CN205159296U - Quartz boat - Google Patents
Quartz boat Download PDFInfo
- Publication number
- CN205159296U CN205159296U CN201520859091.4U CN201520859091U CN205159296U CN 205159296 U CN205159296 U CN 205159296U CN 201520859091 U CN201520859091 U CN 201520859091U CN 205159296 U CN205159296 U CN 205159296U
- Authority
- CN
- China
- Prior art keywords
- support
- quartz
- supporting
- quartz boat
- slotted
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000010453 quartz Substances 0.000 title claims abstract description 43
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 43
- 230000005540 biological transmission Effects 0.000 claims abstract description 19
- 230000003014 reinforcing effect Effects 0.000 claims description 12
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 26
- 229910052710 silicon Inorganic materials 0.000 abstract description 26
- 239000010703 silicon Substances 0.000 abstract description 26
- 235000012431 wafers Nutrition 0.000 description 14
- 238000000034 method Methods 0.000 description 5
- 229910021419 crystalline silicon Inorganic materials 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000011435 rock Substances 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model provides a quartz boat has solved among the prior art silicon chip conveyer and the problem that causes the silicon chip to damage has easily appeared rocking, including being used for the PMKD fixed with outside transmission line, set up externally on the transmission line, the quartzy support column of a plurality of flutings sets up on PMKD, just, the supporter is constituteed to the quartzy support column of a plurality of flutings, the quartzy support column of slotting includes the bracing piece and sets up a plurality of standing grooves on the bracing piece respectively, a plurality of enhancement support frids are connected with the quartzy support column of a plurality of flutings respectively, the utility model provides a quartz boat avoids the appearance of the scheduling problem that scatters of silicon chip, improves the security in the silicon chip transmission course.
Description
Technical Field
The utility model relates to a simple structure, quartz boat that stability is high.
Background
Crystalline silicon solar cells have been increasingly widely applied as new clean renewable energy sources, and a diffusion process is one of key processes in the production process of the crystalline silicon solar cells, and is characterized in that a P-type silicon wafer is diffused to form an N-type surface, so that a P-N junction is formed, and the silicon wafer has a photovoltaic effect.
When the silicon wafer is conveyed in the prior art, a special device needs to be used for conveying, and the silicon wafer conveying device in the prior art can shake in the conveying process due to the structural limitation, so that the problems of scattering and the like of the silicon wafer can be caused, and the silicon wafer is damaged.
SUMMERY OF THE UTILITY MODEL
The utility model provides a quartz boat has solved among the prior art problem that silicon chip conveyer easily appears rocking and causes the silicon chip to damage.
The technical scheme of the utility model is realized like this:
a quartz boat, comprising:
the fixed bottom plate is used for being fixed with the external transmission line and is arranged on the external transmission line;
the slotted quartz support columns are arranged on the fixed bottom plate; moreover, a plurality of slotted quartz support columns form a support body;
the slotted quartz support column comprises a support rod and a plurality of placing grooves respectively arranged on the support rod;
and the plurality of reinforced supporting groove plates are respectively connected with the plurality of slotted quartz supporting columns.
As a further technical solution, the fixed base plate includes:
the supporting plates are respectively connected with the slotted quartz supporting columns;
and the bulge is used for being matched and fixed with the groove on the external transmission line and is arranged on the supporting plate.
Preferably, the support body is an arc-shaped support body, and the reinforcing support groove plate is an arc-shaped reinforcing support groove plate;
the arc-shaped reinforcing and supporting groove plates are arranged on the outer surface of the cylindrical supporting body, and one ends of the arc-shaped reinforcing and supporting groove plates are all positioned on the same straight line.
As a further technical scheme, an included angle is arranged between the plurality of placing grooves and the supporting rod.
Preferably, the included angle is between 60 ° and 80 °.
Preferably, 6 grooved quartz support columns are provided; the reinforcing support groove plates are 5.
The utility model discloses technical scheme passes through the design that a plurality of fluting quartz support columns of PMKD cooperation and a plurality of enhancement wiped the board, holistic stable strength has been improved, and the cooperation through a plurality of standing grooves and a plurality of enhancement support frid makes the silicon chip can be better arrange standing groove and a plurality of enhancement support frid in, the stability after placing of silicon chip has been improved, consequently rock can not appear in the in-process of transmission wholly, and the silicon chip can not appear rocking after placing yet, and then avoid the appearance of the scattering scheduling problem of silicon chip, the security in the silicon chip transmission process is improved.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
FIG. 1 is a schematic view of a quartz boat according to the present invention;
FIG. 2 is a schematic structural view of the quartz boat shown in FIG. 1;
FIG. 3 is an enlarged view of the structure of one embodiment of portion A of FIG. 1;
fig. 4 is an enlarged view of the structure of another embodiment of part a of fig. 1.
In the figure:
1. fixing the bottom plate; 11. a support plate; 12. a protrusion; 2. grooving a quartz support column; 21. a support bar; 22. a placement groove; 3. and reinforcing the support trough plate.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.
As shown in fig. 1-4, the utility model provides a quartz boat, include:
the fixed bottom plate 1 is arranged on the external transmission line, is fixed with the external transmission line in the use stage and acts along with the external transmission line, so that the action of the whole external transmission line is realized, and the transmission of the silicon wafer is ensured;
wherein,
the fixed bottom plate 1 comprises a support plate 11 and a bulge 12, and the support plate 11 is respectively connected with a plurality of slotted quartz support columns 2; the bulge 12 is arranged on the support plate 11 and is matched with the groove on the external transmission line in the using process, and the bulge 12 is matched with the groove on the external transmission line, so that the contact area of the fixed bottom plate 1 and the external transmission line can be ensured, and the integral stability is further improved; of course, the utility model can also be provided with the matched screw threads on the protrusion 12 and the groove, thereby increasing the strength after the connection between the protrusion and the groove and improving the overall stability;
a plurality of slotted quartz support columns 2 are arranged on the fixed bottom plate 1; moreover, a plurality of slotted quartz support columns 2 form a support body; the utility model discloses the well supporter can carry out different position settings as required, can certainly set up the quantity of fluting quartz support post 2 according to the size of silicon chip etc. and then guarantee the stability in transit, the utility model discloses well fluting quartz support post 2 can be 4, 5, 6 or more, the utility model discloses in take 6 fluting quartz support posts 2 as the example, as shown in figure 2, the fluting quartz support post 2 in the utility model is set up with fixed baseplate 1 circular arc limit as the route, and set up the position, account for fixed baseplate 1 circular arc limit half length;
wherein,
the slotted quartz support column 2 comprises a support rod 21 and a plurality of placing grooves 22 respectively arranged on the support rod 21; as shown in fig. 3, the support rods 21 are matched with each other to fix the whole, and when the silicon wafer is placed through the placing grooves 22, the silicon wafer is required to be matched with other placing grooves 22 on other support rods 21;
as shown in fig. 4, in another embodiment of the present invention, an included angle is formed between the plurality of placing grooves 22 and the supporting rod 21, and the included angle is between 60 ° and 80 °; the angle of the placing groove 22 is changed through setting, so that the silicon wafer can be better placed in the placing groove 22 under the action of self gravity, and the placing stability of the silicon wafer is improved;
the plurality of reinforced supporting groove plates 3 are respectively connected with the plurality of slotted quartz supporting columns 2, the fixing force among the slotted quartz supporting columns 2 is increased through the supporting plates 11, and the reinforced supporting groove plates 3 can be provided with the placing grooves 22, so that the force on the placing grooves 22 is increased, and the integral stability is improved;
in addition, due to the weight of the silicon wafer, the grooved quartz support column 2 can be subjected to very high pressure when being placed on the grooved quartz support column 2, so that the reinforced support groove plate 3 needs to have certain strength to ensure that the grooved quartz support column 2 can bear the pressure brought by the silicon wafer in a matching manner, and therefore, the reinforced support groove plate 3 in the utility model needs to use a material with high hardness;
in addition, in the utility model, the supporting body is an arc-shaped supporting body, and the specific reinforced supporting groove plate 3 is an arc-shaped reinforced supporting groove plate 3; the arc-shaped reinforced supporting groove plates 3 are arranged on the outer surface of the cylindrical supporting body, and one ends of the arc-shaped reinforced supporting groove plates 3 are all positioned on the same straight line, so that the number of the reinforced supporting groove plates 3 in the utility model is 5, and the silicon wafers can be conveniently placed and taken out on the premise of ensuring the stability;
and the utility model discloses be provided with a plurality of holes on the well preferred reinforcing support frid 3, can not cause the in-process of preparation to appear damaging because of reinforcing support frid 3's hardness greatly when guaranteeing the shaping of reinforcing support frid like this.
The above description is only a preferred embodiment of the present invention, and should not be taken as limiting the invention, and any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (6)
1. A quartz boat, comprising:
a fixed base plate (1) for fixing with an external transmission line, disposed on the external transmission line;
the slotted quartz support columns (2) are arranged on the fixed bottom plate (1); moreover, a plurality of the slotted quartz support columns (2) form a support body;
the slotted quartz support column (2) comprises a support rod (21) and a plurality of placing grooves (22) which are respectively arranged on the support rod (21);
and the plurality of reinforced supporting groove plates (3) are respectively connected with the plurality of slotted quartz supporting columns (2).
2. Quartz boat according to claim 1, characterized in that said fixed bottom plate (1) comprises:
the supporting plates (11) are respectively connected with the slotted quartz supporting columns (2);
and the bulge (12) is used for being matched and fixed with the groove on the external transmission line and is arranged on the support plate (11).
3. The quartz boat according to claim 1, wherein the supports are arc-shaped supports, and the reinforced support trough plates (3) are arc-shaped reinforced support trough plates (3);
the arc-shaped reinforcing and supporting groove plates (3) are arranged on the outer surface of the cylindrical supporting body, and one ends of the arc-shaped reinforcing and supporting groove plates (3) are all positioned on the same straight line.
4. The quartz boat according to claim 1, characterized in that several of said slots (22) are arranged with an angle with respect to the supporting rods (21).
5. The quartz boat of claim 4, wherein the included angle is between 60 ° and 80 °.
6. The quartz boat of claim 1, wherein the slotted quartz support columns (2) are 6; the reinforcing support groove plates (3) are 5.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201520859091.4U CN205159296U (en) | 2015-11-02 | 2015-11-02 | Quartz boat |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201520859091.4U CN205159296U (en) | 2015-11-02 | 2015-11-02 | Quartz boat |
Publications (1)
Publication Number | Publication Date |
---|---|
CN205159296U true CN205159296U (en) | 2016-04-13 |
Family
ID=55694959
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN201520859091.4U Active CN205159296U (en) | 2015-11-02 | 2015-11-02 | Quartz boat |
Country Status (1)
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CN (1) | CN205159296U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112563188A (en) * | 2020-12-10 | 2021-03-26 | 吉林瑞能半导体有限公司 | Quartz clamp for wafer and using method thereof |
-
2015
- 2015-11-02 CN CN201520859091.4U patent/CN205159296U/en active Active
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112563188A (en) * | 2020-12-10 | 2021-03-26 | 吉林瑞能半导体有限公司 | Quartz clamp for wafer and using method thereof |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant |