CN205263446U - Automatically controlled burnt liquid crystal microlens array of pendulum that focuses - Google Patents

Automatically controlled burnt liquid crystal microlens array of pendulum that focuses Download PDF

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Publication number
CN205263446U
CN205263446U CN201520963711.9U CN201520963711U CN205263446U CN 205263446 U CN205263446 U CN 205263446U CN 201520963711 U CN201520963711 U CN 201520963711U CN 205263446 U CN205263446 U CN 205263446U
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glass substrate
electrode
ito
liquid crystal
array
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Expired - Fee Related
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CN201520963711.9U
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Chinese (zh)
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康胜武
张新宇
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Wuhan Polytechnic University
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Wuhan Polytechnic University
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Abstract

The utility model discloses an automatically controlled burnt liquid crystal microlens array of pendulum that focuses, including last glass substrate, the PI oriented layer, go up glass substrate ITO transparent electrode, the liquid crystal layer, a plurality of glass introns, lower glass substrate and lower glass substrate ITO transparent electrode, the reverse side of going up glass substrate has plated ITO transparent electrode, ITO transparent electrode has been plated in glass substrate's front down, the ITO transparent electrode who goes up the glass substrate reverse side has four by the separated range upon range of posture electrode of silicon dioxide layer and can add the electric control respectively, the pattern of going up four range upon range of posture electrodes of glass substrate reverse side is the bar array, the sub - electrode array of four perpendicular symmetric distributions constitutes a round hole array, the PI oriented layer is on the ITO that plates at last glass substrate electrode and glass substrate's down on the transparent transparent bottom electrode of ITO. The utility model discloses can solve the round hole liquid crystal microlens array who exists among the prior art can not the burnt technical problem of automatically controlled pendulum.

Description

Automatically controlled adjustable focus is put burnt liquid crystal microlens array
Technical field
The utility model belongs to liquid crystal lens technical field, and more specifically, relating to a kind of automatically controlled adjustable focus, to put burnt liquid crystal micro-Lens arra.
Background technology
Along with liquid crystal is applied widely in field of display, various countries researcher finds that liquid crystal material is a kind of good lightElectric material, is especially vulnerable to external condition impact and causes dielectric constant, refractive index to change, under certain condition can be flatFace liquid crystal layer forms graded index profile. Researcher utilizes this feature to develop the self adaptation lenticule based on liquid crystal, shouldLens not only have the feature of gradient-index lens, but also have automatically controlled feature of focusing, and are that performance is outstanding, eagerNeed the novel optical image-forming component of development.
At present, develop and utilized single circular hole electrode to focus and put burnt liquid crystal microlens, and current low-lightLearn device and more and more embody microminiaturization, array, integrated and intelligentized feature, in order to make full use of the parallel of optical informationCharacteristic, also requires to adopt regularly arranged, intensive microlens array, to reach the order that optical information is transmitted and converted. Along with the fast development of semiconductor microactuator process technology, people can use the advanced photolithography techniques systems such as ultraviolet, ion beamMake the unit liquid crystal microlens of micron and nanometer scale, make large-scale array liquid crystal microlens and do not had technologyProblem, makes liquid crystal optical device towards miniature and integrated direction development. Array structure have compared with single unit structure withLower characteristic:
1) concurrency: whole array by the horizontal direction with vertical direction on equally distributed single circular hole cell formation,Each unit is complementary to be disturbed and can realize independently optical delivery function, and Optical Parallel is the intrinsic characteristic in each unit, claimsFor imaging concurrency. Each unit in array has this specific character, and between each unit, also exists concurrency between unit to beThe parallel microoptical circuit that has two dimension, they can carry out respectively corresponding light transmission, conversion and imaging to each microoptical circuit.
2) non-linear: for the liquid crystal microlens of single circular hole, its processing to optical information is equivalent to incident light to carry outAn optical transfer function of linear transformation, meets system linearity consistency. But in array structure, the optical information of each unitCan mutually superpose and make no longer to keep similitude between input and output, change the linear consistency of single unit.
3) dimension changes: the each unit in array structure is a dimension invariable subspace, the image information of two dimensionAfter processing conversion by cellular construction, be still two-dimentional image information, if but after the processing conversion of array element,The dimension of image space just likely changes, as the information of n × n dimension may become n after the array transformation of n × n2×n2The information of dimension, dimension is original n2Doubly.
4) nonindependence: for the each unit in array structure, transmission and the conversion of its light path to optical informationQuite independently, to each other without any interference. But concerning whole array structure, although the optical information processing of each unit isIndependently, but linear relationship between each array do not exist, and the optical information between different array elements is due to stack and relevant, instituteNo longer to keep independence.
The design philosophy of putting burnt liquid crystal microlens structure and microlens array based on single round hole adjustable focus has proposed automatically controlledAdjustable focus is put the structure of burnt liquid crystal microlens array.
Summary of the invention
For the Improvement requirement of prior art, the utility model provides automatically controlled adjustable focus to put burnt liquid crystal microlens array,Its object be to solve the each unit of array of circular apertures liquid crystal microlens existing in existing liquid crystal microlens technology can not put Jiao toThe difficulty that practical application brings.
For achieving the above object, an aspect of the present utility model provides a kind of automatically controlled adjustable focus to put burnt lenticule faceArray, comprise upper glass substrate, PI oriented layer, upper glass substrate ITO transparent upper electrode, liquid crystal layer, multiple glass spacer withAnd the transparent bottom electrode of lower-glass substrate ITO, the ito transparent electrode of upper glass substrate reverse side is respectively four stacked planar array typeElectrode, four sub-electrode patterns are the bar shaped array distributing symmetrically, separate lower-glass between each layer by thin layer of silicon dioxideThe transparent bottom electrode of ITO of substrate is plate electrode, and PI oriented layer is ITO transparent upper electrode and the lower-glass that is plated in upper glass substrateOn the transparent bottom electrode of substrate ITO, upper glass substrate and lower-glass substrate are setting up and down, and liquid crystal layer is poured in upper glass substrateWith between lower-glass substrate, glass spacer is arranged between upper glass substrate and lower-glass substrate, and be positioned at the limit of the twoEdge place.
Preferably, four planar array type sub-electrode patterns of the ITO transparent upper electrode of upper glass substrate are for distributing symmetricallyBar shaped array, the distance of center circle of the array of circular apertures of the ITO transparent upper electrode of upper glass substrate is 250 microns, by four bar shaped institutesThe Circularhole diameter of composition is 100 microns.
Preferably, the four straton electrodes that the ITO of upper glass substrate is transparent are separated mutually by silicon dioxide layer, silicaLayer thickness is 20-30 nanometer.
Preferably, the transparent bottom electrode of ITO of lower-glass substrate is plate electrode.
Preferably, upper glass substrate is separated by glass spacer with lower-glass substrate and keeps strictly parallel.
Preferably, the oriented layer frictional direction of the ITO transparent upper electrode of upper glass substrate and the ITO of lower-glass substrate are transparentThe oriented layer frictional direction of bottom electrode is antiparallel.
Preferably, liquid crystal layer is nematic crystal.
In general, the above technical scheme of conceiving by the utility model compared with prior art, can obtain downRow beneficial effect:
1, driving voltage is low, and the two-layer ito transparent electrode adopting due to the utility model, directly near liquid crystal layer, makes electricityThe voltage of extremely going up directly acts on liquid crystal, and the amplitude of driving voltage is minimized.
2, because the utility model has adopted novel pattern electrode, four layers of the ITO transparent upper electrode of upper glass substrateSub-electrode is connected with power supply respectively, can control four straton electrodes separately, when four straton electrodes are applied to identical voltageWhen amplitude, can realize the function of circular hole liquid crystal microlens array, along the focusing function of optical axis direction, if to four straton electricityWhen controlling separately, just can realize the voltage magnitude of the utmost point the burnt function of the pendulum of microlens array in focal plane.
Brief description of the drawings
Fig. 1 is the section of structure that automatically controlled adjustable focus of the present utility model is put burnt liquid crystal microlens array.
Fig. 2 is the top view of the ITO transparent upper electrode of upper glass substrate of the present utility model.
Fig. 3 is the transparent sub-electrode of the ITO of upper glass substrate in Fig. 2 top view 1..
Fig. 4 is the stereogram of four transparent sub-electrodes of ITO of upper glass substrate of the present utility model.
Fig. 5 is that automatically controlled adjustable focus of the present utility model is put burnt liquid crystal microlens array structure stereogram.
In institute's drawings attached, identical Reference numeral is used for representing identical element or structure, wherein:
1-lower-glass substrate; 2-upper glass substrate; The transparent bottom electrode of ITO of 3-lower-glass substrate; 4-upper glass substrateITO transparent upper electrode; 5-PI (polyimide) oriented layer; 6-liquid crystal molecule; 7-liquid crystal layer; 8-silicon dioxide layer; 9-glassIntrons; The transparent sub-electrode of ITO of 1.~4.-4 upper glass substrate.
Detailed description of the invention
In order to make the purpose of this utility model, technical scheme and advantage clearer, below in conjunction with accompanying drawing and enforcementExample, is further elaborated to the utility model. Should be appreciated that specific embodiment described herein is only in order to explainThe utility model, and be not used in restriction the utility model. In addition institute in each embodiment of described the utility model,The technical characterictic relating to just can combine mutually as long as do not form each other conflict.
As shown in Fig. 1 to 5, the automatically controlled adjustable focus of the utility model put burnt liquid crystal microlens array comprise lower-glass substrate 1, onThe transparent bottom electrode 3 of the ITO of glass substrate 2, lower-glass substrate (IndiumTinOxide, indium tin oxide are called for short ITO), onThe ITO transparent upper electrode 4 of glass substrate, PI (polyimide) oriented layer 5, liquid crystal molecule 6, liquid crystal layer 7, silicon dioxide layer 8,Glass spacer 9.
The transparent bottom electrode 3 of ITO is plated on the front of lower-glass substrate.
ITO transparent upper electrode 4 is plated on the reverse side of upper glass substrate.
The ITO transparent upper electrode 4 of upper glass substrate has four planar array type sub-electrodes, and sub-electrode is connected with extraneous power supply.In the present embodiment, sub-electrode be shaped as bar shaped array, bar shaped is wide 50 microns.
The ITO transparent upper electrode 3 of lower-glass substrate is plate electrode.
PI oriented layer 5 is to be plated in the transparent bottom electrode 3 of ITO of lower-glass substrate and the ITO transparent upper electrode 4 of upper glass substrateOn.
Lower-glass substrate 1 and upper glass substrate 2 are setting up and down, and liquid crystal layer 7 is poured in upper glass substrate 2 and lower-glassBetween substrate 1. In the present embodiment, liquid crystal layer 7 is nematic crystal.
Glass spacer 8 is arranged between lower-glass substrate 1 and upper glass substrate 2, and is positioned at lower-glass substrate 1 and upper glassThe edge of glass substrate 2.
Below describe operation principle of the present utility model in detail:
Because four bar shaped sub-electrode arrays have formed an array of circular apertures, now describe as an example of single circular hole example: whenWhen extraneous power supply provides identical voltage to four sub-electrodes, at the ITO of upper glass substrate transparent upper electrode and lower-glass substrateRegion between the transparent bottom electrode of ITO will produce symmetrical inhomogeneous field, and its intensity is increased to edge gradually by center. Liquid crystalIn layer, liquid crystal molecule points to the also electric field change thereupon of inclination angle of vowing, Yuan center minimum is in edge's maximum. Due to liquidBrilliant refractive index is relevant with the arrangement of liquid crystal molecule with dielectric constant, and they are anisotropy, variable under the impact of external electric fieldShape. In the time that the direction of liquid crystal molecule is consistent with direction of an electric field, its deformation free energy minimum. If incident light is parallel with optical axis, electricityField is broken down into x axle and two orthogonal polarization components of y axle, when two components during all perpendicular to optical axis the refractive index of liquid crystal be no,There is no phase difference, incident light does not change after lens. If when incident light and optical axis are into θ angle, the cross section curve of electric fieldBecoming ellipse, is n in oval short-axis direction refractive indexo, be n at the very optical index of oval long axis direction incident lighte(θ)=none/(ne 2sin2θ+no 2cos2θ)1/2, this function curve has bell-shaped profile, can produce the focusing of traditional convex lensEffect. In the time being loaded into the voltage magnitude of four sub-electrodes and synchronously changing, circular hole electrode plays the focusing function on optical axis, whenFour voltage magnitudes can make focus on focal plane, realize swing while control separately, to reach the burnt function of pendulum.
The method that the utility model is put burnt liquid crystal microlens array for the preparation of automatically controlled adjustable focus comprises the following steps:
(1) cleaning process: adopt successively acetone, alcohol and deionized water solvent to carry out ultrasonic cleaning to ito glass substrateAnd dry;
(2) gluing process: apply positive photoresist and dry with sol evenning machine on the reverse side of dried ito glass substrate5 to 20 minutes;
(3) one side photoetching process: Lithographic template is covered to the front in glass substrate, carry out photoetching with the ultraviolet light of litho machine10 to 20 seconds.
(4) developing process: dissolve away the photoresist of sensitization part on ito glass substrate with developer solution, leave not sensitization part,Developing time is 90 to 120 seconds, then with deionized water rinsing and dry 2 to 5 minutes.
(5) corrosion process: the ITO erosion that is not subject to photoresist protection on ito glass substrate is fallen with HCL solution, and incite somebody to actionThere is the ITO film of photoresist protection to preserve, finally form respectively the ito transparent electrode of glass substrate;
(6) cleaning process: the ito transparent electrode of the glass substrate by acetone and deionized water after to corrosion cleans alsoDry;
(7) coating silicon dioxide layer process: apply 20-30 on the ITO transparent upper electrode of the glass substrate after oven dry and receiveThe silicon dioxide layer that rice is thick, cleans post-drying.
(8) plating ito transparent electrode layer process: the ITO that plates 450-650 nanometer thickness on the silicon dioxide layer after oven dry is transparentElectrode layer.
(9) repeat (1) to (8) process, on upper glass substrate, make four layers of transparent sub-electrode of the ITO being separated, lightProcess will complete and ensure the strict coaxial formation array of circular apertures of four straton electrodes under light microscope quarter, and used same procedure systemMake lower-glass substrate ITO transparent plate electrode.
(10) apply oriented layer process: with sol evenning machine at the ITO of upper glass substrate transparent upper electrode and lower-glass substrateOn the transparent bottom electrode of ITO, apply PI oriented layer;
(11) drying course: the substrate of ito glass up and down that has applied PI oriented layer is put into annealing furnace and anneal solidChange and process;
(12) friction process: along the direction friction PI oriented layer that is parallel to upper and lower ito glass edges of substrate, form with flanneletteOriented layer;
(13) filling process: glass spacer is mixed between upper and lower ito glass substrate, and be positioned at the edge of the two,Live in the left and right sides of lower ito glass substrate by UV rubber seal, pour into nematic crystal between the two by osmosis;
(14) encapsulation process: UV rubber seal is lived in the both sides up and down of lower ito glass substrate and dried.
Those skilled in the art will readily understand, the foregoing is only preferred embodiment of the present utility model, noIn order to limit the utility model, all any amendments of doing within spirit of the present utility model and principle, be equal to replace and changeEnter etc., within all should being included in protection domain of the present utility model.

Claims (5)

1. automatically controlled adjustable focus is put a burnt liquid crystal microlens array, comprises upper glass substrate, transparent the powering on of upper glass substrate ITOThe utmost point, PI oriented layer, lower-glass substrate, the transparent bottom electrode of lower-glass substrate ITO, liquid crystal layer and multiple glass spacer, its spyLevy and be,
Upper glass substrate ITO transparent upper electrode is plated in the reverse side of upper glass substrate;
The transparent bottom electrode of lower-glass substrate ITO is plated in the front of lower-glass substrate;
Upper glass substrate ITO transparent upper electrode is four planar array type sub-electrodes, and sub-electrode is connected with extraneous power supply;
The pattern of four planar array type sub-electrodes is bar shaped array, and four planar array type sub-electrodes are separated by silicon dioxide layer;
Four mutual vertical symmetry of planar array type sub-electrode distribute and form an array of circular apertures pattern;
The transparent bottom electrode of ITO of lower-glass substrate is plate electrode;
PI oriented layer is to be plated on the ITO transparent upper electrode of upper glass substrate and the transparent bottom electrode of ITO of lower-glass substrate;
Upper glass substrate and lower-glass substrate are setting up and down, and liquid crystal layer be poured in upper glass substrate and lower-glass substrate itBetween;
Glass spacer is arranged between upper glass substrate and lower-glass substrate, and is positioned at the edge of the two.
2. put burnt liquid crystal microlens array according to the automatically controlled adjustable focus of claim 1, it is characterized in that, the ITO of upper glass substrateFour sub-electrodes of transparent upper electrode are bar paten.
3. put burnt liquid crystal microlens array according to the automatically controlled adjustable focus of claim 1, it is characterized in that, upper glass substrate by fourIn the array of circular apertures of individual planar array type sub-electrode composition, line space and the column pitch in its center of circle are all identical.
4. put burnt liquid crystal microlens array according to the automatically controlled adjustable focus of claim 1, it is characterized in that, the ITO of upper glass substrateThe distance of center circle of the array of circular apertures of transparent upper electrode is 250 microns.
5. put burnt liquid crystal microlens array according to the automatically controlled adjustable focus of claim 1, it is characterized in that, liquid crystal layer is nematic liquidBrilliant.
CN201520963711.9U 2015-11-26 2015-11-26 Automatically controlled burnt liquid crystal microlens array of pendulum that focuses Expired - Fee Related CN205263446U (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105425503A (en) * 2015-11-26 2016-03-23 武汉轻工大学 Electric-control liquid crystal microlens array capable of achieving focus adjustment and swing and preparation method thereof
WO2020155664A1 (en) * 2019-01-31 2020-08-06 Boe Technology Group Co., Ltd. Optical detection panel, fabricating method thereof and display apparatus

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105425503A (en) * 2015-11-26 2016-03-23 武汉轻工大学 Electric-control liquid crystal microlens array capable of achieving focus adjustment and swing and preparation method thereof
WO2020155664A1 (en) * 2019-01-31 2020-08-06 Boe Technology Group Co., Ltd. Optical detection panel, fabricating method thereof and display apparatus
US11469341B2 (en) 2019-01-31 2022-10-11 Beijing Boe Display Technology Co., Ltd. Optical detection panel, fabricating method thereof and display apparatus

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CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20160525

Termination date: 20171126

CF01 Termination of patent right due to non-payment of annual fee