CN205043348U - Laser detection device and laser processing system - Google Patents
Laser detection device and laser processing system Download PDFInfo
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- CN205043348U CN205043348U CN201520668021.0U CN201520668021U CN205043348U CN 205043348 U CN205043348 U CN 205043348U CN 201520668021 U CN201520668021 U CN 201520668021U CN 205043348 U CN205043348 U CN 205043348U
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Abstract
Provided is an induction system that detects is carried out to quality that laser detection device and laser processing system, laser detection device fall into the beam splitter of test light sum processing light, the light that jets out in to the follow beam splitter including the laser that can send laser lamp -house, and induction system still has the sensor. Laser processing system is except including laser detection device, thereby still judges the laser quality again after the quality information of utilizing the processing light of being told by the beam splitter to detect in carrying out laser beam machining's laser beam machining device and obtaining by induction system and control laser lamp -house's control part well or not, and laser lamp -house and induction system are connected with the control part respectively. Fall into test light sum processing light through the light that sends laser lamp -house to the quality that determines processing light through the quality that detects test light is fine or not, and based on such judgement, thereby the laser quality is judged the circumstances horse back that is bad and can be sent the feedback signal output defective products that prevents to regenerate. (B, )
Description
Technical field
the utility model relates to a kind of laser detector and laser-processing system.
Background technology
usually said laser processing technology of the prior art is the processing technology by making it produce surface or physical property change at processing object table surface irradiation laser.Processing object has many types, and the change of generation may be 2D sea level changes.Such as laser processing technology for irradiate laser on silicon chip, may make amorphous silicon film crystallization thus forms organosilyl technique.
the quality of the processing object of Laser Processing is closely bound up with the quality of processing the laser used.The state that machined object quality namely will be made to remain good, make the laser be irradiated on processing object can maintain the quality of machining need always.Because the quality of the quality and needs that are irradiated to the laser of processing object differs by more than certain limit, the so surperficial change of generation of processing object and the different of anticipation, also may because temperature or the reaction of processing object to light cause processing object to produce and envision different physical property changing.
but accomplish that the above-mentioned laser always sending the same quality is a very difficult technical task.The quality stability of the laser that current laser aid sends not is very high.The quality stability of the laser that the situation that especially laser frequency (frequencydraft) is variable or power density is variable (powerdensity) produces can be more undesirable.
because the laser quality that laser aid produces has such shortcoming, produce much bad situation when processing object is produced in a large number also a lot, so in enormous quantities bad meeting brings huge loss to the enterprise carrying out Laser Processing.Therefore in order to prevent large batch of bad product, feedback is obtained fast from laser aid, except the checkout gear whether sending laser can be measured merely in the past, need a kind of more senior technology, namely need to detect in real time the quality of light and the laser detector fed back, the technology of laser-processing system and laser detecting method.
Utility model content
the technical problems to be solved in the utility model is to provide a kind of laser detector.
in order to solve the problems of the technologies described above, the technical solution adopted in the utility model is: a kind of laser detector, comprise the beam splitter that the laser that LASER Light Source sends can be divided into test light and processing light, the induction installation detected the quality of the light penetrated from described beam splitter, induction installation also has sensor.
in some embodiments, the quality of the described light of needs detection comprises at least one in light frequency, power density.
in some embodiments, described LASER Light Source is gas laser source, the situation in Solid State Laser source or liquid laser source.
in some embodiments, described induction installation comprises the attenuator for regulating test light light quantity, and described attenuator is arranged in the light path that test light passes through.
in some embodiments, described induction installation also comprises the optical module for adjusting at least one eyeglass detecting light light path.
in some further embodiment, described eyeglass is to adjust position or the variable changeable type eyeglass of focal length.
in some further embodiment, described changeable type eyeglass is can change according to signal of telecommunication surface tension thus the liquid-type eyeglass of surface undergoes deformation.
another technical problem to be solved in the utility model is to provide a kind of laser-processing system.
in order to solve the problems of the technologies described above, the technical solution adopted in the utility model is: a kind of laser-processing system comprising the laser detector of above any one technical scheme, also comprise and utilize the processing light that separated by described beam splitter carry out the laser processing device of Laser Processing to processing object and obtain by judging laser quality quality after the quality information detected in described induction installation again thus the control part of LASER Light Source described in controlling, described LASER Light Source is connected with described control part respectively with described induction installation.
in some embodiments, described laser-processing system also comprises the alarm excitation apparatus be connected with described control part.
in some embodiments, described control part has the matched filter of the interfering signal removed in laser quality information.
scope of the present utility model, is not limited to the technical scheme of the particular combination of above-mentioned technical characteristic, also should contain simultaneously and be undertaken being combined by above-mentioned technical characteristic or its equivalent feature and other technical scheme of being formed.The technical characteristic that such as, disclosed in above-mentioned feature and the application (but being not limited to) has similar functions is replaced mutually and the technical scheme etc. formed.
because technique scheme is used, the utility model compared with prior art has following advantages: the utility model provides a kind of light by being sent by LASER Light Source to be divided into test light and processing light, and judge the quality quality of processing light by the quality detecting test light, based on such judgement, laser quality judging is that bad situation can send feedback signal at once thus prevent regeneration output defective products.
Accompanying drawing explanation
fig. 1 is the exemplary plot of said laser detector in the utility model;
fig. 2 is the exemplary plot of the induction installation indicated in Fig. 1;
fig. 3 is the exemplary plot of the impulse waveform of gas laser and the impulse waveform of Solid State Laser;
fig. 4 is the exemplary plot of the said laser-processing system of the utility model;
fig. 5 is the flow chart of the laser detecting method shown in another test of the utility model;
wherein: 100, laser detector 110, beam splitter; 102, light is processed; 104, test light; 120, induction installation; 122, sensor; 124, attenuator; 126, optical module; 20, LASER Light Source; 30, controller; 40, processing object; 400, laser-processing system; 410, laser processing device; 420, control part.
Detailed description of the invention
as shown in accompanying drawing 1, accompanying drawing 4, a kind of laser detector 100, for detecting the laser quality produced from LASER Light Source 20 in real time.Comprise the beam splitter 110 that the laser that LASER Light Source 20 sends can be divided into test light 104 and processing light 102, the induction installation 120 that the quality of the light of injection from described beam splitter 110 is detected.The quality of the described light that needs detect comprises at least one in light frequency, power density.Above-mentioned detection is not limited to the detection frequency of this test, also may for the situation of carrying out detecting according to Fixed Time Interval or the unfixed time interval.Above-mentioned light quality comprises at least one in the frequency (frequency) of laser and energy density (powerdensity).But this is not limited to this, the laser quality that may detect does not comprise frequency but comprises wavelength (wavelength).Because test light 104 has the same quality with processing light 102, the quality therefore by detecting test light 104 can know the information of the quality of processing light 102.
such beam splitter 110 is the optical elements light beam of incidence being divided into two-beam, has many types.One of them example to use semi-reflecting mirror (semireflectingmirror).Such semi-reflecting mirror is generally surface and is coated with thin aluminium film, and the light part usually miter angle degree can be injected reflects back through a part thus by light beam splitting.Other can also use the square beam splitter that prism is housed.Above-mentioned example is just in order to illustrate that the utility model is not limited to this.Processing light 102 penetrates as shown in Figure 1 and does not change direction and shine directly on processing object from beam splitter 110.Processing light 102 shown in Fig. 1 have selected to penetrate from beam splitter 110 not change nyctitropic light beam, but be not limited to this.Also likely select the nyctitropic light beam that changes of injection from beam splitter 110 to be processing light 102 conversely, not changing nyctitropic is test light 104.
induction installation 120 has sensor 122.Sensor 122 may be the general optical sensor of the frequency of detection laser, wavelength and power density.This sensor 122 can detect said power density by the impulse waveform of detection laser.Also be by detection peak (peak) area or peak power value during detection waveform thus calculate the power density of laser.Above-mentioned peak area may be the area in Fig. 3 below impulse waveform curve.The process carrying out rated output density additionally by peak area or peak power may in sensor 122, also may in the controller 30 be connected with sensor 122.
described LASER Light Source 20 is gas laser source, Solid State Laser source or liquid laser source.Such as LASER Light Source 20 be gas lamp or solid light source time, measure separately the calculating that different values carries out power density.Gas lamp above-mentioned may be using gas as active medium, sends the lasing light emitter of laser by gas discharge.In addition Solid State Laser source may for by comprise can excitation laser the solid electrical body comprising ion come lasing lasing light emitter.
with reference to figure 3, can find out that laser pulse shape is high bass wave (Gaussian) distribution waveform from the chart 320 of the impulse waveform in expression Solid State Laser source.Such high bass wave waveform knows that peak power 322 area under a curve of laser just can be calculated automatically, and therefore will measure power density only needs the peak power detecting test light 104 just enough.But can find out that from the chart 310 of the impulse waveform of expression gas laser source laser pulse shape is irregular not according to high bass wave distributed wave.This situation occurs clearly in low pressure gaseous discharge.Want detection power density can measure the peak area of test light 104 in this case.This situation needs the pulse detecting test light 104 in real time, and peak area is the area below curve, the area of the part that 310 bends as Fig. 3 represent.Pulse calculates by integral way by being calculated as of area, and such integral and calculating may be carried out in induction part 120, also may carry out in control part 30.
as shown in Figure 2, described induction installation 120 comprises the attenuator 124 for regulating test light 104 light quantity, and described attenuator 124 is arranged in the light path that test light 104 passes through.The light quantity of test light 104 is adjusted by the cross-sectional sizes adjusting the test light 104 passed through.The cross section that said test light 104 is passed through can be done orthogonal by attenuator, circular or oval, and adjusts its size.Cross section is amplified when test light 104 throughput is few especially and is increased the amount passed through of test light 104 thus improve the confidence level detected by attenuator 124.Otherwise the light quantity that test light 104 is passed through is many especially; may infringement be produced to sensor 122 or the situation of too much interfering signal can be produced, the cross section that attenuator can be reduced by thus the light quantity of test light is reduced the function playing protection sensor 122 and improve the confidence level detected.
described induction installation 120 also comprises the optical module 126 for adjusting at least one eyeglass detecting light light path.Be mapped to light in the process of the sensor 122 of induction part 120 by the test light 104 of above-mentioned attenuator 124 and the situation of diffusion occurs, can reflection be produced in induction part 120 interior surface thus produce a lot of interfering signals; Be mapped to test light 104 concentrations in the process of sensor in a part for sensor 122, produce the situation of saturated phenomenon, damage may be caused to sensor 122.At least comprise an eyeglass to improve in the such optical module of this situation 126 for this reason.Such optical module 126 can be suitable adjustment test light 104 light path thus make test light focus on assigned address or make the light ratio sensor area being irradiated to sensor 122 position larger.The eyeglass of optical module 126 may be convex mirror also may be concave mirror.The position of eyeglass or focal length etc. can make the hot spot being formed a certain size by the test light 104 of optical module 126 on sensor 122 adjust according to the formula of lens makers.The eyeglass in addition optical module 126 used as required may for adjusting position or the variable changeable type eyeglass of focal length.The changeable type eyeglass used may for change thus the liquid-type eyeglass of surface undergoes deformation according to signal of telecommunication surface tension.
as shown in Figure 4, a kind of laser-processing system 400, comprise above-mentioned laser detector 100, also comprise and utilize processing light 102 pairs of processing objects 40 of being separated by described beam splitter 110 carry out the laser processing device 410 of Laser Processing and obtain by judging laser quality quality after the quality information detected in described induction installation 120 again thus the control part 420 of LASER Light Source 20 described in controlling, described LASER Light Source 20 is connected with described control part 420 respectively with described induction installation 120.
control part 420 obtains the information detected in laser detector 100 by the signal of telecommunication.Now in order to the interfering signal (noise) removed in the signal of telecommunication needs matched filter (matchingfilter).Matched filter may be low pass filter (lowpassfilter).Whether control part 420 well needs the notepad of the quality information of a pair preservation standard laser in order to the state of detection laser light in addition.The quality information of standard laser refers to that laser that the laser that above-mentioned use sends sends when realizing normal process needs the relevant information of the light characteristic of the standard possessed.Also need to comprise relative standard in the quality information of standard laser in addition.The actual error range information quality of light being detected of information.Control part 420 is by comparing the information stored in the information and notepad that receive from laser detector 100, and both differences exceed the situation of error range, are bad by the quality judging of laser.
laser quality judging is bad situation by control part 420, bad for preventing continuing generation, can control LASER Light Source 20 is closed automatically.Need to realize Signal transmissions between control part 420 with LASER Light Source 20 to be connected on electrically for this reason.Control part judges that laser quality is as bad situation in addition, can excite corresponding alarm or corresponding warning prompt, also have alarm excitation apparatus for this reason.
carry out control part 420 based on testing result to judge the quality that the laser quality sent is carried out, thus feedback information can be provided to Laser Processing is whether normally real-time.In addition based on such feedback signal can play prevent from producing in laser processing procedure a large amount of bad, and in appropriate to LASER Light Source 20 in the effect that adjusts of the laser beam that produces.
be more than referring to figs. 1 to Fig. 4 according to test of the present utility model to laser detector 100 of the present utility model and the explanation of laser-processing system 400 of installing laser detector.It is below the explanation of the laser detecting method using laser detector 100 and laser-processing system 400 to carry out.Laser detecting method described below may comprise all technological thoughts mentioned in above-mentioned laser detector 100 and laser-processing system 400.
fig. 5 is the flow chart of the laser detecting method shown in another test of the utility model.
with reference to figure 5, the laser detecting method in this test comprises the link S510 sending laser from LASER Light Source 20; The light sent in light source is divided into the link S520 of test light 104 and processing light 102 by laser beam splitter 110; The link S530 of the quality of the test light 104 that real-time detection sends from beam splitter 110; And judge whether the laser sent is bad link S540 according to the quality of the laser detected.At least one in the frequency of test light 104 and power density is comprised with the quality of above-mentioned the same laser.Although do not have in figure to indicate but the laser detecting method carried out in this experiment comprises the link that use attenuator 124 to adjust from beam splitter 110 light quantity of test light 104 out.And use the optical module 126 at least comprising an eyeglass to adjust the link of the transmission path of the test light 104 of laser.Judge the situation that laser state is bad in laser detecting method in addition in this test, produce for preventing bad continuation also to comprise and interrupt the link S550 that lasing light emitter sends laser.
above-described embodiment, only for technical conceive of the present utility model and feature are described, its object is to person skilled in the art can be understood content of the present utility model and implement according to this, can not limit protection domain of the present utility model with this.All equivalences done according to the utility model Spirit Essence change or modify, and all should be encompassed within protection domain of the present utility model.
Claims (10)
1. a laser detector (100), it is characterized in that: comprise the beam splitter (110) that the laser that LASER Light Source (20) send can be divided into test light (104) and processing light (102), the induction installation (120) detected the quality of the light of injection from described beam splitter (110), induction installation (120) also has sensor (122).
2. laser detector according to claim 1 (100), is characterized in that: the quality of the described light that needs detect comprises at least one in light frequency, power density.
3. laser detector according to claim 1 (100), is characterized in that: described LASER Light Source (20) is gas laser source, the situation in Solid State Laser source or liquid laser source.
4. laser detector according to claim 1 (100), it is characterized in that: described induction installation (120) comprises the attenuator (124) for regulating test light (104) light quantity, described attenuator (124) is arranged in the light path that test light (104) passes through.
5. laser detector according to claim 1 (100), is characterized in that: described induction installation (120) also comprises the optical module (126) for adjusting at least one eyeglass detecting light light path.
6. laser detector according to claim 5 (100), is characterized in that: described eyeglass is to adjust position or the variable changeable type eyeglass of focal length.
7. laser detector according to claim 6 (100), is characterized in that: described changeable type eyeglass is can change according to signal of telecommunication surface tension thus the liquid-type eyeglass of surface undergoes deformation.
8. one kind includes the laser-processing system (400) of the laser detector (100) in claim 1-7 described in any one, it is characterized in that: also comprise the laser processing device (410) utilizing the processing light (102) separated by described beam splitter (110) processing object (40) to be carried out to Laser Processing, and obtain by judging laser quality quality after the quality information detected in described induction installation (120) again thus the control part (420) of LASER Light Source (20) described in controlling, described LASER Light Source (20) and described induction installation (120) are connected with described control part (420) respectively.
9. laser-processing system according to claim 8 (400), is characterized in that: described laser-processing system (400) also comprises the alarm excitation apparatus be connected with described control part (420).
10. laser-processing system according to claim 8 (400), is characterized in that: described control part (420) has the matched filter of the interfering signal removed in laser quality information.
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| CN201520668021.0U CN205043348U (en) | 2015-08-31 | 2015-08-31 | Laser detection device and laser processing system |
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| CN201520668021.0U CN205043348U (en) | 2015-08-31 | 2015-08-31 | Laser detection device and laser processing system |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105834581A (en) * | 2016-06-08 | 2016-08-10 | 武汉工程大学 | Laser optical path correcting device and method for CO2 laser cutting carver |
| JP2020188234A (en) * | 2019-05-17 | 2020-11-19 | 住友重機械工業株式会社 | Control device of pulse laser oscillator |
-
2015
- 2015-08-31 CN CN201520668021.0U patent/CN205043348U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105834581A (en) * | 2016-06-08 | 2016-08-10 | 武汉工程大学 | Laser optical path correcting device and method for CO2 laser cutting carver |
| JP2020188234A (en) * | 2019-05-17 | 2020-11-19 | 住友重機械工業株式会社 | Control device of pulse laser oscillator |
| JP7258647B2 (en) | 2019-05-17 | 2023-04-17 | 住友重機械工業株式会社 | Pulse laser oscillator controller |
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