CN205310025U - Work piece scaling -off compensation formula double -sided lapping equipment - Google Patents

Work piece scaling -off compensation formula double -sided lapping equipment Download PDF

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Publication number
CN205310025U
CN205310025U CN201521119891.9U CN201521119891U CN205310025U CN 205310025 U CN205310025 U CN 205310025U CN 201521119891 U CN201521119891 U CN 201521119891U CN 205310025 U CN205310025 U CN 205310025U
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China
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price fixing
valve
pneumatic operated
cylinder
altimeter
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CN201521119891.9U
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裴忠
张峰
梁文
朱勤超
平志韩
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TDG MACHINERY TECHNOLOGY Co Ltd
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TDG MACHINERY TECHNOLOGY Co Ltd
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Abstract

The utility model relates to a work piece scaling -off compensation formula double -sided lapping equipment, including the last price fixing and lower price fixing of cooperation setting, to go up the price fixing and be connected to control mechanism, the sun gear is established at lower price fixing middle part, and the axle center department of sun gear establishes the altimeter, and the altimeter top is just central to last price fixing, and the altimeter is connected to control mechanism, and control mechanism is connected to the price fixing through pneumatic mechanism and cylinder in order, sun gear outside meshing planetary gear, the last through -hole of establishing of planetary gear, the planetary gear meshing is the price fixing ring gear down. The utility model discloses in, external factors influences such as rotational speed, pressure are got rid of in initial grinding, guarantee that the measurement size is accurate, and work piece measurement size value was relatively stable when external factors was the same, then carried out the scaling -off grinding, realized that the work piece once arrives the technological requirement of size grinding, used coordinately milling time control and adopted height sensor to control by the size of grinding work piece, was favorable to going on of control, satisfied big batch of work piece and automatic production demand, promoted polishing precision.

Description

A kind of compensation twin grinding equipment of workpiece sizing
Technical field
This utility model belongs to the technical field for grinding or the lathe of polishing, device or technique, is prevented effectively from the time that is used alone and controls the size of grinding work-piece particularly to a kind of or control the single mill mode of size of grinding work-piece, the compensation twin grinding equipment of workpiece sizing to reach higher grinding precision with height sensor.
Background technology
Twin grinding equipment is to adopt to coat or embed the grinding machine that surface of the work is ground by the lap tool of abrasive material, it is mainly used in the crystal that two sides is parallel or other machine components carry out twin grinding, it is particularly well-suited to the processing of thin fragile material, such as plane lapping and the polishing of the metal materials such as mechanical seal ring, potsherd, cylinder piston ring, oil pump blade bearing end face and silicon, germanium, quartz crystal, graphite, sapphire, optics crystal, glass, Lithium metaniobate, hard alloy, rustless steel, powder ash metallurgy.
In prior art, common twin grinding equipment is typically all individually to adopt and uses milling time to control or individually adopt height sensor to control to be ground the size of workpiece, the i.e. amount of being ground, such control mode is more single, light with the time control due to benchmark different, being unfavorable for the carrying out controlled, light grinds the Production requirement that then cannot meet workpiece high-volume and automatization with size, and the precision ground is also relatively low.
Utility model content
This utility model solves the technical problem that and is, due in prior art, common twin grinding equipment is typically all individually to adopt and uses milling time to control or individually adopt height sensor to control to be ground the size of workpiece, and the control mode that causes is more single, light with the time control due to benchmark different, it is unfavorable for the carrying out controlled, light grinds the Production requirement that then cannot meet workpiece high-volume and automatization with size, and the problem that the precision ground is also relatively low, and then provide a kind of compensation twin grinding equipment of workpiece sizing optimizing structure.
This utility model be employed technical scheme comprise that, a kind of compensation twin grinding equipment of workpiece sizing, including the upper price fixing being equipped with and lower price fixing, described upper price fixing is connected to controlling organization, being provided with central gear in the middle part of described lower price fixing, the axle center place of described central gear is provided with altimeter, just center to described upper price fixing, the top of described altimeter, described altimeter is connected to controlling organization, and described controlling organization sequentially passes through pneumatic mechanism and cylinder is connected to price fixing; Being engaged with planetary gear outside described central gear, described planetary gear is provided with through hole, and described planetary gear is engaged to the ring gear of lower price fixing.
Preferably, described pneumatic mechanism includes the source of the gas, oil fog generator and the pneumatic operated valve group that are sequentially connected with, and described pneumatic operated valve group includes the first pneumatic operated valve group and the second pneumatic operated valve group; Described first pneumatic operated valve group includes the proportioning valve that is connected with described oil fog generator and the first rising threshold being equipped with and the first lowering valve; Described second pneumatic operated valve group includes the air relief valve that is connected with described oil fog generator and the second rising threshold being equipped with and the second lowering valve; Described pneumatic operated valve group is connected with described cylinder.
Preferably, described first pneumatic operated valve group and the second pneumatic operated valve group also include being located at the one-way flow valves between the first rising threshold and the first lowering valve and cylinder and between the second rising threshold and the second lowering valve and cylinder.
Preferably, described upper price fixing being additionally provided with locking cylinder, described locking cylinder is connected to source of the gas by regulating valve.
Preferably, described lower price fixing bottom is connected to hod by drain line, and described drain line is provided with tapping valve.
Preferably, described tapping valve is two-position three way magnetic valve, the outfan of described tapping valve is respectively connecting to hod and waste collection mechanism, and described hod is provided with drawing liquid pump, and described drawing liquid delivery side of pump is connected to the gap between described upper price fixing and lower price fixing by pipeline.
This utility model provides a kind of compensation twin grinding equipment of workpiece sizing optimizing structure, control pneumatic mechanism band dynamic air cylinder by controlling organization to be fallen by upper price fixing, apply certain pressure, workpiece is by the planetary motion between upper price fixing and lower price fixing, its gauge slowly reduces under the effect of the pressure, spacing between upper price fixing and lower price fixing also can slowly reduce, after grinding the regular hour, reach the effect of preliminary grinding, the distance at the altimeter that time thus, the axle center place of central gear in the middle part of the lower price fixing of twin grinding equipment is arranged and the center of upper price fixing calculates price fixing needs to compensate the distance of pressurization, start to compensate on thickness of workpiece error amount, compensation of progressively having pressurizeed is ground. in this utility model, initial grinding is the impact in order to get rid of the extraneous factor such as rotating speed, pressure, ensure the accurate of measurement size, when extraneous factor is identical, the size value of workpiece calibration is also relatively stable, now proceeds by sizing and grinds, it is achieved workpiece once arrives the technological requirement that size is ground, in conjunction with using milling time to control and adopting height sensor to control to be ground the size of workpiece, be conducive to the carrying out controlled, meet the Production requirement of workpiece high-volume and automatization, promote grinding precision.
Accompanying drawing explanation
Fig. 1 is structural representation of the present utility model;
Fig. 2 is the gas circuit structure figure in this utility model.
Detailed description of the invention
Below in conjunction with embodiment, this utility model is described in further detail, but protection domain of the present utility model is not limited to this.
As shown in the figure, this utility model relates to a kind of compensation twin grinding equipment of workpiece sizing, including the upper price fixing 1 being equipped with and lower price fixing 2, described upper price fixing 1 is connected to controlling organization, being provided with central gear 3 in the middle part of described lower price fixing 2, the axle center place of described central gear 3 is provided with altimeter 4, just center to described upper price fixing 1, the top of described altimeter 4, described altimeter 4 is connected to controlling organization, and described controlling organization sequentially passes through pneumatic mechanism and cylinder 5 is connected to price fixing 1; Being engaged with planetary gear outside described central gear 3, described planetary gear is provided with through hole, and described planetary gear is engaged to the ring gear of lower price fixing 2.
In this utility model, high-precision altimeter 4 is used to be installed on the center of central gear 3, descend just center to upper price fixing 1, the top of altimeter 4 in working order, namely the top of altimeter 4 is measured head and is measured the distance at the center with upper price fixing 1, the actual grinding thickness of workpiece can be obtained, it is ensured that duty smooth.
In this utility model, twin grinding equipment is a kind of type being transmission principle with planet circular system, planetary gear is provided with through hole, for 2 cun of wafers, twin grinding equipment operationally, is first placed on planetary gear on lower price fixing 2, planetary teeth portion is meshed with central gear 3 and ring gear, filling at lead to the hole site by wafer to be ground again, close upper price fixing 1, starts auto-programming and namely starts processing work.
In this utility model, planetary motion between upper price fixing 1 and lower price fixing 2, the gauge of workpiece slowly reduces under the effect of the pressure, and the spacing between upper price fixing 1 and lower price fixing 2 also can slowly reduce.
In this utility model, altimeter 4 adopts high-acruracy survey device, and resolution reaches 0.5 μm, precision 2 μm, measures scope 50mm.
In this utility model, in order to prevent the measuring cell of altimeter 4 due to interference, the factors such as vibrations cause measurement highly inaccurate or sudden change, therefore controlling organization can be placed through high accuracy and coordinate the form of instrument, obtain the data of altimeter 4 by reading the mode of binary-coded decimal by PLC, the filter function of meter specially so can be utilized to remove interference, then again through PLC software, altimeter 4 data are carried out the functions such as digital averaging filtering, farthest ensure that the accuracy measuring thickness by such process, it is greatly improved the accuracy of grinding size, this is the content that skilled addressee readily understands that, can be designed according to actual demand.
Described pneumatic mechanism includes the source of the gas 6, oil fog generator 7 and the pneumatic operated valve group that are sequentially connected with, and described pneumatic operated valve group includes the first pneumatic operated valve group and the second pneumatic operated valve group; Described first pneumatic operated valve group includes the proportioning valve 8 being connected with described oil fog generator 7 and the first rising threshold 9 and the first lowering valve 10 being equipped with; Described second pneumatic operated valve group includes the air relief valve 11 being connected with described oil fog generator 7 and the second rising threshold 12 and the second lowering valve 13 being equipped with; Described pneumatic operated valve group is connected with described cylinder 5.
In this utility model, adopt the control mode of pneumatics, its mainly due to pneumatics using air and noble gas as working media, therefore the quantity delivered of air sufficient and also without cost, it is often more important that, surrounding is not polluted by air and noble gas, being cleaning medium, meanwhile, pneumatics can accomplish remote supply, reduce the loss of local plant equipment, increase the service life of twin grinding equipment in this utility model.
In this utility model, pneumatic operated valve group is set to the first pneumatic operated valve group and the second pneumatic operated valve group, it is respectively used to control epicoele and the cavity of resorption of cylinder, the proportioning valve 8 being directly connected to oil fog generator 7 and air relief valve 11 are set simultaneously respectively in the first pneumatic operated valve group and the second pneumatic operated valve group.
In this utility model, proportioning valve 8 can pass through to regulate, and is reached for price fixing 1 and applies different pressures to realize the purpose of different decrease speeds, and proportioning valve 8 can realize the electrodeless adjustment of pressure, speed, can realize remotely controlling and programme-control, fast response time.
In this utility model, air relief valve 11 can adjust the deadweight of the upper price fixing 1 of balance, cylinder 5 adds different pressure stable with the pressure balance of price fixing 1 on realizing, it is possible to achieve increasing smoothly gradually of pressure, do not control just can complete, by the time, operation of pressurizeing smoothly when needs programme-control.
Described first pneumatic operated valve group and the second pneumatic operated valve group also include being located at the one-way flow valves 14 between the first rising threshold 9 and the first lowering valve 10 and cylinder 5 and between the second rising threshold 12 and the second lowering valve 13 and cylinder 5.
In this utility model, one-way flow valves 14 is further respectively had between the first rising threshold 9 and the first lowering valve 10 and cylinder 5 and between the second rising threshold 12 and the second lowering valve 13 and cylinder 5, it is used in pneumatic system is to prevent compression air reverse flow, in guarantee, price fixing 1 does not have the phenomenons such as overshoot in the process declined, ensure the safety that twin grinding equipment is overall, the mechanical life of extension device.
Being additionally provided with locking cylinder 15 on described upper price fixing 1, described locking cylinder 15 is connected to source of the gas 6 by regulating valve 16.
In this utility model, upper price fixing 1 arranges the locking cylinder 15 being connected to source of the gas 6 by regulating valve 16, it is prevented that upper price fixing 1 is unexpected falls damage workpiece to be ground.
Described lower price fixing 2 bottom is connected to hod by drain line, and described drain line is provided with tapping valve 17.
Described tapping valve 17 is two-position three way magnetic valve, the outfan of described tapping valve 17 is respectively connecting to hod and waste collection mechanism, described hod is provided with drawing liquid pump, and described drawing liquid delivery side of pump is connected to the gap between described upper price fixing 1 and lower price fixing 2 by pipeline.
In this utility model, hod, as the storage device of lapping liquid in twin grinding equipment, is typically provided mixing pump and drawing liquid pump on hod, and mixing pump prevents caking for agitation grinding liquid, and drawing liquid pump is for extracting the lapping liquid in hod.
In this utility model, lapping liquid is stored in hod, by mixing pump mix homogeneously, entered by drawing liquid pump drawing liquid and above serve as abrasive material between price fixing 1 and lower price fixing 2, after grinding, lapping liquid enters Drainage pipe, controls the flexible of cylinder by the break-make of the tapping valve 17 on Drainage pipe.
In this utility model, tapping valve 17 is two-position three way magnetic valve, and its outfan is respectively connecting to hod and waste collection mechanism. Blowdown period, controls the flexible of cylinder 5, the tailpiece of the piston rod fixed-piping of cylinder 5 by the break-make of the tapping valve 17 on Drainage pipe, and pipeline has 2 tache motorices, and when moving to one end, pipeline imports hod lapping liquid, when waste liquid is drained when moving to the other end.
In this utility model, once circulate when lapping liquid entrance hod is just formed, the gap between upper price fixing 1 and lower price fixing 2 is drawn back by drawing liquid pump, switching tapping valve 17 after the granule of lapping liquid is less than certain size, its passage controlled is made to import waste collection mechanism, all derive useless lapping liquid, then can reconfigure lapping liquid.
In this utility model, waste collection mechanism is traditionally arranged to be waste collection pond.
In this utility model, upper price fixing 1 is connected with the tailpiece of the piston rod termination of cylinder 5, one end of cylinder 5 can arrive full stroke and namely rise to full stroke, the other end can not arrive full stroke and decline end can not arrive full row, and cylinder 5 has certain speed when rising, in order to prevent piston and cylinder 5 from breaking during arrival full stroke, above price fixing 1 is provided with mechanical stop limiter, such as limited block, in order to prevent piston and cylinder 5 from bumping against.
Operation principle of the present utility model comprises the following steps:
Step one: workpiece is placed in the planetary through hole on the lower price fixing 2 of twin grinding equipment, reads lower range data between altimeter 4 top of price fixing 2 center and the upper price fixing 1 of twin grinding equipment;
Step 2: add lapping liquid between price fixing 1 and lower price fixing 2 on described, add lapping liquid, the state of the switching-on hod of tapping valve 17 of twin grinding equipment in hod; The controlling organization of twin grinding equipment controls source of the gas 6 and the locking cylinder 15 being located at upper price fixing 1 place is adjusted to locking state;
Step 3: set the distance X on milling time T and final altimeter 4 top and upper price fixing 1 by controlling organization, grinding starts;
Step 4: controlling organization controls the pneumatic mechanism of twin grinding equipment and starts operation, and locking cylinder 15 unclamps, pneumatic mechanism drives the cylinder 5 being located at price fixing 1 top that price fixing 1 is progressively declined, and workpiece carries out the grinding of T time;
Step 5: after workpiece has been ground time T, now carries out surely very little grinding with the distance X ' of upper price fixing 1 according to altimeter 4 top, and controlling organization drives upper price fixing 1 slowly to grind downwards distance (X '-X) by described pneumatic mechanism and cylinder 5; X ' > X;
Step 6: when the distance between altimeter 4 top and upper price fixing 1 reaches X, grinding terminates; Controlling organization drives upper price fixing 1 to rise by described pneumatic mechanism and cylinder 5, and the controlling organization of twin grinding equipment controls source of the gas 6 and the locking cylinder 15 being located at upper price fixing 1 place is adjusted to locking state; The state of the switching-on waste collection mechanism of tapping valve 17 of twin grinding equipment.
In this utility model, what twin grinding operation adopted is the mode that the time controls and Altitude control combines. the part that time controls is mainly step 4, pneumatic mechanism is controlled by controlling organization, upper price fixing 1 is fallen by pneumatic mechanism by corresponding parts band dynamic air cylinder 5, and apply certain pressure, workpiece is by the planetary motion between upper price fixing 1 and lower price fixing 2, its gauge slowly reduces under the effect of the pressure, spacing between upper price fixing 1 and lower price fixing 2 also can slowly reduce, after grinding regular hour T, the effect of initial grinding can be reached, surplus is released according to the target thickness of workpiece during this period of time by operator, sets itself, initial grinding is to get rid of rotating speed, the impact of the extraneous factors such as pressure, ensure the accurate of measurement size, when extraneous factor is identical, the size value of workpiece calibration is also relatively stable. it it is then the part of Altitude control, i.e. step 5, altimeter 4 and the distance at the center of upper price fixing 1 that now the axle center place of the central gear 3 in the middle part of the lower price fixing 2 of twin grinding equipment is arranged are X ', and altimeter 4 and the distance at the center of upper price fixing 1 are X in the works, then calculating price fixing 1 needs the distance compensating pressurization for (X '-X), starting to compensate on thickness of workpiece error amount, compensation of progressively having pressurizeed is ground, and sizing grinding achieves workpiece and once arrives the technological requirement that size is ground.
This utility model combines and uses milling time to control and adopt height sensor to control to be ground the size of workpiece, is conducive to the carrying out controlled, meets the Production requirement of workpiece high-volume and automatization, promote grinding precision.
In described step 4, source of the gas 6 supplies, and the first lowering valve 10 and the second lowering valve 13 obtain electric, upper price fixing 1 is declined, passing ratio valve 8 applies pressure and regulates the decrease speed of upper price fixing 1, and workpiece carries out the grinding of T time, is controlled to give vent to anger speed by the one-way flow valves 14 of lower cylinder 5 air inlet.
In this utility model, the down maneuver of upper price fixing 1 when step 4 is control the time. When the first lowering valve 10 and the second lowering valve 13 obtain electric, first rising threshold 9 and the second rising threshold 12 all must not be electric, passing ratio valve 8 applies to regulate the pressure of pressurization, the decline of price fixing 1 in realization, and the different pressure of passing ratio valve 8 applies the friction speed that realizes declining, meet quickly and the practical application of descending at slow speed.
In this utility model, the time controls the milling time T in stage and can be arranged voluntarily according to actual equipment situation and workpiece target thickness by operator.
In this utility model, controlled to give vent to anger speed by the one-way flow valves 14 of lower cylinder 5 air inlet, it is ensured that upper price fixing 1 declines with suitable speed.
In described step 5, source of the gas 6 supplies, after air relief valve 11 is adjusted decompression according to the weight of upper price fixing 1, price fixing 1 is conducted oneself with dignity in balance, first lowering valve 10 and the second lowering valve 13 obtain electric, passing ratio valve 8 applies pressure and regulates the decrease speed of upper price fixing 1, and upper price fixing 1 slowly grinds downwards distance (X '-X).
In this utility model, the down maneuver of upper price fixing 1 when step 5 is Altitude control. It is adjusted decompression by air relief valve 11 according to the weight of upper price fixing 1, after price fixing 1 is conducted oneself with dignity in balance, adds different pressure at upper cylinder 5 and realize the increase that pressure balance is stable, do not control just can complete stable pressurization when needs programme-control by the time; Then the first lowering valve 10 and the second lowering valve 13 electric, the first rising threshold 9 and the second rising threshold 12 all must not electricity, passing ratio valve 8 applies to regulate the pressure of pressurization, it is achieved the set a distance of upper price fixing 1 declines, and upper price fixing 1 slowly grinds downwards distance (X '-X).
In described step 6, source of the gas 6 supplies, and the first lowering valve 10 and the second rising threshold 12 obtain electric, are risen by upper price fixing 1, and passing ratio valve 8 applies pressure and regulates the rate of climb of upper price fixing 1.
In this utility model, step 6 is the vertical motion of upper price fixing 1. First lowering valve 10 and the second rising threshold 12 obtain electric, first rising threshold 9 and the second lowering valve 13 all must not be electric, if now cylinder 5 does not have pressure, upper price fixing 1 can rise with speed quickly, there is certain unsafe factor, therefore by the first lowering valve 10 electric, the first rising threshold 9 must not the form of electricity, further cylinder 5 is applied different pressure to offset the pressure of upper price fixing 1 upper punch by passing ratio valve 8, it is achieved the rise and fall speed that upper price fixing 1 is different.
This utility model solves in prior art, common twin grinding equipment is typically all individually to adopt and uses milling time to control or individually adopt height sensor to control to be ground the size of workpiece, and the control mode that causes is more single, light with the time control due to benchmark different, it is unfavorable for the carrying out controlled, light grinds the Production requirement that then cannot meet workpiece high-volume and automatization with size, and the problem that the precision ground is also relatively low, control pneumatic mechanism band dynamic air cylinder 5 by controlling organization to be fallen by upper price fixing 1, apply certain pressure, workpiece is by the planetary motion between upper price fixing 1 and lower price fixing 2, its gauge slowly reduces under the effect of the pressure, spacing between upper price fixing 1 and lower price fixing 2 also can slowly reduce, after grinding the regular hour, reach the effect of preliminary grinding, the distance at the altimeter 4 that time thus, the axle center place of central gear 3 in the middle part of the lower price fixing 2 of twin grinding equipment is arranged and the center of upper price fixing 1 calculates price fixing 1 needs to compensate the distance of pressurization, start to compensate on thickness of workpiece error amount, compensation of progressively having pressurizeed is ground. in this utility model, initial grinding is the impact in order to get rid of the extraneous factor such as rotating speed, pressure, ensure the accurate of measurement size, when extraneous factor is identical, the size value of workpiece calibration is also relatively stable, now proceeds by sizing and grinds, it is achieved workpiece once arrives the technological requirement that size is ground, in conjunction with using milling time to control and adopting height sensor to control to be ground the size of workpiece, be conducive to the carrying out controlled, meet the Production requirement of workpiece high-volume and automatization, promote grinding precision.

Claims (6)

1. the compensation twin grinding equipment of workpiece sizing, including the upper price fixing being equipped with and lower price fixing, described upper price fixing is connected to controlling organization, it is characterized in that: in the middle part of described lower price fixing, be provided with central gear, the axle center place of described central gear is provided with altimeter, just center to described upper price fixing, the top of described altimeter, described altimeter is connected to controlling organization, and described controlling organization sequentially passes through pneumatic mechanism and cylinder is connected to price fixing; Being engaged with planetary gear outside described central gear, described planetary gear is provided with through hole, and described planetary gear is engaged to the ring gear of lower price fixing.
2. a kind of compensation twin grinding equipment of workpiece sizing according to claim 1, it is characterized in that: described pneumatic mechanism includes the source of the gas, oil fog generator and the pneumatic operated valve group that are sequentially connected with, described pneumatic operated valve group includes the first pneumatic operated valve group and the second pneumatic operated valve group; Described first pneumatic operated valve group includes the proportioning valve that is connected with described oil fog generator and the first rising threshold being equipped with and the first lowering valve; Described second pneumatic operated valve group includes the air relief valve that is connected with described oil fog generator and the second rising threshold being equipped with and the second lowering valve; Described pneumatic operated valve group is connected with described cylinder.
3. a kind of compensation twin grinding equipment of workpiece sizing according to claim 2, it is characterised in that: described first pneumatic operated valve group and the second pneumatic operated valve group also include being located at the one-way flow valves between the first rising threshold and the first lowering valve and cylinder and between the second rising threshold and the second lowering valve and cylinder.
4. a kind of compensation twin grinding equipment of workpiece sizing according to claim 1, it is characterised in that: being additionally provided with locking cylinder on described upper price fixing, described locking cylinder is connected to source of the gas by regulating valve.
5. a kind of compensation twin grinding equipment of workpiece sizing according to claim 1, it is characterised in that: described lower price fixing bottom is connected to hod by drain line, and described drain line is provided with tapping valve.
6. a kind of compensation twin grinding equipment of workpiece sizing according to claim 5, it is characterized in that: described tapping valve is two-position three way magnetic valve, the outfan of described tapping valve is respectively connecting to hod and waste collection mechanism, described hod is provided with drawing liquid pump, and described drawing liquid delivery side of pump is connected to the gap between described upper price fixing and lower price fixing by pipeline.
CN201521119891.9U 2015-12-30 2015-12-30 Work piece scaling -off compensation formula double -sided lapping equipment Active CN205310025U (en)

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Application Number Priority Date Filing Date Title
CN201521119891.9U CN205310025U (en) 2015-12-30 2015-12-30 Work piece scaling -off compensation formula double -sided lapping equipment

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105458908A (en) * 2015-12-30 2016-04-06 天通吉成机器技术有限公司 Workpiece fixed-size compensation type double-sided grinding device and method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105458908A (en) * 2015-12-30 2016-04-06 天通吉成机器技术有限公司 Workpiece fixed-size compensation type double-sided grinding device and method

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