CN205081088U - A level adjustment device for in semiconductor plasma equipment - Google Patents
A level adjustment device for in semiconductor plasma equipment Download PDFInfo
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- CN205081088U CN205081088U CN201520805580.1U CN201520805580U CN205081088U CN 205081088 U CN205081088 U CN 205081088U CN 201520805580 U CN201520805580 U CN 201520805580U CN 205081088 U CN205081088 U CN 205081088U
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- water
- adjusting bolt
- plasma equipment
- semiconductor plasma
- cooling piece
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Abstract
A level adjustment device for in semiconductor plasma equipment, including triangle water -cooling piece and triangular supports seat, both sizes are the same with the shape to connect through lock nut and adjusting bolt. The face that touches of lock nut and adjusting bolt and triangle water -cooling piece and triangular supports seated connection for the sphere. The utility model discloses utilizing adjusting bolt to drive top water -cooling piece, and then making the levelness of heating plate change, avoided the leveling error, the contact surface of lock nut and adjusting bolt and supporting seat, water -cooling piece is the sphere, has increased area of contact, and messenger's equipment is more stable, has improved processing quality and productivity.
Description
Technical field
The utility model relates to a kind of leveling device that can be used in semiconductor plasma equipment.
Background technology
Existing plasma semiconductor process equipment, the spray head typically using surfacing as bottom electrode as the heating plate of top crown and surfacing, applies voltage, forms plasma and carry out thin film deposition between upper bottom crown.
In above-mentioned technical process, the key affecting handicraft product quality is parallel between upper bottom crown, and it directly affects compactness and the uniformity of film in technical process.In semiconductor manufacturing equipment, need regularly to carry out disassembly, cleaning and replacing to hardware such as heating plate, shower plate, ceramic rings, each dismounting all needs the adjustment again equipment being carried out to levelness.
At present, the method precision of traditional adjusting process equipment level degree is lower, adopts disc spring connection can reduce the stability of equipment between water-cooled block and supporting seat, and the uniformity caused reduces problem can be remarkable all the more.Therefore, need to design a kind of novel leveling device, improve the uniformity of handicraft product, the needs improved constantly with adaptive technique.
Utility model content
For above-mentioned the deficiencies in the prior art, the utility model provides for the leveling device in semiconductor plasma equipment.
For achieving the above object, the technical solution adopted in the utility model is: for the leveling device in semiconductor plasma equipment, and comprise triangle water-cooled block and gusseted seat, both size and shapes are identical, and is connected with adjustment bolt by locking nut.Described locking nut and the face adjusting bolt and triangle water-cooled block and gusseted seated connection tactile are sphere.
Preferably, described locking nut and adjustment are bolted to triangle water-cooled block three summits place.
Preferably, described gusseted seat is connected with adjustment bolt by inner thread.
Preferably, the threaded adjustment precision of described adjustment bolt is 0.5mm.
The utility model utilizes adjustment bolt to drive top water-cooled block, and then the levelness of heating plate is changed, avoid leveling error, locking nut with adjustment bolt and supporting seat, water-cooled block contact-making surface be sphere, increase contact area, make equipment more stable, improve processing quality and production capacity.
Accompanying drawing explanation
Fig. 1 is structural representation of the present utility model.
Fig. 2 is the structural representation of locking nut and adjustment bolt.
Embodiment
Below in conjunction with the accompanying drawing in the utility model embodiment, to the technical scheme in the utility model embodiment carry out clear, intactly describe, obviously, described embodiment is only the utility model part embodiment, instead of whole embodiment.Based on the embodiment in the utility model, those of ordinary skill in the art are not making the every other embodiment obtained under creative work prerequisite, all belong to the scope of the utility model protection.
As shown in Figure 1: for the leveling device in semiconductor plasma equipment, comprise triangle water-cooled block 2 and gusseted seat 3, both size and shapes are identical, and are connected with adjustment bolt 4 by locking nut 1.Triangle water-cooled block is fixedly connected with heating plate.Described locking screw 1 face that is female and that adjust bolt 4 and triangle water-cooled block and gusseted seated connection tactile is sphere 5, make the contact-making surface moment be point cantact, the stability of equipment can be improved, and avoid leveling error, save the leveling time, thus improve processing quality and production capacity.Certain gap is left between triangle water-cooled block and adjustment bolt.Locking nut 1 and adjustment bolt 4 are fixed on triangle water-cooled block 2 three summits place, make triangle water-cooled block 2 and gusseted seat 3 stable for extended periods of time.Leveling device is fixed on below reaction cavity on slide unit, is regulated by 3, and adjustable 3 is not point-blank.
Gusseted seat is provided with through hole in three directions, and the position of 3 through holes is not on same straight line, and through-hole wall is provided with screw thread, and adjustment bolt lower end can screw in supporting seat through hole, with through-hole wall threaded engagement.The lower end protruding portion of adjustment bolt is hexagon bolt, by rotating hexagon bolt, bolt can be elevated vertically.The triangle water-cooled block same with gusseted seat is provided with through hole in three directions, adjusts bolt upper end coordinate with gap form with three, and make adjustment bolt directly through through hole, upper end is locked with locking nut.
Level(l)ing device of the present utility model in use, by regulating the hexagon part of adjustment bolt lower end, the adjustment bolt in a direction and supporting seat is made to produce relative displacement, adjustment bolt drives top water-cooled block to be subjected to displacement, and then plays the levelness regulating the heating plate connected with water-cooled block.
Claims (4)
1. for the leveling device in semiconductor plasma equipment, it is characterized in that: comprise triangle water-cooled block and gusseted seat, both size and shapes are identical, and be connected with adjustment bolt by locking nut, described locking nut and the face adjusting bolt and triangle water-cooled block and gusseted seated connection tactile are sphere.
2. as claimed in claim 1 for the leveling device in semiconductor plasma equipment, it is characterized in that: described locking nut and adjustment are bolted to triangle water-cooled block three summits place.
3. for the leveling device in semiconductor plasma equipment, it is characterized in that: described gusseted seat is connected with adjustment bolt by inner thread.
4. for the leveling device in semiconductor plasma equipment, it is characterized in that: the threaded adjustment precision of described adjustment bolt is 0.5mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520805580.1U CN205081088U (en) | 2015-10-16 | 2015-10-16 | A level adjustment device for in semiconductor plasma equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520805580.1U CN205081088U (en) | 2015-10-16 | 2015-10-16 | A level adjustment device for in semiconductor plasma equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205081088U true CN205081088U (en) | 2016-03-09 |
Family
ID=55433475
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520805580.1U Active CN205081088U (en) | 2015-10-16 | 2015-10-16 | A level adjustment device for in semiconductor plasma equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205081088U (en) |
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2015
- 2015-10-16 CN CN201520805580.1U patent/CN205081088U/en active Active
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address | ||
| CP03 | Change of name, title or address |
Address after: No.900 Shuijia, Hunnan District, Shenyang City, Liaoning Province Patentee after: Tuojing Technology Co.,Ltd. Address before: 110179 3rd floor, No.1-1 Xinyuan street, Hunnan New District, Shenyang City, Liaoning Province Patentee before: PIOTECH Co.,Ltd. |