CN204991677U - A fixed (holding) chuck for cylindrical monocrystalline silicon of centre gripping - Google Patents
A fixed (holding) chuck for cylindrical monocrystalline silicon of centre gripping Download PDFInfo
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- CN204991677U CN204991677U CN201520476892.2U CN201520476892U CN204991677U CN 204991677 U CN204991677 U CN 204991677U CN 201520476892 U CN201520476892 U CN 201520476892U CN 204991677 U CN204991677 U CN 204991677U
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- chuck
- locating piece
- holding
- chuck body
- fixed
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Abstract
The utility model provides a fixed (holding) chuck for cylindrical monocrystalline silicon of centre gripping, including the (holding) chuck body, remove the slider, jack catch and fixed baseplate, even opening has four jia kou grooves in the radial orientation of (holding) chuck body, the middle part intersection in jia kou groove opens has the circular shape to press from both sides the mouth, respectively be equipped with a slide rail on the offside inner wall in jia kou groove, be equipped with the spout of corresponding block slide rail on the removal slider, the jack catch is fixed on removing the slider, the bottom in jia kou groove is equipped with the lead screw, the bottom of removing the slider is equipped with the external screw thread of corresponding meshing lead screw, fixed baseplate includes the connecting block, locating piece and locating lever, the up end fixed connection (holding) chuck body of connecting block, the lower terminal surface fixed connection locating piece of connecting block, open the bottom of locating piece has the location bayonet socket, be equipped with on the locating piece and run through the locating lever of fixing a position the bayonet socket. The beneficial effects are that the bottom of (holding) chuck can the strong fix on the fixing base of processing equipment, the upper portion of (holding) chuck can press from both sides tight columniform monocrystalline silicon, saves the pollution of using chemical viscose.
Description
Technical field
The utility model belongs to the Clamping chuck equipment field for gripping, and especially relates to a kind of fixing chuck for clamping cylindrical shaped single crystal silicon.
Background technology
Monocrystalline silicon is the crystal with substantially complete lattice structure, is a kind ofly to have the corresponding good semi-conducting material of different nature in different direction.Highly purified monocrystalline silicon may be used for production and the deep processing manufacture of diode level, rectifying device level, circuit-level and solar battery grade single crystal product article, its subsequent product integrated circuit and semiconductor separation part are widely used in every field, in military avionic equipment, also occupy critical role.Draw from monocrystaline silicon stove and the monocrystalline silicon that goes out through preliminary working, be rendered as the cylindrical of primitive rule, the monocrystalline silicon in this process segment still needs the equipment such as cutting machine to carry out further fine finishining, because do not have can the chuck of corresponding process equipment holder, be fixed on the holder of process equipment so traditional columniform monocrystalline silicon relies on chemical viscose glue to cling, not only fix built on the sand, and chemical viscose glue peculiar smell weight, pollute large.
Utility model content
In view of this, the utility model is intended to propose a kind of fixing chuck for clamping cylindrical shaped single crystal silicon, the bottom of chuck can strong fix on the holder of process equipment, the top of chuck can the monocrystalline silicon of clamp cylinders shape, structure is simple, easy to operate, save the pollution using chemical viscose glue.
For achieving the above object, the technical solution of the utility model is achieved in that
A kind of fixing chuck for clamping cylindrical shaped single crystal silicon, comprise chuck body, moving slider, claw and fixed pedestal, the top disc of discoidal described chuck body evenly have four jaws grooves in the radial direction, described chuck body has circular jaws in the middle part intersection of described jaws groove, the offside inwall of described jaws groove is respectively provided with the slide rail of an evagination, described moving slider is provided with the chute of the described slide rail of corresponding engaging, described claw is fixed on described moving slider, the lowermost end of described jaws groove is provided with the leading screw along described chuck body radial direction trend, the bottom of described moving slider is provided with the external screw thread of corresponding meshing described leading screw, described fixed pedestal comprises contiguous block, locating piece and backstay, the upper surface of described contiguous block is fixedly connected on the bottom disc of described chuck body, the lower surface of described contiguous block is fixedly connected with described locating piece, the bottom of described locating piece has the limited bayonet of corresponding monocrystalline silicon process equipment holder, described locating piece is provided with the described backstay running through described limited bayonet.
Further, the top of described leading screw is with hexagonal (hexagon)nut.
Further, described limited bayonet is rectangle.
Further, the front portion of described backstay is connected with the turncap for extracting and advancing.
Relative to prior art, the fixing chuck for clamping cylindrical shaped single crystal silicon described in the utility model has following advantage:
(1) the chute correspondence of moving slider of the present utility model is fastened on slide rail that jaws groove madial wall has, the jaws groove that moving slider can have in the radial direction along chuck body slides into and skids off, by turning the screw turns of jaws bottom land end, can drive and realize sliding into skidding off by external screw thread and the meshing moving slider of leading screw, four moving sliders of the present utility model can converge to the jaws at middle part, the claw be fixed on moving slider can from four radial direction clamp cylinders shape monocrystalline silicon, the limited bayonet that locating piece bottom the utility model has can be fastened on the holder of process equipment, the location hole that backstay can be provided with through holder, steady stationary positioned further, eliminate the conventional method using chemical viscose glue to be fixed monocrystalline silicon, decrease pollution, the trouble of the chemical viscose glue of monocrystalline silicon surface is cleared up after also eliminating processing.
(2) top of leading screw of the present utility model is with hexagonal (hexagon)nut, conveniently turns leading screw by hexagonal (hexagon)nut, drives moving slider to slide into and skids off, and realizes claw clamping or unclamps monocrystalline silicon; The front portion of backstay is connected with turncap, conveniently extracts or advances backstay.
Accompanying drawing explanation
The accompanying drawing forming a part of the present utility model is used to provide further understanding of the present utility model, and schematic description and description of the present utility model, for explaining the utility model, is not formed improper restriction of the present utility model.In the accompanying drawings:
Fig. 1 is the structural representation of the utility model embodiment;
Fig. 2 is the depression angle schematic diagram of the utility model embodiment superstructure.
Description of reference numerals:
1-chuck body, 2-moving slider, 3-claw, 4-fixed pedestal, 11-jaws groove, 12-jaws, 13-leading screw, 131-hexagonal (hexagon)nut, 21-chute, 22-external screw thread, 41-contiguous block, 42-locating piece, 421-limited bayonet, 43-backstay, 431-turncap.
Embodiment
It should be noted that, when not conflicting, the embodiment in the utility model and the feature in embodiment can combine mutually.
Below with reference to the accompanying drawings and describe the utility model in detail in conjunction with the embodiments.
As Fig. 1, shown in 2, the utility model provides a kind of fixing chuck for clamping cylindrical shaped single crystal silicon, comprise chuck body 1, moving slider 2, claw 3 and fixed pedestal 4, the top disc of discoidal described chuck body 1 evenly have four jaws grooves 11 in the radial direction, described chuck body 1 has circular jaws 12 in the middle part intersection of described jaws groove 11, the offside inwall of described jaws groove 11 is respectively provided with the slide rail of an evagination, described moving slider 2 is provided with the chute 21 of the described slide rail of corresponding engaging, described claw 3 is fixed on described moving slider 2, the lowermost end of described jaws groove 11 is provided with the leading screw 13 along described chuck body 1 radial direction trend, the bottom of described moving slider 2 is provided with the external screw thread 22 of corresponding meshing described leading screw 13, described fixed pedestal 4 comprises contiguous block 41, locating piece 42 and backstay 43, the upper surface of described contiguous block 41 is fixedly connected on the bottom disc of described chuck body 1, the lower surface of described contiguous block 41 is fixedly connected with described locating piece 42, the bottom of described locating piece 42 has the limited bayonet 421 of corresponding monocrystalline silicon process equipment holder, described locating piece 42 is provided with the described backstay 43 running through described limited bayonet 421.
The top of described leading screw 13 is with hexagonal (hexagon)nut 131.
Described limited bayonet 421 is rectangle.
The front portion of described backstay 43 is connected with the turncap 431 for extracting and advancing.
The course of work of this example: chute 21 correspondence of moving slider 2 of the present utility model is fastened on the slide rail that jaws groove 11 madial wall has, moving slider 2 slides into along the jaws groove 11 that chuck body 1 has in the radial direction and skids off, rotated by the leading screw 13 turning jaws groove 11 bottom, drive is slided into by the moving slider 2 that external screw thread 22 and leading screw 13 are meshing and skids off, four moving sliders 2 can converge to the jaws 12 at middle part, be fixed on claw 3 on moving slider 2 from four radial direction clamp cylinders shape monocrystalline silicon, the limited bayonet 421 that locating piece 42 bottom the utility model has is fastened on the holder of process equipment, by the location hole that turncap 431 advances backstay 43 to be provided with through holder, steady stationary positioned further.
The foregoing is only preferred embodiment of the present utility model; not in order to limit the utility model; all within spirit of the present utility model and principle, any amendment done, equivalent replacement, improvement etc., all should be included within protection range of the present utility model.
Claims (4)
1. one kind for clamping the fixing chuck of cylindrical shaped single crystal silicon, it is characterized in that: comprise chuck body, moving slider, claw and fixed pedestal, the top disc of discoidal described chuck body evenly have four jaws grooves in the radial direction, described chuck body has circular jaws in the middle part intersection of described jaws groove, the offside inwall of described jaws groove is respectively provided with the slide rail of an evagination, described moving slider is provided with the chute of the described slide rail of corresponding engaging, described claw is fixed on described moving slider, the lowermost end of described jaws groove is provided with the leading screw along described chuck body radial direction trend, the bottom of described moving slider is provided with the external screw thread of corresponding meshing described leading screw, described fixed pedestal comprises contiguous block, locating piece and backstay, the upper surface of described contiguous block is fixedly connected on the bottom disc of described chuck body, the lower surface of described contiguous block is fixedly connected with described locating piece, the bottom of described locating piece has the limited bayonet of corresponding monocrystalline silicon process equipment holder, described locating piece is provided with the described backstay running through described limited bayonet.
2. the fixing chuck for clamping cylindrical shaped single crystal silicon according to claim 1, is characterized in that: the top of described leading screw is with hexagonal (hexagon)nut.
3. the fixing chuck for clamping cylindrical shaped single crystal silicon according to claim 1, is characterized in that: described limited bayonet is rectangle.
4. the fixing chuck for clamping cylindrical shaped single crystal silicon according to claim 1, is characterized in that: the front portion of described backstay is connected with the turncap for extracting and advancing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520476892.2U CN204991677U (en) | 2015-07-03 | 2015-07-03 | A fixed (holding) chuck for cylindrical monocrystalline silicon of centre gripping |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520476892.2U CN204991677U (en) | 2015-07-03 | 2015-07-03 | A fixed (holding) chuck for cylindrical monocrystalline silicon of centre gripping |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204991677U true CN204991677U (en) | 2016-01-20 |
Family
ID=55126016
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520476892.2U Active CN204991677U (en) | 2015-07-03 | 2015-07-03 | A fixed (holding) chuck for cylindrical monocrystalline silicon of centre gripping |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204991677U (en) |
-
2015
- 2015-07-03 CN CN201520476892.2U patent/CN204991677U/en active Active
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |