CN205317811U - A magnetism electric sensor for declining air current detects - Google Patents
A magnetism electric sensor for declining air current detects Download PDFInfo
- Publication number
- CN205317811U CN205317811U CN201620067284.0U CN201620067284U CN205317811U CN 205317811 U CN205317811 U CN 205317811U CN 201620067284 U CN201620067284 U CN 201620067284U CN 205317811 U CN205317811 U CN 205317811U
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- conductor
- detection
- flexible membrane
- giant magnetostrictive
- membrane frame
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- 230000005389 magnetism Effects 0.000 title claims abstract description 26
- 239000004020 conductor Substances 0.000 claims abstract description 50
- 238000001514 detection method Methods 0.000 claims abstract description 47
- 239000012528 membrane Substances 0.000 claims abstract description 26
- 230000001939 inductive effect Effects 0.000 claims abstract description 13
- 238000001755 magnetron sputter deposition Methods 0.000 claims abstract description 6
- 238000004804 winding Methods 0.000 claims abstract description 4
- 239000010409 thin film Substances 0.000 claims description 26
- 239000011148 porous material Substances 0.000 claims description 15
- 230000000875 corresponding Effects 0.000 claims description 3
- 238000005265 energy consumption Methods 0.000 abstract description 2
- 230000004907 flux Effects 0.000 description 3
- 238000005452 bending Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000005674 electromagnetic induction Effects 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000001131 transforming Effects 0.000 description 1
Abstract
The utility model discloses a magnetism electric sensor for declining air current detects, including flexible membrane frame, soft permanent magnetism piece, giant magnetostrictive film, magnetic pole conductor and detection conductor, the giant magnetostrictive film passes through the magnetron sputtering method and is in the suface jet of soft permanent magnetism piece piles up and forms, and paste respectively on flexible membrane frame at soft permanent magnetism piece both ends, and the magnetic pole conductor has two, sets up respectively on the flexible membrane frame of giant magnetostrictive film both ends department, be located sealed container, the both ends of flexible membrane frame are provided with pastes the piece, paste the piece setting on sealed container's internal face, the detection conductor is located on sealed container's the outer wall, the magnetic pole conductor with it connects through magnetic field to detect the conductor, the winding has induction coil on detecting the conductor. The utility model discloses the test section that can make the sensor lies in airtight space, makes detection ring border airless disturb, and the test section of sensor does not have the energy consumption, is applicable to very much the task of carrying out long -term real -time supervision.
Description
[technical field]
The present invention relates to the technical field of the technical field of measurement and control instrument, particularly magnetoelectric transducer.
[background technology]
Tiny pore detection is widely used in the field such as biomedicine, air tightness test, the airflow influence of Tiny pore is very faint, be highly prone to external environment disturbance and cannot identification, so the detection to Tiny pore, not only need high-precision detecting instrument, in addition it is also necessary to ensureing that the air-flow of detection environment is unaffected, the use of detecting instrument is caused very big obstacle by this, it is therefore necessary to a kind of detecting device of design, it is possible to it is applied to confined space and does not affect external information is mutual and energy transmission.
[summary of the invention]
The purpose of the present invention solves the problems of the prior art exactly, a kind of magnetoelectric transducer for Tiny pore detection is proposed, the detection part that can make sensor is positioned at confined space, detection environment airless is made to disturb, and the detection part Non-energy-consumption of sensor, it is highly suitable for performing the task of long-term monitoring in real time.
For achieving the above object, the present invention proposes a kind of magnetoelectric transducer for Tiny pore detection, including flexible membrane frame, soft permanent magnetism sheet, giant magnetostrictive thin film, magnetic pole conductor and detection conductor; Described giant magnetostrictive thin film is formed at the surface jet-stacking of described soft permanent magnetism sheet by magnetron sputtering method, described soft permanent magnetism sheet two ends are respectively adhered on described flexible membrane frame, described magnetic pole conductor has two, it is separately positioned on the flexible membrane frame at giant magnetostrictive thin film two ends place, the outer end of the corresponding two magnetic pole conductors in described detection conductor two ends; Described flexible membrane frame, soft permanent magnetism sheet, giant magnetostrictive thin film, magnetic pole conductor composition sensor detecting portion, is positioned at hermetic container, and the two ends of described flexible membrane frame are provided with sticking tablet, and described sticking tablet is arranged on the internal face of hermetic container; Described detection conductor is positioned in the outside wall surface of described hermetic container, and described magnetic pole conductor and described detection conductor are attached by magnetic field; Being wound with induction coil on described detection conductor, two ends of described induction coil are received on current detecting equipment.
As preferably, described induction coil winding number of turns n on detection conductor encloses more than 100.
As preferably, the thickness of described giant magnetostrictive thin film is more than 0.5mm.
As preferably, the thickness of described soft permanent magnetism sheet is less than the thickness of described giant magnetostrictive thin film.
Beneficial effects of the present invention: the present invention by piling up the surface being attached to soft permanent magnetism sheet by giant magnetostrictive thin film by magnetron sputtering method, and be supported by flexible membrane frame, make flexible membrane frame when the impact receiving weak gas flow, a degree of bending will be formed, so that the detection part of sensor has higher sensitivity; Carry out magnetic field between detection conductor outside hermetic container by being arranged on magnetic pole conductor within hermetic container be connected with being arranged on, Sensor section inside and outside hermetic container is connected without line, tested region can obtain intact airtight, the interference of external environment will not be subject to, improve the accuracy of detection; By being wound around the induction coil more than 100 circles on detection conductor, the size of current generated due to electromagnetic induction is made can enough to reach the lowest detection ultimate value of current detecting equipment, thus saving the use of the additional devices such as current amplifier, reduce the complexity of cost and device systems.
Inventive feature and advantage will be described in detail in conjunction with accompanying drawing by embodiment.
[accompanying drawing explanation]
Fig. 1 is the front view of the magnetoelectric transducer that the present invention detects for Tiny pore;
Fig. 2 is the schematic diagram of the magnetoelectric transducer practical application that the present invention detects for Tiny pore.
In figure: the soft permanent magnetism sheet of 1-flexible membrane frame, 2-, 3-giant magnetostrictive thin film, 4-magnetic pole conductor, 5-sticking tablet, 6-hermetic container, 7-detect conductor, 8-induction coil.
[detailed description of the invention]
Consulting Fig. 1 and Fig. 2, a kind of magnetoelectric transducer for Tiny pore detection of the present invention, including flexible membrane frame 1, soft permanent magnetism sheet 2, giant magnetostrictive thin film 3, magnetic pole conductor 4 and detection conductor 7; Described giant magnetostrictive thin film 3 is formed at the surface jet-stacking of described soft permanent magnetism sheet 2 by magnetron sputtering method, described soft permanent magnetism sheet 2 two ends are respectively adhered on described flexible membrane frame 1, described magnetic pole conductor 4 has two, it is separately positioned on the flexible membrane frame 1 at giant magnetostrictive thin film 3 two ends place, the outer end of the corresponding two magnetic pole conductors 4 in described detection conductor 7 two ends; Described flexible membrane frame 1, soft permanent magnetism sheet 2, giant magnetostrictive thin film 3, magnetic pole conductor 4 form sensor detecting portion, it is positioned at hermetic container 6, the two ends of described flexible membrane frame 1 are provided with sticking tablet 5, and described sticking tablet 5 is arranged on the internal face of hermetic container 6; Described detection conductor 7 is positioned in the outside wall surface of described hermetic container 6, and described magnetic pole conductor 4 is attached by magnetic field with described detection conductor 7; Being wound with induction coil 8 on described detection conductor 7, two ends of described induction coil 8 are received on current detecting equipment.
The described induction coil 8 winding number of turns n on detection conductor 7 encloses more than 100.
The thickness of described giant magnetostrictive thin film 3 is more than 0.5mm.
The thickness of described soft permanent magnetism sheet 2 is less than the thickness of described giant magnetostrictive thin film 3.
Work process of the present invention:
A kind of magnetoelectric transducer for Tiny pore detection of the present invention is in the course of the work, the space of Tiny pore will be detected in hermetic container 6, sticking tablet 5 is pasted onto on the inwall of hermetic container 6, the impact of flexible membrane frame 1 is made flexible membrane frame 1 deform by weak gas flow, soft permanent magnetism sheet 2 is forced to be deformed with giant magnetostrictive thin film 3, soft permanent magnetism sheet 2 constitutes a magnetic loop with giant magnetostrictive thin film 3, soft permanent magnetism sheet 2 also constitutes a magnetic loop through magnetic pole conductor 4 and detection conductor 7, when giant magnetostrictive thin film 3 deforms, according to counter magnetostriction effect, internal magnetic flux can change, thus the magnetic flux having influence in another magnetic loop changes, so that induction coil 8 detects faradic current, the situation of change of magnetic flux in giant magnetostrictive thin film 3 can be calculated, thus calculate the deflection of giant magnetostrictive thin film 3 according to the constitutive equation of magnetostriction materials, try to achieve the parameter of weak gas flow.
The present invention, by giant magnetostrictive thin film to be piled up the surface being attached to soft permanent magnetism sheet by magnetron sputtering method, and be supported by flexible membrane frame, make flexible membrane frame when the impact receiving weak gas flow, a degree of bending will be formed, so that the detection part of sensor has higher sensitivity; Carry out magnetic field between detection conductor outside hermetic container by being arranged on magnetic pole conductor within hermetic container be connected with being arranged on, Sensor section inside and outside hermetic container is connected without line, tested region can obtain intact airtight, the interference of external environment will not be subject to, improve the accuracy of detection; By being wound around the induction coil more than 100 circles on detection conductor, the size of current generated due to electromagnetic induction is made can enough to reach the lowest detection ultimate value of current detecting equipment, thus saving the use of the additional devices such as current amplifier, reduce the complexity of cost and device systems.
Above-described embodiment is the description of the invention, is not limitation of the invention, any scheme after simple transformation of the present invention is belonged to protection scope of the present invention.
Claims (4)
1. the magnetoelectric transducer for Tiny pore detection, it is characterised in that: include flexible membrane frame (1), soft permanent magnetism sheet (2), giant magnetostrictive thin film (3), magnetic pole conductor (4) and detection conductor (7); Described giant magnetostrictive thin film (3) is formed at the surface jet-stacking of described soft permanent magnetism sheet (2) by magnetron sputtering method, described soft permanent magnetism sheet (2) two ends are respectively adhered on described flexible membrane frame (1), described magnetic pole conductor (4) has two, it is separately positioned on the flexible membrane frame (1) at giant magnetostrictive thin film (3) two ends place, the outer end of the corresponding two magnetic pole conductors (4) in described detection conductor (7) two ends; Described flexible membrane frame (1), soft permanent magnetism sheet (2), giant magnetostrictive thin film (3), magnetic pole conductor (4) composition sensor detecting portion, it is positioned at hermetic container (6), the two ends of described flexible membrane frame (1) are provided with sticking tablet (5), and described sticking tablet (5) is arranged on the internal face of hermetic container (6); Described detection conductor (7) is positioned in the outside wall surface of described hermetic container (6), and described magnetic pole conductor (4) and described detection conductor (7) are attached by magnetic field; Being wound with induction coil (8) on described detection conductor (7), two ends of described induction coil (8) are received on current detecting equipment.
2. the magnetoelectric transducer for Tiny pore detection as claimed in claim 1, it is characterised in that: the described induction coil (8) winding number of turns n in detection conductor (7) encloses more than 100.
3. the magnetoelectric transducer for Tiny pore detection as claimed in claim 1, it is characterised in that: the thickness of described giant magnetostrictive thin film (3) is more than 0.5mm.
4. the magnetoelectric transducer for Tiny pore detection as claimed in claim 1, it is characterised in that: the thickness of described soft permanent magnetism sheet (2) is less than the thickness of described giant magnetostrictive thin film (3).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620067284.0U CN205317811U (en) | 2016-01-22 | 2016-01-22 | A magnetism electric sensor for declining air current detects |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620067284.0U CN205317811U (en) | 2016-01-22 | 2016-01-22 | A magnetism electric sensor for declining air current detects |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205317811U true CN205317811U (en) | 2016-06-15 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620067284.0U Expired - Fee Related CN205317811U (en) | 2016-01-22 | 2016-01-22 | A magnetism electric sensor for declining air current detects |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205317811U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105548608A (en) * | 2016-01-22 | 2016-05-04 | 缪雪峰 | Magnetoelectric sensor for micro-airflow detection |
-
2016
- 2016-01-22 CN CN201620067284.0U patent/CN205317811U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105548608A (en) * | 2016-01-22 | 2016-05-04 | 缪雪峰 | Magnetoelectric sensor for micro-airflow detection |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20170627 Address after: 201100 Shanghai city Minhang District River tidal Road No. 168 building 3 layer 4 Patentee after: Shanghai Jiongce Environmental Protection Technology Co., Ltd. Address before: 510000 unit 2414-2416, building, No. five, No. 371, Tianhe District, Guangdong, China Patentee before: Guangdong Gaohang Intellectual Property Operation Co., Ltd. Effective date of registration: 20170627 Address after: 510000 unit 2414-2416, building, No. five, No. 371, Tianhe District, Guangdong, China Patentee after: Guangdong Gaohang Intellectual Property Operation Co., Ltd. Address before: 317503, Zhejiang, Taizhou province Wenling Binhai Town, Village No. 275 Patentee before: Jiu Xuefeng |
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| TR01 | Transfer of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160615 Termination date: 20180122 |
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| CF01 | Termination of patent right due to non-payment of annual fee |