CN205084628U - Filter system of prewetting - Google Patents
Filter system of prewetting Download PDFInfo
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- CN205084628U CN205084628U CN201520788450.1U CN201520788450U CN205084628U CN 205084628 U CN205084628 U CN 205084628U CN 201520788450 U CN201520788450 U CN 201520788450U CN 205084628 U CN205084628 U CN 205084628U
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- prewetting
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Abstract
The utility model provides a filter system of prewetting, include: connect the affair confession liquid end in the factory, carry the liquor charging device of the liquid of prewetting, a plurality of filters of prewetting waited, each filter include inlet, liquid outlet and gas outlet, each filter pass through inlet and liquid outlet establish ties in in the output and the return circuit between the input of liquor charging device, be provided with the control valve between each filter, factory's affair waste liquid end is connected to the gas outlet of each filter behind the control valve, control the pressure control device of the liquid velocity of flow prewets. The utility model discloses a pressure control come to adjust the velocity of flow of the liquid of prewetting, so to the filter carry on the bubble discharge with the operation of filtration membrane infiltration, realize the higher effect of prewetting, the utility model discloses but the processing of prewetting of a plurality of filters of simultaneous processing, through the return circuit to the liquid of prewetting filter, cyclic utilization, saved the liquid of prewetting, and because manufacturing cost has been saved greatly to the use amount effectual and then reducible photoresistance of prewetting.
Description
Technical field
The utility model relates to manufacture of semiconductor field, particularly relates to a kind of filter and to prewet system.
Background technology
In manufacture of semiconductor, generally include multiple working procedure, wherein the Butut of wafer needs to adopt photoresistance, and carries out controlled exposure to photoresistance.Photoresistance is a kind of photoactive substance with specific molecular structure, it can change under the effect of incident light, it is very important material in semiconductor fabrication process, major part photoresistance is liquid, need photoresistance to push to nozzle to be coated with by a memory when crystal column surface paving photoresistance, but also need by a filter, remove the impurity in photoresistance.Filter needs before use through pre-wetted treatment, to reduce over the bubble in filter, saves photoresistance, reduces processing procedure defect.
Along with gold-tinted processing procedure develops into 28nm from 0.13um, the size of filter is also down to 5nm from 50nm, and there has also been higher requirement for the filter quality of filter and cleanliness factor, so the effect of prewetting of corresponding filter also becomes more important.
Traditional filter is prewetted and is comprised two kinds of methods, and a kind of method is that liquid of prewetting loads in drop bottle, then is extruded in filter with drop bottle liquid of prewetting, then a period of time is placed, have bubble in such process after-filter, and the effect of impregnation of film is bad, cleanliness factor is not high yet; Another kind method is installed to by filter on a vacant photoresistance pipeline, then constantly cleaning and filtering manually, and such operation is cumbersome, and waste of manpower, and have artificial uncontrollable factor to affect, effect is also bad.
Because prewet program waste of manpower, the waste of traditional filter is prewetted liquid, and effect is not fine, therefore cannot meet the requirement of gold-tinted processing procedure, how improve the effect of prewetting of filter, saving cost has become one of those skilled in the art's problem demanding prompt solution.
Utility model content
The shortcoming of prior art in view of the above, the purpose of this utility model is to provide a kind of filter to prewet system, prewets that weak effect, processing procedure defect are many, high in cost of production problem for solving prior art middle filtrator.
For achieving the above object and other relevant objects, the utility model provides a kind of filter to prewet system, and described filter system of prewetting at least comprises:
One is connected to factory's business feed flow end, for carrying the liquid feeding device of liquid of prewetting;
Some filters to be prewetted, each filter comprises inlet, liquid outlet and gas outlet, each filter is series in the loop between the output of described liquid feeding device and input by inlet and liquid outlet, be provided with control valve between each filter, the gas outlet of each filter connects factory's business waste liquid end after control valve;
The pressure control device of the described prewetting liquid rate of flow of fluid of one control.
More preferably, described liquid feeding device and described factory are engaged in being provided with flow control valve, flow indicator between feed flow end.
More preferably, described liquid feeding device is infusion pump.
Preferably, also flowmeter is connected with after the control valve of each filter outlet mouth.
Preferably, flowmeter is provided with in the loop between the output of described liquid feeding device and input.
Preferably, described control valve is electromagnetic flow valve.
Preferably, the size of each filter reduces gradually along the flow direction of liquid.
Preferably, the liquid outlet of afterbody filter is also connected to described factory business waste liquid end.
Preferably, liquid of prewetting described in is alcohol or isopropyl alcohol.
As mentioned above, filter of the present utility model is prewetted system, has following beneficial effect:
Filter of the present utility model system of prewetting regulates the flow velocity of liquid of prewetting by Stress control, and then carries out the operation of bubble discharge and filter membrane infiltration to filter, realizes higher effect of prewetting; The filter system of prewetting of the present utility model can process the pre-wetted treatment of multiple filter simultaneously, by loop, liquid of prewetting is filtered, recycled, save liquid of prewetting, and owing to prewetting effective and then the use amount of photoresistance can be reduced, greatly save production cost.
Accompanying drawing explanation
Fig. 1 is shown as filter of the present utility model and prewets system schematic.
Fig. 2 is shown as the internal structure schematic diagram of filter.
Fig. 3 is shown as the relation schematic diagram of bubbles volume and pressure in filter.
Fig. 4 ~ Fig. 7 is shown as filter of the present utility model and prewets System Working Principle schematic diagram.
Element numbers explanation
1 filter is prewetted system
11 factory's business feed flow ends
111 first magnetic valves
112 flow control valves
113 flow indicators
114 second magnetic valves
115 the 3rd magnetic valves
12 liquid feeding devices
13 pressure control devices
141 ~ 143 the first ~ three filters
151 ~ 157 the first ~ seven control valves
161 ~ 164 the first ~ four flowmeters
17 factory's business waste liquid ends
Detailed description of the invention
Below by way of specific instantiation, embodiment of the present utility model is described, those skilled in the art the content disclosed by this description can understand other advantages of the present utility model and effect easily.The utility model can also be implemented or be applied by detailed description of the invention different in addition, and the every details in this description also can based on different viewpoints and application, carries out various modification or change not deviating under spirit of the present utility model.
Refer to Fig. 1 ~ Fig. 7.It should be noted that, the diagram provided in the present embodiment only illustrates basic conception of the present utility model in a schematic way, then only the assembly relevant with the utility model is shown in graphic but not component count, shape and size when implementing according to reality is drawn, it is actual when implementing, and the kenel of each assembly, quantity and ratio can be a kind of change arbitrarily, and its assembly layout kenel also may be more complicated.
As shown in Figure 1, the utility model provides a kind of filter to prewet system 1, and described filter system 1 of prewetting comprises:
Factory's business feed flow end 11, liquid feeding device 12, pressure control device 13, some filters 14 to be prewetted, some control valves 15, some flowmeters 16 and factory's business waste liquid end 17.
Particularly, as shown in Figure 1, described liquid feeding device 12 to be prewetted liquid for system 1 conveying of prewetting of described filter.In the present embodiment, described in liquid of prewetting be alcohol or isopropyl alcohol, technique, object are different, and the selection of liquid of prewetting is not identical yet, is not limited with the present embodiment.In the present embodiment, described liquid feeding device 12 is infusion pump, comprises 2 inputs, 1 output and 1 control end.
The first input end of described liquid feeding device 12 is connected to described factory business feed flow end 11, in the present embodiment, described liquid feeding device 12 and described factory are engaged in being provided with the first magnetic valve 111, flow control valve 112, flow indicator 113 and the second magnetic valve 114 between feed flow end 11.Described liquid feeding device 12 extracts from described factory business feed flow end 11 liquid of prewetting, described first magnetic valve 111, flow control valve 112 and the second magnetic valve 113 control the flow direction of liquid of prewetting and flow, the flow reading liquid of prewetting directly perceived from described flow indicator 113, is convenient to regulate simultaneously.
The control end of described liquid feeding device 12 is connected to described pressure control device 13, controls by the flow velocity of described pressure control device 13 to the liquid of prewetting exported in described liquid feeding device 12.In the present embodiment, N discharged by described pressure apparatus 13
2(nitrogen), passes through N
2different pressure is applied to liquid of prewetting, and then controls to prewet the flow velocity of liquid.Described pressure control device 13 realizes the control of prewetting liquid rate of flow of fluid by other different modes or gas, is not limited with the present embodiment.
Form series loop between the output of described liquid feeding device 12 and the second input, comprise some filters 14 to be prewetted, as shown in Figure 2, filter comprises shell, filter membrane, inlet, liquid outlet and gas outlet.Liquid enters filter from inlet, if discharge from gas outlet, then liquid is without filter membrane; If discharge from liquid outlet, then liquid is through filter membrane.In the present embodiment, be preferably 3 filters, be respectively the first filter 141, second filter 142 and the 3rd filter 143.In the present embodiment, the size of described first filter 141 is greater than the size of described second filter 142, and the size of described second filter 142 is greater than the size of described 3rd filter 143.Wherein, the inlet of described first filter 141 is connected to the output of described liquid feeding device 12 by the 3rd magnetic valve 115, the liquid outlet of described first filter 141 is connected to the inlet of described second filter 142 by the first control valve 151, the liquid outlet of described second filter 142 is connected to the inlet of described 3rd filter 143 by the second control valve 152, the liquid outlet of described 3rd filter 143 is connected to the second input of described liquid feeding device 12 by the 3rd control valve 153, form series loop.Be provided with first-class gauge 161 in loop between the output of described liquid feeding device 12 and the second input, in the present embodiment, described first-class gauge 161 is connected between described 3rd filter 143 and described 3rd control valve 153.The gas outlet of described first filter 141 is connected to described factory business waste liquid end 17 by the 4th control valve 154, the gas outlet of described second filter 142 is connected to described factory business waste liquid end 17 by the 5th control valve 155, the gas outlet of described 3rd filter 143 is connected to described factory business waste liquid end 17 by the 6th control valve 156, in the present embodiment, described 4th control valve 154, described 5th control valve 155, described 6th control valve 156 and described factory are engaged in being provided with flowmeter between waste liquid end 17, be respectively second gauge 162, 3rd flowmeter 163 and the 4th flowmeter 164, enforcement monitoring can be carried out to the flow of the liquid of prewetting of each pipeline by each flowmeter.In the present embodiment, each control valve 15 is electromagnetic flow valve.
As shown in Figure 1, the output of described first-class gauge 161 is also connected to described factory business waste liquid end 17 by the 7th control valve 157, to discharge the liquid of prewetting that described filter prewets in system 1.In the present embodiment, described 7th control valve 157 is electromagnetic flow valve.
As shown in Figure 3, pressure is relevant with the bubbles volume in filter, and when a certain pressure, the bubbles volume in filter can reach minimum, is 2.5psi (being about 0.017Mpa) in the present embodiment.Therefore, filter of the present utility model system of prewetting regulates the flow velocity of liquid of prewetting by Stress control, pressure is a little bit smaller at the beginning, large quantity of air in filter is slowly displaced and slowly infiltrates filter membrane, then pressure strengthens gradually again, and the liquid that makes to prewet reaches the balance of filter membrane in filter quickly through filter membrane, realize higher effect of prewetting.The filter system of prewetting of the present utility model can process the pre-wetted treatment of multiple filter simultaneously, by loop, liquid of prewetting is filtered, recycled, save liquid of prewetting, and owing to prewetting effective and then the use amount of photoresistance can be reduced, greatly save production cost.
Following table is depicted as filter of the present utility model and prewets a kind of working method of system, and its working method is various, is not limited with the present embodiment.
| Step | Time (s) | Object | Flow (ml) | Flow velocity (ml/min) | Pressure (Mpa) |
| 1 | 120 | Discharge the bubble in the first filter | 20 | 10 | 0.02 |
| 2 | 120 | Discharge the bubble in the first filter | 100 | 50 | 0.1 |
| 3 | 120 | Discharge the bubble in the second filter | 20 | 10 | 0.02 |
| 4 | 120 | Discharge the bubble in the second filter | 100 | 50 | 0.1 |
| 5 | 120 | Discharge the bubble in the 3rd filter | 20 | 10 | 0.02 |
| 6 | 120 | Discharge the bubble in the 3rd filter | 100 | 50 | 0.1 |
| 7 | 1200 | First, second, third filter circulation | 1500 | 75 | 0.15 |
| 8 | 600 | Stop feed flow | 0 | 0 | NA |
| 9 | 120 | Discharge the bubble in the first filter | 100 | 50 | 0.1 |
| 10 | 120 | Discharge the bubble in the second filter | 100 | 50 | 0.1 |
| 11 | 120 | Discharge the bubble in the 3rd filter | 100 | 50 | 0.1 |
| 12 | 1200 | First, second, third filter circulation | 1500 | 75 | 0.15 |
| 13 | 600 | Stop feed flow | 0 | 0 | NA |
Shown in upper table and Fig. 4, perform step 1, open described 4th control valve 154, close described first control valve 151, liquid of prewetting exports from described factory business feed flow end 11, and enters the inlet of described first filter 141 through described liquid feeding device 12, and exports from the gas outlet of described first filter 141, directly enter described factory business waste liquid end 17, discharge the bubble in described first filter 141.Be 0.02Mpa by described pressure control device 13 by Stress control, the flow-control of liquid of prewetting is 20ml, and flow control is 10ml/min.
Shown in upper table and Fig. 4, perform step 2, by described pressure control device 13, pressure is risen to 0.1Mpa, the flow of liquid of prewetting rises to 100ml, and flow velocity rises to 50ml/min, is discharged by the tiny bubble in described first filter 141 further.
Shown in upper table and Fig. 5, perform step 3, open described first control valve 151, described 5th control valve 155, close described second control valve 152, described 4th control valve 154, liquid of prewetting exports from described factory business feed flow end 11, and the inlet of described first filter 141 is entered through described liquid feeding device 12, and export from the liquid outlet of described first filter 141, enter the inlet of described second filter 142 again, export from the gas outlet of described second filter 142, directly enter described factory business waste liquid end 17, filter membrane in described first filter 141 is infiltrated, bubble in described second filter 142 is discharged.Be 0.02Mpa by described pressure control device 13 by Stress control, the flow-control of liquid of prewetting is 20ml, and flow control is 10ml/min.
Shown in upper table and Fig. 5, perform step 4, by described pressure control device 13, pressure is risen to 0.1Mpa, the flow of liquid of prewetting rises to 100ml, and flow velocity rises to 50ml/min, is discharged by the tiny bubble in described second filter 142 further.
Shown in upper table and Fig. 6, perform step 5, open described first control valve 151, described second control valve 152, described 6th control valve 156, close described 3rd control valve 153, described 4th control valve 154, described 5th control valve 155, liquid of prewetting exports from described factory business feed flow end 11, and the inlet of described first filter 141 is entered through described liquid feeding device 12, and export from the liquid outlet of described first filter 141, enter the inlet of described second filter 142 again, export from the liquid outlet of described second filter 142, enter the inlet of described 3rd filter 143 again, export from the gas outlet of described 3rd filter 142, directly enter described factory business waste liquid end 17, described first filter 141, filter membrane in described second filter 142 is infiltrated, bubble in described 3rd filter 143 is discharged.Be 0.02Mpa by described pressure control device 13 by Stress control, the flow-control of liquid of prewetting is 20ml, and flow control is 10ml/min.
Shown in upper table and Fig. 6, perform step 6, by described pressure control device 13, pressure is risen to 0.1Mpa, the flow of liquid of prewetting rises to 100ml, and flow velocity rises to 50ml/min, is discharged by the tiny bubble in described 3rd filter 143 further.
Shown in upper table and Fig. 7, perform step 7, open described first control valve 151, described second control valve 152, described 3rd control valve 153, close described 4th control valve 154, described 5th control valve 155, described 6th control valve 156, described 7th control valve 157, liquid of prewetting exports from described factory business feed flow end 11, and the inlet of described first filter 141 is entered through described liquid feeding device 12, and export from the liquid outlet of described first filter 141, enter the inlet of described second filter 142 again, export from the liquid outlet of described second filter 142, enter the inlet of described 3rd filter 143 again, export from the liquid outlet of described 3rd filter 142, then described liquid feeding device 12 is returned, described first filter 141, filter membrane in described second filter 142 and described 3rd filter 143 is infiltrated.Be 0.15Mpa by described pressure control device 13 by Stress control, the flow-control of liquid of prewetting is 1500ml, and flow control is 75ml/min.
Perform step 8, now described factory business feed flow end 11 stops feed flow, the liquid of prewetting of prewetting in system due to filter of the present utility model recycles, can ensure that the liquid of prewetting in loop is in flow regime all the time, liquid of avoiding prewetting does not flow for a long time, causes more residual impurity on filter tube wall.
Shown in upper table and Fig. 4, perform step 9, by described pressure control device 13, pressure is risen to 0.1Mpa, the flow of liquid of prewetting rises to 100ml, and flow velocity rises to 50ml/min, is discharged by the tiny bubble in described first filter 141 further.
Shown in upper table and Fig. 5, perform step 10, by described pressure control device 13, pressure is risen to 0.1Mpa, the flow of liquid of prewetting rises to 100ml, flow velocity rises to 50ml/min, is discharged by the tiny bubble in described second filter 142 further.
Shown in upper table and Fig. 6, perform step 11, by described pressure control device 13, pressure is risen to 0.1Mpa, the flow of liquid of prewetting rises to 100ml, flow velocity rises to 50ml/min, is discharged by the tiny bubble in described 3rd filter 143 further.
Shown in upper table and Fig. 7, perform step 12, be 0.15Mpa by described pressure control device 13 by Stress control, the flow-control of liquid of prewetting is 1500ml, flow control is 75ml/min, realizes the infiltration of the filter membrane in described first filter 141, described second filter 142 and described 3rd filter 143.
Perform step 13, now described factory business feed flow end 11 stops feed flow, and the liquid of prewetting in loop is in flow regime all the time.
After each step execution terminates, open described 7th control valve 157, liquid of prewetting enters described factory business waste liquid end 17.
Whole process of prewetting can be performed by board that the flow process that sets completes automatically, and what each step performs how long, how many steps, how much all can edit, and in the present embodiment, flow process is by PLC programming realization, easy to operate.In the present embodiment, suppose that step 9 ~ step 13 circulates execution 5 times, each filter probably can be saved 9000ml and to prewet liquid, and three is exactly 27000ml, and add the photoresistance of saving, production cost reduces greatly.
In sum, the utility model provides a kind of filter to prewet system, comprising: one is connected to factory's business feed flow end, for carrying the liquid feeding device of liquid of prewetting; Some filters to be prewetted, each filter comprises inlet, liquid outlet and gas outlet, each filter is series in the loop between the output of described liquid feeding device and input by inlet and liquid outlet, be provided with control valve between each filter, the gas outlet of each filter connects factory's business waste liquid end after control valve; The pressure control device of the described prewetting liquid rate of flow of fluid of one control.Filter of the present utility model system of prewetting regulates the flow velocity of liquid of prewetting by Stress control, and then carries out the operation of bubble discharge and filter membrane infiltration to filter, realizes higher effect of prewetting; The filter system of prewetting of the present utility model can process the pre-wetted treatment of multiple filter simultaneously, by loop, liquid of prewetting is filtered, recycled, save liquid of prewetting, and owing to prewetting effective and then the use amount of photoresistance can be reduced, greatly save production cost.So the utility model effectively overcomes various shortcoming of the prior art and tool high industrial utilization.
Above-described embodiment is illustrative principle of the present utility model and effect thereof only, but not for limiting the utility model.Any person skilled in the art scholar all without prejudice under spirit of the present utility model and category, can modify above-described embodiment or changes.Therefore, such as have in art and usually know that the knowledgeable modifies or changes not departing from all equivalences completed under the spirit and technological thought that the utility model discloses, must be contained by claim of the present utility model.
Claims (9)
1. filter is prewetted a system, and it is characterized in that, described filter system of prewetting at least comprises:
One is connected to factory's business feed flow end, for carrying the liquid feeding device of liquid of prewetting;
Some filters to be prewetted, each filter comprises inlet, liquid outlet and gas outlet, each filter is series in the loop between the output of described liquid feeding device and input by inlet and liquid outlet, be provided with control valve between each filter, the gas outlet of each filter connects factory's business waste liquid end after control valve;
The pressure control device of the described prewetting liquid rate of flow of fluid of one control.
2. filter according to claim 1 is prewetted system, it is characterized in that: described liquid feeding device and described factory are engaged in being provided with flow control valve, flow indicator between feed flow end.
3. filter according to claim 1 and 2 is prewetted system, it is characterized in that: described liquid feeding device is infusion pump.
4. filter according to claim 1 is prewetted system, it is characterized in that: be also connected with flowmeter after the control valve of each filter outlet mouth.
5. filter according to claim 1 is prewetted system, it is characterized in that: be provided with flowmeter in the loop between the output of described liquid feeding device and input.
6. filter according to claim 1 is prewetted system, it is characterized in that: described control valve is electromagnetic flow valve.
7. filter according to claim 1 is prewetted system, it is characterized in that: the size of each filter reduces gradually along the flow direction of liquid.
8. filter according to claim 1 is prewetted system, it is characterized in that: the liquid outlet of afterbody filter is also connected to described factory business waste liquid end.
9. filter according to claim 1 is prewetted system, it is characterized in that: described in liquid of prewetting be alcohol or isopropyl alcohol.
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|---|---|---|---|
| CN201520788450.1U CN205084628U (en) | 2015-10-12 | 2015-10-12 | Filter system of prewetting |
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| CN201520788450.1U CN205084628U (en) | 2015-10-12 | 2015-10-12 | Filter system of prewetting |
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| CN205084628U true CN205084628U (en) | 2016-03-16 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108854556A (en) * | 2017-05-16 | 2018-11-23 | 东京毅力科创株式会社 | Liquid filter humidity method |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108854556A (en) * | 2017-05-16 | 2018-11-23 | 东京毅力科创株式会社 | Liquid filter humidity method |
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