CN205264678U - Silico briquette belt cleaning device - Google Patents
Silico briquette belt cleaning device Download PDFInfo
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- CN205264678U CN205264678U CN201520995541.2U CN201520995541U CN205264678U CN 205264678 U CN205264678 U CN 205264678U CN 201520995541 U CN201520995541 U CN 201520995541U CN 205264678 U CN205264678 U CN 205264678U
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- silico briquette
- cleaning device
- base plate
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- inside casing
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
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- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
- Silicon Compounds (AREA)
Abstract
The utility model provides a silico briquette belt cleaning device, including the frame, the frame include the bottom plate and by the frame that the bottom plate upwards extends, the bottom plate with the frame encloses a synthetic holding chamber, be equipped with a plurality of first through -holes on the bottom plate, be equipped with a plurality of second through -holes on the frame, first through -hole and the second through -hole is used for pouring into into the washing liquid, a serial communication port, the device still includes and a plurality ofly piles up the setting each other and be in the inside casing of holding intracavity, the bottom of inside casing is for arranging the hollow out construction who forms including a plurality of strips that bear, the inside casing is used for loading the silico briquette. The utility model provides a silico briquette belt cleaning device is through carrying out the layering setting with original belt cleaning device for originally silico briquette and belt cleaning device's face contact becomes the line contact, optimizes polysilicon surface cleaning process, improves polycrystalline silicon material pickling efficiency and product quality, has solved the silico briquette and has piled up and cause the pickling inhomogeneous, the problem of sour spot and colour difference appears.
Description
Technical field
The utility model relates to semiconductor processing equipment technical field, relates in particular to a kind of silico briquette cleaning device.
Background technology
As the part in production of polysilicon last process, maintenance, the surface of pickling silicon to product purity is assortedThe processing of matter has vital meaning. Acid cleaning process is that the good silico briquette of fragmentation is contained into silico briquette cleaning deviceIn, be placed on pickler and carry out pickling, the impurity on acid corrosion surface, removes the surface contamination of silicon material, makes silicon tableFace metal impurities reach the requirement of electron level table metal quality.
At present, existing silico briquette cleaning device is the rectangle basket that there is square hole bottom and side, and silico briquette is piled upTogether, in the process of pickling silico briquette, connecing between silico briquette and silico briquette contact-making surface and silico briquette and cleaning basketThe fully pickling of tactile face, thus cause occurring sour spot and aberration product backwash volume being increased on silico briquette.
Summary of the invention
The utility model provides a kind of silico briquette cleaning device, and the face between original silico briquette and cleaning device is contactedBecome line contact, optimized polysilicon surface cleaning, improved polycrystalline silicon material pickling efficiency and product matterAmount.
The technical scheme that the utility model addresses the above problem proposition is: provide a kind of silico briquette cleaning device, bagDraw together housing, described housing comprises base plate and by the upwardly extending frame of described base plate, described base plate with described inFrame encloses an accommodating cavity; Described base plate is provided with some the first through holes, and described frame is provided with someTwo through holes, described the first through hole and described the second through hole are used for injecting cleaning fluid; It is characterized in that, described inDevice also comprises multiple stacking inside casings that are arranged in described accommodating cavity mutually, and the bottom of described inside casing is for comprisingSome carrier strip are arranged the engraved structure forming, and described inside casing is used for loading silico briquette.
Preferably, be also provided with at least one baffle plate in described inside casing, described baffle plate is separated into described inside casingMultiple grid.
Preferably, the quantity of described grid is 2～5.
Preferably, on described base plate, be also provided with multiple threaded connectors from described base plate projection.
Preferably, the top of described threaded connector is spherical or hemispherical.
Preferably, the distance between the top of described threaded connector and described base plate is 4～6mm.
Preferably, described threaded connector and described the first through hole are respectively array distribution on described base plate,And described threaded connector and described the first through hole are interlaced array arrangement.
Preferably, described some carrier strip are equidistant arrangement.
Preferably, the width of described carrier strip is 3～5mm, and thickness is 3～5mm.
Preferably, described the first through hole and described the second through hole are circular port or square opening.
The silico briquette cleaning device that the utility model provides, by original cleaning device is carried out to layering setting,Face between original silico briquette and cleaning device is contacted and becomes line contact, optimize polysilicon surface cleaning,Improve polycrystalline silicon material pickling efficiency and product quality, solved silico briquette accumulation and caused pickling inhomogeneous, occur acidThe problem of spot and aberration.
Brief description of the drawings
The following description of carrying out in conjunction with the drawings, the above-mentioned and other side of embodiment of the present utility model,It is clearer that feature and advantage will become, in accompanying drawing:
Fig. 1 is the utility model silico briquette cleaning device structural representation;
Fig. 2 a is silico briquette cleaning device inner frame structure schematic diagram;
Fig. 2 b is another structural representation of silico briquette cleaning device inside casing;
Fig. 3 is silico briquette cleaning device the first base arrangement schematic diagram;
Fig. 4 is silico briquette cleaning device housing cutaway view.
Detailed description of the invention
Below, describe with reference to the accompanying drawings embodiments of the invention in detail. But, can be with many differentForm is implemented the present invention, and the present invention should not be interpreted as being limited to the specific embodiment of setting forth here.On the contrary, it is in order to explain principle of the present invention and practical application thereof that these embodiment are provided, thereby makes this areaOthers skilled in the art can understand various embodiment of the present invention and be suitable for various the repairing of particular desired applicationChange.
With reference to Fig. 1, the silico briquette cleaning device that the utility model provides, comprises housing 1 and inside casing 2, described inHousing comprises base plate 11, frame 12. Described base plate 11 encloses an accommodating cavity with described frame 12, multipleMutual stacking being arranged in described accommodating cavity of inside casing 2.
Concrete, described frame 12 is upwards extended and obtains by described base plate 11, and described base plate is provided with someThe first through hole 11a, described frame is provided with some the second through hole 12a, described the first through hole 11a and described inThe second through hole 12a is used for injecting cleaning fluid, and the silico briquette being carried on described inside casing 2 is cleaned. Here,Described cleaning fluid is nitric acid, hydrofluoric acid mixed solution, so, in order to prevent that described silico briquette cleaning device is clearlyWash in process and be corroded, the material of described silico briquette cleaning device must be corrosion-resistant, wear-resistant, preferred,The material of described base plate 11, described frame 12 is PP material. Wherein, described the first through hole 11a is with describedThe shape of the second through hole 12a can be circular port or square opening, does not limit here.
In conjunction with Fig. 2 a, Fig. 2 b, pile up in order to solve silico briquette the problem that causes cleaning inhomogeneous, in the present embodimentSilico briquette cleaning device comprises multiple mutually stacking inside casings 2 that are arranged in described accommodating cavity, described inside casing 2 forThe silico briquette that carrying need to be cleaned, wherein, the quantity of described inside casing 2 can be established according to actual needsFixed, do not limit here, be conventionally set as 2～4. The material of described inside casing 2 is acid and alkali-resistance material, exampleAs, the material of described inside casing 2 is PE material.
For the way of contact realizing between silico briquette and silico briquette cleaning device is that line contacts, the bottom of described inside casing21 is to comprise that some carrier strip 21a arrange the engraved structure forming, and described carrier strip 21a is used for carrying needsThe silico briquette cleaning; Described inside casing 2 can equidistantly be arranged and form by described carrier strip 21a along continuous straight runs,Also can vertically equidistantly arrange and form by described carrier strip 21a, can also be by described carrier strip 21aAlong continuous straight runs and vertical direction are equidistantly arranged and are formed respectively. Wherein, the width of described carrier strip 21aBe 3～5mm, thickness is 3～5mm, and the shape of described carrier strip can be selected as required, in order to subtractContact area between few described carrier strip and silico briquette, cleans silico briquette more thorough, preferred, described in holdCarrier strip 21a is shaped as cylindricality, and its diameter is 3～5mm.
Spacing for the ease of silico briquette is carried out, it is right that inside casing 2 described in the present embodiment also comprises with described frame 12The sidewall 22 that should arrange, described carrier strip 21a two ends respectively with described sidewall 22 near described base plate 11 1End connects. Wherein, described sidewall 22 is mainly the effect of playing support. The silico briquette that needs are cleaned is layed inDescribed carrier strip 21a is upper, then the inside casing 2 that carries silico briquette is stacked gradually and puts into described base plate 11 and instituteState in the accommodating cavity that frame 12 encloses, in so upper and lower inside casing 2, be positioned at the silico briquette on described carrier strip 21aCan not contact, avoid silico briquette to pile up and caused cleaning inhomogeneous. Wherein, in order to make from the second through hole 12aThe cleaning fluid injecting injects smoothly, and the structure of the inside casing 2 of stacked on top can be not identical (as Fig. 2 a, Fig. 2 bShown in), for example, the sidewall 22 that is positioned at the inside casing 2 on upper strata can only include parallel two sides, another two sides shapeBecome an opening, the cleaning fluid injecting from the second through hole 12a just can be easy to flow into from opening part.
Further, consult Fig. 2 a and Fig. 2 b in order to reduce connecing between silico briquette and silico briquette in cleaning processTouch, be also provided with at least one baffle plate 23 in described inside casing 2, described baffle plate 23 is separated into described inside casing 2Multiple grid, preferred, the quantity of described grid is 2～5. In cleaning, silico briquette is laid onIn these grid, can reduce contacting between silico briquette and silico briquette.
In conjunction with Fig. 3, Fig. 4, in the time that described inside casing 2 approaches described base plate 11, for increase silico briquette with described inContact area between the cleaning fluid that the first through hole 11a injects, is also provided with multiple from institute on described base plate 11State the threaded connector 11b of base plate 11 projections, the top of described threaded connector 11b is spherical or hemisphereShape. Described threaded connector 11b and described the first through hole 11a are respectively array distribution on described base plate 11,And described threaded connector 11b and described the first through hole 11a are interlaced array arrangement. Described screw threadDistance between the top of connector 11b and described base plate 11 is 4～6mm, preferred, described in be threadedPart 11b is the bolt of M10, and the length of double-screw bolt is that (part rotates in base plate 11 20mm, oneDivide and be raised on base plate 11), wherein, the quantity of described threaded connector 11b and described the first through hole 11aQuantity corresponding. Because described threaded connector 11b also will contact with silico briquette cleaning fluid, so, described inThe material of threaded connector 11b will be also acid and alkali-resistance material, for example, be PP material or PE material.
The structure of setting forth described silico briquette cleaning device below by instantiation with and operation principle. ConsultFig. 1 to Fig. 4, the base plate 11 of described silico briquette cleaning device is of a size of 520mm*325mm*10mm, frame12 size is respectively 325mm*80mm*10mm and 520mm*80mm*10mm, and describedThe diameter of one through hole is 6mm, and described base plate 11 equal intervals are provided with 11 row the first through hole 11a, each rowEqual intervals is provided with 21 the first through hole 11a; Corresponding, described base plate 11 equal intervals are provided with 12Row threaded connector 11b, each lists spaced set 20 threaded connector 11b. Described screw thread connectsFitting 11b is the bolt of M10, and the length of double-screw bolt is 20mm, and its top is spherical, top and base plate itBetween distance be 6mm. Described frame 12 is provided with two and ranked second through hole 12a, described the second through hole 12a'sDiameter is 5mm. Here, described silico briquette cleaning device comprises two inside casings 2, and the bottom of each inside casing 2 isArranged the engraved structure forming by carrier strip 21a, in each inside casing 2, be provided with 3 baffle plates 23, described gearInside casing is separated into 4 grid by plate 23. The diameter of described carrier strip 21a is 3mm, adjacent carrier strip 21aBetween spacing be 10mm. First lay silico briquette in the bottom of first inside casing 2, after having laid, putEnter in the accommodating cavity that described base plate 11 and described frame 12 enclose, and then in the bottom of second inside casing 2Lay silico briquette, after having laid, it is stackingly placed on to first above inside casing 2, so just form two layers of siliconPiece, supports by sidewall 22 between two layers of silico briquette. After laying completes, silico briquette cleaning device is put into acid concentrationIn pond for 10:1 (nitric acid: hydrofluoric acid), carry out pickling, pickling time is 5 minutes, then silico briquette is carried outCold soaking bubble and heat soaking add ultrasonic wave processing, and wherein, the time of cold soaking bubble is 6 hours, and heat soaking adds ultrasonicThe ripple processing time is 4 hours, finally silico briquette is dried to processing, and be 10 hours drying time. Like this,Whole cleaning process just completes, and then the silico briquette after having cleaned is sorted, and sorts out no color differnece, tableThe smooth silicon material of face is as finished product, has aberration, returns to pickling again after having the sorting out of crackle, finally to sortingThe finished product going out is weighed, is packed, calculated yield.
By calculated yield, the silico briquette cleaning device in the present embodiment obtains yield and improves 20% than original yield,And as can be seen from the results, the silico briquette obtaining by the silico briquette cleaning device in the present embodiment is not obviouslyAberration produces.
The above is only the application's detailed description of the invention, it should be pointed out that common for the artTechnical staff, not departing under the prerequisite of the application's principle, can also make some improvements and modifications,These improvements and modifications also should be considered as the application's protection domain.
Claims (10)
1. a silico briquette cleaning device, comprises housing, and described housing comprises base plate and by described base plate upwardsThe frame extending, described base plate and described frame enclose an accommodating cavity; Described base plate is provided with some firstThrough hole, described frame is provided with some the second through holes, and described the first through hole and described the second through hole are for noteEnter cleaning fluid; It is characterized in that, described device also comprises multiple stacking being arranged in described accommodating cavity mutuallyInside casing, the bottom of described inside casing is to comprise that some carrier strip arrange the engraved structure forming, described inside casing is used forLoad silico briquette.
2. silico briquette cleaning device according to claim 1, is characterized in that, in described inside casing, also arrangesHave at least one baffle plate, described inside casing is separated into multiple grid by described baffle plate.
3. silico briquette cleaning device according to claim 2, is characterized in that, the quantity of described grid is2～5.
4. silico briquette cleaning device according to claim 1, is characterized in that, on described base plate, also arrangesThere are multiple threaded connectors from described base plate projection.
5. silico briquette cleaning device according to claim 4, is characterized in that, described threaded connectorTop is spherical or hemispherical.
6. silico briquette cleaning device according to claim 5, is characterized in that, described threaded connectorDistance between top and described base plate is 4～6mm.
7. according to the arbitrary described silico briquette cleaning device of claim 4-6, it is characterized in that, described screw thread connectsFitting and described the first through hole are respectively array distribution on described base plate, and, described threaded connector andDescribed the first through hole is interlaced array arrangement.
8. silico briquette cleaning device according to claim 1, described some carrier strip are equidistant arrangement.
9. silico briquette cleaning device according to claim 8, the width of described carrier strip is 3～5mm, thickDegree is 3～5mm.
10. silico briquette cleaning device according to claim 1, described the first through hole and described second leads toHole is circular port or square opening.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520995541.2U CN205264678U (en) | 2015-12-03 | 2015-12-03 | Silico briquette belt cleaning device |
| PCT/CN2016/089969 WO2017092367A1 (en) | 2015-12-03 | 2016-07-14 | Silicon block cleansing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520995541.2U CN205264678U (en) | 2015-12-03 | 2015-12-03 | Silico briquette belt cleaning device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205264678U true CN205264678U (en) | 2016-05-25 |
Family
ID=56006190
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520995541.2U Active CN205264678U (en) | 2015-12-03 | 2015-12-03 | Silico briquette belt cleaning device |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN205264678U (en) |
| WO (1) | WO2017092367A1 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2017092367A1 (en) * | 2015-12-03 | 2017-06-08 | 朱伯秦 | Silicon block cleansing device |
| CN108946738A (en) * | 2018-08-16 | 2018-12-07 | 青海黄河上游水电开发有限责任公司新能源分公司 | silicon block cleaning method and application |
| CN109877098A (en) * | 2019-04-22 | 2019-06-14 | 西安奕斯伟硅片技术有限公司 | For cleaning the container, device and cleaning method of silico briquette |
| CN110170496A (en) * | 2019-06-04 | 2019-08-27 | 山东魔方新能源科技有限公司 | A kind of fuel battery double plates cleaning stack device |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112893268B (en) * | 2021-01-25 | 2022-09-13 | 佛山电器照明股份有限公司 | Preparation method of LED lamp |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201625653U (en) * | 2009-12-11 | 2010-11-10 | 北京有色金属研究总院 | Silicon chip loading device during groove type cleaning process |
| CN201913087U (en) * | 2010-09-29 | 2011-08-03 | 中国科学院苏州纳米技术与纳米仿生研究所 | Improved structure of polyfluortetraethylene cleaning flower basket |
| CN205264678U (en) * | 2015-12-03 | 2016-05-25 | 青海黄河上游水电开发有限责任公司新能源分公司 | Silico briquette belt cleaning device |
-
2015
- 2015-12-03 CN CN201520995541.2U patent/CN205264678U/en active Active
-
2016
- 2016-07-14 WO PCT/CN2016/089969 patent/WO2017092367A1/en active Application Filing
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2017092367A1 (en) * | 2015-12-03 | 2017-06-08 | 朱伯秦 | Silicon block cleansing device |
| CN108946738A (en) * | 2018-08-16 | 2018-12-07 | 青海黄河上游水电开发有限责任公司新能源分公司 | silicon block cleaning method and application |
| CN108946738B (en) * | 2018-08-16 | 2022-04-19 | 青海黄河上游水电开发有限责任公司新能源分公司 | Silicon block cleaning method and application |
| CN109877098A (en) * | 2019-04-22 | 2019-06-14 | 西安奕斯伟硅片技术有限公司 | For cleaning the container, device and cleaning method of silico briquette |
| CN109877098B (en) * | 2019-04-22 | 2022-04-15 | 西安奕斯伟材料科技有限公司 | Container, device and method for cleaning silicon block |
| CN110170496A (en) * | 2019-06-04 | 2019-08-27 | 山东魔方新能源科技有限公司 | A kind of fuel battery double plates cleaning stack device |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2017092367A1 (en) | 2017-06-08 |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |