CN205300526U - A device for demarcating a plurality of camera parallelisms - Google Patents
A device for demarcating a plurality of camera parallelisms Download PDFInfo
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- CN205300526U CN205300526U CN201520939713.4U CN201520939713U CN205300526U CN 205300526 U CN205300526 U CN 205300526U CN 201520939713 U CN201520939713 U CN 201520939713U CN 205300526 U CN205300526 U CN 205300526U
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Abstract
The utility model provides a device for demarcating a plurality of camera parallelisms, include the motion platform of two degrees of freedom and arrange first camera, second camera and the third camera in this motion platform top, motion platform is last to be provided with the sucking disc pad and to mark mark, demarcate mark include parallel arrangement motion platform with the index point of side no. 1, index point no. 2 and index point no. 3, highly rising in proper order or reducing of this index point no. 1, index point no. 2 and index point no. 3 through the demarcation mark of three high nonconformity, when measuring camera position relation, has increased a plurality of camera parallelisms and has demarcated the function, the inconsistent problem of result is aimed at to the effectual thick PCB board of different boards of having solved.
Description
Technical field
This utility model relates to laser direct-writing exposure technique field, is specifically related to a kind of device for demarcating multiple camera collimation, is the ingredient of laser direct-writing exposure machine.
Background technology
The demarcation of multiple camera collimations is the important component part of quasiconductor direct write exposure sources performance adjustment, and good multiple camera collimations can ensure that the accuracy of the pcb board alignment result of different thickness of slab.
At present, existing quasiconductor direct write exposure machine only has the multiple camera position relation calibrating function of specific thickness of slab, does not have multiple camera collimation calibrating function, it is impossible to meet the requirement of different thickness of slab pcb board alignment result accuracy.
Utility model content
This utility model provides a kind of device for demarcating multiple camera collimation, by three highly inconsistent fixed points, while measuring multiple camera position relations, add the function demarcating multiple camera collimations, efficiently solve the problem that the pcb board alignment result of different thickness of slab is inconsistent.
For solving above-mentioned technical problem, this utility model adopts the following technical scheme that
A kind of device for demarcating multiple camera collimation, including the motion platform of two-freedom and be arranged in the first camera above this motion platform, second camera and third camera, described motion platform is provided with sucker pad and fixed point, described fixed point includes being arranged in parallel in motion platform with the fixed point one of side, fixed point two and fixed point three, and the height of this fixed point one, fixed point two and fixed point three raises successively or reduces.
Preferably, described fixed point one, fixed point two and fixed point three are respectively positioned on outside sucker pad, and wherein the height of fixed point one and described motion platform is highly consistent, it is possible to be easy to measure.
Preferably, described fixed point one includes the copper-clad plate that is printed on a little and is arranged on the tabletting in this copper-clad plate, described fixed point two and fixed point three all include the copper-clad plate, the tabletting being arranged in this copper-clad plate that are printed on a little and are arranged on the pad under this copper-clad plate, three fixed points are distinguished by arranging the pad of differing heights, fixed point one can also change height by increase pad, forms three fixed points raising highly successively or reducing.
By above technical scheme it can be seen that this utility model is by three highly inconsistent fixed points, while measuring camera position relation, add multiple camera collimation calibrating function, effectively solve the problem that the pcb board alignment result of different thickness of slab is inconsistent; Meanwhile, use the copper-clad plate being printed on fixed point to substitute original scaling board, solve the problems such as original scaling board size is bigger than normal, frangible and expensive, rational in infrastructure, compact in design is attractive in appearance, with low cost.
Accompanying drawing explanation
Fig. 1 is the top view of this utility model device;
Fig. 2 is the side view of this utility model device;
Fig. 3 be in this utility model preferred embodiment second camera relative to the X-direction collimation schematic diagram of first camera;
Fig. 4 be in this utility model preferred embodiment second camera relative to the Y-direction collimation schematic diagram of first camera.
In figure: 10, motion platform, 21, first camera, 22, second camera, 23, third camera, 30, sucker pad, 41, fixed point one, 42, fixed point two, 43, fixed point three.
Detailed description of the invention
Below in conjunction with accompanying drawing, a kind of preferred implementation of the present utility model is described in detail.
As illustrated in fig. 1 and 2, motion platform 10 that described device includes having two-freedom and be arranged in the first camera 21 above this motion platform, second camera 22 and third camera 23, three cameras are for demarcating the position coordinates of motion platform. described motion platform 10 is provided with sucker pad 30 and fixed point, described fixed point includes the fixed point 1 being arranged in parallel in motion platform with side, fixed point 2 42 and fixed point 3 43, three fixed points are respectively positioned on outside sucker pad 30, in order to meet the purpose demarcating multiple camera collimations, described fixed point one, fixed point two and the highly desirable of fixed point three raise successively or reduce, when adopting fixed point one, when the height of fixed point two and fixed point three raises successively, wherein the height of fixed point one and described motion platform is highly consistent, when adopting fixed point one, when the height of fixed point two and fixed point three reduces successively, wherein the height of fixed point three and described motion platform is highly consistent.
As it is shown in figure 1,10mm place is provided with fixed point 2 42 on the right side of fixed point 1 described in the present embodiment, on the right side of described fixed point 2 42,10mm place is provided with fixed point 3 43.
As shown in Figure 2, described fixed point 1 includes the copper-clad plate that is printed on a little and is arranged on the tabletting in this copper-clad plate, and described fixed point 2 42 and fixed point 3 43 all include the copper-clad plate, the tabletting being arranged in this copper-clad plate that are printed on a little and be arranged on the pad under this copper-clad plate.
The copper-clad plate consistent size of three fixed points in the present embodiment, all from the copper-clad plate clip that 0.5mm is thick, the part length of clip is 10mm, wide for 10mm, simultaneously need to be printed on fixed point in copper-clad plate. The copper-clad plate that described thickness of slab is 0.5mm is easily cut out, and draws materials simply in semiconductor exposure manufacturer, copper-clad plate is also coated with copper antioxidant, be prevented effectively from the oxidation in later stage.
The size (thickness: 2mm length: 10mm width: 10mm) of fixed point two Intermediate gasket is less than the size (thickness: 4.5mm length: 10mm width: 10mm) of fixed point three Intermediate gasket. Distinguishing three fixed points by arranging the pad of differing heights, fixed point one can also change height by increase pad, forms three fixed points raising highly successively or reducing.
When the multiple camera collimation of employing this utility model device normalization, by three highly inconsistent fixed points, while measuring camera position relation, add multiple camera collimation calibrating function, specifically comprise the following steps that
1) position coordinates (x of fixed point 1 is gathered by first camera 211-1,y1-1), the position coordinates (x of fixed point 1 is gathered by second camera 222-1,y2-1), using first camera 21 as benchmark camera, calculate second camera 22 relative to the first camera 21 camera position relationship delta x in X-direction12-1=x2-1-x1-1, calculate second camera 22 relative to first camera 21 camera position relationship delta y in the Y direction12-1=y2-1-y1-1��
2) position coordinates (x of fixed point 2 42 is gathered by first camera 211-2,y1-2), the position coordinates (x of fixed point 2 42 is gathered by second camera 212-2,y2-2), using first camera 21 as benchmark camera, calculate second camera 22 relative to the first camera 21 camera position relationship delta x in X-direction12-2=x2-2-x1-2, calculate second camera 22 relative to first camera 21 camera position relationship delta y in the Y direction12-2=y2-2-y1-2��
3) position coordinates (x of fixed point 3 43 is gathered by first camera 211-3,y1-3), the position coordinates (x of fixed point 3 43 is gathered by second camera 222-3,y2-3), using first camera 21 as benchmark camera, calculate second camera 22 relative to the first camera 21 camera position relationship delta x in X-direction12-3=x2-3-x1-3, calculate second camera 22 relative to first camera 21 camera position relationship delta y in the Y direction12-3=y2-3-y1-3��
4) by �� x12-1����x12-2����x12-3Numeric ratio relatively, calibrates the second camera 22 X-direction collimation relative to first camera 21, by �� y12-1����y12-2����y12-3Numeric ratio relatively, calibrates the second camera 22 Y-direction collimation relative to first camera 21.
5) according to the second camera 22 X-direction collimation relative to first camera 21 and Y-direction collimation, revise support bracket fastened inclination and the pitching situation of second camera 22, guaranteeing that second camera 22 is parallel to first camera 21 in X-direction and Y-direction, amended collimation needs the camera position relation value met in X-direction and Y-direction equal.
In second camera described in Fig. 3 22 relative in the X-direction collimation embodiment of first camera 21, �� x12-3>��x12-2>��x12-1, represent that second camera 22 is tilted to the right relative to first camera 21, be tilted to the left by adjusting the fixed support of second camera 22, revise the second camera X-direction collimation relative to first camera.
In second camera described in Fig. 4 22 relative in the Y-direction collimation embodiment of first camera 21, �� y12-3>��y12-2>��y12-1, represent that second camera 22 is relative to first camera 21 pitching backward, by adjusting the support bracket fastened pitching situation of second camera 22, revise the second camera Y-direction collimation relative to first camera.
6) repeat the above steps 1)��4), using first camera 21 as benchmark camera, survey calculation third camera 23 is relative to the first camera 21 camera position relationship delta x in X-direction13-1����x13-2����x13-3, survey calculation third camera 23 is relative to first camera 21 camera position relationship delta y in the Y direction13-1����y13-2����y13-3, relatively calibrated third camera by numeric ratio relative to the X-direction collimation of first camera and Y-direction collimation.
7) according to the third camera X-direction collimation relative to first camera and Y-direction collimation, the support bracket fastened inclination of third camera and pitching situation are revised, it is ensured that third camera is parallel to first camera in X-direction and Y-direction.
After demarcating the collimation of first camera and second camera and the collimation of first camera and third camera, it is possible to verifying demarcation accuracy further by demarcating the collimation of second camera and third camera, concrete grammar is as follows:
Repeat the above steps 1)��4), using second camera 22 as benchmark camera, survey calculation third camera 23 is relative to the second camera 22 camera position relationship delta x in X-direction23-1����x23-2����x23-3, survey calculation third camera 23 is relative to second camera 22 camera position relationship delta y in the Y direction23-1����y23-2����y23-3, relatively calibrated third camera by numeric ratio relative to the X-direction collimation of second camera and Y-direction collimation, the accuracy rate of checking collimation scaling method, convenient in time camera fixing support is adjusted.
The above embodiment is only that preferred implementation of the present utility model is described; not scope of the present utility model is defined; under the premise designing spirit without departing from this utility model; various deformation that the technical solution of the utility model is made by those of ordinary skill in the art and improvement, all should fall in the protection domain that claims of the present utility model are determined.
Claims (4)
1. the device being used for demarcating multiple camera collimation, it is characterized in that, including the motion platform (10) of two-freedom and be arranged in the first camera (21) above this motion platform, second camera (22) and third camera (23), described motion platform (10) is provided with sucker pad (30) and fixed point, described fixed point includes the fixed point one (41) being arranged in parallel in motion platform with side, fixed point two (42) and fixed point three (43), this fixed point one, the height of fixed point two and fixed point three raises successively or reduces.
2. device according to claim 1, it is characterized in that, described fixed point one (41), fixed point two (42) and fixed point three (43) are respectively positioned on sucker pad (30) outside, and wherein the height of fixed point one (41) and described motion platform (10) is highly consistent.
3. device according to claim 1, it is characterised in that described fixed point one (41) includes the copper-clad plate that is printed on a little and is arranged on the tabletting in this copper-clad plate.
4. device according to claim 1, it is characterised in that described fixed point two (42) and fixed point three (43) all include the copper-clad plate, the tabletting being arranged in this copper-clad plate that are printed on a little and be arranged on the pad under this copper-clad plate.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520939713.4U CN205300526U (en) | 2015-11-20 | 2015-11-20 | A device for demarcating a plurality of camera parallelisms |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201520939713.4U CN205300526U (en) | 2015-11-20 | 2015-11-20 | A device for demarcating a plurality of camera parallelisms |
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| CN205300526U true CN205300526U (en) | 2016-06-08 |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105466360A (en) * | 2015-11-20 | 2016-04-06 | 合肥芯碁微电子装备有限公司 | Apparatus and method for calibrating parallelism of a plurality of cameras |
| CN109300163A (en) * | 2018-09-14 | 2019-02-01 | 高新兴科技集团股份有限公司 | Space scaling method, storage medium and the electronic equipment of indoor panorama camera |
| CN109410283A (en) * | 2018-09-14 | 2019-03-01 | 高新兴科技集团股份有限公司 | The space caliberating device of indoor panorama camera and positioning device with it |
| CN110275399A (en) * | 2019-06-20 | 2019-09-24 | 合肥芯碁微电子装备有限公司 | A kind of measurement method of laser direct imaging equipment alignment cameras positional relationship error |
-
2015
- 2015-11-20 CN CN201520939713.4U patent/CN205300526U/en active Active
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105466360A (en) * | 2015-11-20 | 2016-04-06 | 合肥芯碁微电子装备有限公司 | Apparatus and method for calibrating parallelism of a plurality of cameras |
| CN105466360B (en) * | 2015-11-20 | 2018-09-11 | 合肥芯碁微电子装备有限公司 | A kind of device and method for demarcating multiple camera collimations |
| CN109300163A (en) * | 2018-09-14 | 2019-02-01 | 高新兴科技集团股份有限公司 | Space scaling method, storage medium and the electronic equipment of indoor panorama camera |
| CN109410283A (en) * | 2018-09-14 | 2019-03-01 | 高新兴科技集团股份有限公司 | The space caliberating device of indoor panorama camera and positioning device with it |
| CN109410283B (en) * | 2018-09-14 | 2021-09-24 | 高新兴科技集团股份有限公司 | Space calibration device of indoor panoramic camera and positioning device with space calibration device |
| CN110275399A (en) * | 2019-06-20 | 2019-09-24 | 合肥芯碁微电子装备有限公司 | A kind of measurement method of laser direct imaging equipment alignment cameras positional relationship error |
| CN110275399B (en) * | 2019-06-20 | 2021-05-07 | 合肥芯碁微电子装备股份有限公司 | Method for measuring position relation error of alignment camera of laser direct imaging equipment |
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Address after: 230088 the 11 level of F3 two, two innovation industrial park, No. 2800, innovation Avenue, Hi-tech Zone, Hefei, Anhui. Patentee after: Hefei Xinqi microelectronics equipment Co., Ltd Address before: 230088, Hefei province high tech Zone, 2800 innovation Avenue, 533 innovation industry park, H2 building, room two, Anhui Patentee before: HEFEI XINQI MICROELECTRONIC EQUIPMENT CO., LTD. |
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