CN205252321U - Nerve stimulation ware - Google Patents
Nerve stimulation ware Download PDFInfo
- Publication number
- CN205252321U CN205252321U CN201520831967.4U CN201520831967U CN205252321U CN 205252321 U CN205252321 U CN 205252321U CN 201520831967 U CN201520831967 U CN 201520831967U CN 205252321 U CN205252321 U CN 205252321U
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- microelectrode
- substrate
- nerve stimulator
- connecting portion
- chip
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Abstract
The utility model belongs to the technical field of biomedical engineering, concretely relates to nerve stimulation ware, including the basement, set up a plurality of through -holes, the microelectrode, a plurality of, the microelectrode is through filling the through -hole setting in the basement, spill basement one side for the amazing portion of microelectrode, the opposite side is the connecting portion of microelectrode, amazing chip, the direct face -down bonding of connecting portion of microelectrode is on amazing chip, the shell, sealing connection is in the basement. The utility model discloses the wire is avoided using by the direct and amazing chip face -down bonding of microelectrode, reduces the wiring width, has greatly reduced the stimulator and has implanted the tissue lesion that the in -process caused, in the aspect of the little electrode array of implanted three -dimensional of high density, ordered arrangement, realizes the selectivity stimulation and the record of high density having good application prospect.
Description
Technical field
The utility model belongs to biomedical engineering technology field, is specifically related to a kind of neural thornSwash device.
Background technology
Embedded nerve stimulator is medically having a wide range of applications, as artificial cochlea, artificialRecovery of vision, brain deep brain stimulation system etc. Microelectrode as disclose nervous system working mechanism,The important tool of the aspects such as treatment sacred disease, is more and more subject to people to pay close attention to widely, becomesFor current important research direction.
The application of people to microelectrode, normally implants microelectrode in animal or patient body,Stimulate or suppress nervous activity by loading the signal of telecommunication, or utilizing microelectrode by nervous activityBeing converted to the signal of telecommunication records and is studied. Due to the difference of effect target, various based on micro-The microelectrode array that process technology is made is developed. Wherein, high density, ordered arrangementIn the implantable nerve fiber of three-dimensional micro-electrode array, realize highdensity selective stimulating and noteRecord, has a good application prospect.
Current, the microelectrode of nerve stimulator is connected by wire with stimulating chip, and when makingWhen high-density microelectrode array, along with the increase of stimulation point quantity, connect thorn in microelectrode arrayThe quantity that swashs some wire constantly rises, and can cause wiring width to become large, and Operation opening needsIncrease, wound face is large.
The making of three-dimensional micro-electrode array at present adopts MEMS technique more, life on base materialBecome the method for microelectrode array. Process more complicated, cost is very high, has limited the typeThe popularization of microelectrode and use.
In order to address the above problem, researcher's a kind of nerve stimulator that begins one's study.
Summary of the invention
For this reason, technical problem to be solved in the utility model is the nerve thorn of prior artSwash device, the microelectrode of nerve stimulator is connected by wire with stimulating chip, causes cloth live widthDegree is large, and Operation opening is large, the problem that wound face is large, and then a kind of nerve stimulation is proposedDevice.
For solving the problems of the technologies described above, the invention provides a kind of nerve stimulator, compriseSubstrate, offers some through holes;
Microelectrode, several, for stimulating neuronal; Described microelectrode arranges by filling viasIn substrate, spill the stimulation unit for microelectrode in substrate one side, opposite side is microelectrodeConnecting portion;
Stimulating chip, sends stimulus signal and receives feedback for controlling described microelectrode neuralward unitSignal; The direct face-down bonding of connecting portion of described microelectrode is on stimulating chip;
Shell, is sealedly connected in substrate, forms cavity, for encapsulating the company of microelectrode with substrateConnect portion and stimulating chip.
Further, described stimulating chip is provided with several contacts, described contact and described micro-The connecting portion of electrode is corresponding one by one, and connects by face-down bonding.
As preferably, described through hole is array and is distributed in described substrate, so that several are micro-Electrode is arranged in microelectrode array in substrate. Especially for highdensity microelectrode array,This product more can effectively embody it and save space, reduces the advantage of Operation opening.
Further, described microelectrode processes by electroplating ventilating hole in substrate, described inSubstrate, by etching certain thickness, is exposed stimulation unit and the connecting portion of microelectrode. Simplify orderThe three-dimensional micro-electrode array of front routine, process is simple, and fabrication cycle is short.
Further, described substrate and shell encapsulate by Laser Welding technique. AvoidIntroduce encapsulation reagent, thereby histocyte is produced to harmful effect.
As preferably, the material of described substrate or substrate and shell is compatible for having good biologicalThe glass of property. At present, conventionally use silicon, polyimides and Parylene as microelectrode baseBottom material, wherein, the materials such as polyimides and Parylene possess flexibility, bio-compatibleProperty the feature such as good, but mechanical strength is inadequate. The much higher hards such as silicon materials, may cause physiologyThe damage of tissue. And substrate of glass especially has the substrate of glass of good biocompatibility,There is certain pliability, good biocompatibility, and there is good mechanical strength.
The glass particularly, with good biocompatibility is Pyrex or sodium calcium glassGlass.
Further, described through hole is to obtain by laser boring.
As preferably, described microelectrode material is for having biocompatibility metal.
Particularly, described microelectrode material be tungsten, titanium, gold, silver, platinum, iridium, tantalum, niobium,Any one in zirconium.
Technique scheme of the present utility model has the following advantages compared to existing technology:
(1) nerve stimulator of the present utility model adopt face-down bonding directly connect microelectrode withStimulating chip, has avoided the required wire that is connected between microelectrode and stimulating chip, can be by the twoAs a whole in implantable neural tissue, greatly reduce and caused in nerve stimulator implantation processTissue damage; Especially there is significant effect for microelectrode array.
(2) the utility model adopts the process technologies such as laser boring, electroplating ventilating hole, has simplifiedAt present conventional three-dimensional micro-electrode array, without through the step such as gluing, photoetching repeatedly, processSimply, fabrication cycle is short.
(3) substrate of the present utility model or substrate and shell adopt and have good bio-compatibleProperty glass, this material has certain pliability, good mechanical strength, and can make stimulatorAfter implantation, there is good biocompatibility.
(4) the utility model adopts Pyrex, the sodium calcium glass with good biocompatibilityGlass, as substrate or substrate and shell package material, can make to have good life after stimulator implantationThing compatibility and stability.
(5) the utility model adopts the packaged type of Laser Welding, without adhesive or glassPowder, by substrate of glass and shell encapsulation combination, has avoided organic solvent to produce bad to histocyteImpact.
Brief description of the drawings
Fig. 1 is nerve stimulator schematic diagram;
Fig. 2 is microelectrode array area schematic.
Wherein, 1, substrate; 2, microelectrode; 3, stimulating chip; 4, shell; 5, fixing hole; 6,Connecting portion; 7, stimulation unit.
Detailed description of the invention
Embodiment 1
A kind of nerve stimulator, as shown in Figure 1, comprises substrate 1, offers some through holes;
Microelectrode 2, several, for stimulating neuronal; Described microelectrode 2 is established by filling viasPut in substrate, spill the stimulation unit 7 for microelectrode 2 in substrate one side, opposite side is micro-The connecting portion 6 of electrode 2;
Stimulating chip 3, sends stimulus signal and receives anti-for controlling described microelectrode 2 neuralward unitsFeedback signal; The direct face-down bonding of connecting portion 6 of described microelectrode 2 is on stimulating chip 3;
Shell 4, is sealedly connected in substrate 1, forms cavity, for encapsulating microelectrode with substrate 12 connecting portion 6 and stimulating chip 3.
Technique scheme is core technology scheme of the present invention, the microelectrode 1 of nerve stimulatorBe connected by Flip Chip Bond Technique with stimulating chip 3, avoided using connecting microelectrode 2 and stingingSwash the wire of chip 3, reduced wiring width large, avoided Operation opening to increase andThe large problem of wound area causing.
Particularly, described stimulating chip is provided with several contacts, described contact with described inConnecting portion 6 face-down bondings of microelectrode connect.
As shown in Figure 2, as preferably, described through hole is array and is distributed in described substrate 1Upper, so that several microelectrodes 2 are arranged in microelectrode array in substrate 1. Especially forHighdensity microelectrode array, this product more can effectively embody it and save space, reduces operationThe advantage of implanting opening, the microelectrode array in the present embodiment is 20*20, microelectrode 2 and coreThe contact of sheet connects one to one.
Further, described microelectrode 2 processes by electroplating ventilating hole in substrate 1,Described substrate 1, by etching certain thickness, is exposed stimulation unit 7 and the connecting portion 6 of microelectrode 2.As preferably, etching certain thickness is 40～70 μ m. Simplify the micro-electricity of three-dimensional of current routineUtmost point array, process is simple, and fabrication cycle is short.
Further, described substrate 1 encapsulates by Laser Welding technique with shell 4. Keep awayExempt to introduce encapsulation reagent, thereby histocyte has been produced to harmful effect.
Further, in order to improve mechanical strength and the pliability of substrate 1 material, this enforcementSubstrate 1 material in example is the glass with good biocompatibility, as preferably this enforcementSubstrate 1 material of example is Pyrex.
As distortion, described substrate material can also be soda-lime glass.
Further, to introduce encapsulation reagent in order reducing, thereby to produce bad to histocyteImpact, described substrate 1 encapsulates by laser weld with shell 4.
Further, described through hole is to obtain by laser boring.
As preferably, described microelectrode 2 materials are for having biocompatibility metal.
Particularly, described microelectrode 2 materials are platinum. As distortion, microelectrode 2 materials alsoCan there is biocompatibility metal for tungsten, titanium, gold, silver, iridium, tantalum, niobium, zirconium etc.
Further, be shaped with fixing hole 5 in substrate 1 both sides, at nerve stimulator implantation processIn play the effect of anchor point, after implantation, with staple, nerve stimulator is fixed on to nerve fiberSurface.
Embodiment 2
Difference from Example 1 is, the material of substrate 1 and shell 4 in the present embodimentBe and have good biocompatibility glass, tool is as the substrate 1 of preferred the present embodiment and outerThe material of shell 4 is Pyrex. As distortion, the material of described substrate 1 and shell 4 alsoIt can be soda-lime glass. In the present embodiment, microelectrode array is 30*30. Other and embodiment 1Identical.
In detail as follows, a kind of nerve stimulator comprises substrate 1, offers some through holes;
Microelectrode 2, several, for stimulating neuronal; Described microelectrode 2 is established by filling viasPut in substrate, spill the stimulation unit 7 for microelectrode 2 in substrate one side, opposite side is micro-The connecting portion 6 of electrode 2;
Stimulating chip 3, sends stimulus signal and receives anti-for controlling described microelectrode 2 neuralward unitsFeedback signal; The direct face-down bonding of connecting portion 6 of described microelectrode 2 is on stimulating chip 3;
Shell 4, is sealedly connected in substrate 1, forms cavity, for encapsulating microelectrode with substrate 12 connecting portion 6 and stimulating chip 3.
Particularly, described stimulating chip is provided with several contacts, described contact with described inConnecting portion 6 face-down bondings of microelectrode 2 connect.
As preferably, described through hole is array and is distributed in described substrate 1, so that someIndividual microelectrode 2 is arranged in microelectrode array in substrate 1. Especially for highdensity micro-electricityUtmost point array, this product more can effectively embody it and save space, reduces the excellent of Operation openingGesture, the microelectrode array in the present embodiment is 30*30, the contact of microelectrode 2 and chip is one by oneCorresponding connection.
Further, described microelectrode processes by electroplating ventilating hole in substrate 1, instituteState substrate 1 by etching certain thickness, expose stimulation unit 7 and the connecting portion 6 of microelectrode 2.As preferably, etching certain thickness is 40～70 μ m.
Further, described substrate 1 encapsulates by Laser Welding technique with shell 4.
Further, substrate 1 material in the present embodiment is to have good biocompatibilityGlass is Pyrex as the substrate 1 of preferred the present embodiment and the material of shell 4.
As distortion, the material of described substrate 1 and shell 4 can also be soda-lime glass.
Further, described substrate 1 encapsulates by laser weld with shell 4.
Further, described through hole is to obtain by laser boring.
As preferably, described microelectrode 2 materials are for having biocompatibility metal.
Particularly, described microelectrode 2 materials are platinum. As distortion, microelectrode 2 materials alsoCan there is biocompatibility metal for tungsten, titanium, gold, silver, iridium, tantalum, niobium, zirconium etc.
Further, be shaped with fixing hole 5 in substrate 1 both sides, at nerve stimulator implantation processIn play the effect of anchor point, after implantation, with staple, nerve stimulator is fixed on to nerve fiberSurface.
Embodiment 3
Difference from Example 1 is, in the present embodiment, substrate 1 material is polyimides,Wherein the substrate material of the present embodiment can also be silicon, Parylene. As distortion, thisThe substrate material of embodiment can also be silicon. Other are identical with embodiment 1, no longer superfluous at thisState.
Embodiment 4
A kind of nerve stimulator, comprises substrate 1, offers some through holes; Microelectrode 2, someIndividual, for stimulating neuronal; Described microelectrode 2 is arranged in substrate by filling vias,Spill the stimulation unit 7 for microelectrode 2 in substrate one side, opposite side is the connection of microelectrode 2Portion 6; Stimulating chip 3, sends stimulus signal also for controlling described microelectrode 2 neuralward unitsReceiving feedback signals; The direct face-down bonding of connecting portion 6 of described microelectrode 2 is at stimulating chip 3On; Shell 4, is sealedly connected in substrate 1, forms cavity with substrate 1, micro-for encapsulatingThe connecting portion 6 of electrode 2 and stimulating chip 3.
Particularly, microelectrode 2 is some one metal wires, is inserted into through hole, and two ends spill portionDivide wire, wherein one end of some one metal wires is in same level, as microelectrode 2Connecting portion 6; The other end is as the stimulation unit 7 of microelectrode 2; Wire adopts epoxy resinGlue is fixed in substrate 1.
Particularly, described stimulating chip 3 is provided with several contacts, described contact and instituteConnecting portion 6 face-down bondings of stating microelectrode connect.
Embodiment 5
A preparation method for nerve stimulator, comprises following procedure of processing:
(a) in substrate, offer through hole;
(b) at a side splash-proofing sputtering metal of substrate, form metal film, as conductive electrode;
(c) electroplating ventilating hole obtains filling the microelectrode of metal, then substrate both sides is etched away to oneDetermine thickness, substrate one side leakage goes out the stimulation unit of microelectrode, and opposite side spills the connection of microelectrodePortion;
(d) by direct the connecting portion of microelectrode face-down bonding on stimulating chip;
(e) shell is encapsulated in substrate, by the connecting portion of stimulating chip, microelectrode be sealed in shell withIn the cavity that substrate forms.
Particularly, described step (d) stimulating chip is provided with several contacts, described micro-electricityThe connecting portion of the utmost point is connected with the contact face-down bonding of stimulating chip.
Particularly, to offer through hole be to obtain by laser boring to described step (a); Described step(e) shell is encapsulated in substrate by Laser Welding technique.
Particularly, the thickness of described step (a) substrate is 0.2～0.3mm, described step(b) thickness of a side splash-proofing sputtering metal is 150～250nm, and step (c) etches away necessarily thickDegree is 40～70 μ m.
As preferably, the material of described substrate or substrate and shell is compatible for having good biologicalThe glass of property.
Further, described in there is good biocompatibility glass be Pyrex, asDistortion can be also soda-lime glass.
Further, described step (b) splash-proofing sputtering metal material is for having biocompatibility metal;Described step (c) is filled the microelectrode material of metal for having biocompatibility metal.
As preferably, described step (b) splash-proofing sputtering metal material platinum is as conductive electrode, described micro-Electrode material is platinum. As distortion, tungsten, titanium, gold, silver, iridium, tantalum, niobium, zirconium etc. areThere is biocompatibility metal, can be used as conductive electrode and microelectrode.
Obviously, above-described embodiment is only for example is clearly described, and not rightThe restriction of embodiment. For those of ordinary skill in the field, in above-mentioned explanationBasis on can also make other changes in different forms. Here without also cannotGive exhaustive to all embodiments. And the apparent variation of being extended out thus orThe still protection domain in the invention of variation.
Claims (10)
1. a nerve stimulator, is characterized in that, comprises
Substrate (1), offers some through holes;
Microelectrode (2), several, for stimulating neuronal; Described microelectrode (2) is by filling outFill through hole and be arranged in substrate, spill the stimulation unit (7) for microelectrode (2) in substrate one side,Opposite side is the connecting portion (6) of microelectrode (2);
Stimulating chip (3), sends stimulus signal for controlling described microelectrode (2) neuralward unitAnd receiving feedback signals; The connecting portion (6) of described microelectrode (2) directly face-down bonding existsOn stimulating chip (3);
Shell (4), is sealedly connected on substrate (1) upper, forms cavity with substrate (1), forConnecting portion (6) and the stimulating chip (3) of encapsulation microelectrode (2).
2. nerve stimulator according to claim 1, is characterized in that, described stimulating chip(3) be provided with several contacts, the connecting portion of described contact and described microelectrode (2)(6) face-down bonding connects.
3. nerve stimulator according to claim 1 and 2, is characterized in that, described through holeBe array and be distributed in described substrate (1) above, so that several microelectrodes (2) are at base, be arranged in microelectrode array at the end (1).
4. nerve stimulator according to claim 1 and 2, is characterized in that, described micro-electricityThe utmost point (2) processes by electroplating ventilating hole in substrate (1), described substrate (1)By etching certain thickness, expose stimulation unit (7) and the connecting portion (6) of microelectrode (2).
5. nerve stimulator according to claim 1, is characterized in that, described shell (4)By laser weld and substrate (1) sealing.
6. according to the nerve stimulator described in claim 1 or 2 or 5, it is characterized in that, described inSubstrate (1) or substrate (1) are compatible for having good biological with the material of shell (4)The glass of property.
7. nerve stimulator according to claim 6, is characterized in that, described in have goodThe glass of biocompatibility is Pyrex or soda-lime glass.
8. according to the nerve stimulator described in claim 1 or 2 or 5, it is characterized in that, described inThrough hole is to obtain by laser boring.
9. according to the nerve stimulator described in claim 1 or 2 or 5, it is characterized in that, described inMicroelectrode material is for having biocompatibility metal.
10. according to the nerve stimulator described in claim 1 or 2 or 5, it is characterized in that, described inMicroelectrode material is any one in tungsten, titanium, gold, silver, platinum, iridium, tantalum, niobium, zirconiumKind.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520831967.4U CN205252321U (en) | 2015-10-26 | 2015-10-26 | Nerve stimulation ware |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520831967.4U CN205252321U (en) | 2015-10-26 | 2015-10-26 | Nerve stimulation ware |
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| CN205252321U true CN205252321U (en) | 2016-05-25 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201520831967.4U Withdrawn - After Issue CN205252321U (en) | 2015-10-26 | 2015-10-26 | Nerve stimulation ware |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105214214A (en) * | 2015-10-26 | 2016-01-06 | 温州生物材料与工程研究所 | A kind of nerve stimulator and preparation method thereof |
| CN107961439A (en) * | 2017-11-21 | 2018-04-27 | 北京麦康医疗器械有限公司 | A kind of localization by ultrasonic peripheral nerve clump stimulator |
| CN108187227A (en) * | 2018-01-17 | 2018-06-22 | 杭州暖芯迦电子科技有限公司 | A kind of nerve stimulator and its manufacturing method |
| CN108254414A (en) * | 2018-03-09 | 2018-07-06 | 国家纳米科学中心 | A kind of flexible in vitro micro- raceway groove microelectrode array integrated chip and its preparation method and application |
| CN109125919A (en) * | 2016-08-01 | 2019-01-04 | 深圳硅基仿生科技有限公司 | The implanted device of stimulating electrode structure and artificial retina with fixation hole |
| CN111569252A (en) * | 2020-05-20 | 2020-08-25 | 重庆大学 | Integrated chip |
| CN113165943A (en) * | 2018-11-27 | 2021-07-23 | 肖特日本株式会社 | Glass substrate having biocompatible through electrode, and biocompatible small-sized electronic device |
-
2015
- 2015-10-26 CN CN201520831967.4U patent/CN205252321U/en not_active Withdrawn - After Issue
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105214214A (en) * | 2015-10-26 | 2016-01-06 | 温州生物材料与工程研究所 | A kind of nerve stimulator and preparation method thereof |
| CN105214214B (en) * | 2015-10-26 | 2019-01-11 | 温州生物材料与工程研究所 | A kind of nerve stimulator and preparation method thereof |
| CN109125919A (en) * | 2016-08-01 | 2019-01-04 | 深圳硅基仿生科技有限公司 | The implanted device of stimulating electrode structure and artificial retina with fixation hole |
| CN107961439A (en) * | 2017-11-21 | 2018-04-27 | 北京麦康医疗器械有限公司 | A kind of localization by ultrasonic peripheral nerve clump stimulator |
| CN108187227A (en) * | 2018-01-17 | 2018-06-22 | 杭州暖芯迦电子科技有限公司 | A kind of nerve stimulator and its manufacturing method |
| WO2019140816A1 (en) * | 2018-01-17 | 2019-07-25 | 杭州暖芯迦电子科技有限公司 | Neurostimulator and manufacturing method thereof |
| CN108254414A (en) * | 2018-03-09 | 2018-07-06 | 国家纳米科学中心 | A kind of flexible in vitro micro- raceway groove microelectrode array integrated chip and its preparation method and application |
| CN108254414B (en) * | 2018-03-09 | 2024-02-02 | 国家纳米科学中心 | Flexible in-vitro micro-channel microelectrode array integrated chip and preparation method and application thereof |
| CN113165943A (en) * | 2018-11-27 | 2021-07-23 | 肖特日本株式会社 | Glass substrate having biocompatible through electrode, and biocompatible small-sized electronic device |
| CN111569252A (en) * | 2020-05-20 | 2020-08-25 | 重庆大学 | Integrated chip |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| EE01 | Entry into force of recordation of patent licensing contract |
Assignee: HAGNZHOU WARM CARAMEL CORE ELECTRONIC TECHNOLOGY CO., LTD. Assignor: WENZHOU BIOMEDICAL MATERIALS AND ENGINEERING RESEARCH INSTITUTE Contract record no.: 2017330000113 Denomination of utility model: Nerve stimulator and manufacturing method thereof Granted publication date: 20160525 License type: Exclusive License Record date: 20170731 |
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| EE01 | Entry into force of recordation of patent licensing contract | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20160525 Effective date of abandoning: 20190111 |
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| AV01 | Patent right actively abandoned |