CN204992544U - Be used for automatic arc extinguishing system of vacuum coating electron gun high voltage power supply system - Google Patents
Be used for automatic arc extinguishing system of vacuum coating electron gun high voltage power supply system Download PDFInfo
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- CN204992544U CN204992544U CN201520550959.2U CN201520550959U CN204992544U CN 204992544 U CN204992544 U CN 204992544U CN 201520550959 U CN201520550959 U CN 201520550959U CN 204992544 U CN204992544 U CN 204992544U
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- arc extinguishing
- high frequency
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Abstract
The utility model provides a can effectively reduce product volume and weight, reliable and the respond well be used for automatic arc extinguishing system of vacuum coating electron gun high voltage power supply system of arc extinguishing of job stabilization, it draws together the three low frequency rectifier module of group that link to each other alone respectively with three input electrical property, the high frequency power drive module that links to each other with each group's this low frequency rectifier module electrical property, the high -frequency transformer who links to each other with this high frequency power drive module electrical property, the high frequency rectification and the voltage that link to each other with this high -frequency transformer electrical property superpose and the energy storage module and set up in arc extinguishing feedback module and steady voltage feedback module between high frequency power drive module and the high -frequency transformer, in order to make the volume and the weight loss of the automatic arc extinguishing high voltage power supply system of vacuum coating electron gun, this scheme uses high -frequency transformer as the voltage transformation, because high -frequency transformer work is at the high frequency state, power density is big, and is efficient to current big, the heavy just problem of inefficiency of power supply size of solution that can be fine.
Description
Technical field
The utility model relates to vacuum coating power technique fields, refers more particularly to a kind of for the automatic arc quenching system of vacuum coating electron gun high voltage power supply.
Background technology
Existing vacuum coating electron gun automatic arc extinguishing high voltage power supply structure as shown in Figure 1, existing vacuum coating electron gun automatic arc extinguishing high voltage power supply structure is: become AC high voltage through Industrial Frequency Transformer boosting after being adjusted by the automatic arc-extinguishing device that power regulating eqiupment is formed by industrial-frequency alternating current, and then rectifying and wave-filtering obtains DC high-voltage, concrete is: industrial-frequency alternating current is successively by auxiliary relay 1 ', three-phase power regulating eqiupment 2 ' and three-phase transformer 3 ' carry out arc extinguishing transformation, industrial-frequency alternating current after transformation carries out rectification by the three-phase rectifier 4 ' be provided with again, form DC high-voltage, DC high-voltage enters into energy storage capacitor 6 ' by the reactor 5 ' be provided with again and carries out energy storage, and then export.Because supply frequency is low in said structure form, the volume and weight of power supply is all larger, conversion efficiency and stability poor, system configuration is complicated.Mainly there is following problem in it: 1, the arc extinguishing signal of the automatic arc extinguishing high voltage power supply of existing vacuum coating electron gun takes from high tension loop, and safety and reliability is low; 2, the automatic arc extinguishing high voltage power supply of existing vacuum coating electron gun is when arc extinguishing, due to the effect of power regulating eqiupment, powers on again after transformer instant cut-off, can cause flux polarity and remanent magnetism polarity " collision ".Produce harmfulness impulse current and voltage.Electric network pollution is large; 3, the automatic arc extinguishing high voltage power supply of existing vacuum coating electron gun uses power regulating eqiupment as arc-control device, and system cost is high and complicated; 4, the excessive DC component that the automatic arc extinguishing high voltage power supply of existing vacuum coating electron gun produces because of abnormal causes such as power regulating eqiupment damages in running can make Industrial Frequency Transformer produce sound, and vibration, even burns transformer.System maintenance cost is high; 5, the feedback component of the automatic arc extinguishing high voltage power supply of existing vacuum coating electron gun, rectifier stack and storage capacitor need external, and system cost is high, installs consuming time; 6, existing vacuum coating electron gun automatic arc extinguishing high voltage power supply is not suitable for single-phase mains supply, and electrical network adaptive capacity is poor.
Summary of the invention
The purpose of this utility model is to overcome the deficiencies in the prior art, one is provided can effectively to reduce small product size and weight, reliable and the arc quenching system for the automatic arc-suppressing method of vacuum coating electron gun high voltage power supply that arc quenching effect is good of working stability, it comprises the three groups of low frequency rectification modules be electrical connected with three inputs alone respectively, the high frequency power driver module that this low frequency rectification module is electrical connected is organized with each, the high frequency transformer be electrical connected with this high frequency power driver module, and the high-frequency rectification that this high frequency transformer is electrical connected and voltage superposition and energy-storage module and the arc extinguishing feedback module be arranged between described high frequency power driver module and high frequency transformer and voltage stabilizing feedback module, wherein said arc extinguishing feedback module and voltage stabilizing feedback module are also by being connected with described high frequency power driver module for the pulse width modulator modulating high-frequency high-voltage of being provided with.
Further, one is also provided with for detecting the arc extinguishing device whether producing electric arc in vacuum chamber in the primary coil loops of described high frequency transformer on it, wherein when described arc extinguishing device detect in vacuum chamber produce electric arc time, this arc extinguishing device sends closing control signal to described pulse width modulator and is closed.
Again further, the independently-powered structure adopting single-phase mains supply when three-phase quadriphase system mains supply and use in parallel can be adopted when three described inputs are and separately use.
In order to make the volume and weight of the automatic arc extinguishing high voltage power supply of vacuum coating electron gun reduce in this programme, this programme uses high frequency transformer as voltage transformation, because high frequency transformer work is in high frequency state, power density is large, efficiency is high, thus can be good at solving large, the heavy and problem of inefficiency of existing power volume, simultaneously in order to the automatic arc quenching effect of the vacuum coating electron gun automatic arc extinguishing high voltage power supply in this programme is more reliable and more stable, this programme has for detecting the arc extinguishing device whether producing electric arc in vacuum chamber by placing one in the primary coil loops of high frequency transformer, during work, when this arc extinguishing device detect in vacuum chamber have electric arc to produce time, electric current on primary coil on high frequency transformer just can become large, arc extinguishing device can send closing control signal to pulse width modulator, pulse width modulator is closed, thus close DC high-voltage and arc extinguishing, after arc extinguishing action completes, DC high-voltage can automatically reply normal work.
Accompanying drawing explanation
Fig. 1 is existing vacuum coating electron gun automatic arc extinguishing high voltage power supply operation principle structure block diagram.
Fig. 2 is the vacuum coating electron gun automatic arc extinguishing high voltage power supply operation principle schematic diagram in the utility model.
Fig. 3 is the theory structure block diagram of the automatic arc extinguishing high voltage power supply of vacuum coating electron gun in the utility model.
Embodiment
Below in conjunction with specific embodiment, the utility model is described in further detail:
The automatic arc quenching system of a kind of vacuum coating of confession described in the present embodiment electron gun high voltage power supply, it comprises the three groups of low frequency rectification modules 1 be electrical connected with three inputs alone respectively, the high frequency power driver module 2 that this low frequency rectification module 1 is electrical connected is organized with each, the high frequency transformer 3 be electrical connected with this high frequency power driver module 2, and the high-frequency rectification that this high frequency transformer 3 is electrical connected and voltage superposition and energy-storage module 7 and the arc extinguishing feedback module 4 be arranged between high frequency power driver module 2 and high frequency transformer 3 and voltage stabilizing feedback module 5, wherein arc extinguishing feedback module 4 and voltage stabilizing feedback module 5 are also by being connected with high frequency power driver module 2 for the pulse width modulator 6 modulating high-frequency high-voltage of being provided with.Simultaneously, in order to no longer use cost is high and the power regulating eqiupment of complex circuit as arc-control device, but the automatic arc extinguishing of electron gun is realized by high-frequency pulsed width modulation device, also have for detecting the arc extinguishing device (not shown) whether producing electric arc in vacuum chamber by placing one in the primary coil loops of high frequency transformer 3 in this programme, during work, when this arc extinguishing device detect in vacuum chamber have electric arc to produce time, electric current on primary coil on high frequency transformer just can become large, arc extinguishing device can send closing control signal to pulse width modulator, pulse width modulator is closed, thus close DC high-voltage and arc extinguishing, after arc extinguishing action completes, DC high-voltage can automatically reply normal work.In addition, it should be noted that, the independently-powered structure adopting single-phase mains supply when three-phase quadriphase system mains supply and use in parallel when three above-mentioned inputs are and separately use, can be adopted.
The examples of implementation of the above are only the preferred embodiment of the utility model, not limit practical range of the present utility model with this, therefore the change that all shapes according to the utility model, principle are done, all should be encompassed in protection range of the present utility model.
Claims (3)
1. for the automatic arc quenching system of vacuum coating electron gun high voltage power supply, it is characterized in that: comprise the three groups of low frequency rectification modules be electrical connected with three-phase input end alone respectively, the high frequency power driver module that this low frequency rectification module is electrical connected is organized with each, the high frequency transformer be electrical connected with this high frequency power driver module, and the high-frequency rectification that this high frequency transformer is electrical connected and energy-storage module and the arc extinguishing feedback module be arranged between described high frequency power driver module and high frequency transformer and voltage stabilizing feedback module, wherein said arc extinguishing feedback module and voltage stabilizing feedback module are also by being connected with described high frequency power driver module for the pulse width modulator modulating high-frequency high-voltage of being provided with.
2. according to claim 1 for the automatic arc quenching system of vacuum coating electron gun high voltage power supply, it is characterized in that: in the primary coil loops of described high frequency transformer on it, be also provided with one for detecting the arc extinguishing device whether producing electric arc in vacuum chamber, wherein when described arc extinguishing device detect in vacuum chamber produce electric arc time, this arc extinguishing device sends closing control signal to described pulse width modulator and is closed.
3. according to claim 2 for the automatic arc quenching system of vacuum coating electron gun high voltage power supply, it is characterized in that: the independently-powered structure adopting single-phase mains supply when three-phase quadriphase system mains supply and use in parallel when three described inputs are and separately use, can be adopted.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520550959.2U CN204992544U (en) | 2015-07-24 | 2015-07-24 | Be used for automatic arc extinguishing system of vacuum coating electron gun high voltage power supply system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520550959.2U CN204992544U (en) | 2015-07-24 | 2015-07-24 | Be used for automatic arc extinguishing system of vacuum coating electron gun high voltage power supply system |
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| Publication Number | Publication Date |
|---|---|
| CN204992544U true CN204992544U (en) | 2016-01-20 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520550959.2U Expired - Fee Related CN204992544U (en) | 2015-07-24 | 2015-07-24 | Be used for automatic arc extinguishing system of vacuum coating electron gun high voltage power supply system |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105024353A (en) * | 2015-07-24 | 2015-11-04 | 佛山市绿系真空科技有限公司 | Automatic arc extinguishing method and system for high-voltage power supply system of vacuum coating electronic gun |
-
2015
- 2015-07-24 CN CN201520550959.2U patent/CN204992544U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105024353A (en) * | 2015-07-24 | 2015-11-04 | 佛山市绿系真空科技有限公司 | Automatic arc extinguishing method and system for high-voltage power supply system of vacuum coating electronic gun |
| CN105024353B (en) * | 2015-07-24 | 2018-09-04 | 佛山市绿系真空科技有限公司 | For the automatic arc-suppressing method of vacuum coating electron gun high voltage power supply and system |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160120 Termination date: 20180724 |