CN205265558U - A power supply unit for plasma generation - Google Patents
A power supply unit for plasma generation Download PDFInfo
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- CN205265558U CN205265558U CN201521023191.XU CN201521023191U CN205265558U CN 205265558 U CN205265558 U CN 205265558U CN 201521023191 U CN201521023191 U CN 201521023191U CN 205265558 U CN205265558 U CN 205265558U
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Abstract
The utility model relates to a VOC improvement and relevant environmental protection field are applied to to nanosecond level high -voltage pulse power, and concrete technical scheme is: a power supply unit for plasma generation, includes three -phase input regulator, three -phase rectifier transformer, pulse generating circuit, pulse boost circuit, magnetism pulse compression device, sampling circuit, cooling system, pulse generator DSP controller. Adopt high -power pulse technique and magnetism compression technique, three -phase rectifier circuit produces direct current busbar voltage, produce microsecond level low pressure pulse through pulse generator, the passages through which vital energy circulates steps up to microsecond level high -voltage pulse towards the stepup transformer, be nanosecond level high -voltage pulse by the compression of pulse compression device again, realize changing suddenly the pulse front edge, constriction pulse width, improve repetition rate's mesh, the requirement that VOC administered has been reached, compare with other form source phases, utilization rate of electrical energy and plasma generation's efficiency has been improved when reducing the energy consumption.
Description
Technical field
The utility model relates to nanosecond high-voltage pulse power power-supply, and specifically a kind of supply unit for plasma generation is applied to VOC and administers and the field of Environment Protection of being correlated with.
Background technology
VOC is the english abbreviation of VOC (volatileorganiccompounds), refers to and can produce that class volatile organic matter of harm in environmental protection, and health is had to tremendous influence. VOC is mainly from fuel combustion, in the time that airborne VOC reaches finite concentration, in short time people can feel headache, feel sick, vomiting, weak etc., when serious, there will be tic, stupor, and can hurt people's liver, kidney, brain and nervous system, cause the serious consequences such as failure of memory.
In recent years, industrial processes produce a large amount of VOC, cause environmental pollution day by day serious, and therefore the improvement of VOC is very urgent. The method that industry VOC administers is a lot, and relatively conventional have a plasma method, and its crucial step is exactly to obtain low temperature plasma by high pressure pulse discharge to react with VOC. But, under atmospheric pressure, gas discharge is easy to change to thermal equilibrium plasma from nonequilibrium plasma, its transformation time is very short, for fear of this conversion, one method is to adopt pulse excitation, makes develop the required time than unstability discharge time also short, thereby avoids unsettled development.
The unnecessary acceleration of particle except electronics in plasma when preventing high pressure pulse discharge, prevent that plasma from being changed to thermal equilibrium plasma by nonequilibrium plasma, require electric supply installation to there is fast rise steepness that rising time is less than hundreds of nanosecond to produce rapidly free radical, there is the relatively narrow pulse width that was less than for 1,000 nanoseconds to avoid unsettled development, have and can reach the relatively high repetition rate of thousands of hertz to improve the generation efficiency of the body such as plasma, and common high-voltage pulse power source obviously cannot meet the demands, meet so need to develop a kind of Novel pulse power supply the requirement that VOC administers.
Magnetic switch pulse compression technique is steepness and compression pulse effectively, and contactless closed action, be conducive to improve pulse recurrence frequency, and long service life, high withstand voltage, Gao Nailiu, so the utility model adopts highpowerpulse technology and magnetic compression technology, improve pulse rising steepness, compressed pulse widths, the pulse recurrence frequency that improves, the requirement of administering to reach VOC.
Summary of the invention
The utility model provides a kind of VOC of being applied to administer relevant nanosecond class pulse generator for EDM, for the supply unit of plasma generation, adopt highpowerpulse technology and magnetic compression technology, to realize steepness pulse front edge, constriction pulse width, to promote the object of repetition rate, thereby reach the requirement that VOC administers.
Above-mentioned technical problem of the present utility model is implemented by the following technical programs: a kind of supply unit for plasma generation, it is characterized in that, and comprising:
Three-phase input regulator, thus be connected with outside three phase mains, for regulating the three-phase alternating voltage regulating impulse busbar voltage of input;
Three-phase rectifier transformer, for by adjustable three-phase alternating current electric boost rectification, produces DC bus-bar voltage;
Pulse generating circuit, for being converted into direct current Microsecond grade action of low-voltage pulse;
Pulse boostering circuit, for boosting Microsecond grade action of low-voltage pulse into Microsecond grade high-voltage pulse;
Magnetic pulse compression device, for by Microsecond grade high-voltage pulse boil down to nanosecond high-voltage pulse;
Sample circuit, for gathering pulse voltage, the current signal of output and feeding back to pulse power dsp controller;
Pulse power dsp controller, for control impuls power parameter.
As preferably, described three-phase input regulator is bidirectional triode thyristor loop, for adjusting input three-phase voltage size, thereby adjusts pulse output voltage peak value size; Three-phase input regulator rear class connects three-phase rectifier transformer. Three-phase alternating current, through the bidirectional triode thyristor loop by the pulse power dsp controller control angle of flow, is adjusted input three-phase voltage size, thereby adjusts pulse output voltage peak value size.
As preferably, described three-phase rectifier transformer comprises: three-phase transformer, for by three-phase alternating current electric boost, improve the operating voltage of pulse generation unit, and reduce the no-load voltage ratio of pulse transformer; Three-phase bridge rectification circuit, for being rectified into direct current by the three-phase alternating current boosting; Filter capacitor, for by the direct current filtering of rectification; Filter inductance, for filtering the impact of rear class pulse generating circuit to three-phase rectifier transformer; Three-phase rectifier transformer rear class connects pulse generating circuit. The three-phase alternating current of input arrives three-phase main-frequency transformer primary through major loop switch and bidirectional triode thyristor loop, boost, produce DC bus-bar voltage after three-phase bridge rectification circuit rectification, filter circuit filtering through three-phase main-frequency transformer.
As preferably, described pulse generating circuit comprises: switching device, adopt IGBT module (InsulatedGateBipolarTransistor insulated gate bipolar transistor), or IGCT, or semiconductor devices, for generation of Microsecond grade action of low-voltage pulse control impuls width and pulse recurrence frequency; RCD absorbing circuit, is made up of absorption resistance, fast recovery diode, Absorption Capacitance, impact energy, protection switch device while shutoff for absorbing switching device; Pulse generating circuit rear class connects pulse boostering circuit. Produce DC bus-bar voltage by three-phase rectifier transformer, produce high-repetition-rate Microsecond grade action of low-voltage pulse by switching device, then produce high-repetition-rate Microsecond grade high-voltage pulse through pulse boosting.
As preferably, described IGBT module adopts LC resonant soft-switching, comprises absorption circuit, overvoltage crowbar, current foldback circuit.
As preferably, described pulse boostering circuit comprises: resonant capacitance, forms LC resonant tank with transformer leakage inductance; Pulse boostering circuit, for boosting action of low-voltage pulse into high-voltage pulse; Pulse boostering circuit rear class connects magnetic pulse compression device.
As preferably, described magnetic pulse compression device comprises: noninductive electric capacity, for energy storage; Magnetic switch, discharges rapidly the energy of noninductive electric capacity for stoping energy transmission before magnetic saturation, after magnetic saturation; Magnetic pulse compression device rear class connects sample circuit. Produce high-repetition-rate Microsecond grade high-voltage pulse by pulse generation and pulse boosting, produce through compression device that pulse front edge steepness, pulse width are narrow, the nanosecond high-voltage pulse of high-repetition-rate.
As preferably, described sample circuit comprises: electric resistance partial pressure type pulse voltage sample circuit, is made up of some resistance; Current transformer formula pulse current sample circuit; Sample circuit rear class connects load. Sample circuit connects with dsp controller, comprises output peak impulse voltage testing circuit, peak current detection circuit, and Main Function is the voltage and current signal that gathers output pulse.
As preferably, described pulse power dsp controller comprises main control unit, keyboard, liquid crystal display, memory cell, communication interface, analogy signal processing unit, pwm signal output unit, fault monitoring and protection unit; For all parameters of control impuls power supply, comprise that thyristor driver signal, switching device drive signal, collection of simulant signal, digital output signal, digital quantity input signal, failure alarm signal and communication signal. Pulse power dsp controller is connected with bidirectional triode thyristor loop, IGBT module, sample circuit and cooling system respectively; realize analog acquisition, the processing to testing circuit and show at liquid crystal display; the adjustment bidirectional triode thyristor angle of flow; thereby adjust input voltage size, Intelligent Measurement fault and starting protection in the time breaking down.
As preferably, also comprise cooling system, for reducing pulse power temperature, prevent from damaging device because of excess Temperature. Cooling system connects with dsp controller, and effect is the temperature of control impuls power supply, prevents a series of harmful effects that excess Temperature causes.
In sum, the utility model compared with prior art tool have the following advantages:
The utility model adopts highpowerpulse technology and magnetic compression technology, rectified three-phase circuit produces DC bus-bar voltage, produce Microsecond grade action of low-voltage pulse through pulse generating unit, boost as Microsecond grade high-voltage pulse through pulse booster, again by compression device boil down to nanosecond high-voltage pulse, realize the object of steepness pulse front edge, constriction pulse width, raising repetition rate, reach the requirement that VOC administers, compared with other form power supplys, when reducing energy consumption, improve the efficiency of utilization rate of electrical and plasma generation.
Brief description of the drawings
Fig. 1 is the utility model theory diagram.
Fig. 2 is the utility model circuit diagram.
Fig. 3 is the circuit diagram of magnetic pulse compression device.
Fig. 4 is comparison of wave shape schematic diagram before and after magnetic pulse compression device.
Fig. 5 is the system architecture diagram of the utility model pulse power dsp controller.
Number in the figure is: 1, distribution system; 2, three-phase input regulator;
3, three-phase rectifier transformer; 31, three-phase transformer; 32, three-phase bridge rectification circuit; 33, filter capacitor; 34, filter inductance;
4, pulse generating circuit; 41, switching device; 42, absorption resistance; 43, fast recovery diode; 44, Absorption Capacitance;
5, pulse boostering circuit; 51, resonant capacitance; 52, pulse transformer;
6, magnetic pulse compression device; 61, electrification holds; 62, magnetic switch;
7, sample circuit; 72, electric resistance partial pressure type pulse voltage sample circuit; 73, current transformer formula pulse current sample circuit;
8, load; 9, cooling system; 10, pulse power dsp controller.
Detailed description of the invention
Below in conjunction with drawings and Examples, the utility model is further illustrated.
Embodiment 1:
As described in Figure 1, a kind of supply unit for plasma generation, comprising: three-phase input regulator 2, three-phase rectifier transformer 3, pulse generating circuit 4, pulse boostering circuit 5, magnetic pulse compression device 6; Provide three phase mains by outside distribution system 1, finally export high-voltage pulse to load 8.
The annexation of each several part is: three-phase input regulator 2 is connected with three phase mains; Between three-phase rectifier transformer 3 and pulse boostering circuit 5, be connected by pulse generating circuit 4; Between pulse boostering circuit 5 and load 8, be connected by magnetic pulse compression device 6.
As described in Figure 2, for the supply unit of plasma generation, administer for VOC, specifically comprise three-phase input regulator 2, three-phase rectifier transformer 3, pulse generating circuit 4, pulse boostering circuit 5, magnetic pulse compression device 6, sample circuit 7, cooling system 9, pulse power dsp controller 10.
Distribution system 1, its effect is to provide three-phase alternating current 380V power supply, and its rear class is connected with three-phase input regulator 2.
Three-phase input regulator 2 is bidirectional triode thyristor loop, and effect is the three-phase alternating voltage that regulates input, thus regulating impulse busbar voltage; Its rear class is connected with three-phase rectifier transformer 3.
Three-phase rectifier transformer 3, effect is by adjustable three-phase alternating current electric boost rectification, obtains the adjustable DC bus-bar voltage of 0-2500V; In its structure, comprise: three-phase transformer 31-its effect is by three-phase alternating current electric boost, thereby improve the operating voltage of pulse generation unit, reduce the no-load voltage ratio of pulse transformer, three-phase bridge rectification circuit 32-its effect is that the three-phase alternating current boosting is rectified into direct current, filter capacitor 33-its effect is by the direct current filtering of rectification, and filter inductance 34-its effect is to filter the impact of rear class pulse generating circuit to three-phase rectifier transformer; Three-phase rectifier transformer 3 rear classes connect pulse generating circuit 4.
Pulse generating circuit 4, effect is that direct current is converted into Microsecond grade action of low-voltage pulse; In its structure, comprise: switching device 41-its effect is to produce Microsecond grade action of low-voltage pulse control impuls width and frequency, RCD absorbing circuit-its effect is the impact energy while absorbing switching device shutoff, protection switch device, RCD absorbing circuit is made up of absorption resistance 42, fast recovery diode 43, Absorption Capacitance 44; Pulse generating circuit 4 rear classes connect pulse boostering circuit 5.
Pulse boostering circuit 5, effect is that Microsecond grade action of low-voltage pulse is boosted as Microsecond grade high-voltage pulse through transformer; In structure, comprise: resonant capacitance 51-its effect is to form LC resonant tank with transformer leakage inductance, and pulse transformer 52-its effect is that action of low-voltage pulse is boosted as high-voltage pulse; Pulse boostering circuit 5 rear classes connect magnetic pulse compression device 6.
Magnetic pulse compression device 6, effect is by Microsecond grade high-voltage pulse boil down to nanosecond high-voltage pulse; In its structure, comprise that noninductive electric capacity 61-its effect is energy storage, magnetic switch 62-its effect is before magnetic saturation, to stop energy transmission, after magnetic saturation, discharge rapidly the energy in noninductive electric capacity 61; Magnetic pulse compression circuit 6 rear classes connect sample circuit 7.
As shown in Figure 3, according to actual requirement, compression device 6 can be formed by the series connection of multiple magnetic pulse compression circuits, and each magnetic pulse compression circuit is made up of a noninductive electric capacity 61, a magnetic switch 62, can steepness pulse front edge, compressed pulse widths to be to meet the requirement of VOC improvement. Microsecond grade high-voltage pulse obtains nanosecond high-voltage pulse after compression device compression, and the comparison of wave shape schematic diagram before and after its compression as shown in Figure 4.
Sample circuit 7, effect is pulse voltage, the pulsed current signal that gathers output, feeds back to controller, with the operational factor of the pulse power; In its structure, comprise electric resistance partial pressure type pulse voltage sample circuit 72, current transformer formula pulse current sample circuit 73; Sample circuit 7 rear classes connect load 8.
Cooling system 9, effect is to reduce pulse power temperature, prevents from damaging device because of excess Temperature.
Pulse power dsp controller 10, effect is all parameters of control impuls power supply, comprises that thyristor driver signal, switching device drive signal, collection of simulant signal, digital output signal, digital quantity input signal, failure alarm signal and communication signal etc. Pulse power dsp controller is connected with bidirectional triode thyristor loop, IGBT module, sample circuit and cooling system respectively; realize analog acquisition, the processing to testing circuit and show at liquid crystal display; the adjustment bidirectional triode thyristor angle of flow; thereby adjust input voltage size, Intelligent Measurement fault and starting protection in the time breaking down.
Particularly; as shown in Figure 5; described pulse power dsp controller, taking TMS320F28335 as main control unit, comprises the parts such as keyboard, liquid crystal display, memory cell, communication interface, analogy signal processing unit, pwm signal output unit and fault monitoring and protection unit. CPU output multi-channel pwm control signal, comprising: IGBT drives pwm control signal, bidirectional triode thyristor heap pwm control signal, output voltage and current peak testing circuit pwm control signal. Controller can be realized the detection to three-phase input voltage, the detection of input current, detection, the detection of output voltage peak value of pulse, the detection of output current peak value of pulse and the temperature of oil in transformer detection etc. of DC bus-bar voltage. Detect output crest voltage, the electric current of gained, and DC bus-bar voltage, after AD conversion, give CPU and process, CPU is by after the data preparation of collecting, show at display unit, and the corresponding output of adjusting pwm signal, digital quantity signal, thereby realize the closed loop Based Intelligent Control of paired pulses power supply.
Specific embodiment described in literary composition is only to the explanation for example of the utility model spirit. The utility model person of ordinary skill in the field can make various amendments or supplements or adopt similar mode to substitute described specific embodiment, but can't depart from spirit of the present utility model or surmount the defined scope of appended claims.
Claims (10)
1. for a supply unit for plasma generation, it is characterized in that, comprising:
Thereby be used for the three-phase input regulator (2) of the three-phase alternating voltage regulating impulse busbar voltage that regulates input, three-phase input regulator is connected with outside three phase mains;
For by the three-phase rectifier transformer (3) of adjustable three-phase alternating current electric boost rectification, generation DC bus-bar voltage;
For direct current being converted into the pulse generating circuit (4) of Microsecond grade action of low-voltage pulse;
For Microsecond grade action of low-voltage pulse is boosted as the pulse boostering circuit (5) of Microsecond grade high-voltage pulse;
Be used for the magnetic pulse compression device (6) of Microsecond grade high-voltage pulse boil down to nanosecond high-voltage pulse;
Be used for the sample circuit (7) that gathers pulse voltage, the current signal of output and feed back to pulse power dsp controller;
For the pulse power dsp controller (10) of control impuls power parameter.
2. the supply unit for plasma generation according to claim 1, is characterized in that, described three-phase input regulator is bidirectional triode thyristor loop.
3. the supply unit for plasma generation according to claim 1, is characterized in that, described three-phase rectifier transformer comprises: three-phase transformer (31), three-phase bridge rectification circuit (32), filter capacitor (33), filter inductance (34),
Three-phase rectifier transformer rear class connects pulse generating circuit.
4. the supply unit for plasma generation according to claim 1, is characterized in that, described pulse generating circuit comprises switching device (41), RCD absorbing circuit; Switching device adopts IGBT module, or IGCT; RCD absorbing circuit is made up of absorption resistance (42), fast recovery diode (43), Absorption Capacitance (44); Pulse generating circuit rear class connects pulse boostering circuit.
5. the supply unit for plasma generation according to claim 4, is characterized in that, described IGBT module adopts LC resonant soft-switching, comprises absorption circuit, overvoltage crowbar, current foldback circuit.
6. the supply unit for plasma generation according to claim 1, is characterized in that, described pulse boostering circuit comprises resonant capacitance (51), pulse transformer (52); Pulse boostering circuit rear class connects magnetic pulse compression device.
7. the supply unit for plasma generation according to claim 1, is characterized in that, described magnetic pulse compression device comprises noninductive electric capacity (61), magnetic switch (62); Magnetic pulse compression device rear class connects sample circuit.
8. the supply unit for plasma generation according to claim 1, is characterized in that, described sample circuit comprises electric resistance partial pressure type pulse voltage sample circuit (72), current transformer formula pulse current sample circuit (73); Electric resistance partial pressure type pulse voltage sample circuit is made up of some resistance; Sample circuit rear class connects load.
9. the supply unit for plasma generation according to claim 1; it is characterized in that, described pulse power dsp controller comprises main control unit, keyboard, liquid crystal display, memory cell, communication interface, analogy signal processing unit, pwm signal output unit, fault monitoring and protection unit.
10. the supply unit for plasma generation according to claim 1, is characterized in that, also comprises cooling system (9).
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201521023191.XU CN205265558U (en) | 2015-12-11 | 2015-12-11 | A power supply unit for plasma generation |
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| CN201521023191.XU CN205265558U (en) | 2015-12-11 | 2015-12-11 | A power supply unit for plasma generation |
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| CN205265558U true CN205265558U (en) | 2016-05-25 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105553322A (en) * | 2015-12-11 | 2016-05-04 | 浙江大维高新技术股份有限公司 | Power source device for plasma generation |
| CN113271030A (en) * | 2021-05-25 | 2021-08-17 | 中国工程物理研究院机械制造工艺研究所 | Pulse generation control method for pulse power supply |
-
2015
- 2015-12-11 CN CN201521023191.XU patent/CN205265558U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105553322A (en) * | 2015-12-11 | 2016-05-04 | 浙江大维高新技术股份有限公司 | Power source device for plasma generation |
| CN113271030A (en) * | 2021-05-25 | 2021-08-17 | 中国工程物理研究院机械制造工艺研究所 | Pulse generation control method for pulse power supply |
| CN113271030B (en) * | 2021-05-25 | 2022-11-29 | 中国工程物理研究院机械制造工艺研究所 | Pulse generation control method for pulse power supply |
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Legal Events
| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| EE01 | Entry into force of recordation of patent licensing contract |
Assignee: Zhejiang Odor Control Engineering Research Center Co.,Ltd. Assignor: ZHEJIANG DOWAY ADVANCED TECHNOLOGY Co.,Ltd. Contract record no.: X2022330000247 Denomination of utility model: Power supply device for plasma generation Granted publication date: 20160525 License type: Common License Record date: 20220620 |
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| EE01 | Entry into force of recordation of patent licensing contract |