CN205140925U - Wireless Intelligence controlling means that low -energy plasma pours into into - Google Patents
Wireless Intelligence controlling means that low -energy plasma pours into into Download PDFInfo
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- CN205140925U CN205140925U CN201520879559.6U CN201520879559U CN205140925U CN 205140925 U CN205140925 U CN 205140925U CN 201520879559 U CN201520879559 U CN 201520879559U CN 205140925 U CN205140925 U CN 205140925U
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Abstract
The utility model discloses a wireless Intelligence controlling means that low -energy plasma pours into into, including low -energy plasma injection machine, industry control cabinet, regulator cubicle and industry control computer, the industry control computer passes through radio communication and corresponds the setting with the industry control cabinet, low -energy plasma pours into the built -in into and is provided with instrument device and control device, and the industry control cabinet includes data sampling module subassembly, relay module and wireless communication module subassembly, the data sampling module subassembly corresponds the setting with the instrument device that low -energy plasma injection built -in was established, and the control device that relay module and low -energy plasma injection built -in were established corresponds the setting. The device has realized the control of equipment wireless Intelligence, improves mentally deficient ionic launching efficiency greatly and pours into the precision into, has extensive practicality to the ion implantation trade.
Description
Technical field
The utility model belongs to ion implantation equipment technology field, more specifically, the present invention relates to the technical field of the Wireless intelligent control device that a kind of low-power plasma injects.
Background technology
Low energy ion beam implantation is widely used at present as a kind of novel gene mutagenesis means, low energy ion beam implantation machine is the device that low energy ion beam produces, be the nucleus equipment being engaged in ion implantation and bio-engineering research and application, the performance of its work and efficiency directly affect the effect of ion implantation life entity.
The low energy ion beam implantation machine that a lot of laboratory uses at present is the production of the eighties initial stage in last century, and its system scale is huge, and line construction is complicated, control switch Numerous, instrument distribution is at random, and all operations of ion implantation mostly is Non-follow control, and the repeatability of experiment is poor.Thereupon under the development of automatic technology and the demand of high efficiency production, fully the implanter control device of intelligence has highlighted its importance day by day.Therefore, need that the equipment of existing low energy ion beam implantation machine is carried out upgrading and overcome existing Problems existing and deficiency.
Summary of the invention
It is adopt following technical scheme to realize that the present invention solves its technical problem:
The Wireless intelligent control device that a kind of low-power plasma that the utility model provides injects, this control device comprises low-power plasma implanter, industrial control cabinet, regulator cubicle and industrial PC, and industrial PC is arranged by radio communication is corresponding with industrial control cabinet; Instrument device and control device is provided with in low-power plasma implanter; Instrument device in low-power plasma implanter comprises arc current instrument, arc voltage instrument, heater current instrument, accelerating voltage instrument, decelerating voltage instrument and line instrument, and connects successively; Control device in low-power plasma implanter comprises forepump, diffusion pump, mechanical pump, front step valve, takes out valve, main valve one, main valve two, head power supply, deceleration power supply, accelerating power source, acceleration control assembly, deceleration control assembly, arc stream control assembly and filament control assembly in advance, and connects successively; Industrial control cabinet comprises data sampling module assembly, relay assembly and wireless communication module assembly; Data sampling module assembly is corresponding with the instrument device established in low-power plasma implanter to be arranged, and relay assembly is corresponding with the control device established in low-power plasma implanter to be arranged.
In the utility model, the switching signal contact in the instrument device that low-power plasma implanter is arranged is connected by wire with the data acquisition module block assembly in industrial control cabinet.
In the utility model, the switching signal contact in the control device that low-power plasma implanter is arranged is connected by cable with the relay assembly in industrial control cabinet.
In the utility model, the wireless communication module assembly arranged in industrial control cabinet is connected by radio communication with industrial PC.
When being suitable for the Wireless intelligent control device of a kind of low-power plasma injection that the utility model provides, first open switch connection general supply in regulator cubicle, now low-power plasma implanter and industrial PC enter operating state, data acquisition module block assembly in industrial control cabinet gathers arc current instrument on low-power plasma implanter, arc voltage instrument, heater current instrument, accelerating voltage instrument, decelerating voltage instrument, the instrumented data of line instrument, after slave computer process in industrial control cabinet, data are sent to industrial PC through wireless communication module assembly by radio communication, shown by the human-computer interaction interface on it, operating personnel understand equipment according to these data and implement operation conditions.
When being suitable for the Wireless intelligent control device of a kind of low-power plasma injection that the utility model provides, operating personnel are by operation industrial PC input experimental data, control data is treated to fill order through industrial PC, sent to the slave computer process in industrial control cabinet by wireless communication module assembly, then forepump on low-power plasma implanter is controlled via relay assembly, diffusion pump, mechanical pump, front step valve, take out valve in advance, main valve one, main valve two, head power supply, deceleration power supply, accelerating power source, accelerate control assembly, deceleration control assembly, arc stream control assembly, the action of filament control assembly complete operation.
When being suitable for the Wireless intelligent control device of a kind of low-power plasma injection that the utility model provides, the timing counting module embedded by the inner slave computer of industrial control cabinet carries out timing and timing, set time parameter, intelligent control system controls automatically according to the time parameter of setting, accurately controls the ion implantation time.
the beneficial effect that the present invention reaches:
(1) existing equipment operating process is become succinct by the Wireless intelligent control device that a kind of low-power plasma provided by the invention injects, achieve equipment controlled in wireless and Based Intelligent Control, greatly improve the injection efficiency of low energy ion and inject precision, avoiding the actual bodily harm of ionising radiation to operating personnel simultaneously.
(2) Wireless intelligent control device that a kind of low-power plasma provided by the invention injects is the low-power plasma injection device that a kind of system scale is little, line construction simple, control switch distributes neat Based Intelligent Control.
Accompanying drawing explanation
Fig. 1 is shown as overall structure schematic diagram of the present utility model.
Fig. 2 is shown as the system theory of constitution schematic diagram that the utility model provides.
In Fig. 1-2: 1-low-power plasma implanter, 2-industrial PC, 5-industrial control cabinet, 6-data sampling module assembly, 7-relay assembly, 8-radio communication mold block assembly, 9-regulator cubicle, 10-arc current instrument, 11-arc voltage instrument, 12-heater current instrument, 13-accelerating voltage instrument, 14-decelerating voltage instrument, 15-line instrument, 16-forepump, 17-diffusion pump, 18-mechanical pump, step valve before 19-, 20-takes out valve in advance, 21-main valve one, 22-main valve two, 23-head power supply, 24-deceleration power supply, 25-accelerating power source, 26-accelerates control assembly, 27-deceleration control assembly, 28-arc stream control assembly, 29-filament control assembly.
Embodiment
1-2 by reference to the accompanying drawings, illustrate, but the utility model is not limited to following embodiment for embodiment.
In the utility model, for convenience of description, the description of the relative position relation of each parts of Wireless intelligent control device that a kind of low-power plasma is injected be with reference to the accompanying drawings 1 Butut mode be described, as: the position relationships such as upper and lower, left and right determine according to the Butut direction of Figure of description 1.
The Wireless intelligent control device that a kind of low-power plasma that the utility model provides injects, this control device comprises low-power plasma implanter (1), industrial control cabinet (5), regulator cubicle (9) and industrial PC (2), and industrial PC (2) is arranged by radio communication is corresponding with industrial control cabinet (5); Low-power plasma implanter is provided with instrument device and control device in (1); Instrument device in low-power plasma implanter (1) comprises arc current instrument (10), arc voltage instrument (11), heater current instrument (12), accelerating voltage instrument (13), decelerating voltage instrument (14) and line instrument (15), and connects successively; Control device in low-power plasma implanter (1) comprises forepump (16), diffusion pump (17), mechanical pump (18), front step valve (19), takes out valve (20), main valve one (21), main valve two (22), head power supply (23), deceleration power supply (24), accelerating power source (25) in advance, accelerates control assembly (26), deceleration control assembly (27), arc stream control assembly (28) and filament control assembly (29), and connects successively; Industrial control cabinet (5) comprises data sampling module assembly (6), relay assembly (7) and wireless communication module assembly (8); Data sampling module assembly (6) is corresponding with the instrument device established in low-power plasma implanter (1) to be arranged, and relay assembly (7) is corresponding with the control device established in low-power plasma implanter (1) to be arranged.
In the utility model, the switching signal contact in the instrument device that low-power plasma implanter (1) is arranged is connected by wire with the data acquisition module block assembly (6) in industrial control cabinet (5).
In the utility model, the switching signal contact in the control device that low-power plasma implanter (1) is arranged is connected by cable with the relay assembly (7) in industrial control cabinet (5).
In the utility model, the wireless communication module assembly (8) arranged in industrial control cabinet (5) is connected by radio communication with industrial PC (2).
When being suitable for the Wireless intelligent control device of a kind of low-power plasma injection that the utility model provides, first open the interior switch connection general supply of regulator cubicle (9), now low-power plasma implanter (1) and industrial PC (2) enter operating state, data acquisition module block assembly (6) in industrial control cabinet (5) gathers the upper arc current instrument (10) of low-power plasma implanter (1), arc voltage instrument (11), heater current instrument (12), accelerating voltage instrument (13), decelerating voltage instrument (14), the instrumented data of line instrument (15), after slave computer process in industrial control cabinet (5), data are sent to industrial PC (2) through wireless communication module assembly (8) by radio communication, shown by the human-computer interaction interface on it, operating personnel understand equipment according to these data and implement operation conditions.
When being suitable for the Wireless intelligent control device of a kind of low-power plasma injection that the utility model provides, operating personnel are by operation industrial PC (2) input experimental data, control data is treated to fill order through industrial PC (2), the slave computer process in industrial control cabinet (5) is sent to by wireless communication module assembly (8), then the upper forepump (16) of low-power plasma implanter (1) is controlled via relay assembly (7), diffusion pump (17), mechanical pump (18), front step valve (19), take out valve (20) in advance, main valve one (21), main valve two (22), head power supply (23), deceleration power supply (24), accelerating power source (25), accelerate control assembly (26), deceleration control assembly (27), arc stream control assembly (28), filament control assembly (29) complete operation action.
When being suitable for the Wireless intelligent control device of a kind of low-power plasma injection that the utility model provides, the timing counting module embedded by the inner slave computer of industrial control cabinet (5) carries out timing and timing, set time parameter, intelligent control system controls automatically according to the time parameter of setting, accurately controls the ion implantation time.
As mentioned above; the utility model can be realized preferably; the above embodiments are only be described preferred implementation of the present utility model; not scope of the present utility model is limited; under the prerequisite not departing from the utility model design spirit; the various distortion that those of ordinary skill in the art make the technical solution of the utility model and improvement, all should fall in protection range that the utility model determines.
Claims (4)
1. a Wireless intelligent control device for low-power plasma injection, this control device comprises low-power plasma implanter, industrial control cabinet, regulator cubicle and industrial PC, and industrial PC is arranged by radio communication is corresponding with industrial control cabinet; Instrument device and control device is provided with in low-power plasma implanter; Instrument device in low-power plasma implanter comprises arc current instrument, arc voltage instrument, heater current instrument, accelerating voltage instrument, decelerating voltage instrument and line instrument, and connects successively; Control device in low-power plasma implanter comprises forepump, diffusion pump, mechanical pump, front step valve, takes out valve, main valve one, main valve two, head power supply, deceleration power supply, accelerating power source, acceleration control assembly, deceleration control assembly, arc stream control assembly and filament control assembly in advance, and connects successively; Industrial control cabinet comprises data sampling module assembly, relay assembly and wireless communication module assembly; Data sampling module assembly is corresponding with the instrument device established in low-power plasma implanter to be arranged, and relay assembly is corresponding with the control device established in low-power plasma implanter to be arranged.
2. the Wireless intelligent control device of a kind of low-power plasma injection as claimed in claim 1, it is characterized in that, the switching signal contact in the instrument device that described low-power plasma implanter is arranged is connected by wire with the data acquisition module block assembly in industrial control cabinet.
3. the Wireless intelligent control device of a kind of low-power plasma injection as claimed in claim 1, it is characterized in that, the switching signal contact in the control device that described low-power plasma implanter is arranged is connected by cable with the relay assembly in industrial control cabinet.
4. the Wireless intelligent control device of a kind of low-power plasma injection as claimed in claim 1, it is characterized in that, the wireless communication module assembly arranged in described industrial control cabinet is connected by radio communication with industrial PC.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520879559.6U CN205140925U (en) | 2015-11-06 | 2015-11-06 | Wireless Intelligence controlling means that low -energy plasma pours into into |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520879559.6U CN205140925U (en) | 2015-11-06 | 2015-11-06 | Wireless Intelligence controlling means that low -energy plasma pours into into |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205140925U true CN205140925U (en) | 2016-04-06 |
Family
ID=55626690
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520879559.6U Expired - Fee Related CN205140925U (en) | 2015-11-06 | 2015-11-06 | Wireless Intelligence controlling means that low -energy plasma pours into into |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205140925U (en) |
-
2015
- 2015-11-06 CN CN201520879559.6U patent/CN205140925U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160406 Termination date: 20201106 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |