling, the output shaft of decelerator 2 is connected with leading screw 9 by shaft coupling。Mobile motor 1 drives leading screw 9 to rotate, and leading screw 9 will drive workbench 3 to move。Workbench 3 is rotatably equipped with rotation platform 5, rotation platform 5 is fixedly installed rotating shaft, the lower end of rotating shaft is fixed on rotation platform 5, rotating shaft has been wholely set worm gear 7, workbench 3 is fixed and is equipped with electric rotating machine 6, being connected to worm screw 8, worm screw 8 and worm gear 7 engaged transmission by shaft coupling on the output shaft of electric rotating machine 6, electric rotating machine 6 rotates and worm screw rotation final driving rotation platform 5 just can be driven to rotate。
When plated film, carry out following steps: be placed on by target on workbench 3；The mobile motor 1 that is moved through of target imparts power to decelerator, and decelerator provides certain slewing rate again by leading screw, power to be passed to workbench 3, thus the distance regulated between target and workpiece；Electric rotating machine 6 then imparts power to worm gear 7 by worm screw 8, and the rotation of worm gear is rotated the rotation of platform 5, and dynamic rotation platform 5 drives target to rotate relative to workbench, thus the angle adjustment realized between target and workpiece。
Claims (4)
1. in rotary moving support arrangement of a target, it is characterized in that: include rail brackets, on rail brackets, slide-and-guide is equipped with workbench, on workbench, screw-driven is equipped with leading screw, and one end of rail brackets is fixed with mobile motor, and mobile motor drives screw turns by decelerator, workbench is rotatably equipped with rotation platform, on rotation platform, spline is equipped with worm gear, worm gear and a worm engaging transmission, and described worm screw is driven by the electric rotating machine fixed on the table。
2. in rotary moving support arrangement of target according to claim 1, it is characterised in that: described worm gear is assemblied on rotation platform by rotating shaft spline, and the lower end of described rotating shaft is fixed on rotation platform, and worm gear spline is assemblied in rotating shaft。
3. in rotary moving support arrangement of target according to claim 2, it is characterised in that: described worm gear is assemblied in rotating shaft by the spline that is wholely set with rotating shaft。
4. in rotary moving support arrangement of target according to claim 3, it is characterised in that: described worm screw is connected with the output shaft of electric rotating machine by shaft coupling。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620093579.5U CN205329152U (en) | 2016-01-29 | 2016-01-29 | Swivelling movement strutting arrangement of target |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620093579.5U CN205329152U (en) | 2016-01-29 | 2016-01-29 | Swivelling movement strutting arrangement of target |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205329152U true CN205329152U (en) | 2016-06-22 |
Family
ID=56317160
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620093579.5U Expired - Fee Related CN205329152U (en) | 2016-01-29 | 2016-01-29 | Swivelling movement strutting arrangement of target |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205329152U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106583144A (en) * | 2016-11-25 | 2017-04-26 | 中国人民解放军装备学院 | Coating device for preparing disc-shaped working medium of laser ablated microthruster |
| CN109280880A (en) * | 2017-07-23 | 2019-01-29 | 杰莱特（苏州）精密仪器有限公司 | A kind of rotatable removable target holder transmission device |
| CN110429016A (en) * | 2019-08-30 | 2019-11-08 | 江苏鲁汶仪器有限公司 | A kind of ion bean etcher with rotation electrode driving |
| CN110819946A (en) * | 2018-08-08 | 2020-02-21 | 合肥江丰电子材料有限公司 | Target moving device and using method |
-
2016
- 2016-01-29 CN CN201620093579.5U patent/CN205329152U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106583144A (en) * | 2016-11-25 | 2017-04-26 | 中国人民解放军装备学院 | Coating device for preparing disc-shaped working medium of laser ablated microthruster |
| CN109280880A (en) * | 2017-07-23 | 2019-01-29 | 杰莱特（苏州）精密仪器有限公司 | A kind of rotatable removable target holder transmission device |
| CN110819946A (en) * | 2018-08-08 | 2020-02-21 | 合肥江丰电子材料有限公司 | Target moving device and using method |
| CN110429016A (en) * | 2019-08-30 | 2019-11-08 | 江苏鲁汶仪器有限公司 | A kind of ion bean etcher with rotation electrode driving |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160622 |