CN205111505U - Process ceramic part and fall forming tool of trapezoidal seal groove - Google Patents
Process ceramic part and fall forming tool of trapezoidal seal groove Download PDFInfo
- Publication number
- CN205111505U CN205111505U CN201520873431.9U CN201520873431U CN205111505U CN 205111505 U CN205111505 U CN 205111505U CN 201520873431 U CN201520873431 U CN 201520873431U CN 205111505 U CN205111505 U CN 205111505U
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- CN
- China
- Prior art keywords
- seal groove
- inverted trapezoidal
- trapezoidal seal
- forming tool
- cutterhead
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The utility model relates to a process ceramic part and fall forming tool of trapezoidal seal groove, including cutterhead and handle of a knife, wherein the cutterhead for trapezoidal, and trapezoidal minor face one side is connected with the handle of a knife, cutterhead maximum diameter diameter d be less than the minimum notch width diameter c who falls trapezoidal seal groove that will process, cutter head length avris fillet rd with to process to fall trapezoidal seal groove fillet rc corresponding, cutterhead length hd with to process to fall trapezoidal seal groove degree of depth hc corresponding. The utility model discloses a forming tool is aided with specific processing route, can make things convenient for, swiftly process out the required trapezoidal seal groove that falls, and the cell type is correct, and the size is stable.
Description
Technical field
The utility model belongs to ceramic processing technique field, particularly relates to a kind of forming tool of processing ceramic part inverted trapezoidal seal groove.
Background technology
Ceramic component on semiconductor manufacturing facility has inverted trapezoidal seal groove, and groove width is less than 2mm, and breadth depth ratio is greater than 1.5, and general processing method cannot complete processing.
Summary of the invention
Technical problem to be solved in the utility model is to provide a kind of forming tool of processing ceramic part inverted trapezoidal seal groove, and solving general processing method cannot the problem of inverted trapezoidal seal groove of ceramic component on processing semiconductor manufacturing equipment.
The utility model solves the technical scheme that its technical problem adopts: the forming tool providing a kind of processing ceramic part inverted trapezoidal seal groove, comprise cutterhead and handle of a knife, wherein said cutterhead is inverted trapezoidal, and trapezoidal minor face side is connected with handle of a knife, described cutterhead maximum gauge Ф d is less than the minimum slot opening Ф c of inverted trapezoidal seal groove to be processed, described cutterhead long side fillet Rd is corresponding with inverted trapezoidal seal groove fillet Rc to be processed, described cutterhead length Hd is corresponding with inverted trapezoidal seal groove depth H c to be processed.
The cylinder of described handle of a knife to be one end be truncated cone-shaped, and the round platform end of handle of a knife is connected with cutter head minor face.
Described cutterhead maximum gauge Ф d is that the minimum slot opening Ф c of inverted trapezoidal seal groove to be processed deducts 0.1mm.
Described cutter cutter abrasive grain when roughing is 120#.
Described cutter cutter abrasive grain when semifinishing is 320#.
Described cutter cutter abrasive grain when fine finishining cutter is 600#.
Beneficial effect
Forming tool of the present utility model, is aided with specific machining path, convenient, fastly can process required inverted trapezoidal seal groove, and grooved is correct, dimensionally stable.
Accompanying drawing explanation
Fig. 1 is the utility model structural representation;
Fig. 2 is with inverted trapezoidal seal groove ceramic component structural representation.
Detailed description of the invention
Below in conjunction with specific embodiment, set forth the utility model further.Should be understood that these embodiments are only not used in restriction scope of the present utility model for illustration of the utility model.In addition should be understood that those skilled in the art can make various changes or modifications the utility model, and these equivalent form of values fall within the application's appended claims limited range equally after the content of having read the utility model instruction.
Embodiment 1
As illustrated in fig. 1 and 2, a kind of forming tool of processing ceramic part inverted trapezoidal seal groove, comprise cutterhead 1 and handle of a knife 2, wherein said cutterhead 1 is inverted trapezoidal, and trapezoidal minor face side is connected with handle of a knife 2, described cutterhead 1 maximum gauge Ф d is less than the minimum slot opening Ф c of inverted trapezoidal seal groove 3 to be processed, described cutterhead 1 long side fillet Rd is corresponding with inverted trapezoidal seal groove 3 fillet Rc to be processed, and described cutterhead 1 length Hd is corresponding with inverted trapezoidal seal groove 3 depth H c to be processed.
Described handle of a knife 2 for one end be the cylinder of truncated cone-shaped, and the round platform end of handle of a knife 2 is connected with cutter head minor face.Cutterhead 1 is connected with drilling machine by handle of a knife 2.
Described cutterhead 1 maximum gauge Ф d is that the minimum slot opening Ф c of inverted trapezoidal seal groove 3 to be processed deducts 0.1mm.Guarantee that cutterhead 1 can cut inverted trapezoidal seal groove 3 to be processed.
Described cutter cutter abrasive grain when roughing is 120#, and described cutter cutter abrasive grain when semifinishing is 320#, and described cutter cutter abrasive grain when fine finishining cutter is 600#.Select cutter abrasive grain larger, particle is then less, and machining accuracy is meticulousr,
During actual use, ceramic component on processing semiconductor manufacturing equipment has inverted trapezoidal seal groove, groove width is less than 2mm, when breadth depth ratio is greater than 1.5, by the utility model cutter holding on machine tool chief axis, blank is fixed on platen, tool setting, specific machining path is set, finally starts drilling machine and process.
Claims (6)
1. the forming tool of a processing ceramic part inverted trapezoidal seal groove, comprise cutterhead (1) and handle of a knife (2), it is characterized in that: described cutterhead (1) is inverted trapezoidal, and trapezoidal minor face side is connected with handle of a knife (2), described cutterhead (1) maximum gauge Ф d is less than the minimum slot opening Ф c of inverted trapezoidal seal groove (3) to be processed, described cutterhead (1) long side fillet Rd is corresponding with inverted trapezoidal seal groove (3) fillet Rc to be processed, described cutterhead (1) length Hd is corresponding with inverted trapezoidal seal groove (3) depth H c to be processed.
2. the forming tool of a kind of processing ceramic part inverted trapezoidal seal groove according to claim 1, it is characterized in that: described handle of a knife (2) for one end be the cylinder of truncated cone-shaped, and the round platform end of handle of a knife (2) is connected with cutter head minor face.
3. the forming tool of a kind of processing ceramic part inverted trapezoidal seal groove according to claim 1, is characterized in that: described cutterhead (1) maximum gauge Ф d is that the minimum slot opening Ф c of inverted trapezoidal seal groove (3) to be processed deducts 0.1mm.
4. the forming tool of a kind of processing ceramic part inverted trapezoidal seal groove according to claim 1, is characterized in that: described cutter cutter abrasive grain when roughing is 120#.
5. the forming tool of a kind of processing ceramic part inverted trapezoidal seal groove according to claim 1, is characterized in that: described cutter cutter abrasive grain when semifinishing is 320#.
6. the forming tool of a kind of processing ceramic part inverted trapezoidal seal groove according to claim 1, is characterized in that: described cutter cutter abrasive grain when fine finishining cutter is 600#.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520873431.9U CN205111505U (en) | 2015-11-04 | 2015-11-04 | Process ceramic part and fall forming tool of trapezoidal seal groove |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520873431.9U CN205111505U (en) | 2015-11-04 | 2015-11-04 | Process ceramic part and fall forming tool of trapezoidal seal groove |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205111505U true CN205111505U (en) | 2016-03-30 |
Family
ID=55567152
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520873431.9U Expired - Fee Related CN205111505U (en) | 2015-11-04 | 2015-11-04 | Process ceramic part and fall forming tool of trapezoidal seal groove |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205111505U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105382657A (en) * | 2015-11-04 | 2016-03-09 | 上海卡贝尼精密陶瓷有限公司 | Forming tool for machining inverted-trapezoid sealing ring groove of ceramic component and machining method of forming tool |
| WO2020170625A1 (en) * | 2019-02-22 | 2020-08-27 | 三菱重工業株式会社 | End mill and method of manufacturing end mill |
-
2015
- 2015-11-04 CN CN201520873431.9U patent/CN205111505U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105382657A (en) * | 2015-11-04 | 2016-03-09 | 上海卡贝尼精密陶瓷有限公司 | Forming tool for machining inverted-trapezoid sealing ring groove of ceramic component and machining method of forming tool |
| WO2020170625A1 (en) * | 2019-02-22 | 2020-08-27 | 三菱重工業株式会社 | End mill and method of manufacturing end mill |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160330 Termination date: 20171104 |