CN204966458U - Wafer cleaning jig - Google Patents
Wafer cleaning jig Download PDFInfo
- Publication number
- CN204966458U CN204966458U CN201520799133.XU CN201520799133U CN204966458U CN 204966458 U CN204966458 U CN 204966458U CN 201520799133 U CN201520799133 U CN 201520799133U CN 204966458 U CN204966458 U CN 204966458U
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- Prior art keywords
- truss
- pillar
- water pipe
- bracket component
- limit
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Abstract
The utility model provides a wafer cleaning jig, truss no. 1 can slide about in the of two for pillar no. 1 and pillar, and truss no. 2 can slide about in the of four for pillar no. 3, pillar. Bracket component no. 1 and bracket component are equipped with an at least genshui pipe between two, the water pipe respectively with a truss draw two perpendicular connections of truss, truss no. 1, truss no. 2 and water pipe remain throughout on same horizontal plane, the water pipe can according to truss no. 1 and truss no. 2 at pillar no. 1 and pillar no. 2, pillar no. 3, pillar slide control height four about when wasing the wafer, can form vaporific dripping like this, makes to float the wafer water intrusion on the surface of water realization rinse thoroughly to guarantee the cleaning efficiency, this wafer cleaning jig structural configuration is reasonable, easily the installation.
Description
Technical field
The utility model relates to a kind of wafer cleaning tool.
Background technology
Along with being growing more intense of wafer industry competition, how increasing work efficiency, reduce costs, improve product quality, to improve the competitiveness in the same industry, become the difficult problem that each wafer enterprise will face.Conventional clean mode is that wafer is placed on cleaning in special Teflon cup; in washing and cleaning operation, often there will be wafer swim in phenomenon on the water surface; cause the wafer swum on the water surface fully to clean, the electrical parameter of wafer can be caused so not good, and cleaning efficiency is lower.
Utility model content
In order to overcome above-mentioned deficiency of the prior art, the utility model provides a kind of wafer cleaning tool, comprising: bracket component one and the bracket component two be arranged side by side with described bracket component one;
Described bracket component one comprises: the pillar one vertically arranged respectively, pillar two and horizontally disposed truss one; Described truss one is slidably connected with described pillar one and described pillar two respectively;
Described bracket component two comprises: the pillar three vertically arranged respectively, pillar four and horizontally disposed truss two; Described truss two is slidably connected with described pillar three and described pillar four respectively;
Described truss one is arranged in parallel with described truss two;
Be provided with at least one water pipe between bracket component one and bracket component two, described water pipe is vertical with described truss two with described truss one to be respectively connected;
Described water pipe is provided with the spray orifice settling shower nozzle.
Preferably, described truss one comprises: the first poling limit and first slideway limit connected vertically with the first poling limit;
Described first poling limit is provided with the first poling cylindrical void placing described water pipe, and described first slideway limit is provided with the first guiding cylindrical void;
Described bracket component one also comprises: the bracing frame one corresponding with described water pipe quantity;
Support frame as described above one comprises: first tube edge and with first poling limit the first guide edge connected vertically;
Described first tube edge is provided with the first supported hole placing described water pipe, and the first guide edge is provided with the first suitable pilot hole of at least two and described first cylindrical voids that lead.
Preferably, described bracket component one also comprises: first guide blot corresponding with support frame as described above one quantity;
The described first guide blot cylindrical void that leads with described first pilot hole and described first respectively matches, and support frame as described above one is fixed on described truss one.
Preferably, described truss two comprises: the second poling limit and second slideway limit connected vertically with the second poling limit;
Described second poling limit is provided with the second poling cylindrical void placing described water pipe, and described second slideway limit is provided with the second guiding cylindrical void;
Described bracket component two also comprises: the bracing frame two corresponding with described water pipe quantity;
Support frame as described above two comprises: second tube edge and with second poling limit the second guide edge connected vertically;
Described second tube edge is provided with the second supported hole placing described water pipe, and the second guide edge is provided with the second suitable pilot hole of at least two and described second cylindrical voids that lead.
Preferably, described bracket component two also comprises: second guide blot corresponding with support frame as described above two quantity;
The described second guide blot cylindrical void that leads with described second pilot hole and described second respectively matches, and support frame as described above two is fixed on described truss two.
Preferably, described water pipe one end is provided with plug, and the other end is communicated with high-pressure hydraulic pump;
Described spray orifice is provided with connecting thread.
Preferably, described pillar one, described pillar two comprise respectively: the first cylinder and the first column base, and the first cylinder is provided with the first external screw thread and first nut suitable with the first external screw thread, and described first nut at least arranges two;
The two ends of described truss one are respectively equipped with first locking hole suitable with described first cylinder;
Described first column base is provided with the first fixing hole.
Preferably, described pillar three, described pillar four comprise respectively: the second cylinder and the second column base, and the second cylinder is provided with the second external screw thread and second nut suitable with the second external screw thread, and described second nut at least arranges two;
The two ends of described truss two are respectively equipped with second locking hole suitable with described second cylinder;
Described second column base is provided with the second fixing hole.
Preferably, described first tube edge is provided with the first lock tube hole and the first lock tube screw suitable with described first lock tube hole.
Preferably, described second tube edge is provided with the second lock tube hole and the second lock tube screw suitable with described second lock tube hole.
As can be seen from the above technical solutions, the utility model has the following advantages:
Truss one can slide up and down relative to pillar one and pillar two, and truss two can slide up and down relative to pillar three, pillar four.At least one water pipe is provided with between bracket component one and bracket component two, water pipe is vertical with described truss two with described truss one to be respectively connected, truss one, truss two and water pipe remain in same level, water pipe can according to truss one and truss two at pillar one and pillar two, pillar three, pillar four slide up and down adjustment height, like this when clean wafers, vaporific dripping can be formed, the wafer swum on the water surface is immersed in the water, realize thoroughly cleaning, and ensureing cleaning efficiency, this wafer cleaning jig structure is rationally distributed, is easy to install.
Accompanying drawing explanation
Fig. 1 is the plan structure figure of wafer cleaning tool;
Fig. 2 is the A portion enlarged drawing of Fig. 1;
Fig. 3 is the main TV structure figure of wafer cleaning tool;
Fig. 4 is the B portion enlarged drawing of Fig. 3;
Fig. 5 is the main TV structure figure of truss one;
Fig. 6 is the plan structure figure of truss one;
Fig. 7 is the side-looking structure chart of truss one;
Fig. 8 is the main TV structure figure of bracing frame one;
Fig. 9 is the plan structure figure of bracing frame one;
Figure 10 is the side-looking structure chart of bracing frame one;
Figure 11 is the structure chart of the first cylinder;
Figure 12 is the structure chart of the first column base;
Figure 13 is the structure chart of water pipe.
Embodiment
For clearly demonstrating the technical characterstic of this programme, below by embodiment, and in conjunction with its accompanying drawing, the utility model is elaborated.
The utility model provides a kind of wafer cleaning tool, refers to shown in Fig. 1, Fig. 2, Fig. 3, Fig. 4, comprising: bracket component 1 and the bracket component 22 be arranged side by side with bracket component 1;
Bracket component 1 comprises: the pillar 1 vertically arranged respectively, pillar 2 12 and horizontally disposed truss 1; Truss 1 is slidably connected with pillar 1 and pillar 2 12 respectively;
Bracket component two comprises: the pillar three vertically arranged respectively, pillar four and horizontally disposed truss two; Truss two is slidably connected with pillar three and pillar four respectively;
Truss 1 is arranged in parallel with truss two; Be provided with at least one water pipe 3 between bracket component 1 and bracket component 22, water pipe 3 is vertical with truss two with truss 1 to be respectively connected; Water pipe 3 is provided with the spray orifice 31 settling shower nozzle.
Truss 1 can slide up and down relative to pillar 1 and pillar 2 12, and truss two can slide up and down relative to pillar three, pillar four.At least one water pipe 3 is provided with between bracket component 1 and bracket component 22, water pipe 3 is vertical with truss two with truss 1 to be respectively connected, truss 1, truss two and water pipe 3 remain in same level, water pipe 3 can according to truss 1 and truss two at pillar 1 and pillar 2 12, pillar three, pillar four slides up and down adjustment height, like this when clean wafers, vaporific dripping can be formed, the wafer swum on the water surface is immersed in the water, realize thoroughly cleaning, and ensure cleaning efficiency, this wafer cleaning jig structure is rationally distributed, be easy to install.
In the present embodiment, refer to shown in Fig. 5, Fig. 6, Fig. 7, truss 1 comprises: the first poling limit 41 and first slideway limit 42 connected vertically with the first poling limit 41;
First poling limit 41 is provided with the first poling cylindrical void 43, the first slideway limit 42 placing water pipe 3 and is provided with the first guiding cylindrical void 44;
Bracket component 1 also comprises: refer to shown in Fig. 8, Fig. 9, Figure 10, the bracing frame one 5 corresponding with water pipe 3 quantity; Bracing frame 1 comprises: first tube edge 51 and first guide edge 53 connected vertically with the first poling limit 51; First tube edge 51 is provided with the first supported hole 52, first guide edge 53 placing water pipe 3 and is provided with the first suitable pilot hole 54 of at least two and first cylindrical voids 44 that lead.
Bracket component 1 also comprises: the first guide blot 54a corresponding with bracing frame 1 quantity; The first guide blot 54a cylindrical void 44 that leads with the first pilot hole 54 and first respectively matches, and bracing frame 1 is fixed on truss 1.
First tube edge 51 is provided with the first lock tube hole 55 and the first lock tube screw 55a suitable with the first lock tube hole 55.
Truss two comprises: the second poling limit and second slideway limit connected vertically with the second poling limit; Second poling limit is provided with the second poling cylindrical void placing water pipe, and the second slideway limit is provided with the second guiding cylindrical void; Bracket component two also comprises: the bracing frame two corresponding with water pipe quantity; Bracing frame two comprises: second tube edge and with second poling limit the second guide edge connected vertically; Second tube edge is provided with the second supported hole placing water pipe, and the second guide edge is provided with the second suitable pilot hole of at least two and second cylindrical voids that lead.
Bracket component two also comprises: second guide blot corresponding with bracing frame two quantity; The second guide blot cylindrical void that leads with the second pilot hole and second respectively matches, and bracing frame two is fixed on truss two.
Second tube edge is provided with the second lock tube hole and the second lock tube screw suitable with the second lock tube hole.
Like this, water pipe 3 one end is fixed on truss 1 through the first supported hole 52 and the first poling cylindrical void 43, and firm in order to what make water pipe 3 fix, water pipe 3 is locked on the first supported hole 52 through the first lock tube hole 55 by the first lock tube screw 55a.First pilot hole 54 and first cylindrical void 44 that leads matches, and can make water pipe 3 Level tune position on truss 1, and after regulating and putting in place, water pipe 3 level is fixed by the first guide blot 54a.
As a same reason, water pipe 3 other end is fixed on truss two through the second supported hole and the second poling cylindrical void, and firm in order to what make water pipe 3 fix, water pipe 3 is locked on the second supported hole through the second lock tube hole by the second lock tube screw.Second pilot hole and second cylindrical void that leads matches, and can make water pipe 3 Level tune position on truss two, and after regulating and putting in place, water pipe 3 level is fixed by the second guide blot.
Just jet cleaning can be opened after the two ends locking of water pipe 3.
In the present embodiment, refer to shown in Figure 13, water pipe 3 one end is provided with plug 32, and the other end is communicated with high-pressure hydraulic pump; Spray orifice 31 is provided with connecting thread.
In the present embodiment, refer to shown in Figure 11 and Figure 12, pillar 1, pillar 2 12 comprise respectively: the first cylinder 111 and the first column base 112, first cylinder 111 are provided with the first external screw thread and the first suitable nut 4, first nut 4 at least arranges two with the first external screw thread;
The two ends of truss 1 are respectively equipped with first locking hole 45 suitable with the first cylinder 111; First column base 112 is provided with the first fixing hole 113.
First locking hole 45 at truss 1 two ends is each passed through the first cylinder 111, and after adjusting cleaning height, truss 1 is clamped in centre by the first nut 4, and truss 1 in the vertical direction is fixed on the first cylinder 111.
In the present embodiment, pillar three, pillar four comprise respectively: the second cylinder and the second column base, and the second cylinder is provided with the second external screw thread and second nut suitable with the second external screw thread, and the second nut at least arranges two; The two ends of truss two are respectively equipped with second locking hole suitable with the second cylinder; Second column base is provided with the second fixing hole.
Second locking hole at truss two two ends is each passed through the second cylinder, and after adjusting cleaning height, truss two is clamped in centre by the second nut, and truss two in the vertical direction is fixed on the second cylinder.
Wafer cleaning tool can according to the setting position of wafer at cleaning device, water pipe 3 height is regulated by truss 1 and truss two in the vertical direction, water pipe 3 horizontal level is regulated by the first pilot hole 54 and the second pilot hole, ensure can form vaporific dripping when cleaning, the wafer swum on the water surface is immersed in the water, by regulating water pipe position and quantity, wafer is fully cleaned.
Above-mentioned embodiment can not as the restriction to the utility model protection range, and for those skilled in the art, any alternate modification make the utility model execution mode or conversion all drop in protection range of the present utility model.
The utility model does not describe part in detail, is the known technology of those skilled in the art of the present technique.
Claims (10)
1. a wafer cleaning tool, is characterized in that, comprising: bracket component one and the bracket component two be arranged side by side with described bracket component one;
Described bracket component one comprises: the pillar one vertically arranged respectively, pillar two and horizontally disposed truss one; Described truss one is slidably connected with described pillar one and described pillar two respectively;
Described bracket component two comprises: the pillar three vertically arranged respectively, pillar four and horizontally disposed truss two; Described truss two is slidably connected with described pillar three and described pillar four respectively;
Described truss one is arranged in parallel with described truss two;
Be provided with at least one water pipe between bracket component one and bracket component two, described water pipe is vertical with described truss two with described truss one to be respectively connected;
Described water pipe is provided with the spray orifice settling shower nozzle.
2. wafer cleaning tool according to claim 1, is characterized in that,
Described truss one comprises: the first poling limit and first slideway limit connected vertically with the first poling limit;
Described first poling limit is provided with the first poling cylindrical void placing described water pipe, and described first slideway limit is provided with the first guiding cylindrical void;
Described bracket component one also comprises: the bracing frame one corresponding with described water pipe quantity;
Support frame as described above one comprises: first tube edge and with first poling limit the first guide edge connected vertically;
Described first tube edge is provided with the first supported hole placing described water pipe, and the first guide edge is provided with the first suitable pilot hole of at least two and described first cylindrical voids that lead.
3. wafer cleaning tool according to claim 2, is characterized in that,
Described bracket component one also comprises: first guide blot corresponding with support frame as described above one quantity;
The described first guide blot cylindrical void that leads with described first pilot hole and described first respectively matches, and support frame as described above one is fixed on described truss one.
4. wafer cleaning tool according to claim 1, is characterized in that,
Described truss two comprises: the second poling limit and second slideway limit connected vertically with the second poling limit;
Described second poling limit is provided with the second poling cylindrical void placing described water pipe, and described second slideway limit is provided with the second guiding cylindrical void;
Described bracket component two also comprises: the bracing frame two corresponding with described water pipe quantity;
Support frame as described above two comprises: second tube edge and with second poling limit the second guide edge connected vertically;
Described second tube edge is provided with the second supported hole placing described water pipe, and the second guide edge is provided with the second suitable pilot hole of at least two and described second cylindrical voids that lead.
5. wafer cleaning tool according to claim 4, is characterized in that,
Described bracket component two also comprises: second guide blot corresponding with support frame as described above two quantity;
The described second guide blot cylindrical void that leads with described second pilot hole and described second respectively matches, and support frame as described above two is fixed on described truss two.
6. wafer cleaning tool according to claim 1, is characterized in that,
Described water pipe one end is provided with plug, and the other end is communicated with high-pressure hydraulic pump;
Described spray orifice is provided with connecting thread.
7. wafer cleaning tool according to claim 2, is characterized in that,
Described pillar one, described pillar two comprise respectively: the first cylinder and the first column base, and the first cylinder is provided with the first external screw thread and first nut suitable with the first external screw thread, and described first nut at least arranges two;
The two ends of described truss one are respectively equipped with first locking hole suitable with described first cylinder;
Described first column base is provided with the first fixing hole.
8. wafer cleaning tool according to claim 4, is characterized in that,
Described pillar three, described pillar four comprise respectively: the second cylinder and the second column base, and the second cylinder is provided with the second external screw thread and second nut suitable with the second external screw thread, and described second nut at least arranges two;
The two ends of described truss two are respectively equipped with second locking hole suitable with described second cylinder;
Described second column base is provided with the second fixing hole.
9. wafer cleaning tool according to claim 2, is characterized in that,
Described first tube edge is provided with the first lock tube hole and the first lock tube screw suitable with described first lock tube hole.
10. wafer cleaning tool according to claim 4, is characterized in that,
Described second tube edge is provided with the second lock tube hole and the second lock tube screw suitable with described second lock tube hole.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520799133.XU CN204966458U (en) | 2015-10-16 | 2015-10-16 | Wafer cleaning jig |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520799133.XU CN204966458U (en) | 2015-10-16 | 2015-10-16 | Wafer cleaning jig |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204966458U true CN204966458U (en) | 2016-01-13 |
Family
ID=55061506
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520799133.XU Expired - Fee Related CN204966458U (en) | 2015-10-16 | 2015-10-16 | Wafer cleaning jig |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204966458U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113257950A (en) * | 2021-03-29 | 2021-08-13 | 江苏亚电科技有限公司 | Transportation basket of photovoltaic silicon chip with cleaning function |
-
2015
- 2015-10-16 CN CN201520799133.XU patent/CN204966458U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113257950A (en) * | 2021-03-29 | 2021-08-13 | 江苏亚电科技有限公司 | Transportation basket of photovoltaic silicon chip with cleaning function |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160113 Termination date: 20181016 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |