CN204981143U - High concentration ozone generating device - Google Patents
High concentration ozone generating device Download PDFInfo
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- CN204981143U CN204981143U CN201520770587.4U CN201520770587U CN204981143U CN 204981143 U CN204981143 U CN 204981143U CN 201520770587 U CN201520770587 U CN 201520770587U CN 204981143 U CN204981143 U CN 204981143U
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- ozone
- plate
- valve
- cooling
- ozone generator
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Abstract
The utility model discloses a high concentration ozone generating device, including unit, ozone generator unit, cooling unit and the ozone unit of giving vent to anger that admits air. When oxygen evenly passes through little clearance, under the effect of radio -frequency power supply, produce dense ozone. Because the grading electrode board adopts the titanium board to make and carries out polishing treatment, be equipped with one deck al2O3 with the face of ventilating in epicoele board and the corresponding gap of cavity of resorption board, obtain very high temperature resistant, the corrosion -resistant surface of smoothness again after the grinding. Front end in cooling part is equipped with temperature -detecting device, exceedes the setting value in case detect the temperature, and the operating power of system automatically regulated radio -frequency power supply guarantees that the the device work safety is stable. Normal during operation in case the device's cooling unit's flow switch detects that cooling water flow does not have or when lower, through control system control electric valve, close the normal cooling pipeline, starts the emergency cooling water route, and the running water inserts and cools off temporarily to guarantee the the device safety and stability.
Description
Technical field
The utility model relates to a kind of ozone generating-device, particularly relates to a kind of high concentrition ozone generator.
Background technology
Ozonizer is for producing ozone gas (O
3) device.Ozone is easy to decomposition and cannot stores, and needs formed in-situ onsite application (can carry out the storage of short period of time when special), and the place using ozone so every all needs to use ozonizer.Ozonizer is in field widespread uses such as tap water, sewage, industrial oxidation, food-processing and fresh-keeping, medical synthesis, space sterilizings.The ozone gas that ozonizer produces can directly utilize, and also can participate in reaction by mixing device and liquid mixing.Utilize high pressure ionization (or chemistry, photochemical reaction), the partial oxidation in air being decomposed and is polymerized to ozone, is the polymorphic transformation process of oxygen; Also water electrolysis method can be utilized to obtain.The unstable of ozone makes it be difficult to realize bottled storage, generally can only utilize ozonizer situ production, with product with.
Ozone is mixed gas, and its concentration represents with volume ratio usually in mass ratio.Mass ratio refers to the ozone containing how many quality in mixed gas in unit volume, conventional unit mg/L, mg/m
3or g/m
3deng expression.Volume ratio refers to volume content in unit volume shared by ozone or degree, uses per-cent to represent as 2%, 5%, 12% etc.Health industry is commonly used ppm and is represented ozone concn, namely in every cube of ozone mixed gas ozone account for this volume 1,000,000/be 1ppm.Ozone concn is the important indicator weighing ozonizer technology content and performance.Under equal working condition, ozone output concentration its quality degree higher is higher.The principal element affecting ozone concn has: 1, the structure of ozonizer and working accuracy; 2, the type of cooling and condition; 3, driving voltage and driving frequency; 4, dielectric material; 5, the content of oxygen and clean and ridity in unstripped gas.(efficiency is high, and converting heat is few for the efficiency of 6, generator power system.); Ozone is the extremely strong unstable gas of a kind of oxidisability, and ozone exports the impact of concentration by many factors, and wherein cavity temperature is one of epochmaking factor; Ozone to be decayed in 1 minute half at about 30 DEG C Shi Hui, and when 40-50 DEG C, decay reaches 80%.Can decompose more than 60 DEG C of ozone at once.Ozone output refers to the quantum of output of ozone in the ozonizer unit time; Ozone concn numerical value is ozone output with the product entering the total tolerance numerical value of ozonizer; Usual use mg/h, g/h or kg/h unit representation.Ozonizer principle of work is the model split by ozone generation, and ozonizer mainly contains three kinds: high voltage discharge type, uviolizing formula, electrolyzing.1, high voltage discharge type producer.Such ozonizer uses the high-tension current of certain frequency to manufacture high-voltage corona electric field, makes the oxygen molecule generation electrochemical reaction in electric field or around electric field, thus manufacture ozone.This ozonizer possesses skills the advantages such as maturation, working stability, long service life, ozone output large (unit can reach 1Kg/h), so be the most popular ozonizers of domestic and international relevant industries.In high voltage discharge type ozonizer, be divided into again following several types: by the high voltage electric frequency partition of producer, have power frequency (50-60Hz), intermediate frequency (400-1000Hz) and high frequency (>1000Hz) three kinds.Power frequency producer, due to shortcomings such as volume are large, power consumption is high, is withdrawn from the market substantially.Medium, high frequency producer has the advantages such as volume is little, low in energy consumption, ozone output is large, is now the most frequently used product.2, divide by the gas raw material used, have oxygen type and air type two kinds.Oxygen type is normally by oxygen cylinder or oxygenerator supply oxygen.Air type typically uses the pressurized air of clean dried as raw material.Because ozone produces by oxygen, and the content of oxygen only has 21% in air, so the ozone concn that air type producer produces is relatively low, and the oxygen purity of bottled or oxygenerator is all more than 90%, so the ozone concn of oxygen type producer is higher.3, divide by the type of cooling, have water-cooling type and Wind-cooling type.Can produce a large amount of heat energy during ozonizer work, need cooling, otherwise ozone Yin Gaowen and generation limit, limit can decompose.Water-cooling type producer good cooling results, working stability, ozone is undamped, and energy long time continuous working, but complex structure, cost is slightly high.Wind-cooling type cooling performance is not ideal enough, and ozone decay obviously.The stable high-performance ozonizer of overall performance is all water-cooled usually.Air-cooled general for the less low and middle-grade ozonizers of ozone output.When selecting ozonizer, water-cooling type should to be selected as far as possible.4, divide by dielectric materials, common are the several types such as silica tube (one of glass), ceramic plate, vitrified pipe, Glass tubing and enamel pipe.Use on the ozonizer market of all kinds of dielectric materials manufacture and all have sale, its performance is had nothing in common with each other, and glass dielectric body cost is low, and performance is surely manually manufacture one of ozone use material the earliest, but bad mechanical strength.Pottery and category of glass like but pottery should not process special use in large-scale ozone machine and be restricted.Enamel is a kind of novel dielectric materials, medium and electrode is high in one physical strength, can precise processing precision higher, widely use in big-and-middle-sized ozonizer, but manufacturing cost is higher.5, divide by ozonizer structure, dielectric barrier discharge formula (DBD) and open two kinds.6, divide by Discharge Cell of Ozone Generators structure, tubular type and board-like two kinds.Be energized its reaction chemical equation be 3O
2====2O
3.
At present, most of ozone generating-device is mainly used in cleaning or sterilization, sterilization at industrial production, medical treatment or field of food, and much can produce relatively large ozone generating apparatus although wherein have, its concentration is generally lower.Along with the application of ozone is more and more extensive, industrial semiconductor production has started applying high density ozone or ozone water carries out explained hereafter, PID process as anti-in silicon chip of solar cell, black silicon dry etching etc., particularly black silicon production aspect, required consistency of ozone water is higher, and the ozone of preparation ozone water is at about 13000PPM.
Utility model content
For above-mentioned prior art, the high concentrition ozone generator that the technical problems to be solved in the utility model is to provide a kind of work safety to stablize, corrosion-resistant and generation ozone concn is high.
For solving the problems of the technologies described above, the utility model provides a kind of high concentrition ozone generator, comprise air admission unit, ozone generator units, cooling unit and ozone outlet cell, air admission unit comprises pipeline, valve, under meter and strainer, valve comprises ball valve, reducing valve, motorized valve and check valve, air admission unit is provided with two pipelines, , oxygen pipeline and another a nitrogen/carbonic acid gas pipeline, every bar pipeline is from left to right equipped with ball valve in turn, reducing valve, strainer, motorized valve, under meter and check valve, and motorized valve is connected with Controlling System circuit, ozone outlet cell comprises ozone outlet cell pipeline, ozone concn detector, ball valve, electrically-controlled valve and check valve, ozone outlet cell pipeline is from left to right provided with ozone concn detector, ball valve, electrically-controlled valve in turn, check valve, and ozone concn detector and electrically-controlled valve are all connected with Controlling System circuit, described ozone generator units comprises induction part, ozone production part and ozone cooling segment, wherein, ozone production part comprises cavity plate, cavity of resorption plate, insulation protective board, grading electrode plate, sealed strip and gap spacer, cavity plate, insulation protective board is equipped with between cavity of resorption plate and grading electrode plate, sealed strip and gap spacer, and be equipped with microgap, cavity plate and cavity of resorption plate are equipped with negative potential, grading electrode plate is provided with positive electrode, upper, water-cooled tube is provided with outside cavity of resorption plate, ozone production part is connected with radio-frequency power supply circuit, induction part is provided with in the front end of ozone production part, induction part comprises front end-plate, air inlet core and sealing inlet plate, front end-plate is provided with air inlet core, centre is provided with air inlet port, ozone cooling segment comprises cooling plate, lower cooling plate, intermediate seal plate and S shape ozone outlet passageway, and the outside of upper cooling plate and lower cooling plate is provided with water-cooled tube.
Described cooling unit comprises ball valve, tensimeter, strainer, electrically operated valve, under meter, flow valve, water temperature detection and water route, cooling unit is provided with two water routes, one tunnel is normal cooling water route, another road is emergency cooling water road, two water routes are equipped with in turn ball valve, tensimeter, strainer, electrically operated valve, under meter, flow valve, water temperature detection, electrically operated valve and ball valve, and sharing the detection of under meter, flow valve and water temperature, electrically operated valve and flow valve are all connected with Controlling System circuit.
Described grading electrode plate adopts titanium plate make and carry out polished finish, cavity plate and grading electrode plate and between cavity of resorption plate and grading electrode plate corresponding described micro-break joint ventilation face on be equipped with one deck Al
2o
3, then the surface obtained after grinding.
Described sealing inlet plate is provided with inlet pipe, air inlet micropore, air inlet core open holes and open holes.
In the front end of the ozone cooling segment of described ozone generator units, be provided with temperature-detecting device.
Compared with prior art, the beneficial effect that the utility model obtains is: owing to have employed said structure, when oxygen is evenly by microgap, under the effect of radio-frequency power supply, produces dense ozone.Because described grading electrode plate adopts titanium plate make and carry out polished finish, cavity plate and grading electrode plate and between cavity of resorption plate and grading electrode plate corresponding micro-break joint ventilation face on be equipped with one deck Al
2o
3, then obtain that unusual light is high temperature resistant, corrosion-resistant surface after grinding.Thus ensure that microgap is even, prevent electric discharge temperature distortion and ozone corrosion.Outside cavity plate, cavity of resorption plate, be embedded with water-cooled tube, in production, pass into water coolant and cool.In the front end of cooling segment, be provided with temperature-detecting device, once detect that temperature exceedes set(ting)value, system regulates the operating power of radio-frequency power supply automatically, thus ensures that this device work safety is stablized.During normal work, the flow valve once the cooling unit of this device detects that cooling water flow does not have or lower, controls electrically operated valve by Controlling System, close normal cooling pipeline, start emergency cooling water road, tap water access cools temporarily, thus ensures security of system.
Accompanying drawing explanation
Fig. 1 is the utility model layout structure schematic diagram;
Fig. 2 is air admission unit pipe fitting joint structure schematic diagram of the present utility model;
Fig. 3 is cooling unit pipe fitting joint structure schematic diagram of the present utility model;
Fig. 4 is ozone outlet cell pipe fitting joint structure schematic diagram of the present utility model;
Fig. 5 is ozone generator units front view of the present utility model;
Fig. 6 is that ozone generator units A-A of the present utility model digs view;
Fig. 7 is ozone generator units vertical view of the present utility model.
Fig. 8 is the sealing inlet plate front view of the induction part of ozone generator units of the present utility model;
Embodiment
Below in conjunction with accompanying drawing, embodiment of the present utility model is described in further detail.
Fig. 1-Fig. 8 shows a kind of high concentrition ozone generator of the utility model, as shown in Figure 1, comprises air admission unit 200, ozone generator units 100, cooling unit 300 and ozone outlet cell 400; Air admission unit 200 comprises pipeline 207, valve, under meter 205 and strainer 203, valve comprises ball valve 201, reducing valve 202, motorized valve 204 and check valve 206, air admission unit 200 is provided with two pipelines 207,, oxygen pipeline and another a nitrogen/carbonic acid gas pipeline, every bar pipeline 207 is from left to right equipped with ball valve 201, reducing valve 202, strainer 203, motorized valve 204, under meter 205 and check valve 206 in turn, and motorized valve 204 is connected with Controlling System circuit.
As shown in Figure 6, described ozone generator units 100 comprises induction part, ozone production part and ozone cooling segment, wherein, ozone production part comprises cavity plate 101, cavity of resorption plate 102, insulation protective board 103, grading electrode plate 104, sealed strip 105 and gap spacer 106, cavity plate 101, insulation protective board 103 is equipped with between cavity of resorption plate 102 and grading electrode plate 104, sealed strip 105 and gap spacer 106, and be equipped with microgap, after each part combination of ozone production part, at cavity plate 101 and grading electrode plate 104, the long narrow gap (microgap) of each height of formation preferably 0.8 millimeter along the longitudinal direction between cavity of resorption plate 102 and grading electrode plate 104, cavity plate 101 and cavity of resorption plate 102 are equipped with negative potential 109, positive electrode is set to by electrode insulation cover 107 to picking out electrode 108 at grading electrode plate 104, in order to ensure the gap uniformity of long narrow seam, prevent electric discharge temperature distortion and ozone corrosion, described grading electrode plate 104 adopts titanium plate to make and carries out polished finish, the ventilation face of long narrow gap (microgap) corresponding to cavity of resorption plate 102 cavity plate 101 is through surface recombination thick layer preferably 1 millimeter of Al
2o
3, then obtain that unusual light is high temperature resistant, corrosion-resistant surface after grinding.In addition, outside cavity plate 101, cavity of resorption plate 102, be provided with water-cooled tube 110, water-cooled tube 110 preferably cooling copper tube, its shape is S shape.Ozone production part is connected with radio-frequency power supply E circuit, when oxygen is evenly by long narrow seam (microgap), under the effect of radio-frequency power supply, produces dense ozone.
As shown in Figure 5, in order to air inlet uniformity, be provided with induction part in the front end of ozone production part, induction part comprises front end-plate 122, air inlet core 121 and sealing inlet plate 123, and front end-plate 122 is provided with air inlet core 121, and centre is provided with air inlet port; After gas enters from the middle air inlet port of front end-plate 121, enter the static pressure chamber 124 be made up of above-mentioned three parts through air inlet core 122 radial hole, then enter in long narrow seam (microgap) from static pressure chamber 124 through sealing in the micropore of inlet plate 123 facing to the long narrow seam (microgap) of ozone production part.As shown in Figure 8, described sealing inlet plate 123 is provided with inlet pipe 1231, air inlet micropore 1232, air inlet core open holes 1233 and open holes 1234.
Oxygen arrives ozone generator units 100 cooling segment below after generating ozone by long narrow seam (microgap), ozone cooling segment comprises cooling plate 131, lower cooling plate 132, intermediate seal plate 133 and S shape ozone outlet passageway 135 (as shown in Figure 7), after the part combination such as upper cooling plate 131, lower cooling plate 132, intermediate seal plate 133, the ozone outlet passageway 135 (as shown in Figure 7) of S shape is formed in inside, ozone through fully cooling, flows into ozone outlet cell 400 from air outlet after this passage.The outside of upper cooling plate 131 and lower cooling plate 132 is provided with water-cooled tube 110, water-cooled tube 110 preferably cooling copper tube, and its shape is S shape.In the front end of the ozone cooling segment of described ozone generator units 100, be provided with temperature-detecting device 134, once detect that temperature exceedes set(ting)value, system regulates the operating power of radio-frequency power supply automatically, ensures that this device work safety is stablized.
As shown in Figure 3, described cooling unit 300 comprises ball valve 301, tensimeter 302, strainer 303, electrically operated valve 304, under meter 305, flow valve 306, water temperature detects 307 and water route 308, cooling unit 300 is provided with two water routes, one tunnel is normal cooling water route A, another road is emergency cooling water road B, two water routes 308 are equipped with ball valve 301 in turn, tensimeter 302, strainer 303, electrically operated valve 304, under meter 305, flow valve 306, water temperature detects 307, electrically operated valve 304 and ball valve 301, and share under meter 305, flow valve 306 and water temperature detect 307, electrically operated valve 304 is all connected with Controlling System circuit with flow valve 306.In normal work, detect that water coolant A flow does not have or lower once flow valve 306, control electrically operated valve 304 by Controlling System, close normal cooling water A road, start emergent water route tap water B access to cool temporarily, guarantee that this device work safety is stablized.
As shown in Figure 4, described ozone outlet cell 400 comprises ozone outlet pipe 405, ozone concn detector 401, ball valve 402, electrically-controlled valve 403 and check valve 404, ozone outlet cell pipeline 405 is from left to right provided with ozone concn detector 401, ball valve 402, electrically-controlled valve 403 in turn, check valve 404, and ozone concn detector 401 is all connected with Controlling System circuit with electrically-controlled valve 403.
The principle of work of this high-concentration ozone water device is:
As shown in Figure 1, oxygen and nitrogen (carbonic acid gas), under the control of each element of air admission unit 200, evenly enter ozone generator units 100, and oxygen is under the effect of the radio frequency electrical of radio-frequency power supply E, be ionized and resolve into positively charged ion, recombine generates ozone.Owing to producing a large amount of heats in ionization process, carry out cooling by cooling unit 300 pairs of ozone generator units to control, make ozone arrive ozone outlet cell 400 time temperature significantly reduce, ozone outlet cell 400 detects the concentration of giving vent to anger, feed back to air admission unit 200, to regulate the concentration of ozone.
By reference to the accompanying drawings embodiment of the present utility model is explained in detail above, but the utility model is not limited to above-mentioned embodiment, in the ken that those of ordinary skill in the art possess, many variations can also be made to it.
Claims (10)
1. a high concentrition ozone generator, comprise air admission unit (200), ozone generator units (100), cooling unit (300) and ozone outlet cell (400), air admission unit (200) comprises pipeline (207), valve, under meter (205) and strainer (203), valve comprises ball valve (201), reducing valve (202), motorized valve (204) and check valve (206), air admission unit (200) is provided with two pipelines (207), , oxygen pipeline and another a nitrogen/carbonic acid gas pipeline, every bar pipeline (207) is from left to right equipped with ball valve (201) in turn, reducing valve (202), strainer (203), motorized valve (204), under meter (205) and check valve (206), and motorized valve (204) is connected with Controlling System circuit, ozone outlet cell (400) comprises ozone outlet cell pipeline (405), ozone concn detector (401), ball valve (402), electrically-controlled valve (403) and check valve (404), ozone outlet cell pipeline (405) is from left to right provided with in turn ozone concn detector (401), ball valve (402), electrically-controlled valve (403), check valve (404), and ozone concn detector (401) is all connected with Controlling System circuit with electrically-controlled valve (403), it is characterized in that: described ozone generator units (100) comprises induction part, ozone production part and ozone cooling segment, wherein, ozone production part comprises cavity plate (101), cavity of resorption plate (102), insulation protective board (103), grading electrode plate (104), sealed strip (105) and gap spacer (106), cavity plate (101), insulation protective board (103) is equipped with between cavity of resorption plate (102) and grading electrode plate (104), sealed strip (105) and gap spacer (106), and be equipped with microgap, cavity plate (101) and cavity of resorption plate (102) are equipped with negative potential (109), grading electrode plate (104) is provided with positive electrode (108), in cavity plate (101), cavity of resorption plate (102) outside is provided with water-cooled tube (110), ozone production part is connected with radio-frequency power supply (E) circuit, induction part is provided with in the front end of ozone production part, induction part comprises front end-plate (122), air inlet core (121) and sealing inlet plate (123), front end-plate (122) is provided with air inlet core (121), centre is provided with air inlet port, ozone cooling segment comprises cooling plate (131), lower cooling plate (132), intermediate seal plate (133) and S shape ozone outlet passageway (135), and the outside of upper cooling plate (131) and lower cooling plate (132) is provided with water-cooled tube (110).
2. high concentrition ozone generator as claimed in claim 1, it is characterized in that: described cooling unit (300) comprises ball valve (301), tensimeter (302), strainer (303), electrically operated valve (304), under meter (305), flow valve (306), water temperature detects (307) and water route (308), cooling unit (300) is provided with two water routes, one tunnel is normal cooling water route (A), another road is emergency cooling water road (B), two water routes are equipped with in turn ball valve (301), tensimeter (302), strainer (303), electrically operated valve (304), under meter (305), flow valve (306), water temperature detects (307), electrically operated valve (304) and ball valve (301), and share under meter (305), flow valve (306) and water temperature detect (307), electrically operated valve (304) is all connected with Controlling System circuit with flow valve (306).
3. high concentrition ozone generator as claimed in claim 1 or 2, it is characterized in that: described grading electrode plate (104) adopts titanium plate make and carry out polished finish, cavity plate (101) and grading electrode plate (104) and between cavity of resorption plate (102) and grading electrode plate (104) corresponding described micro-break joint ventilation face on be equipped with one deck Al
2o
3, then the surface obtained after grinding.
4. high concentrition ozone generator as claimed in claim 1 or 2, is characterized in that: described sealing inlet plate (123) is provided with inlet pipe (1231), air inlet micropore (1232), air inlet core open holes (1233) and open holes (1234).
5. high concentrition ozone generator as claimed in claim 3, is characterized in that: described sealing inlet plate (123) is provided with inlet pipe (1231), air inlet micropore (1232), air inlet core open holes (1233) and open holes (1234).
6. high concentrition ozone generator as claimed in claim 1 or 2, is characterized in that: in the front end of the ozone cooling segment of described ozone generator units (100), is provided with temperature-detecting device (134).
7. high concentrition ozone generator as claimed in claim 3, is characterized in that: in the front end of the ozone cooling segment of described ozone generator units (100), is provided with temperature-detecting device (134).
8. high concentrition ozone generator as claimed in claim 4, is characterized in that: in the front end of the ozone cooling segment of described ozone generator units (100), is provided with temperature-detecting device (134).
9. high concentrition ozone generator as claimed in claim 1 or 2, is characterized in that: described water-cooled tube (110) is cooling copper tube.
10. high concentrition ozone generator as claimed in claim 3, is characterized in that: described water-cooled tube all (110) is cooling copper tube.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520770587.4U CN204981143U (en) | 2015-09-30 | 2015-09-30 | High concentration ozone generating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520770587.4U CN204981143U (en) | 2015-09-30 | 2015-09-30 | High concentration ozone generating device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204981143U true CN204981143U (en) | 2016-01-20 |
Family
ID=55115531
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520770587.4U Withdrawn - After Issue CN204981143U (en) | 2015-09-30 | 2015-09-30 | High concentration ozone generating device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204981143U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105271129A (en) * | 2015-09-30 | 2016-01-27 | 南京华伯仪器科技有限公司 | High concentration ozone generating device |
-
2015
- 2015-09-30 CN CN201520770587.4U patent/CN204981143U/en not_active Withdrawn - After Issue
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105271129A (en) * | 2015-09-30 | 2016-01-27 | 南京华伯仪器科技有限公司 | High concentration ozone generating device |
| CN105271129B (en) * | 2015-09-30 | 2017-09-29 | 南京华伯新材料有限公司 | A kind of high concentrition ozone generator |
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| AV01 | Patent right actively abandoned |
Granted publication date: 20160120 Effective date of abandoning: 20170908 |
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| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20160120 Effective date of abandoning: 20170929 |
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| AV01 | Patent right actively abandoned |