CN204966443U - Scanning electron microscope objective table - Google Patents
Scanning electron microscope objective table Download PDFInfo
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- CN204966443U CN204966443U CN201520714786.3U CN201520714786U CN204966443U CN 204966443 U CN204966443 U CN 204966443U CN 201520714786 U CN201520714786 U CN 201520714786U CN 204966443 U CN204966443 U CN 204966443U
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- objective table
- esem
- sample
- clamping screw
- screw nail
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Abstract
The utility model provides a scanning electron microscope objective table, scanning electron microscope objective table is including carrying thing tray, at least three centre gripping screw base and a plurality of centre gripping screw it is provided with a plurality of location round hole on the thing tray to carry, the centre gripping screw base pass through the location round hole is fixed carry on the thing tray, the external screw thread of centre gripping screw is twisted correspondingly screw hole on the centre gripping screw base. The utility model discloses scanning electron microscope objective table can directly bear crude tensile failure sample, the effectual test cost that has reduced to avoid the sample contamination and scrapped the risk, improved the accuracy of test. Independent assortment, the nimble change can be realized to it to stablize the sample of the various out -of -shapes of centre gripping, reduced test cost, improved the efficiency of software testing and the degree of accuracy. Simultaneously scanning electron microscope objective table can also test the cubic sample of a plurality of out -of -shapes simultaneously, can improve test efficiency greatly to save the energy consumption.
Description
Technical field
The utility model relates to scanning electron microscopy field, particularly ESEM objective table.
Background technology
ESEM full name scanning electron microscopy, the appearance of scanning electron microscopy (SEM) technology, makes the observation ability of the mankind to material surface microcosmos there occurs qualitative leap.In recent years, this technology has been applied to diverse discipline field, as the field such as inspection of metallurgy, material, medical science, geology, biology, machining, semiconductor manufacturing and pottery.Especially, in Material Field, scanning electron-microscopy is playing extremely important effect, relates to the research of each side such as the morphosis of material, damage mechanisms, state of interface and Optimization of Material Property.ESEM is utilized can directly to study crystal defect and production process thereof, aggregate measure and their real border of metal material interior atoms can be observed, also can observe the mode of Boundary Moving at different conditions, the damage that crystal causes in surperficial machining and radiation damage etc. can also be checked.
But, some detected materials, particularly tensile sample, great majority are all the block samples of fracture that extension test produces, owing to the otherness of intrinsic composition, tissue between different materials, the fracture size difference that different broken pieces drawn produces is comparatively large, and its shape is also different.In order to observe these materials under ESEM, be all generally the sample becoming bottom surface smooth its external consigned processing, and then be placed in objective table and carry out dependence test.Regrettably, the processing again of sample reduces testing efficiency, causes the waste of manpower and materials.More seriously, this measure is processed to sample and not only easily makes sample surfaces wreck, even bring and scrap risk, thus all that has been achieved is spoiled to cause whole research process.Therefore, how tensile sample is carried out rationally, efficient, devoid of risk test becomes the new problem that this field faces at present.
Chinese Patent Application No. 201520200781.9, the patent document in publication date on July 1st, 2015, disclose a kind of ESEM objective table, include article carrying platform and claw-like inserted link, article carrying platform lower surface is provided with the screw rod be connected with the specimen holder of scanning electron microscope example room, article carrying platform upper surface offers multiple thread jack, and metal claw is equipped with at the top of claw-like inserted link, bottom is inserted link screw rod, and the inserted link screw rod correspondence of claw-like inserted link is contained in the thread jack of article carrying platform.The technique effect of this utility model is: claw-like inserted link can insert the cylindrical sample of multiple different-diameter, and after claw-like inserted link inserted by sample, claw-like inserted link by sample stuck fast, directly can take out sample after being completed.Sample plug and play, the cylindrical sample that convenient test is different, improves testing efficiency, is specially adapted to the irregular cylindrical sample in bottom.But the sample shape that in this utility model, metal claw is fixing is restricted, can not observe by the different fracture of clamping shape.
In addition, Chinese Patent Application No. 201420695658.4, the patent document in publication date on April 2nd, 2015, also a kind of scanning electron microscopy sample clamping device is disclosed, the objective table of a circle is provided with the back-up block that 4 are rectangle distribution, long to two pieces of back-up blocks between be connected to slide bar, every root slide bar is arranged with movable fixture block, in the middle of two fixture blocks, is provided with the spring be enclosed within slide bar.This utility model installs slide bar and fixture block additional at traditional ESEM objective table, can be applicable to the clamping of irregular sample, and can largely ensure that inspection surface is in horizontal positioned.But the contact of this utility model clamped sample timer and sample is face to be contacted, clamping is unstable, poor reliability.
Utility model content
The technical problems to be solved in the utility model there is to overcome ESEM objective table in prior art the defect that clamping shape irregular sample poor stability, reliability are low, affect normal observation, provides a kind of ESEM objective table.
The utility model solves above-mentioned technical problem by following technical proposals: a kind of ESEM objective table, its feature is, described ESEM objective table comprises pallet, at least three clamping screw nail seats and some clamp screws, described pallet is provided with multiple positioning round orifice, described clamping screw nail seat is fixed on described pallet by described positioning round orifice, and the external screw thread of described clamp screws is screwed into the screwed hole in corresponding described clamping screw nail seat.
Preferably, described clamping screw nail seat comprises cross-drilled hole section, supporting section and positioning section, and described screwed hole is arranged in described cross-drilled hole section.
Preferably, described screwed hole is vertical with the axis direction of described supporting section in the axial direction.
Preferably, described positioning section is cylindrical, and the diameter of described positioning section and the diameter of described positioning round orifice match, the diameter 4-6mm larger than the diameter of described positioning section of described supporting section.
Preferably, one end of described clamp screws is tack, and the other end is tack or conehead.
Preferably, described pallet is circular discs, and its diameter is 80-120mm.
Preferably, described positioning round orifice is through hole, and described positioning round orifice is arranged on described pallet equably, and arrangement is in regular hexagon.
Preferably, the diameter range of described positioning round orifice is 3-6mm.
Preferably, the length of the described supporting section of described clamping screw nail seat is 8-14mm.
Preferably, the quantity of described clamping screw nail seat is 3-12.
Positive progressive effect of the present utility model is: the utility model ESEM objective table directly can carry crude tension failure sample, effectively reduces testing cost, and avoids sample contamination and scrap risk, improves the accuracy of test.It can realize independent assortment, change flexibly, thus the various sample in irregular shape of stable holding, reduce testing cost, improve testing efficiency and accuracy.Described ESEM objective table can also be tested multiple block sample in irregular shape simultaneously simultaneously, greatly can improve test efficiency, and save energy consumption.
Accompanying drawing explanation
The above and other feature of the utility model, character and advantage are by more obvious by what become below in conjunction with the description of drawings and Examples, and Reference numeral identical in the accompanying drawings represents identical feature all the time, wherein:
Fig. 1 is the structural representation of the utility model ESEM objective table.
Fig. 2 is the structural representation of clamping screw nail seat in the utility model ESEM objective table.
Fig. 3 is the vertical view of pallet in the utility model ESEM objective table.
Fig. 4 is the application schematic diagram of the utility model ESEM objective table.
Embodiment
For above-mentioned purpose of the present utility model, feature and advantage can be become apparent, below in conjunction with accompanying drawing, embodiment of the present utility model is elaborated.
Set forth a lot of detail in the following description so that fully understand the utility model, but the utility model can also adopt other to be different from alternate manner described here to implement, therefore the utility model is not by the restriction of following public specific embodiment.
Embodiment one:
Fig. 1 is the structural representation of the utility model ESEM objective table.Fig. 2 is the structural representation of clamping screw nail seat in the utility model ESEM objective table.Fig. 3 is the vertical view of pallet in the utility model ESEM objective table.Fig. 4 is the application schematic diagram of the utility model ESEM objective table.
As shown in Figures 1 to 4, disclose a kind of ESEM objective table in an embodiment of the present utility model, it comprises pallet 10, at least three clamping screw nail seats 20 and some clamp screws 30.The quantity of clamping screw nail seat 20 can choose 3-12, and in the present embodiment, clamping screw nail seat is set to three.Pallet 10 is preferably circular discs, and its diameter is 80-120mm, and such as its diameter can be set to 100mm.Pallet 10 is provided with multiple positioning round orifice 11, and positioning round orifice 11 is through hole, and positioning round orifice 11 is arranged on pallet 10 equably, and arrangement is in regular hexagon.Be fixed on pallet 10 by positioning round orifice 11 by clamping screw nail seat 20, the external screw thread of clamp screws 30 is screwed in the screwed hole in corresponding clamping screw nail seat 20.The diameter range of positioning round orifice 11 is 3-6mm, and such as, in the present embodiment, the diameter of positioning round orifice 11 is set to 5mm.
Preferably, clamping screw nail seat 20 comprises cross-drilled hole section 21, supporting section 22 and positioning section 23, is arranged in cross-drilled hole section 21 by described screwed hole.Especially described screwed hole is arranged in the axial direction vertical with the axis direction of supporting section 22.The length range of the supporting section 22 of clamping screw nail seat 20 is 8-14mm.Such as, in the present embodiment, the length of the supporting section 22 of clamping screw nail seat 20 is set to 10mm.
Positioning section 23 is herein preferably cylindrical, and the diameter of the diameter of positioning section 23 and positioning round orifice 11 matches, the diameter 4-6mm larger than the diameter of positioning section 23 of supporting section 22.Especially, one end of clamp screws 30 is tack, and the other end is tack or conehead.
The operation principle of process to described ESEM objective table clamping 1 sample in conjunction with the present embodiment illustrates:
Step one, first on pallet 10, select three suitable positioning round orifice 11 according to block sample size to be measured and shape.
Step 2, choose three clamping screw nail seats 20 and the section of being located 23 insert above-mentioned steps one select three positioning round orifice 11 in.Due to cooperatively interacting of positioning section 23 and positioning round orifice 11, make three clamping screw nail seats 20 can stablize, be fixed on securely on pallet 10.
Step 3, fixing in step 2 after three clamping screw nail seats 2 on screwed hole in cross-drilled hole section 5 screw in clamp screws 30, because the change of sample to be tested surface configuration is intensive, so select the clamp screws 30 of three band coneheads.Clamp screws 30 and screwed hole are threaded engagement, so the length of clamp screws 30 can flexible.
Step 4, placement sample, allow block sample bottom contact the conehead of three clamp screws 30, then screw clamp screws 30 with fixing sample, can carry out next step observation.
As mentioned above, sample to be tested 40 to be directly fixed between three length-adjustable clamp screws 30 and to be suspended from (as shown in Figure 4) above pallet 10 by the present embodiment, effectively can compensate for defect uneven bottom sample to be tested.
Embodiment two:
The structure of the present embodiment is substantially identical with embodiment one, and its difference is: the quantity of clamping screw nail seat 20 is set to 12.Pallet 10 is circular discs, and its diameter is set to 120mm.The diameter of positioning round orifice 11 is 3mm.The diameter 4mm larger than the diameter of positioning section 23 of supporting section 22.In clamping screw nail seat 20, the length of supporting section 22 is 8mm, and the two ends of clamp screws 30 are tack.
The present embodiment can clamp 4 samples in irregular shape simultaneously and observe, and because four specimen surface change of shape are little, therefore can adopt tack clamp screws, its concrete steps are:
Step one: select A, B, C, D tetra-regions on pallet.
Step 2: select three each and every one suitable positioning round orifice respectively according in A, B, C, D tetra-regions that block sample size to be measured and shape are selected in step one.
Step 3: choose 12 clamping screw nail seats and the section of being located is inserted in 12 positioning round orifice selected in step 2, because the cooperatively interacting, so clamping screw nail seat can be stablized, be fixed on pallet securely of positioning section and positioning round orifice.
Step 4; Screwed hole in clamping screw nail seat after fixing in step 3 in cross-drilled hole section screws in clamp screws, because clamp screws and screwed hole are threaded engagement, so the length of clamp screws can flexible.
Step 5: place sample, allows block sample bottom contact the tack of clamp screws, then screws clamp screws with fixing sample, can observe four samples simultaneously.
The utility model can clamp multiple sample simultaneously test simultaneously by designing multiple regularly arranged positioning round orifice on pallet, controlled flexibly.Not only reduce cost, thoroughly avoid the risk that sample scraps, and substantially increase testing efficiency and accuracy.
Embodiment three:
The structure of the present embodiment is substantially identical with embodiment one, and its difference is: the quantity of clamping screw nail seat 20 is 6, and pallet 10 is circular discs, and its diameter is chosen for 80mm.The diameter range of positioning round orifice 11 is 6mm.The diameter 6mm larger than the diameter of positioning section 23 of supporting section 22.In clamping screw nail seat 20, the length of supporting section 22 is 14mm, and in 6 clamp screws 30,3 clamp screws 30 two ends are tack, and one end of other 3 clamp screws 30 is tack, and the other end is conehead.
The present embodiment can observe two or more sample simultaneously, improves test efficiency, saves energy consumption.
In sum, compared with prior art, its beneficial effect is as follows for the utility model ESEM objective table:
One, the clamping screw nail seat of the utility model ESEM objective table to be matched with the positioning round orifice on pallet by its positioning section and is arranged on pallet, clamp screws forms a sample holder contact after screwing in the screwed hole of the cross-drilled hole section in clamping screw nail seat, and the clamping contact of more than three and three overcomes the shortcoming that traditional electrical ESEM can only be tested the smooth block sample in bottom surface.
The utility model ESEM objective table stably can clamp the block sample of bottom surface out-of-flatness, realizes ESEM and characterizes block sample in irregular shape.Select the clamping screw nail seat of varying number according to the sample of different size, shape, and these clamping screw nail seats are arranged in the positioning round orifice of diverse location by positioning section, guarantee the stability of sample holder.One end of clamp screws is tack, and the other end is tack or conehead, selects the clamp screws of tack or conehead can adapt to difform sample, to improve clamping stability further.
Two, the utility model pallet is circular discs, and its diameter range is 80 ~ 120mm, to be applicable to the scanning electron microscopy of regular size.
Three, the utility model positioning round orifice is through hole, makes objective table double-sided symmetrical, and positive and negative can replace use.Positioning round orifice is evenly arranged on pallet, and spread geometry is regular hexagon, in order to adapt to the sample of different size, improves clamp precision.
Four, the diameter range of the utility model positioning round orifice is 3 ~ 6mm, guarantees the positioning round orifice that can arrange sufficient amount when pallet area is certain, thus covers various frequent observation sample size scope.
Five, in the utility model clamping screw nail seat, the length of supporting section is 8 ~ 14mm, make clamping screw nail seat have length not wait specification, the different clamping screw nail seat of its clamped height can be chosen according to sample size in practical operation.
Six, the quantity 3 ~ 12 of the preferred clamping screw nail seat of the utility model, can complete sample and stably clamp.
Seven, the utility model directly can carry crude tension failure sample, effectively reduces testing cost, and avoids sample contamination and scrap risk, improves the accuracy of test.
Eight, the utility model is logical can test multiple block sample in irregular shape simultaneously, greatly can improve test efficiency, and save energy consumption.
Although the foregoing describe embodiment of the present utility model, it will be understood by those of skill in the art that these only illustrate, protection range of the present utility model is defined by the appended claims.Those skilled in the art, under the prerequisite not deviating from principle of the present utility model and essence, can make various changes or modifications to these execution modes, but these change and amendment all falls into protection range of the present utility model.
Claims (10)
1. an ESEM objective table, it is characterized in that, described ESEM objective table comprises pallet, at least three clamping screw nail seats and some clamp screws, described pallet is provided with multiple positioning round orifice, described clamping screw nail seat is fixed on described pallet by described positioning round orifice, and the external screw thread of described clamp screws is screwed into the screwed hole in corresponding described clamping screw nail seat.
2. ESEM objective table as claimed in claim 1, it is characterized in that, described clamping screw nail seat comprises cross-drilled hole section, supporting section and positioning section, and described screwed hole is arranged in described cross-drilled hole section.
3. ESEM objective table as claimed in claim 2, it is characterized in that, described screwed hole is vertical with the axis direction of described supporting section in the axial direction.
4. ESEM objective table as claimed in claim 2, it is characterized in that, described positioning section is cylindrical, and the diameter of described positioning section and the diameter of described positioning round orifice match, the diameter 4-6mm larger than the diameter of described positioning section of described supporting section.
5. ESEM objective table as claimed in claim 3, it is characterized in that, one end of described clamp screws is tack, and the other end is tack or conehead.
6. ESEM objective table as claimed in claim 1, it is characterized in that, described pallet is circular discs, and its diameter is 80-120mm.
7. ESEM objective table as claimed in claim 1, it is characterized in that, described positioning round orifice is through hole, and described positioning round orifice is arranged on described pallet equably, and arrangement is in regular hexagon.
8. ESEM objective table as claimed in claim 7, it is characterized in that, the diameter range of described positioning round orifice is 3-6mm.
9. ESEM objective table as claimed in claim 2, it is characterized in that, the length of the described supporting section of described clamping screw nail seat is 8-14mm.
10. the ESEM objective table as described in claim 1-9 any one, is characterized in that, the quantity of described clamping screw nail seat is 3-12.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520714786.3U CN204966443U (en) | 2015-09-16 | 2015-09-16 | Scanning electron microscope objective table |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520714786.3U CN204966443U (en) | 2015-09-16 | 2015-09-16 | Scanning electron microscope objective table |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204966443U true CN204966443U (en) | 2016-01-13 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520714786.3U Expired - Fee Related CN204966443U (en) | 2015-09-16 | 2015-09-16 | Scanning electron microscope objective table |
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| Country | Link |
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| CN (1) | CN204966443U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112454291A (en) * | 2020-11-20 | 2021-03-09 | 扬州大学 | Novel multi-functional compound variable scanning electron microscope SEM sample objective table |
-
2015
- 2015-09-16 CN CN201520714786.3U patent/CN204966443U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112454291A (en) * | 2020-11-20 | 2021-03-09 | 扬州大学 | Novel multi-functional compound variable scanning electron microscope SEM sample objective table |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160113 Termination date: 20200916 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |