CN205297958U - Cryopump - Google Patents
Cryopump Download PDFInfo
- Publication number
- CN205297958U CN205297958U CN201520954310.7U CN201520954310U CN205297958U CN 205297958 U CN205297958 U CN 205297958U CN 201520954310 U CN201520954310 U CN 201520954310U CN 205297958 U CN205297958 U CN 205297958U
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- CN
- China
- Prior art keywords
- branch road
- cryopump
- main shaft
- lubricating system
- bearing
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Abstract
The utility model provides a cryopump. Cryopump includes the pump body, from lubricating system and motor, locate from lubricating system the pump is originally internal, from lubricating system including the sprue that is linked together, bearing branch road, main shaft branch road and by first branch road, second branch road and third branch road that the main shaft branch road extends, the sprue by the entry of casing the casing with runner that the impeller formed the lubrication groove of back lid communicates formation in proper order, and each branch road communicates with each other. Compared with the prior art, the utility model provides a cryopump will place in lubricating system the pump is originally internal, include many pipelines from lubricating system, can realize carrying out the self -lubricating function to this internal multiple part of pump, just the design of pressure boost impeller can improve lubricated effect from lubricating system to guarantee the normal operating of these internal each parts of pump, improve cryopump's work efficiency prolongs its life.
Description
Technical field
This utility model relates to pump technical field, is specifically related to a kind of cryopump.
Background technology
Cryopump is that by condensing or adsorbing, gas molecule is caught the vacuum pump being exhausted on the cryopanel be cooled to ultralow temperature, its research being widely used in semiconductor and IC and production, and the field such as molecular beam research, vacuum coating equipment, vacuum surface analytical tool, ion implantation apparatus and space simulation facility.
The pump body operating temperature of cryopump is generally below subzero more than 100 degrees Celsius, this internal working environment of pump according to cryopump, each parts need could normal operation when sufficient lubrication, lubricate not in place it would appear that the situation of part failure, thus affecting the normal operation of cryopump, bring very big cost to maintenance. In correlation technique, cryopump carries a set of lubricating system, and described lubricating system can only lubricate the section components that it is internal, and is in unlubricated state during major part component working, so that the fault rate of described cryopump is high.
Therefore, it is necessary to provide a kind of new cryopump to solve the problems referred to above.
Utility model content
For solving above-mentioned technical problem, this utility model provides a kind of cryopump that can realize multiple oil sites carry out self-lubricating.
This utility model provides a kind of cryopump, including pump body, self lubricating system and motor, described self lubricating system is located at described pump, and this is internal, described pump body includes the housing with receiving space, it is contained in the main shaft in described housing and the impeller set gradually by the import of described pump body to described motor drive direction, bonnet, clutch shaft bearing, interior magnet coupler, supercharging impeller, second bearing and separation sleeve, described self lubricating system includes the sprue being connected, bearing branch road, main shaft branch road and the first branch road extended by described main shaft branch road, second branch road and the 3rd branch road, described sprue is by the entrance of described housing, the runner that described housing is formed with described impeller, the lubrication groove of described bonnet is sequentially communicated formation, described bearing props up the described lubrication groove of route and connects the formation of described clutch shaft bearing, described main shaft props up the oil groove on route described lubrication groove, described main shaft and described supercharging impeller is sequentially communicated formation, described first route described supercharging impeller, the pipeline groove of described interior magnet coupler and described clutch shaft bearing and is sequentially communicated formation, described second route the passage formation that described supercharging impeller connects between described interior magnet coupler and described separation sleeve, and described 3rd oil groove routeing described supercharging impeller, the chute of described separation sleeve, described second bearing and described main shaft is sequentially communicated formation.
Preferably, described supercharging impeller outer face has oblique angle, and described oblique angle favours described second branch road.
Preferably, the operating temperature of described cryopump is less than or equal to 196 DEG C.
Compared with correlation technique, the cryopump that this utility model provides, described self lubricating system is built in described pump, and this is internal, described self lubricating system includes a plurality of pipeline, it is possible to realize the intrinsic multiple parts of pump are carried out self-lubricating function and the design of described supercharging impeller, the lubricant effect of described self lubricating system can be improved, thus ensureing the properly functioning of these internal each parts of pump, improving the work efficiency of described cryopump, extending its service life.
Accompanying drawing explanation
Fig. 1 is the structural representation of this utility model cryopump.
Detailed description of the invention
Below in conjunction with drawings and embodiments, the utility model is described in further detail.
Refer to Fig. 1, for the structural representation of this utility model cryopump. Described cryopump 1 includes pump body 11, self lubricating system 12 and motor 13. Described self lubricating system 12 is located in described pump body 11. Described motor 13 is connected with described pump body 11.
Described pump body 11 includes having the housing 101 of receiving space, the main shaft 102 being contained in described housing 101 and the impeller 103 set gradually by the entrance 1011 of described pump body 11, bonnet 104, clutch shaft bearing 105, interior magnet coupler 106, supercharging impeller the 107, second bearing 108 and described separation sleeve 109 to described motor 13 direction.
Described impeller 103, described bonnet 104, described clutch shaft bearing 105, described interior magnet coupler 106, described supercharging impeller 107 and described second bearing 108 are connected with described main shaft 102 respectively, and described separation sleeve 109 is located on described interior magnet coupler 106.
Described housing 101 forms runner 1012 with described impeller 103. Described main shaft 102 has oil groove 1021. Described bonnet 104 has lubrication groove 1041. Described interior magnet coupler 106 and described separation sleeve 109 interval arrange formation passage 1091. Described separation sleeve 109 has chute 1092.
Sprue 120 that described self lubricating system 12 includes being connected, bearing branch road 121, main shaft branch road 122 and the first branch road the 123, second branch road 124 and the 3rd branch road 125 extended by described main shaft branch road 122.
Described runner 1012, the described lubrication groove 1041 of described bonnet 104 that described sprue 120 is formed by the entrance 1011 of described housing 101, described housing 101 and described impeller 103 are sequentially communicated and are formed.
Described bearing branch road 121 is connected described clutch shaft bearing 105 by described lubrication groove 1041 and is formed, and described clutch shaft bearing 105 can be lubricated by lubricating fluid.
Described main shaft branch road 122 is sequentially communicated is formed by the described oil groove 1021 on described lubrication groove 1041, described main shaft 102 and described supercharging impeller 107.
Described first branch road 123 is sequentially communicated is formed by described supercharging impeller 107, the pipeline groove 1061 of described interior magnet coupler 106 and described clutch shaft bearing 105, and lubricating fluid can pass through described first branch road 123 return to described bearing 105.
Described supercharging impeller 107 outer face has oblique angle, and described oblique angle favours described second branch road 124, the part that lubricating fluid is vaporized by described supercharging impeller 107, flows to described second branch road 124. The described passage 1091 that described second branch road 124 is connected between described interior magnet coupler 106 and described separation sleeve 109 by described supercharging impeller 107 is formed. The lubricating fluid of the lubricating fluid and described first branch road 123 that flow through described bearing branch road 121 and flows after described clutch shaft bearing 105, again with flow through the lubricating fluid of described second branch road 124 and flow in the described lubrication groove 1041 of described bonnet 104, thus constitute circulation lubrication.
Described 3rd branch road 125 is sequentially communicated by the oil groove 1021 of described supercharging impeller 107, the described chute 1092 of described separation sleeve 109, described second bearing 108 and described main shaft 102 and is formed. The lubricating fluid flowing through described 3rd branch road 125 connects composition circulation lubrication by described supercharging impeller 107 with other lubricant channel.
In the present embodiment, the described oil groove 1021 of described main shaft 102 communicates with the entrance 1011 of described housing 101, and the lubricating fluid entering described housing 101 also can be directly entered described oil groove 102, and described main shaft 102 is lubricated. Then through described bearing branch road 121, described main shaft branch road 122, described first branch road 123, described second branch road 124 and described 3rd branch road 125, the parts such as described clutch shaft bearing 105, described second bearing 108 are circulated lubrication.
In the present embodiment, the operating temperature of described cryopump 1 is less than or equal to 196 DEG C.
Compared with correlation technique, the cryopump that this utility model provides, described self lubricating system is built in described pump, and this is internal, described self lubricating system includes a plurality of pipeline, it is possible to realize the intrinsic multiple parts of pump are carried out self-lubricating function and the design of described supercharging impeller, the lubricant effect of described self lubricating system can be improved, thus ensureing the properly functioning of these internal each parts of pump, improving the work efficiency of described cryopump, extending its service life.
The foregoing is only embodiment of the present utility model; not thereby the scope of the claims of the present utility model is limited; every equivalent structure utilizing this utility model description and accompanying drawing content to make or equivalence flow process conversion; or directly or indirectly it is used in other relevant technical field, all in like manner include in scope of patent protection of the present utility model.
Claims (3)
1. a cryopump, including pump body, self lubricating system and motor, described self lubricating system is located at described pump, and this is internal, it is characterized in that, described pump body includes the housing with receiving space, it is contained in the main shaft in described housing and the impeller set gradually by the import of described pump body to described motor drive direction, bonnet, clutch shaft bearing, interior magnet coupler, supercharging impeller, second bearing and separation sleeve, described self lubricating system includes the sprue being connected, bearing branch road, main shaft branch road and the first branch road extended by described main shaft branch road, second branch road and the 3rd branch road, described sprue is by the entrance of described housing, the runner that described housing is formed with described impeller, the lubrication groove of described bonnet is sequentially communicated formation, described bearing props up the described lubrication groove of route and connects the formation of described clutch shaft bearing, described main shaft props up the oil groove on route described lubrication groove, described main shaft and described supercharging impeller is sequentially communicated formation, described first route described supercharging impeller, the pipeline groove of described interior magnet coupler and described clutch shaft bearing and is sequentially communicated formation, described second route the passage formation that described supercharging impeller connects between described interior magnet coupler and described separation sleeve, and described 3rd oil groove routeing described supercharging impeller, the chute of described separation sleeve, described second bearing and described main shaft is sequentially communicated formation.
2. cryopump according to claim 1, it is characterised in that described supercharging impeller outer face has oblique angle, described oblique angle favours described second branch road.
3. cryopump according to claim 1, it is characterised in that the operating temperature of described cryopump is less than or equal to 196 DEG C.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520954310.7U CN205297958U (en) | 2015-11-25 | 2015-11-25 | Cryopump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520954310.7U CN205297958U (en) | 2015-11-25 | 2015-11-25 | Cryopump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205297958U true CN205297958U (en) | 2016-06-08 |
Family
ID=56462725
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520954310.7U Active CN205297958U (en) | 2015-11-25 | 2015-11-25 | Cryopump |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205297958U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105465006A (en) * | 2015-11-25 | 2016-04-06 | 湖南耐普泵业股份有限公司 | Low-temperature pump |
| US10190556B2 (en) | 2017-01-09 | 2019-01-29 | Caterpillar Inc. | System and method for lubricating a cryogenic pump |
-
2015
- 2015-11-25 CN CN201520954310.7U patent/CN205297958U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105465006A (en) * | 2015-11-25 | 2016-04-06 | 湖南耐普泵业股份有限公司 | Low-temperature pump |
| US10190556B2 (en) | 2017-01-09 | 2019-01-29 | Caterpillar Inc. | System and method for lubricating a cryogenic pump |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: Improved cryopump Effective date of registration: 20161227 Granted publication date: 20160608 Pledgee: Changsha Bank city branch of Limited by Share Ltd Pledgor: HUNAN NEPTUNE PUMP CO., LTD. Registration number: 2016430000067 |
|
| PLDC | Enforcement, change and cancellation of contracts on pledge of patent right or utility model | ||
| PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20190322 Granted publication date: 20160608 Pledgee: Changsha Bank city branch of Limited by Share Ltd Pledgor: HUNAN NEPTUNE PUMP CO., LTD. Registration number: 2016430000067 |
|
| PC01 | Cancellation of the registration of the contract for pledge of patent right |