CN103475242A - Plasma high frequency high voltage power supply - Google Patents
Plasma high frequency high voltage power supply Download PDFInfo
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- CN103475242A CN103475242A CN2013104073647A CN201310407364A CN103475242A CN 103475242 A CN103475242 A CN 103475242A CN 2013104073647 A CN2013104073647 A CN 2013104073647A CN 201310407364 A CN201310407364 A CN 201310407364A CN 103475242 A CN103475242 A CN 103475242A
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Abstract
The invention discloses a plasma high frequency high voltage power supply which is low in flashover number and high in power-supply efficiency. The plasma high frequency high voltage power supply comprises an EMC management unit, a rectification smoothing / slow start unit, a BUCK conversion unit, a full-bridge high frequency conversion unit, a high frequency high voltage transformer and a high voltage rectification smoothing unit, wherein the EMC management unit, the rectification smoothing / slow start unit, the BUCK conversion unit, the full-bridge high frequency conversion unit, the high frequency high voltage transformer and the high voltage rectification smoothing unit are sequentially connected in series. The plasma high frequency high voltage power supply further comprises an auxiliary power supply, a DSP control and parameter display unit, a current / voltage sensing unit and an IGBT driving unit. A 380V alternating current power supply from a three-phase alternating current network is filtered through the EMC management unit so as to remove high-frequency interference signals which come from the three-phase alternating current network and higher harmonics which are generated when the plasma high frequency high voltage power supply operates, form an impulse direct current power supply through the rectification smoothing / slow start unit, forms a synchronous follow current through the BUCK conversion unit, forms a fixed frequency resonant type zero-voltage zero-current full-bridge converter through the full-bridge high frequency conversion unit, is stepped up through the high frequency high voltage transformer, and finally is subjected to rectification smoothing through the high voltage rectification smoothing unit to generate a high voltage, and then the high voltage is output. The plasma high frequency high voltage power supply is suitable for a plasma generator.
Description
Technical field
The invention belongs to power technique fields, particularly a kind of high efficiency plasma high-frequency and high-voltage power supply.
Background technology
The plasma high voltage source is the important component part of plasma generator, and the performance of plasma high voltage source affects the performance of plasma generator to a great extent.
Existing plasma high voltage source is for adopting thyristor controlled frequency high voltage power supply, and its output performance is bad, is mainly reflected in actual applications high voltage source flashover number high, and power-efficient is low.
Summary of the invention
The object of the present invention is to provide a kind of plasma high-frequency and high-voltage power supply, its flashover number is low, and power-efficient is high.
The technical solution that realizes the object of the invention is: a kind of plasma high-frequency and high-voltage power supply, it comprises the EMC administrative unit, rectifying and wave-filtering/slow start unit, the BUCK converter unit, the full-bridge high-frequency converter unit, high frequency high voltage transformer and high-voltage rectifying filter unit, the input of described EMC administrative unit is as the three-phase alternating-current supply input of described plasma high-frequency and high-voltage power supply, the first output of EMC administrative unit is connected with the first input end of rectifying and wave-filtering/slow start unit, the first input end of BUCK converter unit is connected with the output of rectifying and wave-filtering/slow start unit, the output of BUCK converter unit is connected with the first input end of full-bridge high-frequency converter unit, the output of the input termination full-bridge high-frequency converter unit of high frequency high voltage transformer, the input of the output termination high-voltage rectifying filter unit of high frequency high voltage transformer, the first output of described high-voltage rectifying filter unit is as the high-voltage output end of described plasma high-frequency and high-voltage power supply,
Also comprise accessory power supply, DSP control and parameter display unit, current/voltage sensing unit and IGBT driver element, the second output of the input termination EMC administrative unit of described accessory power supply, the output termination DSP control of described accessory power supply and the first input end of parameter display unit, the output of the second input termination current/voltage sensing unit of described DSP control and parameter display unit, the input of described current/voltage sensing unit is connected with the second output of described high-voltage rectifying filter unit; Described DSP controls and the first output of parameter display unit is connected with the second input of rectifying and wave-filtering/slow start unit, described DSP controls and the second output of parameter display unit is connected with the input of IGBT driver element, the second input of the first output termination BUCK converter unit of described IGBT driver element, the second input of the second output termination high frequency conversion unit of described IGBT driver element;
From the 380V AC power of three-phase alternating current electrical network through the EMC administrative unit, the high order harmonic component that filtering produces during from the high-frequency interferencing signal of electrical network and this power work, form Voltage pulsating direct-current supply through rectifying and wave-filtering/slow start unit again, realize synchronous freewheeling through the BUCK converter unit again, realize the fixed full-bridge converter of resonant mode Zero-voltage zero-current frequently through the full-bridge high-frequency converter unit again, through high frequency high voltage transformer, boost again, finally by exporting after high-voltage rectifying filter unit rectifying and wave-filtering;
DSP controls and parameter display unit is powered by accessory power supply, signal according to the current/voltage sensing unit, by the IGBT driver element, BUCK converter unit and full-bridge high-frequency converter unit are carried out to sequencing control, DSP controls and parameter display unit also starts control to rectification filtering unit.
The present invention compared with prior art, its remarkable advantage:
1, power-efficient is high: owing to adopting fixed resonant mode Zero-voltage zero-current full-bridge converter and synchronous rectification frequently, reduced switching loss, the flashover number is low, has effectively improved transducer effciency;
2, power supply reliability is good: introduce DSP as kernel control chip, simplify power management, improved the high voltage source reliability.
Below in conjunction with the drawings and specific embodiments, the invention will be further described.
The accompanying drawing explanation
The structured flowchart that Fig. 1 is plasma high-frequency and high-voltage power supply of the present invention.
The circuit diagram that Fig. 2 is EMC administrative unit in Fig. 1.
The circuit diagram that Fig. 3 is rectifying and wave-filtering in Fig. 1/slow start unit.
The circuit diagram that Fig. 4 is BUCK converter unit and full-bridge high-frequency converter unit in Fig. 1;
The circuit diagram that Fig. 5 is Fig. 1 medium-high frequency high-tension transformer, rectification filtering unit and voltage/current sensing unit.
In figure: 1EMC administrative unit, 2 rectifying and wave-filterings/slow start unit, 3BUCK converter unit, 4 full-bridge high-frequency converter units, 5 high frequency high voltage transformers, 6 high-voltage rectifying filter units, 7 current/voltage sensing units, 8DSP controls and parameter display unit, 9IGBT driver element, 10 accessory power supplys.
Embodiment
As shown in Figure 1, plasma high-frequency and high-voltage power supply of the present invention, the EMC administrative unit 1, rectifying and wave-filtering/slow start unit 2, BUCK converter unit 3, full-bridge high-frequency converter unit 4, high frequency high voltage transformer 5 and the high-voltage rectifying filter unit 6 that comprise series connection successively, the input of described EMC administrative unit 1 is as the three-phase alternating-current supply input of described plasma high-frequency and high-voltage power supply, and the output of described high-voltage rectifying filter unit 6 is as the high-voltage output end of described plasma high-frequency and high-voltage power supply;
The first output of EMC administrative unit 1 is connected with the first input end of rectifying and wave-filtering/slow start unit 2, the first input end of BUCK converter unit 3 is connected with the output of rectifying and wave-filtering/slow start unit 2, the output of BUCK converter unit 3 is connected with the first input end of full-bridge high-frequency converter unit 4, the output of the input termination full-bridge high-frequency converter unit 4 of high frequency high voltage transformer 5, the input of the output termination high-voltage rectifying filter unit 6 of high frequency high voltage transformer 5;
Plasma high-frequency and high-voltage power supply of the present invention also comprises accessory power supply 10, DSP controls and parameter display unit 8, current/voltage sensing unit 7 and IGBT driver element 9, the second output of the input termination EMC administrative unit 1 of described accessory power supply 10, the output termination DSP control of described accessory power supply 10 and the first input end of parameter display unit 8, the output of the second input termination current/voltage sensing unit 7 of described DSP control and parameter display unit 8, the input of described current/voltage sensing unit 7 is connected with the second output of described high-voltage rectifying filter unit 6,
Described DSP controls and 8 first outputs of parameter display unit are connected with the second input of rectifying and wave-filtering/slow start unit 2, described DSP controls and the second output J4 of parameter display unit 8 is connected with the input J1 of IGBT driver element 9, the first output J2 of described IGBT driver element 9 connects the second input of BUCK converter unit 3, and the second output J3 of described IGBT driver element 9 connects the second input of high frequency conversion unit 4;
From the 380V AC power of three-phase alternating current electrical network through EMC administrative unit 1, the high order harmonic component that filtering produces during from the high-frequency interferencing signal of electrical network and this power work, form Voltage pulsating direct-current supply through rectifying and wave-filtering/slow start unit 2 again, realize synchronous freewheeling through BUCK converter unit 3 again, realize the fixed full-bridge converter of resonant mode Zero-voltage zero-current frequently through full-bridge high-frequency converter unit 4 again, through high frequency high voltage transformer 5, boost again, finally by exporting after high-voltage rectifying filter unit 6 rectifying and wave-filterings;
DSP controls and parameter display unit 8 is powered by accessory power supply 10, voltage and current feedback signal according to current/voltage sensing unit 7, carry out sequencing control by 9 pairs of BUCK converter units 3 of IGBT driver element and full-bridge high-frequency converter unit 4, DSP controls and parameter display unit 8 also starts control slowly to rectification filtering unit 2.
Determine frequency resonant mode Zero-voltage zero-current full-bridge converter and synchronous rectification because the present invention adopts, reduced switching loss, reduced the flashover number, thereby effectively improved transducer effciency, power-efficient is improved.
As shown in Figure 2, described EMC administrative unit 1 comprises and the first inductance L 1 of power supply three-phase input series connection, the second inductance L 2 with power supply three-phase output series connection, the first capacitor C 1, the second capacitor C 2, the 3rd capacitor C 3 be connected in twos with triple line, and is serially connected in the 4th capacitor C 4, the 5th capacitor C 5, the 6th capacitor C 6 between each phase line and earth polar;
Form the LCL filter by inductance L 1, L2, capacitor C 1 to C6, on the one hand the high-frequency interferencing signal from electrical network is carried out to the filtering processing, to eliminate the harmful effect of grid disturbance to power supply, the high order harmonic component produced during simultaneously to this power work is carried out the filtering processing, when eliminating power work to the issuable pollution of electrical network.
As shown in Figure 3, described rectifying and wave-filtering/slow start unit 2 comprises three phase rectifier module VC1, slow starting resistance R4, controllable silicon V1, inductance L 3, capacitor C 7, described slow starting resistance R4 is with after controllable silicon V1 is in parallel, the cathode output end of the described three phase rectifier module of one termination VC1, another termination inductance L 3 inputs, shunt capacitance C7 between the cathode output end of three phase rectifier module VC1 and the output of inductance L 3;
Described three phase rectifier module VC1 carries out rectification to AC power and forms Voltage pulsating direct-current supply, by utilizing controllable silicon V1 by resistance R 4 short circuits after time delay, inductance L 3, capacitor C 7 form the Γ mode filter, utilize the energy storage of inductance L 3 and afterflow to complete three-phase Passive Power factor correction to improve power.
For improving the power factor (PF) of this power supply, the Γ mode filter that adopts L3, C7 to form, rather than C mode filter commonly used, process by simple Γ type filtering, and electrical source power factor can be brought up to more than 95%.
The capacitor group that the electrolytic capacitor that described capacitor C 7 is plural a plurality of 400V, 1000 μ F forms by connection in series-parallel.
Because the C7 capacity is larger, adopt simple resistance current-limiting mode in circuit, while avoiding starting shooting to the impact of electrical network.By utilizing controllable silicon V1 by the current-limiting resistance short circuit after time delay.
As shown in Figure 4, described BUCK converter unit 3 consists of two high-power half-bridge IGBT module V2, V3 and afterflow inductance L 4, L5 with identical electric parameter, V2, V3 adopt the pulse time sharing mode, utilize the lower brachium pontis of high-power half-bridge IGBT module to realize synchronous freewheeling.
In Fig. 4, described full-bridge (FULL-BRIDGE) high frequency conversion unit 4 is formed and is determined frequency resonant mode Zero-voltage zero-current full-bridge converter by two high-power half-bridge IGBT module V4, V5 with identical electric parameter and auxiliary resonance inductance L 6, auxiliary resonance capacitor C 13, C14.
The control of V2, V3, V4, V5 is realized by dsp controller, from the IGBT module gate drive signal of DSP control unit, after the IGBT driver element amplifies, drives respectively corresponding IGBT module.
High-power IGBT module V2, V3, V4, V5 are arranged on a water-cooling plate, and the hear rate produced during module work conducts to rapidly water-cooling plate, and by circulating water flow, heat is taken away.
As shown in Figure 5, described high frequency high voltage transformer 5, high-voltage rectifying filter unit 6 and current/voltage sensing 7 are integrated in a fuel tank, and high pressure is drawn by a pluggable high-tension cable.
5 levels of described high frequency high voltage transformer adopt many windings planarized structure.
High-frequency impulse from full-bridge high-frequency converter unit 4 boosts by high frequency high voltage transformer 5.Secondary each winding is connected to respectively corresponding rectifier diode by electric connecting mode shown in Fig. 5, and capacitor is selected a plurality of high frequency capacitance series connection, to meet the 50kV operating voltage.Capacitance after series connection is generally between 1500PF-2000PF.Resistance R 1 is the high-power current-limiting resistance, and this power supply R1 value is 1k Ω, by the maximum current limit of high tension loop, is 50A.In normal working conditions, when load current is 0.6A, the normality power consumption of R1 is 360W.But when the transient state of R1 is born power and should be able to be born load direct short-circuit, institute's maximum power and voltage when electric power output voltage all puts on this resistance.
The resitstance voltage divider of the 5000:1 that the output voltage of power supply forms through resistance R 2, R3, R4, R5 forms high-pressure sampling voltage on R5, feeds back to DSP and controls and parameter display unit 8.When-50kV voltage, sampling voltage is-10V.The sample resistance R6 sampling that load current is 5 Ω by resistance, when load current 1A, the R6 both end voltage is about 5V.Current sampling signal feeds back to the DSP control board.Even occur that because arcing may occur plasma generator the corona wire disconnection causes instantaneous short circuit, thereby resistance R 6 adopts the parallel connection of many resistance, 18V piezo-resistance in parallel and shunt capacitance at the resistance two ends, thereby prevent when flashover phenomenon and load short circuits appear in high voltage source the overvoltage that the current sampling resistor two ends may occur.
Described current/voltage sensing unit 7 is the low side of the output of the high voltage source at the high-voltage rectifying filter unit 6 current transformer TA1 that connects, when sparking occurs in high voltage source, provide current pulse signal fast to DSP control and parameter display unit 8, in fast shut-off BUCK conversion and full-bridge high-frequency translation circuit, the grid of IGBT drives pwm signal.
DSP controls and parameter display unit 8, TMS320LF2407 in the TMS320F series DSP chip of employing TI company is as kernel control chip, according to high pressure feedback signal, direct current sampled signal, pass through software mode, the grid of regulating in real time IGBT module V2, V3 in the BUCK converter unit drives pwm signal, realizes that the voltage stabilizing of High voltage output is controlled.According to pulsed current signal, finely tune in real time the High voltage output amplitude of plasma high-frequency and high-voltage power supply, realize the flashover numerical control system of plasma generator.Certain development according to chip technology, the also dsp chip of available other models such as TMS320F2812, TMS320F28335 etc.
Above are only a kind of preferred embodiment of the present invention, be not intended to limit protection scope of the present invention.Within the spirit and principles in the present invention all, any modification of doing, be equal to replacement, improvement etc., within all should being included in protection scope of the present invention.
Claims (10)
1. a plasma high-frequency and high-voltage power supply is characterized in that:
Comprise EMC administrative unit (1), rectifying and wave-filtering/slow start unit (2), BUCK converter unit (3), full-bridge high-frequency converter unit (4), high frequency high voltage transformer (5) and high-voltage rectifying filter unit (6), the input of described EMC administrative unit (1) is as the three-phase alternating-current supply input of described plasma high-frequency and high-voltage power supply, the first output of EMC administrative unit (1) is connected with the first input end of rectifying and wave-filtering/slow start unit (2), the first input end of BUCK converter unit (3) is connected with the output of rectifying and wave-filtering/slow start unit (2), the output of BUCK converter unit (3) is connected with the first input end of full-bridge high-frequency converter unit (4), the output of the input termination full-bridge high-frequency converter unit (4) of high frequency high voltage transformer (5), the input of the output termination high-voltage rectifying filter unit (6) of high frequency high voltage transformer (5), the first output of described high-voltage rectifying filter unit (6) is as the high-voltage output end of described plasma high-frequency and high-voltage power supply,
Also comprise accessory power supply (10), DSP controls and parameter display unit (8), current/voltage sensing unit (7) and IGBT driver element (9), the second output of the input termination EMC administrative unit (1) of described accessory power supply (10), the output termination DSP control of described accessory power supply (10) and the first input end of parameter display unit (8), the output of the second input termination current/voltage sensing unit (7) of described DSP control and parameter display unit (8), the input of described current/voltage sensing unit (7) is connected with the second output of described high-voltage rectifying filter unit (6),
Described DSP controls and the first output of parameter display unit (8) is connected with the second input of rectifying and wave-filtering/slow start unit (2), described DSP controls and the second output of parameter display unit (8) is connected with the input of IGBT driver element (9), the second input of the first output termination BUCK converter unit (3) of described IGBT driver element (9), the second input of the second output termination high frequency conversion unit (4) of described IGBT driver element (9);
From the 380V AC power of three-phase alternating current electrical network through EMC administrative unit (1), the high order harmonic component that filtering produces during from the high-frequency interferencing signal of electrical network and this power work, form Voltage pulsating direct-current supply through rectifying and wave-filtering/slow start unit (2) again, realize synchronous freewheeling through BUCK converter unit (3) again, realize the fixed full-bridge converter of resonant mode Zero-voltage zero-current frequently through full-bridge high-frequency converter unit (4) again, through high frequency high voltage transformer (5), boost again, finally by exporting after high-voltage rectifying filter unit (6) rectifying and wave-filtering;
DSP controls and parameter display unit (8) is powered by accessory power supply (10), signal according to current/voltage sensing unit (7), by IGBT driver element (9), BUCK converter unit (3) and full-bridge high-frequency converter unit (4) are carried out to sequencing control, DSP controls and parameter display unit (8) also starts control to rectification filtering unit (2).
2. plasma high-frequency and high-voltage power supply according to claim 1, it is characterized in that: described EMC administrative unit (1) comprises and the first inductance L 1 of power supply three-phase input series connection, the second inductance L 2 with power supply three-phase output series connection, the first capacitor C 1, the second capacitor C 2, the 3rd capacitor C 3 be connected in twos with triple line, and is serially connected in the 4th capacitor C 4, the 5th capacitor C 5, the 6th capacitor C 6 between each phase line and earth polar;
Form the LCL filter by inductance L 1, L2, capacitor C 1 to C6, on the one hand the high-frequency interferencing signal from electrical network is carried out to the filtering processing, to eliminate the harmful effect of grid disturbance to power supply, the high order harmonic component produced during simultaneously to this power work is carried out the filtering processing, when eliminating power work to the issuable pollution of electrical network.
3. plasma high-frequency and high-voltage power supply according to claim 1, it is characterized in that: described rectifying and wave-filtering/slow start unit (2) comprises three phase rectifier module VC1, slow starting resistance R4, controllable silicon V1, inductance L 3, capacitor C 7, described slow starting resistance R4 is with after controllable silicon V1 is in parallel, the cathode output end of the described three phase rectifier module of one termination VC1, another termination inductance L 3 inputs, shunt capacitance C7 between the cathode output end of three phase rectifier module VC1 and the output of inductance L 3;
Described three phase rectifier module VC1 carries out rectification to AC power and forms Voltage pulsating direct-current supply, by utilizing controllable silicon V1 by resistance R 4 short circuits after time delay, inductance L 3, capacitor C 7 form the Γ mode filter, utilize the energy storage of inductance L 3 and afterflow to complete three-phase Passive Power factor correction to improve power.
4. plasma high-frequency and high-voltage power supply according to claim 3, is characterized in that: the capacitor group that the electrolytic capacitor that described capacitor C 7 is two above 400V, 1000 μ F forms by connection in series-parallel.
5. plasma high-frequency and high-voltage power supply according to claim 1, it is characterized in that: described BUCK converter unit (3) consists of two high-power half-bridge IGBT module V2, V3 and afterflow inductance L 4, L5 with identical electric parameter, V2, V3 adopt time sharing mode, utilize the lower brachium pontis of module to realize synchronous freewheeling.
6. plasma high-frequency and high-voltage power supply according to claim 1 is characterized in that: described full-bridge high-frequency converter unit (4) is formed and is determined frequency resonant mode Zero-voltage zero-current full-bridge converter by two high-power half-bridge IGBT module V4, V5 with identical electric parameter and auxiliary resonance inductance L 6, auxiliary resonance capacitor C 13, C14.
7. plasma high-frequency and high-voltage power supply according to claim 1, it is characterized in that: described high frequency high voltage transformer (5), high-voltage rectifying filter unit (6) and current/voltage sensing (7) are integrated in a fuel tank, and high pressure is drawn by a pluggable high-tension cable.
8. plasma high-frequency and high-voltage power supply according to claim 1, is characterized in that: the secondary many windings of employing of described high frequency high voltage transformer (5) planarized structure.
9. plasma high-frequency and high-voltage power supply according to claim 1, it is characterized in that: described current/voltage sensing unit (7) is the current transformer TA1 that connects of the low side in the output of the high voltage source of high-voltage rectifying filter unit (6), when sparking occurs in high voltage source, provide current pulse signal fast to DSP control and parameter display unit (8), in fast shut-off BUCK conversion and full-bridge high-frequency translation circuit, the grid of IGBT drives pwm signal.
10. plasma high-frequency and high-voltage power supply according to claim 1 is characterized in that: described DSP controls and the control chip of parameter display unit (8) is TMS320LF2407.
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| CN104113219A (en) * | 2014-04-28 | 2014-10-22 | 中国船舶重工集团公司第七二三研究所 | LCC resonant high-frequency sine-wave power supply |
| CN106026689A (en) * | 2016-07-20 | 2016-10-12 | 北京金大万翔环保科技有限公司 | High-frequency high-voltage power supply for capacitive loads |
| CN106374761A (en) * | 2016-11-01 | 2017-02-01 | 株洲变流技术国家工程研究中心有限公司 | Cascading type chopped wave power supply for plasma arc |
| CN108092516A (en) * | 2017-12-26 | 2018-05-29 | 北京无线电测量研究所 | A kind of modular water cold anticyclone power supply |
| CN109412426A (en) * | 2018-12-19 | 2019-03-01 | 长沙秋点兵信息科技有限公司 | Time-delay stable plasma intermediate frequency power supply |
| CN109687733A (en) * | 2017-10-19 | 2019-04-26 | 江苏扬航光电科技有限公司 | A kind of power supply unit for making alternating current be transformed into direct current |
| CN112532070A (en) * | 2020-11-26 | 2021-03-19 | 核工业西南物理研究院 | Power supply circuit for PSM high-voltage power supply control and application thereof |
| CN114665702A (en) * | 2022-04-20 | 2022-06-24 | 合肥综合性国家科学中心能源研究院(安徽省能源实验室) | High-power constant-voltage constant-current power supply capable of resisting radio frequency interference |
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| CN112532070A (en) * | 2020-11-26 | 2021-03-19 | 核工业西南物理研究院 | Power supply circuit for PSM high-voltage power supply control and application thereof |
| CN114665702A (en) * | 2022-04-20 | 2022-06-24 | 合肥综合性国家科学中心能源研究院(安徽省能源实验室) | High-power constant-voltage constant-current power supply capable of resisting radio frequency interference |
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Application publication date: 20131225 |