CN105382657A - Forming tool for machining inverted-trapezoid sealing ring groove of ceramic component and machining method of forming tool - Google Patents
Forming tool for machining inverted-trapezoid sealing ring groove of ceramic component and machining method of forming tool Download PDFInfo
- Publication number
- CN105382657A CN105382657A CN201510740663.1A CN201510740663A CN105382657A CN 105382657 A CN105382657 A CN 105382657A CN 201510740663 A CN201510740663 A CN 201510740663A CN 105382657 A CN105382657 A CN 105382657A
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- CN
- China
- Prior art keywords
- cutter
- tool
- inverted trapezoidal
- seal groove
- forming tool
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B19/00—Single-purpose machines or devices for particular grinding operations not covered by any other main group
- B24B19/02—Single-purpose machines or devices for particular grinding operations not covered by any other main group for grinding grooves, e.g. on shafts, in casings, in tubes, homokinetic joint elements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D7/00—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor
- B24D7/18—Wheels of special form
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
Abstract
The invention relates to a forming tool for machining an inverted-trapezoid sealing ring groove of a ceramic component and a machining method of the forming tool. The tool comprises a tool bit and a tool handle. The tool bit is in an inverted trapezoid shape. The maximum diameter phi d of the tool bit is smaller than the minimum groove opening width phi c of the inverted-trapezoid sealing ring groove to be machined, the long edge side circular bead Rd of the tool bit corresponds to the circular bead Rc of the inverted-trapezoid sealing ring groove to be machined, and the length Hd of the tool bit corresponds to the depth Hc of the inverted-trapezoid sealing ring groove to be machined. The method comprises the steps that the cylindrical diamond tool with the phi c-0.1 is selected and installed on a machine tool spindle; a blank is fixed to a machine tool workbench; a machine tool is started, and the tool is fed for layer cutting by depth Hc-0.05 in the Z direction; the tool is specially designed to conform to the formula: phi d=phi c-0.1, feeding is carried out in the Z direction, and lateral cutting is carried out by depth Hc+0.05; and a tool compensation program runs. The needed inverted-trapezoid sealing ring groove can be conveniently and rapidly machined, the groove type is accurate, and the size is stable.
Description
Technical field
The invention belongs to ceramic processing technique field, particularly relate to a kind of processing ceramic part inverted trapezoidal seal groove forming tool and processing method thereof.
Background technology
Ceramic component on semiconductor manufacturing facility has inverted trapezoidal seal groove, and groove width is less than 2mm, and breadth depth ratio is greater than 1.5, and general processing method cannot complete processing.
Summary of the invention
Technical problem to be solved by this invention is to provide a kind of processing ceramic part inverted trapezoidal seal groove forming tool and processing method thereof, and solving general processing method cannot the problem of inverted trapezoidal seal groove of ceramic component on processing semiconductor manufacturing equipment.
The technical solution adopted for the present invention to solve the technical problems is: provide a kind of processing ceramic part inverted trapezoidal seal groove forming tool, comprise cutterhead and handle of a knife, wherein said cutterhead is inverted trapezoidal, and trapezoidal minor face side is connected with handle of a knife, described cutterhead maximum gauge Ф d is less than the minimum slot opening Ф c of inverted trapezoidal seal groove to be processed, described cutterhead long side fillet Rd is corresponding with inverted trapezoidal seal groove fillet Rc to be processed, and described cutterhead length Hd is corresponding with inverted trapezoidal seal groove depth H c to be processed.
The cylinder of described handle of a knife to be one end be truncated cone-shaped, and the round platform end of handle of a knife is connected with cutter head minor face.
Described cutterhead maximum gauge Ф d is that the minimum slot opening Ф c of inverted trapezoidal seal groove to be processed deducts 0.1mm.
Use a processing method for described a kind of processing ceramic part inverted trapezoidal seal groove forming tool, wherein said method step is:
A () chooses the cylindrical diamond cutter of Ф c-0.1, be fixed on by cutter on machine tool chief axis;
B blank is fixed on platen by ();
C () starts lathe, then cut by cutter Z-direction feeding layer, dark Hc-0.05;
D () be design cutter Ф d=Ф c-0.1 especially, Z-direction feeding, and side is cut, dark Hc+0.05;
E () is run cutter and is mended program, process qualified products.
Described cutter cutter abrasive grain when roughing is 120#.
Described cutter cutter abrasive grain when semifinishing is 320#.
Described cutter cutter abrasive grain when fine finishining cutter is 600#.
Beneficial effect
Forming tool of the present invention, specific machining path, convenient, fastly can process required inverted trapezoidal seal groove, and grooved is correct, dimensionally stable.
Accompanying drawing explanation
Fig. 1 is structural representation of the present invention;
Fig. 2 is with inverted trapezoidal seal groove ceramic component structural representation.
Detailed description of the invention
Below in conjunction with specific embodiment, set forth the present invention further.Should be understood that these embodiments are only not used in for illustration of the present invention to limit the scope of the invention.In addition should be understood that those skilled in the art can make various changes or modifications the present invention, and these equivalent form of values fall within the application's appended claims limited range equally after the content of having read the present invention's instruction.
Embodiment 1
As shown in Fig. 1 ~ 2, a kind of processing ceramic part inverted trapezoidal seal groove forming tool, comprise cutterhead 1 and handle of a knife 2, wherein said cutterhead 1 is inverted trapezoidal, and trapezoidal minor face side is connected with handle of a knife 2, described cutterhead 1 maximum gauge Ф d is less than the minimum slot opening Ф c of inverted trapezoidal seal groove 3 to be processed, described cutterhead 1 long side fillet Rd is corresponding with inverted trapezoidal seal groove 3 fillet Rc to be processed, and described cutterhead 1 length Hd is corresponding with inverted trapezoidal seal groove depth H c to be processed.
Described handle of a knife 2 for one end be the cylinder of truncated cone-shaped, and the round platform end of handle of a knife 2 is connected with cutter head minor face.Cutterhead 1 is connected with drilling machine by handle of a knife 2.
Described cutterhead 1 maximum gauge Ф d is that the minimum slot opening Ф c of inverted trapezoidal seal groove 3 to be processed deducts 0.1mm.Guarantee that cutterhead 1 can cut inverted trapezoidal seal groove 3 to be processed.
Use a processing method for described a kind of processing ceramic part inverted trapezoidal seal groove forming tool, wherein said method step is:
A () chooses the cylindrical diamond cutter of Ф c-0.1, be fixed on by cutter on machine tool chief axis;
B base is fixed on platen by ();
C () starts lathe, then cut by cutter Z-direction feeding layer, dark Hc-0.05;
D () be design cutter Ф d=Ф c-0.1 especially, Z-direction feeding, and side is cut, dark Hc+0.05;
E () is run cutter and is mended program, process qualified products.
Described cutter cutter abrasive grain when roughing is 120#, and described cutter cutter abrasive grain when semifinishing is 320#, and described cutter cutter abrasive grain when fine finishining cutter is 600#.Select cutter abrasive grain larger, particle is then less, and machining accuracy is meticulousr,
During actual use, the ceramic component on processing semiconductor manufacturing equipment has inverted trapezoidal seal groove, and slot opening is less than 2mm, when breadth depth ratio is greater than 1.5, choosing the cylindrical diamond cutter of Ф c-0.1 is clamped on machine tool chief axis, and blank is fixed on platen, starts lathe, Z-direction feeding layer is cut, dark Hc-0.05, special design cutter Ф d=Ф c-0.1, Z-direction feeding, side is cut, dark Hc+0.05; Run cutter and mend program, process qualified products.
Claims (7)
1. a processing ceramic part inverted trapezoidal seal groove forming tool, comprise cutterhead (1) and handle of a knife (2), it is characterized in that: described cutterhead (1) is inverted trapezoidal, and trapezoidal minor face side is connected with handle of a knife (2), described cutterhead (1) maximum gauge Ф d is less than the minimum slot opening Ф c of inverted trapezoidal seal groove (3) to be processed, described cutterhead (1) long side fillet Rd is corresponding with inverted trapezoidal seal groove (3) fillet Rc to be processed, described cutterhead (1) length Hd is corresponding with inverted trapezoidal seal groove (3) depth H c to be processed.
2. a kind of processing ceramic part inverted trapezoidal seal groove forming tool according to claim 1, is characterized in that: described handle of a knife (2) for one end be the cylinder of truncated cone-shaped, and the round platform end of handle of a knife (2) is connected with cutter head minor face.
3. a kind of processing ceramic part inverted trapezoidal seal groove forming tool according to claim 1, is characterized in that: described cutterhead (1) maximum gauge Ф d is that the minimum slot opening Ф c of inverted trapezoidal seal groove (3) to be processed deducts 0.1mm.
4. use a processing method for a kind of processing ceramic part inverted trapezoidal seal groove forming tool as claimed in claim 1, it is characterized in that: described method step is:
A () chooses the cylindrical diamond cutter of Ф c-0.1, be fixed on by cutter on machine tool chief axis;
B blank is fixed on platen by ();
C () starts lathe, then cut by cutter Z-direction feeding layer, dark Hc-0.05;
D () be design cutter Ф d=Ф c-0.1 especially, Z-direction feeding, and side is cut, dark Hc+0.05;
E () is run cutter and is mended program, process qualified products.
5. a kind of processing method using a kind of processing ceramic part inverted trapezoidal seal groove forming tool as claimed in claim 1 according to claim 4, is characterized in that: described cutter cutter abrasive grain when roughing is 120#.
6. a kind of processing method using a kind of processing ceramic part inverted trapezoidal seal groove forming tool as claimed in claim 1 according to claim 4, is characterized in that: described cutter cutter abrasive grain when semifinishing is 320#.
7. a kind of processing method using a kind of processing ceramic part inverted trapezoidal seal groove forming tool as claimed in claim 1 according to claim 4, is characterized in that: described cutter cutter abrasive grain when fine finishining cutter is 600#.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510740663.1A CN105382657A (en) | 2015-11-04 | 2015-11-04 | Forming tool for machining inverted-trapezoid sealing ring groove of ceramic component and machining method of forming tool |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510740663.1A CN105382657A (en) | 2015-11-04 | 2015-11-04 | Forming tool for machining inverted-trapezoid sealing ring groove of ceramic component and machining method of forming tool |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN105382657A true CN105382657A (en) | 2016-03-09 |
Family
ID=55415777
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510740663.1A Pending CN105382657A (en) | 2015-11-04 | 2015-11-04 | Forming tool for machining inverted-trapezoid sealing ring groove of ceramic component and machining method of forming tool |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105382657A (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5704736A (en) * | 1995-06-08 | 1998-01-06 | Giannetti; Enrico R. | Dove-tail end mill having replaceable cutter inserts |
| CN202291576U (en) * | 2011-11-04 | 2012-07-04 | 浙江双六工具有限公司 | Dovetail milling cutter |
| CN202639456U (en) * | 2012-04-01 | 2013-01-02 | 马鞍山市天睿实业有限公司 | Blade for metal processing |
| CN203077015U (en) * | 2012-12-11 | 2013-07-24 | 浙江汤溪齿轮机床有限公司 | Double-faced double-moving-column horizontal machining center |
| CN204504260U (en) * | 2015-03-20 | 2015-07-29 | 苏州工业园区海宏精密科技有限公司 | dovetail cutter |
| CN205111505U (en) * | 2015-11-04 | 2016-03-30 | 上海卡贝尼精密陶瓷有限公司 | Process ceramic part and fall forming tool of trapezoidal seal groove |
-
2015
- 2015-11-04 CN CN201510740663.1A patent/CN105382657A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5704736A (en) * | 1995-06-08 | 1998-01-06 | Giannetti; Enrico R. | Dove-tail end mill having replaceable cutter inserts |
| CN202291576U (en) * | 2011-11-04 | 2012-07-04 | 浙江双六工具有限公司 | Dovetail milling cutter |
| CN202639456U (en) * | 2012-04-01 | 2013-01-02 | 马鞍山市天睿实业有限公司 | Blade for metal processing |
| CN203077015U (en) * | 2012-12-11 | 2013-07-24 | 浙江汤溪齿轮机床有限公司 | Double-faced double-moving-column horizontal machining center |
| CN204504260U (en) * | 2015-03-20 | 2015-07-29 | 苏州工业园区海宏精密科技有限公司 | dovetail cutter |
| CN205111505U (en) * | 2015-11-04 | 2016-03-30 | 上海卡贝尼精密陶瓷有限公司 | Process ceramic part and fall forming tool of trapezoidal seal groove |
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|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
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| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20160309 |