CN205088298U - Metal winding surface high temperature vacuum magnetron sputter coating machine - Google Patents
Metal winding surface high temperature vacuum magnetron sputter coating machine Download PDFInfo
- Publication number
- CN205088298U CN205088298U CN201520908522.1U CN201520908522U CN205088298U CN 205088298 U CN205088298 U CN 205088298U CN 201520908522 U CN201520908522 U CN 201520908522U CN 205088298 U CN205088298 U CN 205088298U
- Authority
- CN
- China
- Prior art keywords
- vacuum cavity
- vacuum
- inflator
- winder
- magnetron sputtering
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
The utility model discloses a metal winding surface high temperature vacuum magnetron sputter coating machine, including the vacuum cavity, the air extractor, switch board and the aerator that communicates with the vacuum cavity, be provided with heating device and magnetron sputtering system in the vacuum cavity, air extractor and vacuum cavity intercommunication, air extractor and aerator are located the upper and lower both sides of vacuum cavity respectively, the extraction opening of air extractor is just to the inflation inlet of aerator, both ends are provided with machine of unreeling and rolling machine respectively about in the vacuum cavity, heating device and magnetron sputtering system are located the upper and lower both ends of vacuum cavity respectively, the aerator, the control signal input of machine of unreeling and rolling machine all is connected with the control signal output of switch board. The utility model discloses added machine of unreeling and rolling machine in the vacuum cavity, made the metal winding expand to realize that linear transmission adds in succession nice and warm coating film, it is more even to add nice and warm coating film, the rete more firmly, finer and close.
Description
Technical field
The utility model relates to a kind of vacuum coating film equipment, particularly relates to a kind of metallic coil belt surface high-temperature vacuum magnetron sputtering coater.
Background technology
The excellent specific property that superconducting material has makes it from from being found, and just illustrates tempting application prospect to the mankind.But want practical application superconducting material to be subject to again the restriction of series of factors, first this is its critical parameter, the problems (how the superconducting material of such as fragility makes soft and fine wire rod just series of process problem) such as the technique secondly also having material to make, in the processes process of superconducting material, need to use vacuum coating film equipment.
Vacuum high-temperature magnetron sputtering is the improvement of conventional magnetron sputtering mode, it is the developing direction of following high-end magnetron sputtering, for the defect in coating process and deficiency, can play and well improve and make up effect, make the vacuum plating rete of metal winding evenly, finer and close, sticking power is better, is particularly useful for small-sized, slim, flexible part.
High temperature winding magnetron sputtering coater is now in blank at home, be abroad also difficult to see, and import equipment is due to many-sided reason, is difficult to buy, and therefore we are in the urgent need to developing a kind of high performance high temperature winding magnetron sputtering coater, to fill the domestic gaps.
The metal winding high temperature winding magnetron sputtering coater of current employing forms primarily of vacuum vessel, magnetic control sputtering system, heating system, exhaust system and housing.To treat article entirety be needed to put into furnace chamber, then bleed, heat, plated film, cooling, venting.Metal winding due to existing magnetron sputtering coater is that entire volume is put into, and do not launch, outermost layer blocks internal layer, and metallic coil belt surface can not be heated and plated film completely, therefore has heating uniformity poor, the shortcomings such as plated film lack of homogeneity.Usually magnetron sputtering plating is low temperature plated film in addition, and the firmness of rete and compactness are not as high temperature magnetron sputtering plating.
Utility model content
The purpose of this utility model is just to provide a kind of heating, plated film evenly to solve the problem and the metallic coil belt surface high-temperature vacuum magnetron sputtering coater that metal winding can be made to launch.
The utility model is achieved through the following technical solutions above-mentioned purpose:
A kind of metallic coil belt surface high-temperature vacuum magnetron sputtering coater, comprise vacuum cavity, vacuum fan, housing and the inflator be communicated with described vacuum cavity, heating unit and magnetic control sputtering system is provided with in described vacuum cavity, described vacuum fan is communicated with described vacuum cavity, described vacuum fan and described inflator lay respectively at the both sides up and down of described vacuum cavity, the bleeding point of described vacuum fan is just to the inflation inlet of described inflator, two ends, left and right in described vacuum cavity are respectively arranged with unreeling machine and winder, described heating unit and described magnetic control sputtering system lay respectively at the two ends up and down in described vacuum cavity, described inflator, described unreeling machine is all connected with the control signal output terminal of described housing with the control signal input terminus of described winder.
Metal winding can be launched and pack up by unreeling machine and winder, heating unit and magnetic control sputtering system can act in metal winding more uniformly.
Preferably, the rotating shaft of described unreeling machine and the rotating shaft of described winder are vertically installed and are parallel to each other, and the winding up roller of described unreeling machine and described winder is all between described heating unit and described magnetic control sputtering system, and this structure is convenient to arrange metal winding.
Preferably, also gas distributor is provided with in described vacuum cavity, described gas distributor comprises ventpipe and distribution pipe, one end of described ventpipe is connected with the air outlet of described inflator, described distribution pipe is provided with an inlet mouth and multiple production well, the other end of described ventpipe is connected with the inlet mouth of described distribution pipe, and all vertically upward, this structure can make that inflator is more uniform blows to metal winding for multiple production wells of described ventilation distribution pipe.
The beneficial effects of the utility model are:
The utility model with the addition of unreeling machine and winder in vacuum cavity, metal winding is launched, thus realizes Linear transmission laser heating and plated film, heating and plated film evenly, rete more firmly, finer and close.
Accompanying drawing explanation
Fig. 1 is the structural representation of metallic coil belt surface high-temperature vacuum magnetron sputtering coater described in the utility model;
In figure: the winding of 1-metal, 2-heating unit, 3-unreeling machine, 4-vacuum cavity, 5-vacuum fan, 6-winder, 7-inflator, 8-gas distributor, 801-ventpipe, 802-distribution pipe, 803-production well, 9-magnetic control sputtering system.
Embodiment
Below in conjunction with accompanying drawing, the utility model is described in further detail:
As shown in Figure 1, the utility model comprises vacuum cavity 4, vacuum fan 5, housing and the inflator 7 be communicated with vacuum cavity 4, heating unit 2 and magnetic control sputtering system 9 is provided with in vacuum cavity 4, vacuum fan 5 is communicated with vacuum cavity 4, vacuum fan 5 and inflator 7 lay respectively at the both sides up and down of vacuum cavity 4, the bleeding point of vacuum fan 5 is just to the inflation inlet of inflator 7, two ends, left and right in vacuum cavity 4 are respectively arranged with unreeling machine 3 and winder 6, heating unit 2 and magnetic control sputtering system 9 lay respectively at the two ends up and down in vacuum cavity 4, inflator 7, unreeling machine 3 is all connected with the control signal output terminal of housing with the control signal input terminus of winder 6.
In the present embodiment, the rotating shaft of unreeling machine 3 and the rotating shaft of winder 6 are vertically installed and are parallel to each other, and the winding up roller of unreeling machine 3 and winder 6 is all between heating unit 2 and magnetic control sputtering system 9.Gas distributor 8 is also provided with in vacuum cavity 4, gas distributor 8 comprises ventpipe 801 and distribution pipe 802, one end of ventpipe 801 is connected with the air outlet of inflator 7, distribution pipe 802 is provided with an inlet mouth and multiple production well 803, the other end of ventpipe 801 is connected with the inlet mouth of distribution pipe 802, and multiple production wells 803 of ventilation distribution pipe 802 all vertically upward.
Position, direction described in foregoing is all using Fig. 1 as reference, and housing does not draw in the drawings.
The principle of work of metallic coil belt surface high-temperature vacuum magnetron sputtering coater described in the utility model is as follows: be wrapped on unreeling machine 3 by metal winding 1 to be coated, and the pull-out of its termination is wrapped on winder 6, now multiple production wells of gas distributor 8 be all positioned at metal winding 1 below and towards metal winding 1, heating unit 2 be just in time positioned at metal winding 1 top and towards metal winding 1.Some production wells 803 are uniformly distributed in distribution pipe 802 end face corresponding with metal winding 1.In vacuum cavity 4, housing controls unreeling machine 3 and winder 6 action, thus drive metal winding 1 to release from unreeling machine 3, and be wrapped on winder 6, the whole course of action of metal winding 1 is constant velocity linear's motion, in the process, magnetic control sputtering system 9 starts, and heated by heating unit 2 pairs of metal winding 1, by inflator 7 and gas distributor 8 pairs of metal winding 1 surface uniform inflations of metal winding 1 side, bled by the vacuum fan 5 of metal winding 1 opposite side again, so just can realize uniform coated.
These are only preferred embodiment of the present utility model, not in order to limit the utility model, all do within spirit of the present utility model and principle any amendment, equivalent to replace and improvement etc., all should be included in protection domain of the present utility model.
Claims (3)
1. a metallic coil belt surface high-temperature vacuum magnetron sputtering coater, comprise vacuum cavity, vacuum fan and housing, heating unit and magnetic control sputtering system is provided with in described vacuum cavity, described vacuum fan is communicated with described vacuum cavity, it is characterized in that: also comprise the inflator be communicated with described vacuum cavity, described vacuum fan and described inflator lay respectively at the both sides up and down of described vacuum cavity, the bleeding point of described vacuum fan is just to the inflation inlet of described inflator, two ends, left and right in described vacuum cavity are respectively arranged with unreeling machine and winder, described heating unit and described magnetic control sputtering system lay respectively at the two ends up and down in described vacuum cavity, described inflator, described unreeling machine is all connected with the control signal output terminal of described housing with the control signal input terminus of described winder.
2. metallic coil belt surface high-temperature vacuum magnetron sputtering coater according to claim 1, it is characterized in that: the rotating shaft of described unreeling machine and the rotating shaft of described winder are vertically installed and be parallel to each other, the winding up roller of described unreeling machine and described winder is all between described heating unit and described magnetic control sputtering system.
3. metallic coil belt surface high-temperature vacuum magnetron sputtering coater according to claim 1, it is characterized in that: in described vacuum cavity, be also provided with gas distributor, described gas distributor comprises ventpipe and distribution pipe, one end of described ventpipe is connected with the air outlet of described inflator, described distribution pipe is provided with an inlet mouth and multiple production well, the other end of described ventpipe is connected with the inlet mouth of described distribution pipe, and multiple production wells of described ventilation distribution pipe all vertically upward.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520908522.1U CN205088298U (en) | 2015-11-13 | 2015-11-13 | Metal winding surface high temperature vacuum magnetron sputter coating machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520908522.1U CN205088298U (en) | 2015-11-13 | 2015-11-13 | Metal winding surface high temperature vacuum magnetron sputter coating machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205088298U true CN205088298U (en) | 2016-03-16 |
Family
ID=55479003
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520908522.1U Active CN205088298U (en) | 2015-11-13 | 2015-11-13 | Metal winding surface high temperature vacuum magnetron sputter coating machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205088298U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110616406A (en) * | 2018-11-29 | 2019-12-27 | 爱发科豪威光电薄膜科技(深圳)有限公司 | Magnetron sputtering coating machine |
-
2015
- 2015-11-13 CN CN201520908522.1U patent/CN205088298U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110616406A (en) * | 2018-11-29 | 2019-12-27 | 爱发科豪威光电薄膜科技(深圳)有限公司 | Magnetron sputtering coating machine |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103990798A (en) | High-temperature powder bed system for laser additive manufacture | |
| CN202430352U (en) | High-temperature spinning manifold | |
| CN103557710B (en) | A kind of Rapid Circulation air-cooling vacuum furnace | |
| CN203785312U (en) | Rotary series-pole magnetic refrigeration system | |
| CN109385648A (en) | A kind of copper foil warpage annealing device and method | |
| CN102976730A (en) | Method for preparing MnZn ferrite magnetic core by multi-physical field coupling | |
| CN205088298U (en) | Metal winding surface high temperature vacuum magnetron sputter coating machine | |
| CN207515435U (en) | A kind of cloth shaping and drying device | |
| CN209588608U (en) | A kind of hot thermostatic drying chamber of high efficiency neodymium iron boron magnetic body productive power | |
| CN206721209U (en) | A kind of experiment insulating box | |
| CN211601011U (en) | Air replacement device for carbon fiber plate production workshop | |
| CN107777861A (en) | Water circulation system built in a kind of mould | |
| CN203312027U (en) | Magnetic core transverse magnetic field heat treatment furnace | |
| CN203922996U (en) | A kind of lear cooling duct energy conserving system | |
| CN105181003B (en) | Strong circulating energy-efficient type extra high voltage line ice-melt experiment high current system | |
| CN103882397B (en) | Reaction chamber and magnetron sputtering equipment | |
| CN207166815U (en) | A kind of electromagnetic induction heating type crucible | |
| CN206118092U (en) | A heat preservation device for microwave smelting furnace | |
| CN207987285U (en) | A kind of cooling device for silicon steel sheet annealing passivation technique | |
| CN207515512U (en) | A kind of energy comprehensive utilization system for kiln | |
| CN202738357U (en) | Novel warehouse-type container data center | |
| CN205295448U (en) | Sputter cooling device in production of nickel target | |
| CN203055551U (en) | Baking device for varnished wire | |
| CN204166404U (en) | Semiconductor thermostatic and temperature electric cabinet | |
| CN203535518U (en) | A full-automatic computer temperature control apparatus |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |