CN205275688U - Continuous mask baffle transmission - Google Patents
Continuous mask baffle transmission Download PDFInfo
- Publication number
- CN205275688U CN205275688U CN201521142082.XU CN201521142082U CN205275688U CN 205275688 U CN205275688 U CN 205275688U CN 201521142082 U CN201521142082 U CN 201521142082U CN 205275688 U CN205275688 U CN 205275688U
- Authority
- CN
- China
- Prior art keywords
- mask baffle
- screw rod
- coating film
- baffle plate
- mask
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn - After Issue
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- Physical Vapour Deposition (AREA)
Abstract
The utility model provides a continuous mask baffle transmission, including motor, mask baffle, installing support, drive assembly and base, it has the coating film notch that runs through upper and lower terminal surface to open in the installing support, and it has an at least spout to open on the coating film notch inside wall, and the mask baffle is in remove in the spout, the base is placed at coating film notch downside, drive assembly includes the transmission lead screw at least, and the transmission lead screw includes screw rod and nut, and the screw rod supports on the installing support, the screw rod place the trend with the spout move towards the unanimity, the nut is fixed on the mask baffle, the screw rod that the motor drove drive assembly rotates. The mask baffle shelters from the work piece of treating the coating film completely under the initial condition, and motor drive drive assembly drives the mask baffle and removes, makes the work piece progressively expose outside the mask baffle, cooperates outside filming equipment to last the coating film to the work piece, and then reaches the purpose of gradual coating film, satisfies the change requirement to work piece coating film thickness.
Description
Technical field
The utility model relates to a kind of coating thin film equipment, in particular to a kind of continuous mask baffle plate transmission mechanism of film.
Background technology
Coating thin film operation utilizes filming equipment, by different coating process (such as: physical vapor deposition, chemical vapour deposition etc.), workpiece is carried out plated film under vacuum, but existing coating thin film equipment cannot complete the plated film operation that Thickness Variation has requirement.
Practical novel content
Technical problem to be solved in the utility model is to provide the continuous mask baffle plate transmission mechanism that a kind of structure is simple, coating effects is good.
For solving the problems of the technologies described above, the utility model provides a kind of mask baffle plate transmission mechanism continuously, comprise motor, mask baffle plate, mounting bracket, transmission assembly and base, the plated film notch running through upper and lower end face is had in mounting bracket, plated film notch inner side-wall has at least one chute, mask baffle plate moves in described chute, and base is placed on the downside of plated film notch;
Transmission assembly at least comprises drive lead screw, and drive lead screw comprises screw rod and nut, and screw rod is supported on mounting bracket, and the placement trend of screw rod is consistent with the trend of chute, and nut is fixed on mask baffle plate;
The bolt rotary of driven by motor transmission assembly.
After adopting such structure, under original state, mask baffle plate blocks workpiece to be coated completely, motor drives transmission assembly to drive mask baffle plate to move, workpiece is made progressively to be exposed to outside mask baffle plate, coordinate outside filming equipment that workpiece is continued plated film, and then reach the object of gradual plated film, meet the change requirement to workpiece coating film thickness.
This continuous mask baffle plate transmission mechanism allows user manually or automatically to control, and the transmission of accurate control mask baffle plate in coating process walks, and is applicable to the process exploitation of multiple coating films machine.
In order to better understand technology contents of the present utility model, below by this continuous mask baffle plate transmission mechanism referred to as this transmission mechanism.
The transmission assembly of this transmission mechanism also comprises vacuum magnetic fluid dynamic seal, shaft coupling, turbine and whirlpool bar, turbine is equipped with in screw rod one end, turbine coordinates with whirlpool bar, and whirlpool bar is connected with vacuum magnetic fluid dynamic seal by shaft coupling, and vacuum magnetic fluid dynamic seal is connected with the output shaft of motor; After adopting such structure, by vacuum magnetic fluid dynamic seal, motor is arranged on outside vacuum treatment space, it is possible to improve the service efficiency in vacuum treatment space; Turbine and worm screw can change the direction of output shaft, are convenient to reasonable Arrangement position, make this device be applicable to more Work places.
Accompanying drawing explanation
Fig. 1 is the front view of this transmission mechanism embodiment.
Fig. 2 is that Fig. 1 is along A-A direction sectional view.
Embodiment
As shown in Fig. 1 to 2
This transmission mechanism comprises motor 5, mask baffle plate 3, mounting bracket 1, transmission assembly and base 2.
Mounting bracket 1 horizontal positioned, the plated film notch 11 running through upper and lower end face is had in mounting bracket 1, plated film notch 11 extends to the right side of mounting bracket 1, support bar 12 it is fixed with in the middle part of plated film notch 11, support bar 12 two ends are fixed with the forward and backward sidewall of plated film notch 11 respectively, having on the forward and backward sidewall of plated film notch 11 and left and right move towards chute 13, the position of two chutes 13 is corresponding.
Base 2 is placed on the downside of mounting bracket 1, and base 2 upper surface is the object disposing platform of place work piece 6, the plated film notch 11 of object disposing platform alignment mounting bracket 1.
Mask baffle plate 3 is rectangle plate body, and mask baffle plate 3 front and rear portions stretches in two chutes 13 respectively, and mask baffle plate 3 can move back and forth to the left and right along walking of two chutes 13.
Transmission assembly comprises drive lead screw, vacuum magnetic fluid dynamic seal 43, shaft coupling 44, turbine 45 and whirlpool bar 46, drive lead screw comprises screw rod 41 and nut 42, the left end of screw rod 41 by bearings at mounting bracket 1 left part, the right-hand member of screw rod 41 by bearings on the support bar 12 of mounting bracket 1, screw rod 41 can be mounted opposite that support 1 is personal freely to rotate, the placement trend of screw rod 41 is consistent with the trend of chute 13, nut 42 coordinates with screw rod 41, and nut 42 and mask baffle plate 3 lower surface are fixed;
Turbine 45 is arranged on screw rod 41 left part, and turbine 45 coordinates with whirlpool bar 46, and whirlpool bar 46 is connected with vacuum magnetic fluid dynamic seal 43 by shaft coupling 44, and vacuum magnetic fluid dynamic seal 43 is connected with the output shaft of motor 5.
During plated film operation, workpiece 6 to be coated is placed on base 2, mask baffle plate 3 is in the right-most position of its stroke, workpiece 6 to be coated is now blocked by mask baffle plate 3 completely, start outside filming equipment, the motor 5 of this wheelwork drives vacuum magnetic fluid dynamic seal 43 to rotate, through the transmission of turbine 45 and whirlpool bar 46, and then the screw rod 41 driving drive lead screw rotates, mask baffle plate 3 slowly moves to the left under the drive of nut 42, workpiece to be coated 6 progressively departs from blocking of mask baffle plate 3, reaches the object of gradual plated film;
Mask baffle plate 3 is in the left-most position of its stroke, and workpiece 6 is exposed within the scope of the plated film of filming equipment, after plated film operation, starts motor 5 reversion and makes mask baffle plate 3 return to the starting position on right side.
This transmission mechanism can adopt following step to carry out:
1. program accurately controls motor 5 manually or automatically, and control mask baffle plate 3 moves from original " right side " position to " left side " position, and motion can be continuous, it is possible to is progressive, by time variable control manually or automatically.
2., after coating process completes, time variable control mask baffle plate 3 resets to " left side " position manually or automatically.
Above-described is only a kind of enforcement mode of the present utility model; it is noted that for the person of ordinary skill of the art, under the prerequisite not departing from the utility model principle; can also making some modification and improvement, these also should be considered as belonging to protection domain of the present utility model.
Claims (2)
1. a continuous mask baffle plate transmission mechanism, it is characterized in that: comprise motor, mask baffle plate, mounting bracket, transmission assembly and base, the plated film notch running through upper and lower end face is had in mounting bracket, plated film notch inner side-wall has at least one chute, mask baffle plate moves in described chute, and base is placed on the downside of plated film notch;
Transmission assembly at least comprises drive lead screw, and drive lead screw comprises screw rod and nut, and screw rod is supported on mounting bracket, and the placement trend of screw rod is consistent with the trend of chute, and nut is fixed on mask baffle plate;
The bolt rotary of driven by motor transmission assembly.
2. continuous mask baffle plate transmission mechanism according to claim 1, is characterized in that:
Described transmission assembly also comprises vacuum magnetic fluid dynamic seal, shaft coupling, turbine and whirlpool bar, turbine is equipped with in screw rod one end, turbine coordinates with whirlpool bar, and whirlpool bar is connected with vacuum magnetic fluid dynamic seal by shaft coupling, and vacuum magnetic fluid dynamic seal is connected with the output shaft of motor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201521142082.XU CN205275688U (en) | 2015-12-31 | 2015-12-31 | Continuous mask baffle transmission |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201521142082.XU CN205275688U (en) | 2015-12-31 | 2015-12-31 | Continuous mask baffle transmission |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205275688U true CN205275688U (en) | 2016-06-01 |
Family
ID=56060280
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201521142082.XU Withdrawn - After Issue CN205275688U (en) | 2015-12-31 | 2015-12-31 | Continuous mask baffle transmission |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205275688U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105525257A (en) * | 2015-12-31 | 2016-04-27 | 蚌埠雷诺真空技术有限公司 | Continuous mask baffle transmission device |
| CN106435474A (en) * | 2016-11-15 | 2017-02-22 | 东莞市秦智工业设计有限公司 | Movement mechanism of film-coating shielding plate |
| CN110449673A (en) * | 2019-07-25 | 2019-11-15 | 河南理工大学 | A kind of micro- texture technology of belt activity exposure mask Electrolyzed Processing and device |
-
2015
- 2015-12-31 CN CN201521142082.XU patent/CN205275688U/en not_active Withdrawn - After Issue
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105525257A (en) * | 2015-12-31 | 2016-04-27 | 蚌埠雷诺真空技术有限公司 | Continuous mask baffle transmission device |
| CN105525257B (en) * | 2015-12-31 | 2018-04-27 | 蚌埠雷诺真空技术有限公司 | Continuous mask baffle transmission device |
| CN106435474A (en) * | 2016-11-15 | 2017-02-22 | 东莞市秦智工业设计有限公司 | Movement mechanism of film-coating shielding plate |
| CN106435474B (en) * | 2016-11-15 | 2018-12-28 | 毛琴飞 | A kind of film-coating covering plate mobile mechanism |
| CN110449673A (en) * | 2019-07-25 | 2019-11-15 | 河南理工大学 | A kind of micro- texture technology of belt activity exposure mask Electrolyzed Processing and device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20160601 Effective date of abandoning: 20180427 |