CN205236291U - Slit coater - Google Patents

Slit coater Download PDF

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Publication number
CN205236291U
CN205236291U CN201520835654.6U CN201520835654U CN205236291U CN 205236291 U CN205236291 U CN 205236291U CN 201520835654 U CN201520835654 U CN 201520835654U CN 205236291 U CN205236291 U CN 205236291U
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CN
China
Prior art keywords
slit type
base
coating head
servomotor
workbench
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201520835654.6U
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Chinese (zh)
Inventor
付超
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hangzhou Zhongneng Photoelectric Technology Co Ltd
Original Assignee
Hangzhou Zhongneng Photoelectric Technology Co Ltd
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Priority to CN201520835654.6U priority Critical patent/CN205236291U/en
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Publication of CN205236291U publication Critical patent/CN205236291U/en
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Abstract

The utility model relates to a slit coater, comprises a workbench, and a support, the 2nd servo motor and narrow joint type scribble the leftover of bolt of cloth, the workstation includes the base, a vacuum adsorption platform and a servo motor, be equipped with the driving lever on the base lateral wall, the vacuum adsorption platform is located the upper portion of base, and by at least one servo motor drive, the upper portion of base both sides is equipped with the spout, the gage block has been placed in the spout, still be equipped with rectangular shape through -hole on the lateral wall of spout, the driving lever passes the through -hole and is connected with the gage block, narrow joint type scribbles the leftover of bolt of cloth and passes through the support and fix the top at the workstation, and the 2nd servo motor of narrow joint type coating pretext drive, the both sides that narrow joint type scribbled the leftover of bolt of cloth are fixed with the displacement inductor, the displacement inductor aligns with the position of spout. The utility model discloses a slit coater, rational in infrastructure, the precision is high, and the coating is thin, and the homogeneity is good, can carry out depth of parallelism school zero more high -efficient, the high accuracy, has improved experimental efficiency, reduce cost.

Description

A kind of slit type coater
Technical field
The utility model relates to film coating equipment technical field, relates in particular to a kind of slit type coater.
Background technology
For existing slit type coater (slotdiecoater), because dispense tip and substrate spacing are micron order, for keeping coating low gap and high evenness, between dispense tip and slide glass platform, need the high depth of parallelism. And in laboratory, existing equipment is coated with to front debugging, school zero, need long-time adjusting, test to reach desirable effect, before so each experiment, all need long adjustment, and can not ensure that the effect after each adjustment can reach optimum, affects experimental result and research and development progress.
Summary of the invention
In order to solve above-mentioned technical problem, the purpose of this utility model is to provide a kind of slit type coater, this slit type coater is rational in infrastructure, more efficiency obtain the depth of parallelism higher between dispense tip and platform, make coating ultra-thin and have a higher uniformity, thereby raising conventional efficient, reduces costs.
To achieve these goals, the utility model has adopted following technical scheme:
A kind of slit type coater, comprise workbench, support, the second servomotor and slit type coating head, described workbench comprises base, vacuum absorbing platform and the first servomotor, described base side wall is provided with driving lever, described vacuum absorbing platform is positioned at the top of base, and by least one the first driven by servomotor, the top of described base both sides is provided with chute, in chute, be placed with gauge block, on the sidewall of described chute, be also provided with strip through hole, described driving lever is connected with gauge block through through hole, described slit type coating head is fixed on the top of workbench by support, and slit type coating head is by the second driven by servomotor, the both sides of described slit type coating head are fixed with displacement sensor, the aligned in position of described displacement sensor and chute.
As preferred version: described support comprises crossbeam and pillar, two pillars lay respectively at the both sides of workbench, two the second servomotors are separately fixed at the bottom of two root posts, the two ends of described crossbeam are connected with the power transmission shaft of two the second servomotors respectively, and described slit type coating head is fixed on crossbeam middle part.
As preferred version: described the first servomotor is fixed on base by electric machine support.
As preferred version: described base bottom is also provided with four legs, and wherein three legs are Height Adjustable leg. Workbench Level tune is also convenient like this, has further improved the depth of parallelism between dispense tip and slide glass platform.
As preferred version, described displacement sensor is the inductor of contactless or contact.
The utility model is by arranging displacement transducer in slit type coating head both sides, and the corresponding gauge block that arranges on base, make the convenient adjustment of the depth of parallelism between slit type coating head and workbench, precision is higher, and gauge block position-adjustable does not affect the normal work of slit type coating head.
Slit type coater of the present utility model, rational in infrastructure, precision is high, and coating is thin, and good uniformity can carry out more efficient, high-precision depth of parallelism school zero, and can realize the full-automatic school zero of the depth of parallelism, thereby has improved conventional efficient, reduces costs.
Brief description of the drawings
Fig. 1 is Facad structure schematic diagram of the present utility model.
Fig. 2 is top surface structure schematic diagram of the present utility model.
Detailed description of the invention
Below in conjunction with accompanying drawing, detailed description of the invention of the present utility model is made a detailed explanation.
A kind of slit type coater as depicted in figs. 1 and 2, comprise workbench, support, the second servomotor 4 and slit type coating head 9, described workbench comprises base 3, vacuum absorbing platform 1 and the first servomotor 2, described base 3 sidewalls are provided with driving lever 7, described vacuum absorbing platform 1 is positioned at the top of base 3, and driven by least one first servomotor 2, described the first servomotor 2 is fixed on base 3 by electric machine support 13.
The top of described base 3 both sides is provided with chute 6, in chute 6, be placed with gauge block 8, on the sidewall of described chute 6, be also provided with strip through hole, described driving lever 7 is connected with gauge block 8 through through hole, described slit type coating head 9 is fixed on the top of workbench by support, and slit type coating head 9 is driven by the second servomotor 4, and the both sides of described slit type coating head 9 are fixed with displacement sensor 11, the aligned in position of described displacement sensor 11 and chute 6.
Described support comprises crossbeam 10 and pillar 12, two pillars 12 lay respectively at the both sides of workbench, two the second servomotors 4 are separately fixed at the bottom of two root posts 12, the two ends of described crossbeam 10 are connected with the power transmission shaft of two the second servomotors 4 respectively, and described slit type coating head 9 is fixed on crossbeam 10 middle parts.
Described base 3 bottoms are also provided with four legs 5, and wherein three legs 5 are Height Adjustable leg 5. Described displacement sensor 11 is the inductor of contactless or contact.
Described slit type coater is in the time of depth of parallelism school zero, the displacement sensor of slit type coating head both sides is responded to respectively the distance of the gauge block corresponding with workbench both sides, simultaneously by regulating respectively both sides the second servomotor to make displacement sensor identical with the distance of corresponding gauge block, reach the slit type coating head object parallel with the height of workbench, described depth of parallelism school zero process can be set as automatically. Slit type coater gauge block in the time of work moves to the chute other end by driving lever, and after slit type coating head declines, displacement sensor can not have interference with gauge block.
In the utility model specific embodiment, when carrying out depth of parallelism school zero, calculate dispense tip and platform distance, while coating, slit type coating head drops to required separation distance, and between substrate, keep micron order clearance distance, slit type coating head is extruded slurry while vacuum absorbing platform by certain speed and is moved and be coated with by certain speed, complete after coating, slit type coating head rises and gets back to initial point, and vacuum absorbing platform is return original position.
The foregoing is only embodiment of the present utility model; not thereby limit the scope of the claims of the present utility model; every equivalent structure or conversion of equivalent flow process that utilizes the utility model description and accompanying drawing content to do; or be directly or indirectly used in other relevant technical fields, be all in like manner included in scope of patent protection of the present utility model.

Claims (5)

1. a slit type coater, it is characterized in that: comprise workbench, support, the second servomotor (4) and slit type coating head (9), described workbench comprises base (3), vacuum absorbing platform (1) and the first servomotor (2), described base (3) sidewall is provided with driving lever (7), described vacuum absorbing platform (1) is positioned at the top of base (3), and driven by least one first servomotor (2), the top of described base (3) both sides is provided with chute (6), in chute (6), be placed with gauge block (8), on the sidewall of described chute (6), be also provided with strip through hole, described driving lever (7) is connected with gauge block (8) through through hole, described slit type coating head (9) is fixed on the top of workbench by support, and slit type coating head (9) is driven by the second servomotor (4), the both sides of described slit type coating head (9) are fixed with displacement sensor (11), the aligned in position of described displacement sensor (11) and chute (6).
2. a kind of slit type coater according to claim 1, it is characterized in that: described support comprises crossbeam (10) and pillar (12), two pillars (12) lay respectively at the both sides of workbench, two the second servomotors (4) are separately fixed at the bottom of two pillars (12), the two ends of described crossbeam (10) are connected with the power transmission shaft of two the second servomotors (4) respectively, and described slit type coating head (9) is fixed on crossbeam (10) middle part.
3. a kind of slit type coater according to claim 1, is characterized in that: described the first servomotor (2) is fixed on base (3) by electric machine support (13).
4. a kind of slit type coater according to claim 1, is characterized in that: described base (3) bottom is also provided with four legs (5), and wherein three legs (5) are Height Adjustable leg (5).
5. a kind of slit type coater according to claim 1, is characterized in that: described displacement sensor (11) is the inductor of contactless or contact.
CN201520835654.6U 2015-10-26 2015-10-26 Slit coater Active CN205236291U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201520835654.6U CN205236291U (en) 2015-10-26 2015-10-26 Slit coater

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201520835654.6U CN205236291U (en) 2015-10-26 2015-10-26 Slit coater

Publications (1)

Publication Number Publication Date
CN205236291U true CN205236291U (en) 2016-05-18

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN201520835654.6U Active CN205236291U (en) 2015-10-26 2015-10-26 Slit coater

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CN (1) CN205236291U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108620287A (en) * 2017-03-21 2018-10-09 苏州威格尔纳米科技有限公司 A kind of accuracy control method of coating die head height

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108620287A (en) * 2017-03-21 2018-10-09 苏州威格尔纳米科技有限公司 A kind of accuracy control method of coating die head height

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