CN205241782U - A wiring structure for electron beam evaporation equipment - Google Patents
A wiring structure for electron beam evaporation equipment Download PDFInfo
- Publication number
- CN205241782U CN205241782U CN201521097484.2U CN201521097484U CN205241782U CN 205241782 U CN205241782 U CN 205241782U CN 201521097484 U CN201521097484 U CN 201521097484U CN 205241782 U CN205241782 U CN 205241782U
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- China
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- electron beam
- beam evaporation
- evaporation equipment
- thermocouple
- installation pipe
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Abstract
The utility model discloses a wiring structure for electron beam evaporation equipment, including setting up the installation pipe on electron beam evaporation equipment platform, the installation pipe includes the body that is used for the thermocouple wiring and sets up the protective wall who is used for protecting the bare thermocouple in body one end. The utility model is not only simple in structure, low cost, and the naked problem of thermocouple among the effectual solution prior art of ability, the effectively loss of reduce production in -process thermocouple guarantees that the high efficiency of production is gone on.
Description
Technical field
The utility model relates to a kind of wire structures, particularly, relates to one and steams for electron beamThe wire structures of the equipment of sending out.
Background technology
What existing electron beam evaporation equipment adopted is arbitrarily without fixed walk line states, this cablingThere is following a few point defect in mode: 1, cabling arbitrarily easily bends and makes its fracture, has increased heatThe loss of galvanic couple; 2, the random wiring pile crown without near the heating lamp of fixing easily touching of cabling,Increase the fault alarm rate of equipment and increased the waste of thermocouple; 3, thermocouple withoutUnder the naked state of protection, make its damage increase thermocouple thereby be easily subject to external force impactWaste; These not only can cause the loss of thermocouple, also can have influence on production simultaneously, causeOperating efficiency is low.
Utility model content
In order to overcome the deficiencies in the prior art, the purpose of this utility model be to provide a kind of forThe wire structures of electron beam evaporation equipment, it is not only simple in structure, with low cost, and can be effectiveSolution prior art in the exposed problem of thermocouple, effectively reduce thermocouple in production processLoss, ensures efficiently carrying out of production.
For addressing the above problem, the technical scheme that the utility model adopts is as follows:
For a wire structures for electron beam evaporation equipment, comprise that being arranged on electron beam evaporation establishesInstallation pipe on standby platform, described installation pipe comprises for the body of thermocouple wiring and is arranged onBody one end is for the protection of the protection walls of bare thermocouple.
Preferably, described body is hollow tube, described protection walls cut vertically by hollow tube andBecome.
Preferably, described internal diameter of tube body is 0.4-1.0cm.
Preferably, described installation pipe is stainless steel.
Preferably, also comprise the fixed card being fixed on electron beam evaporation equipment platform, described solidFixed card is U-shaped structure, and described installation pipe is buckled in fixed card.
Preferably, on described installation pipe, be provided with the scrobicular ring corresponding with fixed card.
Preferably, described fixed card is screwed on electron beam evaporation equipment platform.
Compared to existing technology, the beneficial effects of the utility model are:
1, the utility model is not only simple in structure, with low cost, and can effectively solve existingIn technology, the exposed problem of thermocouple, effectively reduces the loss of thermocouple in production process, ensuresThat produces efficiently carries out.
2, thermocouple in addition installation pipe protection fixing after, sweeping electron beam evaporation equipment platformShi Buhui makes its bending again, stopped thermocouple because of the bending phenomenon of rupture causing back and forth;
3, thermocouple in addition installation pipe protection fixing after, existed with the wiring pile crown of heating lampCertain distance, has stopped because thermocouple touches the caused heating short circuit of heating wiring pile,And the phenomenon of therefore blowing thermocouple;
4, thermocouple in addition installation pipe protection fixing after, once evaporate in evaporation technologyMaterial splash phenomena, the material that splashes out also only can be fallen on body, has protected completelyThe high-temperature liquid material that thermocouple is not splashed out damages.
Brief description of the drawings
Fig. 1 is that in the utility model, the structure for the wire structures of electron beam evaporation equipment is shownIntention;
Fig. 2 is the top view for the wire structures of electron beam evaporation equipment in Fig. 1;
Fig. 3 is installation pipe structural representation in the utility model;
Fig. 4 is fixed card and screw structural schematic diagram in the utility model;
Wherein, 1 is installation pipe, and 101 is body, and 102 is that protection walls, 103 is scrobicular ring, 2For fixed card, 201 is screw, and 3 is that electron beam evaporation equipment platform, 4 is thermocouple.
Detailed description of the invention
Below in conjunction with the drawings and specific embodiments, the utility model is described in further detail.
As Figure 1-4, in the utility model for the wire structures bag of electron beam evaporation equipmentDraw together the installation pipe 1 being arranged on electron beam evaporation equipment platform 3, installation pipe 1 comprises for heatBody that galvanic couple 4 connects up 101 and be arranged on body 101 one end for the protection of bare thermocouple 4Protection walls 102. Body 101 is not subject to outside for the protection of the inner thermocouple 4 passing through of protectionEnvironmental disturbances, protection walls 102 is established sweeping electron beam evaporation for the protection of exposed thermocouple 4When standby platform, can not make its bending.
In a preferred embodiment, comprise setting for the wire structures of electron beam evaporation equipmentThe installation pipe 1 of the stainless steel on electron beam evaporation equipment platform 3, installation pipe 1 comprisesThe body 101 connecting up for thermocouple 4 and be arranged on body 101 one end for the protection of exposed heatThe protection walls 102 of galvanic couple 4, body 101 is hollow tube, protection walls 102 by hollow tube along axleForm to cutting, body 101 internal diameters are 0.4cm, are convenient to thermocouple 4 and pass.
In a further advantageous embodiment, comprise not for the wire structures of electron beam evaporation equipmentThe installation pipe 1 of rust steel matter and be fixed on the fixed card 2 on electron beam evaporation equipment platform 3,Installation pipe 1 comprises the body 101 connecting up for thermocouple 4 and is arranged on body 101 one end to be usedIn the protection walls 102 of protection bare thermocouple 4, body 101 is hollow tube, protection walls 102Cut and form vertically by hollow tube, body 101 internal diameters are 1.0cm, are convenient to thermocouple 4 and wearCross; Fixed card 2 is U-shaped structure, is fixed on electron beam evaporation equipment flat by screw 201On platform 3, installation pipe 1 is buckled in fixed card 2, is provided with and fixed card 2 on installation pipe 1Corresponding scrobicular ring 103. Buckle form is fixed, and is convenient to the dismounting of installation pipe 1, is more convenient to electricityThe cleaning of sub-beam evaporation equipment.
To one skilled in the art, can be according to technical scheme described above and structureThink, make other various corresponding changes and deformation, and all these changes and deformationWithin all should belonging to the protection domain of the utility model claim.
Claims (7)
1. for a wire structures for electron beam evaporation equipment, it is characterized in that, compriseBe arranged on the installation pipe on electron beam evaporation equipment platform, described installation pipe comprises for thermocoupleThe body of wiring and be arranged on the protection walls of body one end for the protection of bare thermocouple.
2. the wire structures for electron beam evaporation equipment as claimed in claim 1, itsBe characterised in that, described body is hollow tube, and described protection walls is cut and formed vertically by hollow tube.
3. the wire structures for electron beam evaporation equipment as claimed in claim 1, itsBe characterised in that, described internal diameter of tube body is 0.4-1.0cm.
4. the wiring for electron beam evaporation equipment as described in claim 1-3 any oneStructure, is characterized in that, described installation pipe is stainless steel.
5. the wire structures for electron beam evaporation equipment as claimed in claim 4, itsBe characterised in that, also comprise the fixed card being fixed on electron beam evaporation equipment platform, described fixingCard is U-shaped structure, and described installation pipe is buckled in fixed card.
6. the wire structures for electron beam evaporation equipment as claimed in claim 5, itsBe characterised in that, on described installation pipe, be provided with the scrobicular ring corresponding with fixed card.
7. the wire structures for electron beam evaporation equipment as claimed in claim 5, itsBe characterised in that, described fixed card is screwed on electron beam evaporation equipment platform.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201521097484.2U CN205241782U (en) | 2015-12-24 | 2015-12-24 | A wiring structure for electron beam evaporation equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201521097484.2U CN205241782U (en) | 2015-12-24 | 2015-12-24 | A wiring structure for electron beam evaporation equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205241782U true CN205241782U (en) | 2016-05-18 |
Family
ID=55940858
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201521097484.2U Active CN205241782U (en) | 2015-12-24 | 2015-12-24 | A wiring structure for electron beam evaporation equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205241782U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108168722A (en) * | 2017-12-28 | 2018-06-15 | 贵阳航发精密铸造有限公司 | A kind of electro beam physics vapour deposition temp measuring method |
-
2015
- 2015-12-24 CN CN201521097484.2U patent/CN205241782U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108168722A (en) * | 2017-12-28 | 2018-06-15 | 贵阳航发精密铸造有限公司 | A kind of electro beam physics vapour deposition temp measuring method |
| CN108168722B (en) * | 2017-12-28 | 2021-10-08 | 贵阳航发精密铸造有限公司 | Electron beam physical vapor deposition temperature measurement method |
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|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |