CN205017582U - MEMS microphone chip, microphone and audio equipment - Google Patents
MEMS microphone chip, microphone and audio equipment Download PDFInfo
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- CN205017582U CN205017582U CN201520747972.7U CN201520747972U CN205017582U CN 205017582 U CN205017582 U CN 205017582U CN 201520747972 U CN201520747972 U CN 201520747972U CN 205017582 U CN205017582 U CN 205017582U
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- vibrating diaphragm
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Abstract
The application discloses MEMS microphone chip includes stratum basale, first insulation layer, vibrating diaphragm layer, second insulating layer and back of the body utmost point layer by the bottom to the top in proper order, the periphery of the effective vibrating area of vibrating diaphragm on vibrating diaphragm layer is connected with the vibrating diaphragm fixed part, be provided with out -of -the -way polar region on the back of the body utmost point layer, back of the body polar region is isolated with all the other positions on back of the body utmost point layer through first line of cut, projection around the periphery at vibrating diaphragm effective vibrating area of first line of cut on the vibrating diaphragm layer, and back of the body polar region is fixed in second insulating layer top through its peripheral back of the body utmost point fixed part, still be provided with the second line of cut on the vibrating diaphragm layer, second line of cut around the regional outward flange of the projection of back of the body polar region on the vibrating diaphragm layer and the outward flange setting of vibrating diaphragm fixed part lie in the regional of second line of cut regional keep apart outer with lieing in the second line of cut on making the vibrating diaphragm layer, and the vibrating diaphragm layer outside the second line of cut does not produce parasitic capacitance, has reduced parasitic capacitance. This application still discloses microphone and audio equipment including this MEMS microphone chip.
Description
Technical field
The utility model relates to technical field of electronic devices, more particularly, relates to a kind of MEMS microphone chip, microphone and audio frequency apparatus.
Background technology
Micro Electro Mechanical System (Micro-Electro-MechanicalSystem, MEMS) microphone is the microphone manufactured based on MEMS technology, because it has, encapsulation volume is little, reliability is high, low cost and other advantages, be widely used in various speech ciphering equipment, the electronic products such as such as mobile phone, panel computer, PDA, audiomonitor.
The size of sensitivity is one of key factor of a measurement MEMS microphone chip performance, and the computing formula of described sensitivity is:
wherein, S is sensitivity, V
bfor bias voltage (biasvoltage), △ p is for measuring acoustic pressure, and d is air gap (AirGap), and △ d is vibrating diaphragm deformation quantity, C
0for measuring the capacitance arrived, C
pfor parasitic capacitance, therefore, visible, described parasitic capacitance C
pdirectly can affect the sensitivity of described MEMS microphone chip, when described parasitic capacitance increases, described sensitivity S reduces, therefore can reduce its parasitic capacitance when designing described MEMS microphone chip as far as possible, therefore, how to reduce the size of the parasitic capacitance of described MEMS microphone chip, become one of those skilled in the art's technical problem urgently to be resolved hurrily.
Utility model content
In view of this, the purpose of this utility model is to provide a kind of MEMS microphone chip, microphone and audio frequency apparatus, for solving the problem that in prior art, the parasitic capacitance of MEMS microphone chip is large.
For achieving the above object, the utility model provides following technical scheme:
A kind of MEMS microphone chip, comprises basalis, the first insulating barrier, vibrating diaphragm layer, the second insulating barrier and backplane layer by bottom successively to top, described basalis is provided with the operatic tunes; The position described vibrating diaphragm layer being covered in the described operatic tunes is the effective vibrating area of vibrating diaphragm, and the periphery of the effective vibrating area of described vibrating diaphragm is connected with vibrating diaphragm fixed part, and the effective vibrating area of described vibrating diaphragm is fixed on above described first insulating barrier by described vibrating diaphragm fixed part; Described backplane floor is provided with backplane district, described backplane district is isolated by all the other positions of the first line of cut and described backplane floor, the projection of described first line of cut on described vibrating diaphragm layer is centered around the periphery of the effective vibrating area of described vibrating diaphragm, and described backplane district is fixed on above described second insulating barrier by the backplane fixed part of its periphery; Described vibrating diaphragm layer is also provided with the second line of cut, the outward flange of the view field of described second line of cut around described backplane district on described vibrating diaphragm floor and the outward flange of vibrating diaphragm fixed part are arranged, and make vibrating diaphragm layer to be positioned at the region of described second line of cut and the zone isolation be positioned at outside described second line of cut.
Preferably, in above-mentioned MEMS microphone chip, within the outer edge of the view field of described backplane district on described vibrating diaphragm floor is positioned at described second line of cut, and the distance between described second line of cut and the outer edge of this view field is 5um ~ 15um.
Preferably, in above-mentioned MEMS microphone chip, the live width of described second line of cut is more than or equal to 1um.
Preferably, in above-mentioned MEMS microphone chip, the live width of described second line of cut is 2um ~ 5um.
Preferably, in above-mentioned MEMS microphone chip, described vibrating diaphragm fixed part is be connected to the circular ring structure on the outer ring of the effective vibrating area of described vibrating diaphragm.
Preferably, in above-mentioned MEMS microphone chip, described vibrating diaphragm fixed part is be connected to the broached-tooth design on the outer ring of the effective vibrating area of described vibrating diaphragm, and described backplane fixed part is also broached-tooth design.
Preferably, in above-mentioned MEMS microphone chip, the sawtooth position correspondence of described vibrating diaphragm fixed part and described backplane fixed part is arranged.
Preferably, in above-mentioned MEMS microphone chip, the alternate setting in sawtooth position of described vibrating diaphragm fixed part and described backplane fixed part.
The utility model additionally provides a kind of microphone, comprises MEMS microphone chip, and described MEMS microphone chip is the MEMS microphone chip described in above-mentioned any one.
The utility model additionally provides a kind of audio frequency apparatus, comprises microphone, and described microphone is above-mentioned microphone.
Compared with prior art, the beneficial effects of the utility model are:
The MEMS microphone chip that the utility model embodiment provides, vibrating diaphragm layer is also provided with the second line of cut, the outward flange of the view field of the second line of cut around backplane district on vibrating diaphragm floor and the outward flange of vibrating diaphragm fixed part are arranged, and vibrating diaphragm layer vibrating diaphragm layer being positioned at the second line of cut is isolated with the vibrating diaphragm layer be positioned at outside the second line of cut.And the vibrating diaphragm layer beyond the second line of cut can not produce parasitic capacitance, backplane district only with the second line of cut within vibrating diaphragm floor produce parasitic capacitance, therefore, reduce parasitic capacitance by the area reducing the vibrating diaphragm floor under backplane district, improve the sensitivity of described MEMS microphone chip.
Accompanying drawing explanation
In order to be illustrated more clearly in the utility model embodiment or technical scheme of the prior art, be briefly described to the accompanying drawing used required in embodiment or description of the prior art below, apparently, accompanying drawing in the following describes is only embodiment of the present utility model, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawing can also be obtained according to the accompanying drawing provided.
Fig. 1 is the vertical view of a kind of MEMS microphone chip of the prior art;
The vertical view of Fig. 2 a kind of MEMS microphone chip disclosed in the embodiment of the present application;
Fig. 3 is the cutaway view in C-C cross section in Fig. 2;
Fig. 4 is the vertical view of another kind of MEMS microphone chip of the prior art;
The vertical view of Fig. 5 a kind of MEMS microphone chip disclosed in the embodiment of the present application;
Fig. 6 is the close-up schematic view of MEMS microphone chip in Fig. 5;
Fig. 7 is the cutaway view in the E-E cross section of Fig. 5;
Fig. 8 is the cutaway view in the F-F cross section of Fig. 5.
In Fig. 1-Fig. 8,1 for basalis, 2 be the first insulating barrier, 3 for vibrating diaphragm floor, 301 for the effective vibrating area of vibrating diaphragm, 302 for vibrating diaphragm fixed part, 4 be the second insulating barrier, 5 for backplane floor, 501 for backplane district, 502 for backplane fixed part, 6 be that the first electrode, 7 is the second electrode, a is the first line of cut, b is the second line of cut.
Embodiment
Core of the present utility model there is provided a kind of MEMS microphone chip, can reduce parasitic capacitance, improves sensitivity.
The utility model additionally provides a kind of microphone and audio frequency apparatus of this MEMS microphone chip of application, improves sensitivity of microphone.
Below in conjunction with the accompanying drawing in the utility model embodiment, be clearly and completely described the technical scheme in the utility model embodiment, obviously, described embodiment is only the utility model part embodiment, instead of whole embodiments.Based on the embodiment in the utility model, those of ordinary skill in the art are not making the every other embodiment obtained under creative work prerequisite, all belong to the scope of the utility model protection.
Please refer to Fig. 1 and 3, usual MEMS microphone chip is followed successively by top layer by bottom: basalis 1, first insulating barrier 2, vibrating diaphragm layer 3, second insulating barrier 4 and backplane layer 5; Wherein, basalis 1 is provided with the operatic tunes, the first insulating barrier 2 is arranged on basalis 1, and on the first insulating barrier 2, the position of the corresponding operatic tunes is through the first through hole of upper and lower surface; Vibrating diaphragm layer 3 is arranged at above the first insulating barrier 2, isolated with basalis 1 by the first insulating barrier 2, vibrating diaphragm layer 3 is made up of the effective vibrating area of vibrating diaphragm 301 and invalid vibrating area, the effective vibrating area 301 of vibrating diaphragm i.e. vibrating diaphragm layer 3 is covered in the position of the operatic tunes, vibrating diaphragm layer 3 outside the effective vibrating area of vibrating diaphragm 301 is invalid vibrating area, the periphery of the effective vibrating area 301 of vibrating diaphragm is connected with vibrating diaphragm fixed part 302, and the effective vibrating area 301 of vibrating diaphragm is fixed on above the first insulating barrier 2 by vibrating diaphragm fixed part 302; Second insulating barrier 4 is arranged at above vibrating diaphragm layer 3, and on the second insulating barrier 4, the position of the corresponding operatic tunes is through the second through hole of upper and lower surface; Backplane layer 5 is arranged at above the second insulating barrier 4, backplane floor 5 is provided with backplane district 501, backplane district 501 is isolated by all the other positions of the first line of cut a and backplane floor 5, first line of cut a projects on vibrating diaphragm layer 3, then the projection of the first line of cut a is centered around the periphery of the effective vibrating area 301 of vibrating diaphragm of vibrating diaphragm layer 3, the periphery in backplane district 501 is backplane fixed part 502, backplane fixed part 502 is the part in backplane district, backplane district 501 is fixed on the second insulating barrier 4 by backplane fixed part 502, and the position being covered in the operatic tunes in backplane district 501 offers some acoustic aperture; Backplane district 501 and vibrating diaphragm floor 3 are electrically connected with the first electrode 6 be arranged in MEMS microphone chip and the second electrode 7 respectively.
Applicant is found by research, the size of parasitic capacitance is relevant with the area of invalid vibrating area corresponding below backplane district 501, during work, as long as there is part corresponding up and down in the invalid vibrating area of vibrating diaphragm floor 3 and backplane district 501, then the region at whole invalid vibrating area place all can form parasitic capacitance, when backplane district 501 size is fixing, the larger then parasitic capacitance of area of invalid vibrating area is larger, see Fig. 1, Fig. 1 is the vertical view of MEMS microphone chip of the prior art, wherein, first line of cut a to surround and the region being positioned at the projection of vibrating diaphragm floor 3 is backplane district 501, shadow region, center is the effective vibrating area 301 of vibrating diaphragm, the periphery of the effective vibrating area 301 of vibrating diaphragm is connected with vibrating diaphragm fixed part 302, it is invalid vibrating area outside vibrating diaphragm fixed part 302, as can be seen from Figure 1, the periphery in backplane district 501 has covered on invalid vibrating area, the region then forming parasitic capacitance is the invalid vibration area of whole vibrating diaphragm layer 3, parasitic capacitance is larger, sensitivity of microphone is caused to reduce.
Be directed to above-mentioned discovery, the utility model embodiment provide a kind of newly, the MEMS microphone chip that parasitic capacitance is less, see Fig. 2 and Fig. 3, this MEMS microphone chip is comprised to top successively by bottom: basalis 1, first insulating barrier 2, vibrating diaphragm layer 3, second insulating barrier 4 and backplane layer 5, its setting is identical with MEMS microphone chip recited above, unlike, vibrating diaphragm layer 3 is also provided with the second line of cut b, the outward flange of the view field of the second line of cut b around backplane district 501 on vibrating diaphragm floor 3 and the outward flange of vibrating diaphragm fixed part 302 are arranged, as can be seen from Figure 2, second line of cut b is surrounded on the outside of the first projection of line of cut a on vibrating diaphragm layer 3.Certainly, second line of cut b can be one around line of cut, also can after the cutting of the periphery of vibrating diaphragm fixed part 302, again around the outward flange cutting of the projection of backplane fixed part 502 on vibrating diaphragm layer 3, namely the second line of cut b is two parts compositions, as long as the vibrating diaphragm layer 3 vibrating diaphragm layer 3 being positioned at the second line of cut b can be made to isolate with the vibrating diaphragm layer 3 be positioned at outside the second line of cut b, reduce the area of invalid vibrating area corresponding below backplane district 501, do not allow backplane district 501 and whole invalid vibrating area produce parasitic capacitance.
Because the outward flange of the projection on vibrating diaphragm floor 3 around backplane district 501 on vibrating diaphragm floor 3 and the outward flange of vibrating diaphragm fixed part 302 arrange the second line of cut b, make backplane district 501 project in vibrating diaphragm floor 3 project with backplane district 501 outside vibrating diaphragm floor 3 isolated, and vibrating diaphragm layer 3 beyond the second line of cut b due to not with the second Electrode connection, therefore parasitic capacitance can not be produced, backplane district 501 only with the second line of cut b within vibrating diaphragm floor 3 produce parasitic capacitance, therefore, parasitic capacitance is reduced by the area of the invalid vibrating area reducing the vibrating diaphragm floor 3 under backplane district 501, improve the sensitivity of described MEMS microphone chip.
Be understandable that, when design second line of cut b, can need from the distance between Row sum-equal matrix itself and the outer edge of the view field of backplane district 501 on vibrating diaphragm floor 3 according to user, and, in order to ensure that the setting of the second line of cut b can not impact the overall performance of MEMS microphone chip, in the above embodiments of the present application, certain intervals should be had between the outer edge of the second line of cut b and backplane district 501 view field on vibrating diaphragm floor 3, namely within the outer edge of the view field of backplane district 501 on vibrating diaphragm floor 3 is positioned at the second line of cut b, preferably, distance between the projection of the first line of cut a on vibrating diaphragm layer 3 and the second line of cut b is 5um ~ 15um.Certainly, the number range enumerated listed by the present embodiment is not limited to.
Be understandable that, cut to prevent void in the process of cutting vibrating diaphragm layer 3, or because the width of the second line of cut b is too small, MEMS microphone chip is caused to be heated or after other reasons distortion, the vibrating diaphragm layer 3 beyond the second line of cut b to be contacted with the vibrating diaphragm layer 3 within the second line of cut b, in the above embodiments of the present application, the width of the second line of cut b is not less than 1um, is preferably any numerical value between 2um to 5um.
As shown in Figures 2 and 3, in the present embodiment, vibrating diaphragm fixed part 302 is for being connected to the circular ring structure on the outer ring of the effective vibrating area 301 of vibrating diaphragm, time fixing, circular vibrating diaphragm fixed part 302 is fixed on the periphery of the first through hole on the first insulating barrier 2, thus effective for vibrating diaphragm vibrating area 301 is fixed corresponding to the operatic tunes.When carrying out the second line of cut b and cutting, the edge along vibrating diaphragm fixed part 302 also cuts, and is conducive to the isolation of the effective vibrating area of vibrating diaphragm and invalid vibrating area.
In the present embodiment, the shape of the backplane fixed part 502 in backplane district 501 is the broached-tooth design arranged along the circumferential edges in backplane district 501, namely the shape of the first line of cut a is zigzag fashion, certain intervals is there is between adjacent saw-tooth, the quantity of sawtooth sets according to actual user demand, is not specifically limited at this.The shape in backplane district 501 is not limited to the shape cited by the present embodiment.
As shown in Fig. 4-Fig. 8, present embodiments provide another kind of MEMS microphone chip, the difference in it and above-described embodiment is the shape of vibrating diaphragm fixed part 302, the cloth of the first line of cut a and the second line of cut b is set up, all the other arrange all identical.Concrete, vibrating diaphragm fixed part 302 is for being connected to the broached-tooth design on the outer ring of the effective vibrating area 301 of vibrating diaphragm, and backplane fixed part 502 is also broached-tooth design.The sawtooth position of vibrating diaphragm fixed part 302 and backplane fixed part 502 may correspond to setting, and namely each sawtooth position of vibrating diaphragm fixed part 302 is all positioned at the projection of each sawtooth position on vibrating diaphragm layer 3 of backplane fixed part 502; Or the alternate setting in sawtooth position of vibrating diaphragm fixed part 302 and backplane fixed part 502, i.e. the sawtooth position of vibrating diaphragm fixed part 302 and the alternate setting of the projection of sawtooth position on vibrating diaphragm layer 3 of backplane fixed part 502.
Fig. 4-Fig. 8 gives the structure of the alternate setting in sawtooth position of vibrating diaphragm fixed part 302 and backplane fixed part 502, under such configuration, the second line of cut b on vibrating diaphragm floor 3 cuts around the outward flange of the view field of backplane district 501 on vibrating diaphragm floor 3 shown in Fig. 4 and the outward flange of vibrating diaphragm fixed part 302, before this, the effective vibrating area of vibrating diaphragm on vibrating diaphragm layer 3 301 is kept apart with invalid vibrating area, as Fig. 5, shown in 6 and Fig. 8, only remain jagged vibrating diaphragm fixed part 302 to be connected with the effective vibrating area 301 of vibrating diaphragm, as shown in figure 5 and figure 7, effective for vibrating diaphragm vibrating area 301 is fixed on the first insulating barrier 2, in order to reduce on the backplane floor 5 of vibrating diaphragm fixed part 302 correspondence area, (area in the non-backplane district of the backplane floor 5 of vibrating diaphragm fixed part 302 correspondence is larger, parasitic capacitance also can be larger), then the first line of cut a is except adopting cutting structure as shown in Figures 2 and 3, also need to cut inside the outer edge of the view field of vibrating diaphragm fixed part 302 on backplane layer 5, thus the backplane district 501 of the backplane floor 5 of vibrating diaphragm fixed part 302 correspondence is separated with non-backplane leave, the parasitic capacitance that the non-backplane district reducing backplane floor 5 produces.Compared to the MEMS microphone chip in Fig. 2 and Fig. 3, shape due to the vibrating diaphragm fixed part 302 in the present embodiment is the spaced broached-tooth design of tool, less than the area of the vibrating diaphragm fixed part 302 of circular ring structure, the area of the invalid vibrating area of the vibrating diaphragm floor under backplane district 501 diminishes, and the parasitic capacitance produced is less.
Certainly, the shape sets itself according to actual needs of vibrating diaphragm fixed part 302 and backplane fixed part 502, is not limited to the structure described by above-described embodiment.
Be directed to MEMS microphone chip disclosed in the above-mentioned any one embodiment of the application, disclosed herein as well is a kind of microphone, microphone comprises MEMS microphone chip, and this MEMS microphone chip is MEMS microphone chip disclosed in the above-mentioned any one embodiment of the application.
In addition, be directed to above-mentioned microphone, disclosed herein as well is a kind of audio frequency apparatus applying above-mentioned microphone, described audio frequency apparatus can be the audio frequency apparatuses such as mobile phone, panel computer, notebook, audio amplifier.
In this specification, each embodiment adopts the mode of going forward one by one to describe, and what each embodiment stressed is the difference with other embodiments, between each embodiment identical similar portion mutually see.
To the above-mentioned explanation of the disclosed embodiments, professional and technical personnel in the field are realized or uses the utility model.To be apparent for those skilled in the art to the multiple amendment of these embodiments, General Principle as defined herein when not departing from spirit or scope of the present utility model, can realize in other embodiments.Therefore, the utility model can not be restricted to these embodiments shown in this article, but will meet the widest scope consistent with principle disclosed herein and features of novelty.
Claims (10)
1. a MEMS microphone chip, comprises basalis (1), the first insulating barrier (2), vibrating diaphragm layer (3), the second insulating barrier (4) and backplane layer (5) by bottom successively to top; (1) is provided with the operatic tunes to described basalis; The position described vibrating diaphragm layer (3) being covered in the described operatic tunes is the effective vibrating area of vibrating diaphragm (301), the periphery of the effective vibrating area of described vibrating diaphragm (301) is connected with vibrating diaphragm fixed part (302), and the effective vibrating area of described vibrating diaphragm (301) is fixed on described first insulating barrier (2) by described vibrating diaphragm fixed part (302); Described backplane floor (5) is provided with backplane district (501), described backplane district (501) is isolated with all the other positions of described backplane floor (5) by the first line of cut (a), the projection of described first line of cut (a) on described vibrating diaphragm layer (3) is centered around the periphery of the effective vibrating area of described vibrating diaphragm (301), and described backplane district (501) is fixed on described second insulating barrier (4) top by the backplane fixed part (502) of its periphery; It is characterized in that, described vibrating diaphragm layer (3) is also provided with the second line of cut (b), described second line of cut (b) is arranged around the outward flange of the view field of described backplane district (501) on described vibrating diaphragm floor (3) and the outward flange of vibrating diaphragm fixed part (302), the region making vibrating diaphragm layer (3) is positioned at described second line of cut (b) be positioned at described second line of cut (b) zone isolation outward.
2. MEMS microphone chip according to claim 1, it is characterized in that, within the outer edge of the view field of described backplane district (501) on described vibrating diaphragm floor (3) is positioned at described second line of cut (b), and the distance between described second line of cut (b) and the outer edge of this view field is 5um ~ 15um.
3. MEMS microphone chip according to claim 1, is characterized in that, the live width of described second line of cut (b) is more than or equal to 1um.
4. MEMS microphone chip according to claim 3, is characterized in that, the live width of described second line of cut (b) is 2um ~ 5um.
5. the MEMS microphone chip according to any one of claim 1-4, is characterized in that, described vibrating diaphragm fixed part (302) is for being connected to the circular ring structure on the outer ring of the effective vibrating area of described vibrating diaphragm (301).
6. the MEMS microphone chip according to any one of claim 1-4, it is characterized in that, described vibrating diaphragm fixed part (302) is for being connected to the broached-tooth design on the outer ring of the effective vibrating area of described vibrating diaphragm (301), and described backplane fixed part (502) is also broached-tooth design.
7. MEMS microphone chip according to claim 6, is characterized in that, the sawtooth position correspondence of described vibrating diaphragm fixed part (302) and described backplane fixed part (502) is arranged.
8. MEMS microphone chip according to claim 6, is characterized in that, the alternate setting in sawtooth position of described vibrating diaphragm fixed part (302) and described backplane fixed part (502).
9. a microphone, comprises MEMS microphone chip, it is characterized in that, described MEMS microphone chip is the MEMS microphone chip described in any one of claim 1-8.
10. an audio frequency apparatus, comprises microphone, it is characterized in that, described microphone is microphone according to claim 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520747972.7U CN205017582U (en) | 2015-09-24 | 2015-09-24 | MEMS microphone chip, microphone and audio equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520747972.7U CN205017582U (en) | 2015-09-24 | 2015-09-24 | MEMS microphone chip, microphone and audio equipment |
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| CN205017582U true CN205017582U (en) | 2016-02-03 |
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| CN201520747972.7U Withdrawn - After Issue CN205017582U (en) | 2015-09-24 | 2015-09-24 | MEMS microphone chip, microphone and audio equipment |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105142086A (en) * | 2015-09-24 | 2015-12-09 | 歌尔声学股份有限公司 | MEMS microphone chip, microphone and audio device |
| CN109417671A (en) * | 2016-07-08 | 2019-03-01 | 欧姆龙株式会社 | MEMS structure and capacitance type sensor, piezo-type sensor, sound transducer with MEMS structure |
| CN110572762A (en) * | 2019-09-29 | 2019-12-13 | 歌尔股份有限公司 | MEMS chip and electronic equipment |
| CN110708649A (en) * | 2019-09-29 | 2020-01-17 | 歌尔股份有限公司 | MEMS chip and electronic equipment |
| CN115065920A (en) * | 2022-05-26 | 2022-09-16 | 歌尔微电子股份有限公司 | MEMS device and electronic apparatus |
-
2015
- 2015-09-24 CN CN201520747972.7U patent/CN205017582U/en not_active Withdrawn - After Issue
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105142086A (en) * | 2015-09-24 | 2015-12-09 | 歌尔声学股份有限公司 | MEMS microphone chip, microphone and audio device |
| CN105142086B (en) * | 2015-09-24 | 2018-09-07 | 歌尔股份有限公司 | A kind of MEMS microphone chip, microphone and audio frequency apparatus |
| CN109417671A (en) * | 2016-07-08 | 2019-03-01 | 欧姆龙株式会社 | MEMS structure and capacitance type sensor, piezo-type sensor, sound transducer with MEMS structure |
| CN109417671B (en) * | 2016-07-08 | 2020-10-27 | 欧姆龙株式会社 | MEMS structure, and capacitive sensor, piezoelectric sensor, and acoustic sensor having the same |
| US11064299B2 (en) | 2016-07-08 | 2021-07-13 | Omron Corporation | MEMS structure, capacitive sensor, piezoelectric sensor, acoustic sensor having mems structure |
| CN110572762A (en) * | 2019-09-29 | 2019-12-13 | 歌尔股份有限公司 | MEMS chip and electronic equipment |
| CN110708649A (en) * | 2019-09-29 | 2020-01-17 | 歌尔股份有限公司 | MEMS chip and electronic equipment |
| CN110572762B (en) * | 2019-09-29 | 2020-11-24 | 潍坊歌尔微电子有限公司 | MEMS chip and electronic equipment |
| CN115065920A (en) * | 2022-05-26 | 2022-09-16 | 歌尔微电子股份有限公司 | MEMS device and electronic apparatus |
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Address after: 261031 Dongfang Road, Weifang high tech Industrial Development Zone, Shandong, China, No. 268 Patentee after: Goertek Inc. Address before: 261031 Dongfang Road, Weifang high tech Industrial Development Zone, Shandong, China, No. 268 Patentee before: Goertek Inc. |
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| AV01 | Patent right actively abandoned |
Granted publication date: 20160203 Effective date of abandoning: 20180907 |
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| AV01 | Patent right actively abandoned |