CN205090834U - Polycrystalline silicon production hydrogenation furnace tail gas cooling device - Google Patents
Polycrystalline silicon production hydrogenation furnace tail gas cooling device Download PDFInfo
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- CN205090834U CN205090834U CN201520872408.8U CN201520872408U CN205090834U CN 205090834 U CN205090834 U CN 205090834U CN 201520872408 U CN201520872408 U CN 201520872408U CN 205090834 U CN205090834 U CN 205090834U
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- heat exchange
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P10/00—Technologies related to metal processing
- Y02P10/25—Process efficiency
Abstract
The utility model discloses an enough control the polycrystalline silicon production hydrogenation furnace tail gas cooling device that the tail gas temperature reduces the degree. This polycrystalline silicon production hydrogenation furnace tail gas cooling device, including the U -shaped heat exchange of heat pipe, the U -shaped shell, form a sealed intermediate layer space between the outer wall of U -shaped shell and U -shaped heat exchange of heat pipe, be provided with cooling water inlet and coolant outlet with intermediate layer space intercommunication on the U -shaped shell, cooling water inlet department is connected with the inlet tube, coolant outlet department is connected with the drain pipe, be provided with water pump and flow control valve on the inlet tube, be provided with into water temperature -detecting device on the inlet tube, be provided with out water temperature -detecting device on the drain pipe. Through set up the temperature -detecting device of intaking on the inlet tube, set up out water temperature -detecting device on the drain pipe, people alright with according to the degree of temperature with leaving water temperature judgement heat exchange of intaking, the reduction degree of the accurate control tail gas temperature of people of being convenient for. Be fit for the field popularization and application at polysilicon production equipment.
Description
Technical field
The utility model relates to production of polysilicon apparatus field, especially a kind of production of polysilicon hydrogenation furnace exhaust gas cooling device.
Background technology
In improved Siemens production of polysilicon, the tail gas of hydrogenation furnace is generally more than 800 DEG C, the main component of tail gas is the mixture of the gases such as SiHCl3, SiCl4, H2, HCl, in order to realize the loop production of improved Siemens, just must carry out recovery to above-mentioned tail gas and being separated.In order to realize this purpose, above-mentioned high-temperature tail gas to be carried out preliminary cooling first exactly, temperature being cooled to the low-temperature mixed gas of 140 DEG C ~ 200 DEG C about the high-temperature tail gas of 800 DEG C, to meet the technological requirement of subsequent treatment.Existing production of polysilicon hydrogenation furnace exhaust gas cooling device comprises U-shaped heat exchange of heat pipe, U-shaped shell, U-shaped heat exchange of heat pipe is arranged in U-shaped shell, a mezzanine space sealed is formed between the outer wall of U-shaped shell and U-shaped heat exchange of heat pipe, the bottom of described U-shaped shell is provided with the gas inlet be communicated with U-shaped heat exchange of heat pipe inside, the top of U-shaped heat exchange of heat pipe is provided with offgas outlet, described U-shaped shell is provided with the cooling water inlet and coolant outlet that are communicated with mezzanine space, described cooling water inlet place is connected with water inlet pipe, described coolant outlet place is connected with drainpipe, its course of work is as described below: the tail gas that hydrogenation furnace produces enters in U-shaped heat exchange of heat pipe by gas inlet, simultaneously, cooling water enters mezzanine space along water inlet pipe from cooling water inlet, cooling water in such mezzanine space just can with the high-temperature tail gas generation heat exchange in U-shaped heat exchange of heat pipe, thus reduce the temperature of tail gas, and then the cooling water of mezzanine space is discharged from coolant outlet along drainpipe, such cooling water continually will flow to coolant outlet place from cooling water inlet, the heat contained in tail gas is sponged in flow process, thus reduce the temperature of tail gas, there is following problem in this exhaust gas cooling device: first in actual use, in mezzanine space the speed of current and the reduction degree of exhaust temperature closely bound up, if flow rate of water flow is very fast, cooling water temperature in mezzanine space is lower, what the temperature of tail gas so just can be made to fall is very low, if water velocity is slower, cooling water in mezzanine space and exhaust gas heat longer for swap time, cooling water temperature in such mezzanine space is higher, also the temperature of tail gas is caused to reduce limitation, therefore, in adjustment mezzanine space, the speed of current accurately can control the reduction degree of exhaust temperature, and existing exhaust gas cooling device cannot adjust the flow rate of water flow in mezzanine space, also the foundation do not adjusted, secondly, have higher flow velocity from hydrogenation furnace tail gas out, directly pass in U-shaped heat exchange of heat pipe, the tail gas that flow velocity is higher is discharged from offgas outlet soon, after even having little time to heat with cooling water, causes the cooling effect of cooling device poor, moreover existing cooling device for once cooling procedure, is difficult to make the temperature of tail gas to be reduced to required temperature range.
Utility model content
Technical problem to be solved in the utility model is to provide a kind of production of polysilicon hydrogenation furnace exhaust gas cooling device that can control exhaust temperature reduction degree.
The utility model solves the technical scheme that its technical problem adopts: this production of polysilicon hydrogenation furnace exhaust gas cooling device, comprise U-shaped heat exchange of heat pipe, U-shaped shell, U-shaped heat exchange of heat pipe is arranged in U-shaped shell, a mezzanine space sealed is formed between the outer wall of U-shaped shell and U-shaped heat exchange of heat pipe, the bottom of described U-shaped shell is provided with the gas inlet be communicated with U-shaped heat exchange of heat pipe inside, the top of U-shaped heat exchange of heat pipe is provided with offgas outlet, described U-shaped shell is provided with the cooling water inlet and coolant outlet that are communicated with mezzanine space, described cooling water inlet place is connected with water inlet pipe, described coolant outlet place is connected with drainpipe, described water inlet pipe is provided with water pump and flow control valve, described water inlet pipe is provided with inflow temperature checkout gear, described drainpipe is provided with outlet water temperature detecting device.
Be further, be provided with impingement baffle in described U-shaped heat exchange of heat pipe, described impingement baffle is arranged on gas inlet place, and described impingement baffle comprises horizontally disposed circular baffle plate, the surrounding of described circular baffle plate is provided with arc crimp, and described arc crimp elder generation is to downward-extension and then upwards extend.
Be further, the top of described U-shaped heat exchange of heat pipe is provided with secondary cooling apparatus, described secondary cooling apparatus comprises compressor, condenser, evaporimeter, airtight cover body, the lower end of described cover body is communicated with the offgas outlet of U-shaped heat exchange of heat pipe, the upper end of cover body is provided with exhaust outlet, described evaporimeter is arranged in airtight cover body, described compressor, condenser is arranged on outside cover body, the outlet of compressor is communicated with by coolant media pipe with the import of condenser, the outlet of condenser is communicated with by coolant media pipe with the import of evaporimeter, the outlet of evaporimeter is communicated with by coolant media pipe with the import of compressor.
Further, the coolant media pipe between compressor and condenser is provided with flow control valve.
Further, described U-shaped shell is provided with journal stirrup.
Further, multiple deflection plate is provided with in described U-shaped heat exchange of heat pipe.
The beneficial effects of the utility model are: this production of polysilicon hydrogenation furnace exhaust gas cooling device by arranging inflow temperature checkout gear on water inlet pipe, drainpipe arranges outlet water temperature detecting device, people just can judge the degree of heat exchange according to inflow temperature and leaving water temperature, be convenient to the reduction degree that people control exhaust temperature accurately.
Accompanying drawing explanation
Fig. 1 is the structural representation of the utility model production of polysilicon hydrogenation furnace exhaust gas cooling device;
Be labeled as in figure, U-shaped heat exchange of heat pipe 1, U-shaped shell 2, mezzanine space 3, gas inlet 4, offgas outlet 5, cooling water inlet 6, coolant outlet 7, water inlet pipe 8, drainpipe 9, water pump 11, flow control valve 12, inflow temperature checkout gear 13, outlet water temperature detecting device 14, impingement baffle 15, circular baffle plate 151, arc crimp 152, secondary cooling apparatus 16, compressor 161, condenser 162, evaporimeter 163, cover body 164, exhaust outlet 165, flow control valve 166, journal stirrup 17, deflection plate 18.
Detailed description of the invention
Below in conjunction with accompanying drawing, the utility model is further illustrated.
As shown in Figure 1, this production of polysilicon hydrogenation furnace exhaust gas cooling device, comprise U-shaped heat exchange of heat pipe 1, U-shaped shell 2, U-shaped heat exchange of heat pipe 1 is arranged in U-shaped shell 2, a mezzanine space sealed 3 is formed between the outer wall of U-shaped shell 2 and U-shaped heat exchange of heat pipe 1, the bottom of described U-shaped shell 2 is provided with the gas inlet 4 be communicated with U-shaped heat exchange of heat pipe 1 inside, the top of U-shaped heat exchange of heat pipe 1 is provided with offgas outlet 5, described U-shaped shell 2 is provided with the cooling water inlet 6 and coolant outlet 7 that are communicated with mezzanine space 3, described cooling water inlet 6 place is connected with water inlet pipe 8, described coolant outlet 7 place is connected with drainpipe 9, described water inlet pipe 8 is provided with water pump 11 and flow control valve 12, described water inlet pipe 8 is provided with inflow temperature checkout gear 13, described drainpipe 9 is provided with outlet water temperature detecting device 14.By arranging inflow temperature checkout gear 13 on water inlet pipe 8, drainpipe 9 arranges outlet water temperature detecting device 14, people just can judge the degree of heat exchange according to inflow temperature and leaving water temperature, be convenient to the reduction degree that people control exhaust temperature accurately.
In addition, impingement baffle 15 is provided with in described U-shaped heat exchange of heat pipe 1, described impingement baffle 15 is arranged on gas inlet 4 place, described impingement baffle 15 comprises horizontally disposed circular baffle plate 151, the surrounding of described circular baffle plate 151 is provided with arc crimp 152, and described arc crimp 152 elder generation is to downward-extension and then upwards extend.By arranging impingement baffle 15 in U-shaped heat exchange of heat pipe 1, from hydrogenation furnace tail gas out when passing into U-shaped heat exchange of heat pipe 1, under the effect of impingement baffle 15, effectively can reduce the flow velocity of tail gas, tail gas is made to flow to offgas outlet 5 slowly, so just, tail gas and cooling water can be made to have the sufficiently long time to carry out heat exchange, can the cooling effect of cooling device greatly.
Moreover, the top of described U-shaped heat exchange of heat pipe 1 is provided with secondary cooling apparatus 16, described secondary cooling apparatus 16 comprises compressor 161, condenser 162, evaporimeter 163, airtight cover body 164, the lower end of described cover body 164 is communicated with the offgas outlet 5 of U-shaped heat exchange of heat pipe 1, the upper end of cover body 164 is provided with exhaust outlet 165, described evaporimeter 163 is arranged in airtight cover body 164, described compressor 161, condenser 162 is arranged on outside cover body 164, the outlet of compressor 161 is communicated with by coolant media pipe with the import of condenser 162, the outlet of condenser 162 is communicated with by coolant media pipe with the import of evaporimeter 163, the outlet of evaporimeter 163 is communicated with by coolant media pipe with the import of compressor 161.By being provided with secondary cooling apparatus 16 on the top of U-shaped heat exchange of heat pipe 1, if the temperature of high-temperature tail gas tail gas after water-cooled is not reduced to the degree of needs, secondary cooling apparatus 16 can be utilized again to lower the temperature to tail gas, this secondary cooling apparatus 16 utilizes compressor 161 that coolant media is compressed into high steam, then high steam enters and carries out heat exchange with outside air in condenser 162 and make high steam be condensed into highly pressurised liquid, after highly pressurised liquid enters evaporimeter 163, the heat absorbing tail gas makes highly pressurised liquid flash to the steam of low pressure, low-pressure steam again enters compressor 161 and is compressed into high steam and is recycled, this secondary cooling apparatus 16 good cooling results, greatly can reduce the temperature of tail gas.
For the ease of controlling the reduction degree of exhaust temperature, the coolant media pipe between compressor 161 and condenser 162 is provided with flow control valve 166.
For the ease of carrying cooling device, described U-shaped shell 2 is provided with journal stirrup 17.
In order to make the heat exchanger time of tail gas and cooling water longer, in described U-shaped heat exchange of heat pipe 1, be provided with multiple deflection plate 18.Due to the effect of deflection plate 18, can the flowing velocity of further slow tail gas, thus extend heat exchanger time, improve the cooling effect of cooling device.
Claims (6)
1. production of polysilicon hydrogenation furnace exhaust gas cooling device, comprise U-shaped heat exchange of heat pipe (1), U-shaped shell (2), U-shaped heat exchange of heat pipe (1) is arranged in U-shaped shell (2), a mezzanine space sealed (3) is formed between the outer wall of U-shaped shell (2) and U-shaped heat exchange of heat pipe (1), the bottom of described U-shaped shell (2) is provided with the gas inlet (4) be communicated with U-shaped heat exchange of heat pipe (1) inside, the top of U-shaped heat exchange of heat pipe (1) is provided with offgas outlet (5), described U-shaped shell (2) is provided with the cooling water inlet (6) and coolant outlet (7) that are communicated with mezzanine space (3), described cooling water inlet (6) place is connected with water inlet pipe (8), described coolant outlet (7) place is connected with drainpipe (9), it is characterized in that: described water inlet pipe (8) is provided with water pump (11) and flow control valve (12), described water inlet pipe (8) is provided with inflow temperature checkout gear (13), described drainpipe (9) is provided with outlet water temperature detecting device (14).
2. production of polysilicon hydrogenation furnace exhaust gas cooling device as claimed in claim 1, it is characterized in that: in described U-shaped heat exchange of heat pipe (1), be provided with impingement baffle (15), described impingement baffle (15) is arranged on gas inlet (4) place, described impingement baffle (15) comprises horizontally disposed circular baffle plate (151), the surrounding of described circular baffle plate (151) is provided with arc crimp (152), and described arc crimp (152) elder generation is to downward-extension and then upwards extend.
3. production of polysilicon hydrogenation furnace exhaust gas cooling device as claimed in claim 2, it is characterized in that: the top of described U-shaped heat exchange of heat pipe (1) is provided with secondary cooling apparatus (16), described secondary cooling apparatus (16) comprises compressor (161), condenser (162), evaporimeter (163), airtight cover body (164), the lower end of described cover body (164) is communicated with the offgas outlet (5) of U-shaped heat exchange of heat pipe (1), the upper end of cover body (164) is provided with exhaust outlet (165), described evaporimeter (163) is arranged in airtight cover body (164), described compressor (161), condenser (162) is arranged on cover body (164) outward, the outlet of compressor (161) is communicated with by coolant media pipe with the import of condenser (162), the outlet of condenser (162) is communicated with by coolant media pipe with the import of evaporimeter (163), the outlet of evaporimeter (163) is communicated with by coolant media pipe with the import of compressor (161).
4. production of polysilicon hydrogenation furnace exhaust gas cooling device as claimed in claim 3, is characterized in that: the coolant media pipe between compressor (161) and condenser (162) is provided with flow control valve (166).
5. production of polysilicon hydrogenation furnace exhaust gas cooling device as claimed in claim 4, is characterized in that: described U-shaped shell (2) is provided with journal stirrup (17).
6. production of polysilicon hydrogenation furnace exhaust gas cooling device as claimed in claim 5, is characterized in that: be provided with multiple deflection plate (18) in described U-shaped heat exchange of heat pipe (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520872408.8U CN205090834U (en) | 2015-11-04 | 2015-11-04 | Polycrystalline silicon production hydrogenation furnace tail gas cooling device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520872408.8U CN205090834U (en) | 2015-11-04 | 2015-11-04 | Polycrystalline silicon production hydrogenation furnace tail gas cooling device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205090834U true CN205090834U (en) | 2016-03-16 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520872408.8U Expired - Fee Related CN205090834U (en) | 2015-11-04 | 2015-11-04 | Polycrystalline silicon production hydrogenation furnace tail gas cooling device |
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| CN (1) | CN205090834U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114272635A (en) * | 2022-02-15 | 2022-04-05 | 深圳市华信一机械有限公司 | Acid gas treatment device for water bath internalization of lead-acid battery |
| CN115808287A (en) * | 2023-02-08 | 2023-03-17 | 中国空气动力研究与发展中心超高速空气动力研究所 | Stagnation point ablation test water-cooling model support for high-temperature flow field |
-
2015
- 2015-11-04 CN CN201520872408.8U patent/CN205090834U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114272635A (en) * | 2022-02-15 | 2022-04-05 | 深圳市华信一机械有限公司 | Acid gas treatment device for water bath internalization of lead-acid battery |
| CN115808287A (en) * | 2023-02-08 | 2023-03-17 | 中国空气动力研究与发展中心超高速空气动力研究所 | Stagnation point ablation test water-cooling model support for high-temperature flow field |
| CN115808287B (en) * | 2023-02-08 | 2023-04-14 | 中国空气动力研究与发展中心超高速空气动力研究所 | Stagnation point ablation test water-cooling model support for high-temperature flow field |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160316 Termination date: 20201104 |
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| CF01 | Termination of patent right due to non-payment of annual fee |