CN205139072U - Quick component of molybdena nanofiber paper hydrogen - Google Patents
Quick component of molybdena nanofiber paper hydrogen Download PDFInfo
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- CN205139072U CN205139072U CN201520890931.3U CN201520890931U CN205139072U CN 205139072 U CN205139072 U CN 205139072U CN 201520890931 U CN201520890931 U CN 201520890931U CN 205139072 U CN205139072 U CN 205139072U
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- molybdena
- hydrogen
- nanofiber paper
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Abstract
The utility model discloses a quick component of molybdena nanofiber paper hydrogen, including molybdena nanofiber paper and conductive electrode, molybdena nanofiber paper is obtained by the hydrothermal method preparation, more than the single molybdena nanometer belt length du keda 500um, conductive electrode be after the unilateral surface covering settlement size metal mask version of molybdena nanofiber paper, sputter the conductive electrode that processing tapping ptPd nano particle array formed again in the vacuum magnetron sputtering equipment, the electrode encapsulates pin connection with the outside respectively, becomes hydrogen sensor finished product. The hydrogen sensor can be worked under normal atmospheric temperature, low power dissipation in 0.5W, the response and recovery time is short, sensitivity is high, the stable performance, the quick component of hydrogen still can be convenient the integration in various multiple sensors.
Description
Technical field
The utility model relates to a kind of molybdena nanofiber papery hydrogen-sensitive element, belongs to inorganic nanometer functional material hydrogen gas sensor technical field.
Background technology
Hydrogen, by method preparations such as hydrolysis, belongs to secondary energy.Combustion of hydrogen performance is good, and calorific capacity is high, only produces water after burning, and can recycle, and cleanliness without any pollution, is widely used in the numerous areas such as industrial or agricultural, is the new forms of energy of future ideality.But hydrogen is inflammable and explosive, monitoring hydrogen need with highly sensitive, quick response, the sensor that reproducible, temperature application range is wide.Conventional hydrogen gas sensor comprises: semi-conductor type, galvanochemistry type, optical type and electrothermic type four class, its mechanism is when hydrogen molecule is adsorbed onto material surface, driver resistance or conductance or volt-ampere characteristic curve or optical characteristics change, thus obtain measurement data.Electrothermic type hydrogen gas sensor material can be roughly divided into inorganic heat electric material and Organic thermoelectric material, although wherein inorganic heat electric material is applicable to the application places of larger temperature variation, organic electrothermic type hydrogen gas sensor material possesses fast response time, selectivity is good, good stability, be easy to the advantage such as integrated, optical type hydrogen gas sensor material response is quick, good stability, highly sensitive, although galvanochemistry type hydrogen gas sensor is easy to integrated, but these hydrogen gas sensors all exist and just there will be matrix material and come off after repeatedly circulation, foaming phenomena, life-span is short, or the reason such as manufacturing cost is high.The research of current many hydrogen gas sensors is with Sn0
2for the H of sensitive material
2gas sensor.Although the cost of material is low, fast response time.But because it generally exists response to reducibility gas, such as CO, CH
4, C
2h
5oH etc., therefore its poor selectivity, operating voltage are high, and mostly be 24V, one time power consumption is high, be generally 5W, single metal oxide sensitivity not high, simultaneously due to will 200 be heated to
oc, therefore increase extra power consumption, and working temperature is high, and easily volume that is explosion caused, sensor is large, causes being not easy to the disadvantageous factors such as integrated compatibility issue such as grade, seriously limits it and use.On the other hand, because its interdigital electrode is made up of dot matrix, be therefore easy to cause contact bad, cause sensor to there is unstable defect.
The method of nano materials has a lot, a kind of molybdena nanofiber paper adopting hydro-thermal method self-assembling technique to prepare is as sensitive material " a kind of molybdena nanofiber paper and preparation method thereof " (application number: 201510308204.6), its excellent homogeneity, large surface volume than and the how empty membrane structure of excellence, can improve the response speed of hydrogen gas sensor, sensitivity and repeatability, high surface volume is than contributing to the sensitivity and the response speed that improve sensor.Hydro-thermal method self-assembling technique synthesis technique is simple, reproducible, and output is high, can realize producing in enormous quantities, and can realize the direct spontaneous assembling of nanofiber paper on substrate.Further as the surface sputtering Pt/Pd electrode directly in molybdenum oxide nanowires fibrous paper, building resistor-type hydrogen-sensitive element, is the effective measures improved stability, improve sensor sensing performance.In the single side surface of molybdena nanofiber paper, splash-proofing sputtering metal Pt/Pd nano-grain array forms a hydrogen-sensitive element for electrode, does not see in published document or patented technology.
Summary of the invention
The purpose of this utility model is the problem proposed for background technology, design a kind of molybdena nanofiber papery hydrogen-sensitive element, based on patent of invention " a kind of molybdena nanofiber paper and preparation method thereof " (application number: the single side surface splash-proofing sputtering metal Pt/Pd nano-grain array of 201510308204.6) obtained molybdena nanofiber paper forms electrode, be reprocessed into the hydrogen-sensitive element of band conductive electrode, described hydrogen-sensitive element is elder generation's covering metal mask plate on molybdena nanofiber paper, in vacuum magnetic-control sputtering equipment, sputter Pt/Pd nano-grain array again form electrode, and the molybdena nanometer paper after having sputtered evenly is cut from centre, form the hydrogen-sensitive element of two identical performances, hydrogen-sensitive element is encapsulated into respectively in each IC pedestal, namely hydrogen gas sensor finished product is become.Described hydrogen gas sensor can work at normal temperatures, power consumption lower than 0.5W, response and release time short, highly sensitive, stable performance, described hydrogen-sensitive element also can be integrated in various multiple sensor easily.
In order to achieve the above object, the utility model adopts following scheme:
A kind of molybdena nanofiber papery hydrogen-sensitive element, comprising: molybdena nanofiber paper and conductive electrode, described molybdena nanofiber paper is prepared by hydro-thermal method, and single molybdena nanobelt length can reach more than 500um; It is characterized in that: described conductive electrode is after the single side surface of described molybdena nanofiber paper covers setting size metallic mask plate, in vacuum magnetic-control sputtering equipment, sputtering processes the conductive electrode of Pt metal/Pd nano-grain array formation again, and described conductive electrode is connected with external package leads respectively.
The preparation method of described hydrogen-sensitive element comprises the steps:
(1) set the molybdena nanofiber paper of size;
(2) choose the splash-proofing sputtering metal mask plate of setting size, described mask plate has 12 pairs of interdigital electrodes, and metal mask version is covered on described molybdena nanofiber paper, form substrate;
(3) splash-proofing sputtering metal Pt/Pd nano-grain array on the substrate, the obtained molybdena nanofiber paper with conductive electrode;
(4) after having sputtered, throw off metal mask version, then the molybdena nanofiber paper after sputtering Pt/Pd nano-grain array is cut off from middle part along its length, namely become the hydrogen-sensitive element with conductive electrode that two performances are identical.
Above-mentioned steps (3) in, the method for splash-proofing sputtering metal Pt/Pd nano-grain array comprises the steps: on the substrate
A, substrate to be placed in the sputtering chamber of vacuum magnetic-control sputtering equipment, to be evacuated to vacuum tightness and to reach 10
-4during magnitude, then fill blanket gas in sputtering chamber; Described blanket gas is argon gas, or other inert gas;
B, the flow controlling to be filled with blanket gas by flow regulator are (10 ~ 15) sccm;
C, when the vacuum tightness of magnetron sputtering apparatus is (3 ~ 5) Pa, opens d.c. sputtering general supply and make target can build-up of luminance gradually, after build-up of luminance, then slow down the speed of evacuation gradually, make the vacuum tightness of magnetron sputtering apparatus for (0.5 ~ 1) Pa;
D, sputtering Pt or Pd electrode, set sputtering power as (70 ~ 80) W, sputtering time is (60 ~ 100) s.
The beneficial effects of the utility model are: the conductive electrode of the utility model hydrogen-sensitive element, that employing standard magnetically controlled sputter method splash-proofing sputtering metal Pt/Pd nano-grain array in molybdena nanofiber paper single side surface is formed, comparing traditional block Pt or continuous P d film or independent semiconductor nano material sensor is gas sensitive, this molybdena nanofiber papery hydrogen-sensitive element has higher specific surface area, can adsorbed hydrogen also response fast faster.Based on the hydrogen gas sensor that this hydrogen-sensitive element makes, power consumption is lower than 0.5W, there are higher sensitivity, better response speed and better restorability, and Repeatability is good, can mass be carried out and be applied in actual productive life to detect the leakage situation of hydrogen, playing the effect of security protection.
Accompanying drawing explanation
Fig. 1 is metal mask version schematic diagram;
Fig. 2 is vacuum sputtering rear oxidation molybdenum nanofiber paper schematic diagram;
Fig. 3 is the single hydrogen-sensitive element schematic diagram of the utility model embodiment.
Description of symbols in figure: 1-sputtering conductive electrode, 2-molybdena nanofiber paper.
Embodiment
Below in conjunction with accompanying drawing, the utility model embodiment is described further, for making the purpose of this utility model, technical scheme and advantage clearly, technical scheme below in the utility model is clearly and completely described, obviously, described embodiment is the utility model part embodiment, instead of whole embodiments.Based on the embodiment in the utility model, those of ordinary skill in the art are not making the every other embodiment obtained under creative work prerequisite, all belong to the scope of the utility model protection.
With reference to accompanying drawing 1 ~ 3, a kind of molybdena nanofiber of the utility model papery hydrogen-sensitive element, comprise molybdena nanofiber paper and conductive electrode, described molybdena nanofiber paper is prepared by hydro-thermal method, single molybdena nanobelt length can reach more than 500um, described conductive electrode is after the single side surface of described molybdena nanofiber paper covers setting size metallic mask plate, then in vacuum magnetic-control sputtering equipment splash-proofing sputtering metal Pt/Pd nano-grain array and the conductive electrode that forms.
Fig. 1 is metal mask version schematic diagram, in the present embodiment, the overall dimensions of metal mask version are 30mm × 20mm, and the molybdena nanofiber paper selected is based on " a kind of molybdena nanofiber paper and preparation method thereof " (application number: 201510308204.6) obtained molybdena nanofiber paper.
Fig. 2 is the molybdena nanofiber paper that overall dimensions are identical with metal mask version, the schematic diagram after splash-proofing sputtering metal Pt/Pd nano-grain array in vacuum magnetic-control sputtering equipment.
Fig. 3 is the single hydrogen-sensitive element schematic diagram after molybdena nanofiber paper cutting in Fig. 2 being processed.In Fig. 3, sputtering zone forms conductive electrode 1, and non-sputtering zone is molybdena nanofiber paper 2, when upper and lower two parts sputtering zone is respectively by external package leads access power positive cathode, namely becomes the quick sensing head of hydrogen of hydrogen gas sensor.
Described sputtering processing metal Pt/Pd nano-grain array method comprises the steps:
(1) get the molybdena nanofiber paper of setting size;
(2) choose the splash-proofing sputtering metal mask plate of setting size, described metal mask version has 12 pairs of interdigital electrodes, and metal mask version is covered on described molybdena nanofiber paper, form substrate;
(3) splash-proofing sputtering metal Pt/Pd nano-grain array on the substrate, the hydrogen gas sensor of obtained band conductive electrode:
(4) after having sputtered, throw off metal mask version, again the molybdena nanofiber paper after sputtering Pt/Pd nano-grain array is cut off from middle part along its length, become the hydrogen-sensitive element that two performances are identical, and then two hydrogen-sensitive elements are encapsulated in IC pedestal respectively, namely produce the hydrogen gas sensor that two performances are identical.
(3) above-mentioned steps is form conductive electrode sputter processing metal nano-grain array on substrate after, when adopting Pt or Pd nano particle, when implementing different sputtering powers and sputtering time scheme, the hydrogen-sensitive element processed is for hydrogen gas sensor, its response time, release time are not quite similar, and specifically see the following form:
The utility model adopts standard magnetically controlled sputter method splash-proofing sputtering metal Pt/Pd nano-grain array in molybdena nanofiber paper single side surface, process conductive electrode, comparing traditional block Pt or continuous P d film or independent semiconductor nano material sensor is gas sensitive, this hydrogen-sensitive element has higher specific surface area, can adsorbed hydrogen also response fast faster.Based on the hydrogen gas sensor that this hydrogen-sensitive element makes, power consumption is lower than 0.5W, there are higher sensitivity, better response speed and better restorability, and Repeatability is good, can mass be carried out and be applied in actual productive life to detect the leakage situation of hydrogen, playing the effect of security protection.
Claims (1)
1. a molybdena nanofiber papery hydrogen-sensitive element, comprising: molybdena nanofiber paper and conductive electrode, and described molybdena nanofiber paper is prepared by hydro-thermal method, and single molybdena nanobelt length can reach more than 500um; It is characterized in that: described conductive electrode is after the single side surface of described molybdena nanofiber paper covers setting size metallic mask plate, in vacuum magnetic-control sputtering equipment, sputtering processes the conductive electrode of Pt metal/Pd nano-grain array formation again, and described conductive electrode is connected with external package leads respectively.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520890931.3U CN205139072U (en) | 2015-11-10 | 2015-11-10 | Quick component of molybdena nanofiber paper hydrogen |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520890931.3U CN205139072U (en) | 2015-11-10 | 2015-11-10 | Quick component of molybdena nanofiber paper hydrogen |
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| CN205139072U true CN205139072U (en) | 2016-04-06 |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107144600A (en) * | 2017-05-04 | 2017-09-08 | 湖北大学 | The MoO of quantum dot containing Pd3Nanofiber paper H2Sensor and preparation method |
| CN107870635A (en) * | 2017-11-06 | 2018-04-03 | 龚土婷 | Hydrogen using workshop safety hydrogen control device |
| CN111399708A (en) * | 2020-04-07 | 2020-07-10 | 惠州易晖光电材料股份有限公司 | Electrode wiring structure of touch functional sheet and preparation method thereof |
| CN112881475A (en) * | 2021-01-08 | 2021-06-01 | 温州大学 | Porous SiCO-MoO3 high-temperature hydrogen sensor and preparation method thereof |
| CN115160564A (en) * | 2022-07-19 | 2022-10-11 | 湖北大学 | Molybdenum oxide composite polyaniline nanofiber paper and preparation method thereof |
-
2015
- 2015-11-10 CN CN201520890931.3U patent/CN205139072U/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107144600A (en) * | 2017-05-04 | 2017-09-08 | 湖北大学 | The MoO of quantum dot containing Pd3Nanofiber paper H2Sensor and preparation method |
| CN107870635A (en) * | 2017-11-06 | 2018-04-03 | 龚土婷 | Hydrogen using workshop safety hydrogen control device |
| CN111399708A (en) * | 2020-04-07 | 2020-07-10 | 惠州易晖光电材料股份有限公司 | Electrode wiring structure of touch functional sheet and preparation method thereof |
| CN112881475A (en) * | 2021-01-08 | 2021-06-01 | 温州大学 | Porous SiCO-MoO3 high-temperature hydrogen sensor and preparation method thereof |
| CN112881475B (en) * | 2021-01-08 | 2023-04-07 | 温州大学 | Porous SiCO-MoO3 high-temperature hydrogen sensor and preparation method thereof |
| CN115160564A (en) * | 2022-07-19 | 2022-10-11 | 湖北大学 | Molybdenum oxide composite polyaniline nanofiber paper and preparation method thereof |
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|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160406 Termination date: 20181110 |
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| CF01 | Termination of patent right due to non-payment of annual fee |