CN204963540U - High temperature vacuum sintering furnace's furnace lining structure - Google Patents

Abstract

The utility model provides a high temperature vacuum sintering furnace's furnace lining structure, belongs to high temperature sintering furnace technical field. Including the stove outer covering, has the stove outer covering cooling body, the boiler tube, the siege is established to the boiler tube intracavity, protective gas introduces mechanism, its and protective gas supply tube coupling, boiler tube heating mechanism, it is connected with feeding mechanism, and furnace lining structure includes: a stove section of thick bamboo, stove section of thick bamboo door closure circle is respectively set at the position of its left end and right -hand member port, stove section of thick bamboo endotheca is established at stove section of thick bamboo intracavity and is touched with the chamber wall subsides of a stove section of thick bamboo, keep having living space between the outer wall of boiler tube and the stove section of thick bamboo endotheca, a stove section of thick bamboo comprises a set of stove shell ring section, stove section of thick bamboo endotheca is the carbon fiber bush, the boiler tube is made by the celion, the inner wall of stove section of thick bamboo door closure circle constitutes for the taper surface, and one side of stove section of thick bamboo door closure circle has a stove section of thick bamboo to inlay the chamber, and the graphite annulus caulking groove is established back to one side of a stove section of thick bamboo to stove section of thick bamboo door closure, establishes the graphite annulus in the graphite annulus caulking groove, the periphery and the taper surface cooperation of stove section of thick bamboo door closure. The improvement is to the sintering temperature's of the product of boiler tube intracavity homogeneity, guarantee sintering quality.

Description

The furnace lining structure of high-temperature vacuum sintering furnace

Technical field

The utility model belongs to high temperature sintering furnace technical field, is specifically related to a kind of furnace lining structure of high-temperature vacuum sintering furnace.

Background technology

Above mentioned high-temperature vacuum sintering furnace is born under the background of " work is for its kind must first sharpen his tools ", to belong to aluminium nitride (ALN) substrate of DLC nitride category, because it has the strong point being not limited to following aspects: thermal conductivity is high, be about 20W/mk, close to BeO and SiC, and be Al ₂o ₃more than five times; Thermal coefficient of expansion is little, 4.5 × 10 ^-6dEG C, with Si(3.5 ~ 4 × 10 ^-6dEG C) and GaAs(6 × 10 ^-6dEG C) quite; Electrical performance characteristics is excellent, and specifically, dielectric constant, dielectric loss, body resistivity and dielectric strength are very excellent; Mechanical performance is desirable, and rupture strength is higher than Al ₂o ₃with BeO pottery; It is good and nontoxic that purity is high, light propagates holding property; Etc., be thus subject to thinking highly of of people.But, because the sintering temperature of aluminium nitride is higher, about about 2000 DEG C, no matter be thus that furnace binding or heater and the auxiliary equipment relevant to body of heater all have harsh requirement, that is conventional high temperature sintering furnace cannot be competent at the high temperature sintering to aluminium nitride or similar material.

The technical information about high-temperature vacuum sintering furnace can be seen in disclosed Chinese patent literature, as application for a patent for invention publication No. CN102331175A(high-temperature vacuum sintering furnace), CN1352375A(electric resistor heating type super high temperature vacuum sintering furnace), CN104776714A(high-temperature vacuum sintering furnace infrared temperature measurement apparatus and high-temperature vacuum sintering furnace), CN104792151A(adopts the high-temperature vacuum sintering furnace of hydraulic lift) and the high temperature sintering furnace heating system that sinters for aluminium nitride of CN104236314A(mono-kind), etc.

The all not mentioned furnace lining structure as core component of the patent application scheme being not limited to exemplify above, but as is known in the industry, the whether reasonable of furnace lining structure is directly connected to the even of sintering temperature, and then is related to the sintering quality to product.To this, the applicant has done positive exploration and design repeatedly, finally defines technical scheme described below, and is taking to the experiment proved that it is practicable under secrecy provision.

Summary of the invention

Task of the present utility model be to provide a kind of contribute to significantly improving the furnace lining structure ensured the high-temperature vacuum sintering furnace of the sintering quality of product is used to the uniformity of the sintering temperature of the intraluminal product of stove.

Task of the present utility model has been come like this, a kind of furnace lining structure of high-temperature vacuum sintering furnace, comprise a furnace shell, this furnace shell there is a furnace shell cooling body and on furnace shell, connected that boiler tube vacuumizes interface, stove cylinder vacuumizes interface, protective gas interface tube and electrode interface, respectively expand at the left end port of the length direction of furnace shell and the position of right-hand member port and be provided with a furnace shell flange, and be equipped with a furnace shell end cap at the position corresponding to this furnace shell flange, one boiler tube, this boiler tube is arranged in described furnace shell, and be positioned at the center of furnace shell, to be parallel to the length direction in boiler tube chamber and the bottom being positioned at boiler tube chamber is provided with a siege in the boiler tube chamber of this boiler tube, described boiler tube vacuumizes interface and communicates with the boiler tube chamber of described boiler tube, one protective gas retraction mechanism, this protective gas retraction mechanism is arranged in described boiler tube chamber, and is stretched over that furnace shell is outer to be connected with protective gas supply source pipeline corresponding to the position of described protective gas interface tube, one boiler tube heating arrangements, this boiler tube heating arrangements is arranged on outside described boiler tube, and be stretched over the outer and feeding mechanism of furnace shell and be electrically connected corresponding to the position of described electrode interface, described furnace lining structure comprises: a stove cylinder, this stove cylinder is to be placed on state outside described boiler tube and to be arranged in the furnace shell chamber of furnace shell with the state of the length direction being parallel to described furnace shell simultaneously, and maintain space between the furnace shell chamber wall of the furnace tube outer wall of this stove cylinder and furnace shell, furnace shell chamber ventilating duct is configured to by this space, described stove cylinder vacuumizes interface and communicates with this furnace shell chamber ventilating duct, a stove cylinder door closure circle is respectively equipped with at the left end port of the length direction of stove cylinder and the position of right-hand member port, this stove cylinder door closure circle is concordant with described furnace shell flange, one stove cylinder inner sleeve, pastes in the stove cylinder chamber being set on stove cylinder and with the chamber wall in stove cylinder chamber and touch in this stove cylinder, maintain space between the outer wall of described boiler tube and described stove cylinder inner sleeve, be configured to boiler tube heating arrangements chamber by this space, described boiler tube heating arrangements is arranged in this boiler tube heating arrangements chamber, described stove cylinder is made up of one group of stove shell ring section, scarf each other between adjacent stove shell ring section, and the stove cylinder door closure be equipped in the position of the middle section corresponding to described stove cylinder door closure circle for closing the stove cylinder chamber of stove cylinder, one group of described stove shell ring section and stove cylinder door closure are made by graphite, described stove cylinder inner sleeve is carbon fiber lining, described boiler tube is made up of celion, the inwall of described stove cylinder door closure circle is configured to taper surface, and be configured with an embedding chamber of stove cylinder at stove cylinder door closure circle towards the side of described stove cylinder, and offer a graphite annulus caulking groove at stove cylinder door closure back to the edge of the side of stove cylinder and around the circumferencial direction of stove cylinder door closure circle, in this graphite annulus caulking groove, be embedded with a graphite annulus, the periphery of described stove cylinder door closure matches with described taper surface.

In a specific embodiment of the present utility model, described furnace shell is provided with the pressure detector mounting interface, temperature measuring device mounting interface, the installation of TC interface and the pyroscan mounting interface that communicate with the boiler tube chamber of described boiler tube, and on furnace shell, is also provided with the heating arrangements cavity temperature detector mounting interface communicated with described boiler tube heating arrangements chamber; The sections caulking groove mutual scarf of each two adjacent stove shell ring sections by compensating each other in one group of described stove shell ring section.

In another specific embodiment of the present utility model, described furnace shell cooling body comprises a furnace shell cooling spacer, one group of cooling medium introduces interface and one group of thermal medium extraction interface, furnace shell cooling spacer is formed on described furnace shell, one group of cooling medium is introduced interface and to be formed on furnace shell with space state in the position of bottom of length direction corresponding to furnace shell and to be connected with cooling medium supply source by cooling medium introduction pipeline, this group cooling medium introducing interface all cools spacer with furnace shell and communicates, one group of thermal medium is drawn interface and to be formed on furnace shell with space state in the position on top of length direction corresponding to furnace shell and to draw pipeline by thermal medium and be connected with described cooling medium supply source and form cooling medium closed circuit, this group thermal medium extraction interface all cools spacer with furnace shell and communicates.

In another specific embodiment of the present utility model, axis pin base is fixed with back to the position of the side of described furnace shell end cap around the circumferencial direction of furnace shell with space state at the left end of the length direction of described furnace shell and right-hand member and corresponding to described furnace shell flange, axis pin base there is a tie down screw by hinge, and be equipped with a handwheel at the end of this tie down screw, described furnace shell end cap towards the side of furnace shell and correspond to furnace shell flange position expand be provided with a furnace shell end cap flange, be fixed with space state the end caps pawl that quantity is equal with the quantity of described axis pin base and position is corresponding back to the side of furnace shell flange and around the circumferencial direction of furnace shell end cap flange at this furnace shell end cap flange, probe into or exit the lock pawl groove of end caps pawl by described tie down screw and clockwise or counterclockwise operation done to described handwheel and makes furnace shell end cap to the port closed of furnace shell or remove closed, described furnace shell is also fixed with a pair furnace shell hinge seat in the position with described axis pin base, and a pair furnace shell end cap chain connection head is fixed with on described furnace shell end cap and in the position corresponding to a pair furnace shell hinge seat, this to furnace shell end cap chain connection head respectively by connector bearing pin and a pair furnace shell hinge seat hinged, furnace shell end cap is configured with end cap cooling medium spacer, this end cap cooling medium spacer is by being formed in end cap cooling medium that is on furnace shell end cap and that communicate with end cap cooling medium spacer and introducing interface and end cap thermal medium drawing interface and cooling medium supply source forms circulation cooling circuit, and on furnace shell end cap, be also provided with one for the accent in the boiler tube chamber to described boiler tube and close or remove closed end cap seal mechanism to the accent in described boiler tube heating arrangements chamber, in described furnace shell chamber ventilating duct, be parallel to furnace shell chamber ventilating duct be provided with for the stove cylinder cushion block to described stove cylinder location with space state.

In another specific embodiment of the present utility model, described end cap seal mechanism comprises moving-coil and drives acting cylinder, moving-coil supporting Connection Block, moving-coil, cover plate mounting, spring bearer plate, back shroud, stove cylinder closing cap, boiler tube lid and guard ring, moving-coil drives acting cylinder to be fixed on the side of described furnace shell end cap back to described furnace shell with horizontal boom state, and be positioned at the edge of furnace shell end cap, this moving-coil drives the moving-coil of acting cylinder to drive acting cylinder post to be stretched in the furnace shell end cap chamber of furnace shell end cap, moving-coil supporting Connection Block is fixed with furnace shell end cap in furnace shell end cap chamber, guard ring is fixed with the state of the chamber diapire in furnace shell end cap chamber that soars and chamber diapire by one group of guard ring holder, and a guard ring air vent is offered in the middle position of the bottom of this guard ring, and on the sidewall of guard ring, offer a pair cover plate mounting bearing pin adjusting hole, this is separated by 180 ° to the circumferencial direction of cover plate mounting bearing pin adjusting hole around the sidewall of guard ring and is in mutual aspectant state, on the diapire of guard ring and corresponding to described moving-coil, drive the position of acting cylinder post to offer an acting cylinder post resigning hole, moving-coil is arranged in furnace shell end cap chamber in the position in the outside corresponding to guard ring, and on this moving-coil, be provided with moving-coil supporting Connection Block attachment screw and an acting cylinder post holder, this acting cylinder post holder is equipped with an acting cylinder post and is fixedly connected with screw, moving-coil supporting Connection Block attachment screw supports Connection Block with described moving-coil and is connected, and acting cylinder post is fixedly connected with screw with moving-coil drives the acting cylinder styletable face screw in the distal end faces of acting cylinder post to be connected, and on moving-coil, offer a pair moving-coil pin shaft hole, this is separated by 180 ° and corresponding with a pair described cover plate mounting bearing pin adjusting hole to moving-coil pin shaft hole around the circumferencial direction of moving-coil, cover plate mounting corresponds in moving-coil, and this cover plate mounting is insinuated in a pair described cover plate mounting bearing pin adjusting hole by a pair cover plate mounting bearing pin screw and is connected with guard ring after passing a pair described moving-coil pin shaft hole, cover plate mounting is also fixed with one group of cover plate seat ring, and cover plate mounting screw rod is fixed with in the middle position of cover plate mounting, spring bearer plate and cover plate mounting are fixed back to the side of back shroud, and fix with the base portion of cover plate mounting screw simultaneously, back shroud is shelved on one group of described cover plate seat ring, and a back shroud screw hole is offered in the middle position of this back shroud, this back shroud screw hole is nested with on cover plate mounting screw rod, stove cylinder closing cap is arranged on cover plate mounting screw rod back to the position of the side of cover plate mounting by the stove cylinder closing cap screw hole being opened in its middle position corresponding to back shroud, and be fixed with an insulation cover plate at this stove cylinder closing cap towards the side of boiler tube lid, a boiler tube lid swivel nut hole is offered in the middle position of boiler tube lid, a boiler tube lid swivel nut is provided with in this boiler tube lid swivel nut hole, the central authorities of this boiler tube lid swivel nut are configured with a swivel nut internal thread hole, this swivel nut internal thread hole is connected with the swivel nut connecting thread head thread of the end of cover plate mounting screw rod, and be equipped with a boiler tube box nut for seizing on both sides by the arms boiler tube lid at the position screw thread that boiler tube lid swivel nut leans out boiler tube lid swivel nut hole, the nut bore of this boiler tube box nut is connected with described swivel nut connecting thread head thread equally, the described furnace shell end cap of right-hand member corresponding to described furnace shell is provided with a fan coolling mechanism.

Also have in a specific embodiment of the present utility model, described fan coolling mechanism comprises motor, motor water cooling but overlaps and fan, the middle position that motor is corresponding to described furnace shell end cap is fixed on furnace shell end cap by motor fixing seat with the horizontally-arranged state of level, the motor shaft of this motor is stretched in described furnace shell end cap chamber, motor water cooling but overlaps and is arranged on motor with sealing state, be provided with on this motor water cooling but overlaps into water interface and water outlet mouthpiece, water outlet mouthpiece was connected with the motor bearing seat water inlet on the motor bearing seat being formed in motor by communicating pipe, motor bearing seat is configured with a motor bearing seat delivery port, water inlet interface is respectively connected with water circulation cooling device pipeline by pipeline with motor bearing seat delivery port, position and motor shaft that fan is corresponding to described guard ring air vent are fixed.

More of the present utility model and in a specific embodiment, a nut connector is fixed with by nut on described boiler tube and corresponding to the position of described protective gas interface, described protective gas retraction mechanism comprises a protective gas inlet tube and one group of protective gas escape pipe, one end of protective gas inlet tube to be inserted in the position corresponding to protective gas interface in protective gas interface and is being connected with described nut connector threaded engagement through after described stove cylinder, the other end leans out protective gas interface and is connected with described protective gas supply source pipeline, one group of protective gas escape pipe is connected in series by protective gas communicating pipe in end each other, and this group protective gas escape pipe is respectively fixed by chamber, the boiler tube chamber wall in the boiler tube chamber of escape pipe hanger spaced apart and boiler tube, respectively protective gas fairlead is offered with space state at the length direction of this group protective gas escape pipe, the middle position being positioned at the length direction of a middle protective gas escape pipe in one group of protective gas escape pipe is equipped with a three-way connection, this three-way connection is same to be connected with described nut connector threaded engagement and to communicate with the tube chamber of protective gas inlet tube, one group of described protective gas escape pipe, protective gas communicating pipe, escape pipe hanger and three-way connection are made by celion.

In an of the present utility model and then specific embodiment, described electrode interface is positioned at the middle part of the length direction of described furnace shell and the quantity of this electrode interface has circumferencial direction around furnace shell with one of equidistant intervals distributions group; The quantity graphite electrode post holes equal with the quantity of electrode interface is offered on described stove cylinder and corresponding to the position of described electrode interface; The quantity of described feeding mechanism is equal with the quantity of electrode interface and be fixedly connected with electrode interface; described boiler tube heating arrangements comprises the quantity one group graphite heating unit equal with the quantity of described feeding mechanism and one group of graphite electrode columns, one group of graphite heating unit is arranged in described boiler tube heating arrangements chamber around the circumferencial direction of described boiler tube with equidistant intervals state, and this group graphite heating unit is respectively made up of one group of graphite heating rod and a pair graphite connection strap, one group of graphite heating rod is not only spaced but also mutual parallel in length direction maintenance, wherein one piece of graphite connection strap in a pair graphite connection strap is connected with the end, one end of one group of graphite heating rod, and another piece of graphite connection strap in a pair graphite connection strap is connected with the other end end of one group of graphite heating rod, the bottom of one group of graphite electrode columns is respectively configured with a graphite rod Connection Block, the graphite heating unit that this graphite rod Connection Block is adjacent with two in described one group of graphite heating unit is connected, and the position that the top of one group of graphite electrode columns is corresponding to described graphite electrode post holes is connected with described feeding mechanism, and on the outer wall on the top of this group graphite electrode columns, be respectively configured with graphite electrode columns external screw thread, this graphite electrode columns external screw thread is equipped a graphite electrode columns and limits nut, an Electrode connection screwed hole is offered in the middle position on the top of graphite electrode columns, this Electrode connection screwed hole is blind hole.

Of the present utility model again more and in a specific embodiment, described feeding mechanism comprises, lower insulation sleeve, felt pad, fixed head, electrode connection plate and electrode, the middle part of lower insulation sleeve is positioned at described graphite electrode post holes, the upper end of lower insulation sleeve leans out graphite electrode post holes and on the outer wall of this upper end, is provided with insulation sleeve and connects external screw thread, and the lower end of lower insulation sleeve leans out graphite electrode post holes equally and be insinuated in described boiler tube heating arrangements chamber, the outer wall of the lower end of this lower insulation sleeve is provided with lower insulation sleeve and limits nut screw connection external screw thread, limit on nut screw connection external screw thread at this lower insulation sleeve and be equipped with the nut of insulation sleeve restriction, lower insulation sleeve is limited on described stove cylinder by this lower insulation sleeve limits nut, a graphite heating rod hole is configured with in the middle position of the length direction of lower insulation sleeve, the chamber wall of the bottom of the upper insulation mantle cavity of upper insulation sleeve is configured with insulation sleeve and connects internal thread, on this, insulation sleeve connects internal thread and described upper insulation sleeve connects external screw thread threaded engagement, the top of upper insulation sleeve is insinuated in described electrode interface, the top of described graphite electrode columns is insinuated in upper insulation mantle cavity by way of graphite heating rod hole, and limit nut by described graphite electrode columns to limit, felt pad is arranged on described electrode interface, a felt pad electrode resigning hole is offered in the middle position of this felt pad, this felt pad electrode resigning hole is corresponding with described upper insulation mantle cavity, fixed head is stacked on felt pad, and this fixed head is fixed together with felt pad and electrode interface by one group of fixed head screw, fixed head electrode resigning hole is offered on fixed head and corresponding to the position of felt pad electrode resigning hole, electrode connection plate is fixed on electrode, and this electrode connection plate is connected with external power source circuit electrical, and the lower end of electrode is configured with an electrode thread connector with narrow contracting state, this electrode thread connector and described Electrode connection screwed hole are connected, a cooling of electrode chamber is configured with in the middle position of electrode upper.

In an again of the present utility model and then specific embodiment, described graphite rod Connection Block is configured with a pair joining of graphite screwed hole, and this graphite heating unit adjacent with two in described one group of graphite heating unit respectively to graphite rod connecting thread hole is connected; Wherein one piece of graphite connection strap in a pair described graphite connection strap is connected with one end end winding support of described one group of graphite heating rod by graphite nut, and another piece of graphite connection strap in a pair graphite connection strap is connected with the other end end winding support of one group of graphite heating rod by graphite nut equally.

The technique effect of the technical scheme that the utility model provides is: because furnace lining structure have employed the stove cylinder be made up of graphite material, the stove cylinder inner sleeve be made up of carbon fiber, and have employed the boiler tube be made up of celion, thus significantly can improve the sintering quality uniformity of the sintering temperature of the intraluminal product of stove used and ensures product.

Accompanying drawing explanation

Fig. 1 is example structure figure of the present utility model.

Fig. 2 is the sectional view of Fig. 1.

Fig. 3 is the furnace shell end cap shown in Fig. 1 and the structure chart being arranged at the end cap seal mechanism on furnace shell end cap.

The detailed structure view that Fig. 4 is the boiler tube heating arrangements shown in Fig. 1 and feeding mechanism.

Fig. 5 is the sectional view of Fig. 4.

Fig. 6 is the detailed structure view of the stove cylinder shown in Fig. 1.

Fig. 7 is the detailed structure view of the protective gas retraction mechanism shown in Fig. 1.

Fig. 8 is the cross sectional representation of Fig. 1.

Detailed description of the invention

In order to enable the auditor of Patent Office especially the public clearly understand technical spirit of the present utility model and beneficial effect, applicant will elaborate below by way of example, but not all the restriction to the utility model scheme to the description of embodiment, any according to being only pro forma but not substantial equivalent transformation and all should being considered as the technical solution of the utility model category done by the utility model design.

Refer to Fig. 1 and Fig. 2, give a furnace shell 1 of the structural system belonging to high-temperature vacuum sintering furnace, this furnace shell 1 also can claim furnace shell supporting leg by the furnace shell supporting base 18(bottom it in a state of use) with soar in terrace state and be simultaneously arranged on the terrace of use with the horizontally-arranged state of level, there is shown be positioned at furnace shell 1 left end and right-hand member bottom each a pair furnace shell supporting base 18, this furnace shell 1 has a furnace shell cooling body 11, and on furnace shell 1, connect boiler tube vacuumize interface 12a, stove cylinder vacuumizes interface 12b, protective gas interface tube 12c and electrode interface 13, respectively expand at the left end port of the length direction of furnace shell 1 and the position of right-hand member port (for location status shown in Fig. 1) and be provided with a furnace shell flange 14, and be equipped with a furnace shell end cap 15 at the position corresponding to this furnace shell flange 14.Aforesaid boiler tube vacuumizes the bottom that interface 12a is positioned at furnace shell 1, this boiler tube vacuumize interface 12a in a state of use by vacuum-pumping pipeline with vacuum extractor as vacuum pumping pump is connected, communicate with the boiler tube chamber 41 of the boiler tube 4 will mentioned below because this boiler tube vacuumizes interface 12a, thus can play the effect that boiler tube chamber 41 is vacuumized.Aforesaid stove cylinder vacuumizes the rear side side on the upper side that the position of interface 12b on furnace shell 1 is positioned at furnace shell 1, in a state of use same by vacuum-pumping pipeline with vacuum extractor as vacuum pumping pump is connected, because this stove cylinder vacuumizes interface 12b being insinuated in the ventilating duct 12d of furnace shell chamber after furnace shell 1, the effect vacuumized to furnace shell chamber ventilating duct 12d thus can be played.

Give a stove cylinder 2 of the structural system belonging to furnace lining structure of the present utility model; this stove cylinder 2 is to be placed on state outside boiler tube 4 and to be arranged in the furnace shell chamber of furnace shell 1 with the state of the length direction being parallel to aforementioned furnace shell 1 simultaneously; and maintain space between the furnace shell chamber wall of the furnace tube outer wall of this stove cylinder 2 and furnace shell 1; aforesaid furnace shell chamber ventilating duct 12d is configured to by this space; the bottom of aforesaid protective gas inlet tube interface 12c is insinuated in this furnace shell ventilating duct 12d, and aforesaid electrode interface 13 is with example.As shown in Figure 1, be respectively equipped with a stove cylinder door closure circle 21 at the left end port of the length direction of stove cylinder 2 and the position of right-hand member port, the surface of this stove cylinder door closure circle 21 is concordant with aforesaid furnace shell flange 14.Give a stove cylinder inner sleeve 3, this stove cylinder inner sleeve 3 also can be called stove cylinder lining, pastes and touch in the stove cylinder chamber being arranged on stove cylinder 2 and with the chamber wall in stove cylinder chamber.It can thus be appreciated that, the furnace lining of high-temperature vacuum sintering furnace is made up of stove cylinder 2 and stove cylinder inner sleeve 3.

Give the boiler tube 4 belonging to the structural system of high-temperature vacuum sintering furnace mentioned above, this boiler tube 4 is arranged in the stove cylinder chamber of aforementioned stove cylinder 2, and maintain space between the outer wall of this boiler tube 4 and aforementioned stove cylinder inner sleeve 3, boiler tube heating arrangements chamber 42 is configured to by this space, to be parallel to the length direction in boiler tube chamber 41 and the bottom being positioned at boiler tube chamber 41 is provided with a siege 411 in the boiler tube chamber 41 of boiler tube 4, the detailed construction of siege 411 can see Fig. 8, for the product that sinters such as aluminium nitride chip or similar at sheet by carrier as saggar or similar container such as crucible are placed in siege 411.It can thus be appreciated that stove cylinder 2 is placed on outside boiler tube 4 together with stove cylinder lining 3, and boiler tube 4 is then positioned at the center of furnace shell 1.

Give a protective gas retraction mechanism 5 of the structural system belonging to high-temperature vacuum sintering furnace equally; this protective gas retraction mechanism 5 is arranged in aforementioned boiler tube chamber 41; and be stretched in the position corresponding to aforementioned protective gas interface tube 12c outside furnace shell 1 and be connected with protective gas supply source pipeline; here be included in the protective gas mentioned below and all refer to nitrogen, protective gas supply source is as nitrogen pot.

Give a boiler tube heating arrangements 6 of the structural system of high-temperature vacuum sintering furnace, this boiler tube heating arrangements 6 is arranged in aforementioned boiler tube heating arrangements chamber 42, namely be positioned at outside boiler tube 4, and be stretched over the outer and feeding mechanism 7 of furnace shell 1 and be electrically connected corresponding to the position of former electrodes interface 13, above mentioned boiler tube vacuumizes interface 12a and communicates with the boiler tube chamber 41 of aforementioned boiler tube 4, vacuumizes interface 12b equally communicate with furnace shell chamber ventilating duct 12d at above mentioned stove cylinder.

Continue to see Fig. 1, aforesaid furnace shell 1 is provided with communicate with the boiler tube chamber 41 of aforementioned boiler tube 4 pressure detector mounting interface 12c, temperature measuring device mounting interface 12f, the installation of TC interface 12g and pyroscan mounting interface 12h, and on furnace shell 1, be also provided with the heating arrangements cavity temperature detector mounting interface 12i communicated with aforementioned boiler tube heating arrangements chamber 42.Pressure detector such as pressure sensor is arranged on pressure detector mounting interface 12e, the pressure in boiler tube chamber 41 can be predicted; Temperature measuring device is arranged on temperature measuring device mounting interface 12f as temperature sensor, the sintering temperature in boiler tube chamber 41 can be measured; The installation of TC interface 12g has two, and two thermocouples are installed on the installation of TC interface 12g respectively, can play the effect of the temperature controlled in boiler tube chamber 41; Pyroscan is installed on pyroscan mounting interface 12h, the intraluminal required state of arts of stove can be understood.

Continue to see Fig. 1 and Fig. 2, above mentioned furnace shell cooling body 11 preferably but not the structure be definitely limited to is as follows: comprise one furnace shell cooling spacer 111, one group of cooling medium introduces interface 112 and one group of thermal medium extraction interface 113, furnace shell cooling spacer 111 is formed on aforementioned furnace shell 1, one group of cooling medium is introduced interface 112 and to be formed in space state in the position of bottom of length direction corresponding to furnace shell 1 on furnace shell 1 and to be connected with cooling medium supply source by cooling medium introduction pipeline, this group cooling medium introducing interface 112 all cools spacer 111 with furnace shell and communicates, one group of thermal medium is drawn interface 113 and to be formed in space state in the position on top of length direction corresponding to furnace shell 1 on furnace shell 1 and to draw pipeline by thermal medium and be connected with described cooling medium supply source and form cooling medium closed circuit, this group thermal medium extraction interface 113 all cools spacer 111 with furnace shell and communicates.Aforesaid cooling medium is water, and aforesaid cooling medium supply source is as being configured at the water circulating pump on cyclic water tank or circulating water pool.Introduce interface 112 due to one group of cooling medium to be connected with the delivery port of cooling medium supply source water circulating pump as the aforementioned by cooling medium introduction pipeline, thus introduce interface 112 by one group of cooling medium and cooling medium (water) is introduced furnace shell cooling spacer 111, enter in furnace shell cooling spacer 111 and after heating up thermal medium (water) and enter aforesaid cyclic water tank or circulating water pool through one group of thermal medium extraction interface 113 by thermal medium fairlead pass, water inlet for water circulating pump extracts, circulation like this and the Physical temperature-lowering effect (water cooling cooling effect) played furnace shell 1, the temperature rise of furnace shell 1 is avoided to exceed the degree rationally allowed.

Continue to see Fig. 1, axis pin base 16 is fixed with back to the position of the side of aforementioned furnace shell end cap 15 around the circumferencial direction of furnace shell 1 with space state at the left end of the length direction of aforementioned furnace shell 1 and right-hand member and corresponding to aforementioned furnace shell flange 14, axis pin base 16 is hinged with a tie down screw 161 by bearing pin 1611, and is equipped with a handwheel 1612 at the end of this tie down screw 161.Aforesaid furnace shell end cap 15 towards the side of furnace shell 1 and correspond to furnace shell flange 14 position expand be provided with a furnace shell end cap flange 151, be fixed with quantity and the quantity equal and position corresponding end caps pawl 1511 of aforementioned axis pin base 16 back to the side of furnace shell flange 14 and around the circumferencial direction of furnace shell end cap flange 151 with space state at this furnace shell end cap flange 151, probe into or exit the lock pawl groove 15111 of end caps pawl 1511 by aforementioned tie down screw 161 and clockwise or counterclockwise operation done to handwheel 1612 and makes the port closed of furnace shell end cap 15 pairs of furnace shells 1 or remove to close.In addition, aforementioned furnace shell 1 is also fixed with a pair furnace shell hinge seat 17 in the position with axis pin base 16, and on furnace shell end cap 15 and corresponding to the position of a pair furnace shell hinge seat 17, be fixed with a pair furnace shell end cap chain connection head 156, this to furnace shell end cap chain connection head 156 respectively by connector bearing pin 1561 and a pair furnace shell hinge seat 17 hinged.

Preferably, namely be embedded with a furnace shell flange sealing ring 141 towards the side of furnace shell end cap flange 151 at aforementioned furnace shell flange 14 towards furnace shell end cap 15, and be embedded with a pair furnace shell end cap flange sealing ring 1512(Fig. 3 and show on furnace shell end cap flange 151 and corresponding to the position of furnace shell flange sealing ring 141).

Refer to Fig. 3, aforesaid furnace shell end cap 15 is configured with end cap cooling medium spacer 152, this end cap cooling medium spacer 152 is introduced interface 153 and end cap thermal medium and is drawn interface 154 by being formed in end cap cooling medium that is on furnace shell end cap 15 and that communicate with end cap cooling medium spacer 152 and form circulation cooling circuit with cooling medium supply source, and on furnace shell end cap 15, is also provided with one for the accent in the boiler tube chamber 41 to aforementioned boiler tube 4 and close or remove closed end cap seal mechanism 8 to the accent in aforementioned boiler tube heating arrangements chamber 42.In aforesaid furnace shell chamber ventilating duct 12d, be parallel to furnace shell chamber ventilating duct 12d be provided with for showing stove cylinder cushion block 22(Fig. 1 of described stove cylinder 2 location with space state).

Because aforesaid end cap cooling medium spacer 152, end cap cooling medium introduce interface 153 and end cap thermal medium, to draw the circulation cooling circuit of interface 154 pairs of furnace shell end caps 15 and the mechanism of action etc. all identical with aforesaid furnace shell cooling body 11 phase, and thus applicant repeats no more.

Please see Fig. 3 by emphasis, aforesaid end cap seal mechanism 8 preferably but not the structure be definitely limited to is as follows: comprise moving-coil drive acting cylinder 81, moving-coil supporting Connection Block 82, moving-coil 83, cover plate mounting 84, spring bearer plate 85, back shroud 86, stove cylinder closing cap 87, boiler tube lid 88 and guard ring 89, moving-coil drives acting cylinder 81 to be fixed on the side of aforementioned furnace shell end cap 15 back to aforementioned furnace shell 1 with horizontal boom state, and be positioned at the edge of furnace shell end cap 15, as preferred scheme, the position driving acting cylinder 81 and furnace shell end cap 15 to fix at moving-coil is provided with an acting cylinder seal receptacle 812, this moving-coil drives the moving-coil of acting cylinder 81 to drive acting cylinder post 811 to be stretched in the furnace shell end cap chamber 155 of furnace shell end cap 15, namely moving-coil supporting Connection Block 82 is welded and fixed with the chamber wall in furnace shell end cap chamber 155 with furnace shell end cap 15 is fixing in furnace shell end cap chamber 155, guard ring 89 is fixed with the state of the chamber diapire in furnace shell end cap chamber 155 that soars and chamber diapire by one group of guard ring holder 891, and a guard ring air vent 892 is offered in the middle position of the bottom of this guard ring 89, and on the sidewall of guard ring 89, offer a pair cover plate mounting bearing pin adjusting hole 893, this is separated by 180 ° to the circumferencial direction of cover plate mounting bearing pin adjusting hole 893 around the sidewall of guard ring 89 and is in mutual aspectant state, on the diapire of guard ring 89 and corresponding to moving-coil, drive the position of acting cylinder post 811 to offer an acting cylinder post resigning hole 894, moving-coil 83 is arranged in furnace shell end cap chamber 155 in the position in the outside corresponding to guard ring 89, and on this moving-coil 83, be provided with moving-coil supporting Connection Block attachment screw 831 and an acting cylinder post holder 832, this acting cylinder post holder 832 is equipped with an acting cylinder post and is fixedly connected with screw 8321, moving-coil supporting Connection Block attachment screw 831 supports Connection Block 82 with aforesaid moving-coil and is connected, specifically: owing to offering a moving-coil supporting Connection Block screw hole 821 on moving-coil supporting Connection Block 82, thus moving-coil is supported Connection Block attachment screw 831 insert and pass moving-coil supporting Connection Block screw hole 821, an attachment screw stop nut 8311(a pair is arranged again) at the end of moving-coil supporting Connection Block attachment screw 831, thus moving-coil is supported Connection Block attachment screw 831 and be movably connected to moving-coil and prop up on Connection Block 82.Aforementioned acting cylinder post is fixedly connected with screw 8321 and drives the acting cylinder styletable face screw 8111 in the distal end faces of acting cylinder post 811 to be connected with moving-coil, and on moving-coil 83, offer a pair moving-coil pin shaft hole 833, this is separated by 180 ° to the circumferencial direction of moving-coil pin shaft hole 833 around moving-coil 83 and forms aspectant position relationship, and this is corresponding with aforesaid a pair cover plate mounting bearing pin adjusting hole 893 to moving-coil pin shaft hole 833.Cover plate mounting 84 corresponds in moving-coil 83, and this cover plate mounting 84 is insinuated in aforesaid a pair cover plate mounting bearing pin adjusting hole 893 by a pair cover plate mounting bearing pin screw 841 after passing aforesaid a pair moving-coil pin shaft hole 833, thus realize being connected with guard ring 89, a bearing pin screw restriction nut 8411 is respectively equipped in the position that a pair cover plate mounting bearing pin screw 841 leans out the end of cover plate mounting bearing pin adjusting hole 893.Cover plate mounting 84 is also fixed with one group of cover plate seat ring 842, and cover plate mounting screw rod 843 is fixed with in the middle position of cover plate mounting 84, spring bearer plate 85 and cover plate mounting 84 are fixed back to the side of back shroud 86, and fix with the base portion of cover plate mounting screw 843 simultaneously, back shroud 86 is shelved on aforesaid one group of cover plate seat ring 842, and a back shroud screw hole 861 is offered in the middle position of this back shroud 86, this back shroud screw hole 861 is nested with on cover plate mounting screw rod 843, stove cylinder closing cap 87 is arranged on cover plate mounting screw rod 843 back to the position of the side (left side shown in Fig. 3) of cover plate mounting 84 by the stove cylinder closing cap screw hole 871 being opened in its middle position corresponding to back shroud 86, and be fixed with an insulation cover plate 872 towards the side of boiler tube lid 88 by one group of insulation cover plate hold-down screw 8721 at this stove cylinder closing cap 87, a boiler tube lid swivel nut hole 881 is offered in the middle position of boiler tube lid 88, a boiler tube lid swivel nut 8811 is provided with in this boiler tube lid swivel nut hole 881, the central authorities of this boiler tube lid swivel nut 8811 are configured with a swivel nut internal thread hole, this swivel nut internal thread hole is threaded with the swivel nut connecting thread head 8431 of the end being formed in cover plate mounting screw rod 843, and be equipped with a boiler tube box nut 882 for seizing on both sides by the arms boiler tube lid 88 at the position screw thread that boiler tube lid swivel nut 8811 leans out boiler tube lid swivel nut hole 881, the nut bore 8821 of this boiler tube box nut 882 is threaded with aforesaid swivel nut connecting thread head 8431 equally.As preferred scheme, can on aforesaid boiler tube lid swivel nut 8811 a sheathed spacer ring 88111.

In the present embodiment, aforesaid moving-coil drives acting cylinder 81 to select with cylinder, if but drive acting cylinder 81 to use oil cylinder instead moving-coil for evading the purpose of this utility model, so should be considered as equivalent substitution.

Under furnace shell end cap 15 is in closed condition, under being namely in the state locked end caps pawl 1511 by aforesaid tie down screw 161, in order to ensure to the accent in boiler tube chamber 41 and the accent positiver sealing to boiler tube heating arrangements chamber 42.Thus realize by aforesaid end cap seal mechanism 8.Specific as follows: moving-coil drives acting cylinder 81 to work, moving-coil drives acting cylinder post 811 to stretch outside cylinder body, because moving-coil drives the acting cylinder styletable face screw 8111 in the distal end faces of acting cylinder post 811 to be acting cylinder post Connection Block with the acting cylinder post holder 832(of moving-coil 83) be connected, thus acting cylinder post 811 is driven to promote moving-coil 83 by moving-coil, cover plate mounting 84 is driven by moving-coil 83, back shroud 86 is driven by cover plate mounting 84, stove cylinder closing cap 87 and boiler tube lid 88, boiler tube lid 88 and stove cylinder closing cap 87 is made to be in the reliable closed state of the accent to boiler tube chamber 41 and the accent to boiler tube heating arrangements 42 respectively, vice versa.

As preferred scheme, a fan coolling mechanism 9 can be set on the furnace shell end cap 15 of right-hand member corresponding to aforementioned furnace shell 1, certainly fan coolling mechanism 9 be all set on two furnace shell end caps 15 also harmless.

Continue to see Fig. 3, aforesaid fan coolling mechanism 9 comprises motor 91, motor water cooling but overlaps 92 and fan 93, the middle position that motor 91 is corresponding to described furnace shell end cap 15 is fixed on furnace shell end cap 15 by motor fixing seat 912 with the horizontally-arranged state of level, the motor shaft 911 of this motor 91 is stretched in aforementioned furnace shell end cap chamber 155, motor water cooling but overlaps 92 and is arranged on motor 91 with sealing state, but overlapping on 92 at this motor water cooling is provided with into water interface 921 and water outlet mouthpiece 922, water outlet mouthpiece 922 was connected with the motor bearing seat water inlet 913 on the motor bearing seat (motor bearing seat is configured with water cooling spacer) being formed in motor 91 by communicating pipe 9221, motor bearing seat is configured with a motor bearing seat delivery port 914, water inlet interface 921 is respectively connected with water circulation cooling device pipeline by pipeline with motor bearing seat delivery port 914, the position that fan 93 is corresponding to aforementioned guard ring air vent 892 is fixed by fan hold-down nut 931 and motor shaft 911.Also show the motor fixing seat screw 9121 for aforesaid motor fixing seat 912 being fixed with furnace shell end cap 15 in figure 3.

Refer to Fig. 6 and composition graphs 1, aforesaid stove cylinder 2 is made up of one group of stove shell ring section 23, scarf each other between adjacent stove shell ring section 23, and the stove cylinder door closure 211 be equipped in the position of the middle section corresponding to aforementioned stove cylinder door closure circle 21 for closing the stove cylinder chamber of stove cylinder 2, aforesaid one group of stove shell ring section 23 and stove cylinder door closure 211 are made by graphite; Aforesaid stove cylinder inner sleeve 3(Fig. 1 shows) be carbon fiber lining; Aforesaid boiler tube 4(Fig. 1 shows) be made up of celion.The boiler tube 4 be made up of celion and stove cylinder inner sleeve 3 can make uniformity of temperature profile, with the error of the temperature of technique initialization only the degree of positive and negative 5 DEG C.

Refer to Fig. 7 and composition graphs 1, be fixed with a nut connector 43(Fig. 7 by nut 431 and show on aforesaid boiler tube 4 and corresponding to the position of described protective gas interface 12c).Aforesaid protective gas retraction mechanism 5 comprises a protective gas inlet tube 51 and one group of protective gas escape pipe 52, one end of protective gas inlet tube 51 to be inserted in the position corresponding to protective gas interface 12c in protective gas interface 12c and is being connected (Fig. 7 illustrates) with aforementioned nut joint 43 threaded engagement through after aforementioned stove cylinder 2, the other end leans out protective gas interface 12c and is connected with described protective gas supply source pipeline, one group of protective gas escape pipe 52 is connected in series by protective gas communicating pipe 53 in end each other, and this group protective gas escape pipe 52 is respectively fixed with chamber, the boiler tube chamber wall in the boiler tube chamber 41 of boiler tube 4 by escape pipe hanger 521 spaced apart, respectively protective gas fairlead 522 is offered with space state at the length direction of this group protective gas escape pipe 52, the middle position being positioned at the length direction of a middle protective gas escape pipe in one group of protective gas escape pipe 52 is equipped with a three-way connection 523, this three-way connection 523 is same to be connected with aforementioned nut joint 43 threaded engagement and to communicate with the tube chamber of protective gas inlet tube 51.In the present embodiment, aforesaid one group of protective gas escape pipe 52, protective gas communicating pipe 53, escape pipe hanger 521 and three-way connection 523 are made by celion.

As shown in Figure 7, the end winding support being respectively connected with adjacent with the two respectively protective gas escape pipe 52 of 531, two communicating pipe of a connecting pipe transit joint transit joint 531 at the two ends of aforementioned protective gas communicating pipe 53 is connected; Aforesaid escape pipe hanger 521 is configured with hanger stud 5211, and hanger stud 5211 is fixed with the chamber wall in the boiler tube chamber 41 of boiler tube 4, thus makes one group of protective gas escape pipe 52 be positioned at boiler tube chamber 41 with hanging state and be positioned at the top in boiler tube chamber 41.In order to avoid one group of protective gas escape pipe 52 produces amount of deflection situation because of tediously long, therefore each protective gas escape pipe of one group of protective gas escape pipe 52 can be divided into two or more sections, be realized connecting by pipe joint 524 between adjacent segment.Shown in figure; one group of protective gas escape pipe 52 was realized joining end to end by means of communicating pipe transit joint 531 by aforesaid protective gas communicating pipe 53, and by each end plug 525 shutoff of first of one group of protective gas escape pipe 52 and the protective gas escape pipe in end.

Refer to Fig. 4 and Fig. 5 and composition graphs 1 and Fig. 2, former electrodes interface 13 is positioned at the middle part of the length direction of aforementioned furnace shell 1 and the quantity of this electrode interface 13 has circumferencial direction around furnace shell 1 with one of equidistant intervals distributions group; The graphite electrode post holes 24(Fig. 5 offering quantity equal with the quantity of electrode interface 13 on aforementioned stove cylinder 2 and in the position corresponding to electrode interface 13 shows); The quantity of aforementioned feeding mechanism 7 is equal with the quantity of electrode interface 13 and be fixedly connected with electrode interface 13.

Please see Fig. 4 and Fig. 5 by emphasis, aforementioned boiler tube heating arrangements 6 comprises the quantity one group graphite heating unit 61 equal with the quantity of aforementioned feeding mechanism 7 and one group of graphite electrode columns 62, one group of graphite heating unit 61 is arranged in aforementioned boiler tube heating arrangements chamber 42 around the circumferencial direction of aforementioned boiler tube 4 with equidistant intervals state, and this group graphite heating unit 61 is respectively made up of one group of graphite heating rod 611 and a pair graphite connection strap 612, one group of graphite heating rod 611 is not only spaced but also mutual parallel in length direction maintenance, wherein one piece of graphite connection strap in a pair graphite connection strap 612 is connected with the end, one end of one group of graphite heating rod 611, and another piece of graphite connection strap in a pair graphite connection strap 612 is connected with the other end end of one group of graphite heating rod 61, the bottom of one group of graphite electrode columns 62 is respectively configured with a graphite rod Connection Block 621, the graphite heating unit that this graphite rod Connection Block 621 is adjacent with two in one group of graphite heating unit 61 is connected, and the position that the top of one group of graphite electrode columns 62 is corresponding to described graphite electrode post holes 24 is connected with aforesaid feeding mechanism 7, and on the outer wall on the top of this group graphite electrode columns 62, be respectively configured with graphite electrode columns external screw thread 622, this graphite electrode columns external screw thread 622 is equipped a graphite electrode columns and limits nut 6221, an Electrode connection screwed hole 623 is offered in the middle position on the top of graphite electrode columns 62, this Electrode connection screwed hole 623 is blind hole.

Still see Fig. 4 and Fig. 5, aforesaid feeding mechanism 7 comprises, lower insulation sleeve 71, 72, felt pad 73, fixed head 74, electrode connection plate 75 and electrode 76, the middle part of lower insulation sleeve 72 is positioned at described graphite electrode post holes 24, the upper end of lower insulation sleeve 72 leans out graphite electrode post holes 24 and on the outer wall of this upper end, is provided with insulation sleeve and connects external screw thread 721, and lower insulation sleeve 72 is ceramic jacket, the lower end of this lower insulation sleeve 72 leans out graphite electrode post holes 24 equally and is insinuated in aforesaid boiler tube heating arrangements chamber 42, the outer wall of the lower end of this lower insulation sleeve 72 is provided with lower insulation sleeve and limits nut screw connection external screw thread 722, limit on nut screw connection external screw thread 722 at this lower insulation sleeve and be equipped with the nut 7221 of insulation sleeve restriction, by this lower insulation sleeve limits nut 7221, lower insulation sleeve 72 is limited on aforesaid stove cylinder 2, a graphite heating rod hole 723 is configured with in the middle position of the length direction of lower insulation sleeve 72, upper insulation sleeve 71 is ceramic jacket, on the chamber wall of the bottom of the upper insulation mantle cavity 711 of upper insulation sleeve 71, be configured with insulation sleeve connect internal thread 7111 at this, on this, insulation sleeve connects internal thread 7111 and connects external screw thread 721 threaded engagement with aforementioned upper insulation sleeve, the top of upper insulation sleeve 71 is insinuated in former electrodes interface 13, the top of aforesaid graphite electrode columns 62 is insinuated in upper insulation mantle cavity 711 by way of graphite heating rod hole 723, and limit nut 6221 by aforesaid graphite electrode columns to limit, felt pad 73 is arranged on former electrodes interface 13, a felt pad electrode resigning hole 731 is offered in the middle position of this felt pad 73, this felt pad electrode resigning hole 731 is corresponding with aforesaid upper insulation mantle cavity 711, fixed head 74 is stacked on felt pad 73, and this fixed head 74 is fixed together with felt pad 73 and electrode interface 13 by one group of fixed head screw 741, fixed head electrode resigning hole 742 is offered on fixed head 74 and corresponding to the position of felt pad electrode resigning hole 731, electrode connection plate 75 is fixed on electrode 76, and this electrode connection plate 75 is connected with external power source circuit electrical, and the lower end of electrode 76 is configured with an electrode thread connector 761 with narrow contracting state, this electrode thread connector 761 is connected with described Electrode connection screwed hole 623, a cooling of electrode chamber 762 is configured with in the middle position on electrode 76 top.

Shown in Fig. 4 and Fig. 5, one group of fixed head screw 743 is offered with space state in the edge of fixed head 74 and around the circumferencial direction of fixed head 74, a screw insulation sleeve 7431 is respectively provided with in this group fixed head screw 743, in the electrode interface screw hole 133 that aforesaid fixed head screw 741 defaults on electrode interface 13 through screw insulation sleeve 7431 and being screwed into after being preset on felt pad 73 felt pad screw successively after adding screw insulating washer 7411, thus fixed head 74 is fixed on electrode interface 13 together with felt pad.

Ask for an interview Fig. 6, as preferred scheme, the inwall of aforementioned stove cylinder door closure circle 21 is configured to taper surface 212(Fig. 1 and indicates), and be configured with an embedding chamber 213 of stove cylinder at stove cylinder door closure circle 21 towards the side of aforementioned stove cylinder 2, and offer a graphite annulus caulking groove 214 at stove cylinder door closure 21 back to the edge of the side of stove cylinder 2 and around the circumferencial direction of stove cylinder door closure circle 21, in this graphite annulus caulking groove 214, be embedded with a graphite annulus 2141.The periphery of aforesaid stove cylinder door closure 211 is configured to stove cylinder door closure taper surface equally and matches with aforementioned taper surface 212.

As shown in Figure 6, the sections caulking groove 231 mutually scarf of each two adjacent stove shell ring sections in aforesaid one group of stove shell ring section 23 by compensating each other.

As shown in Figure 4, aforesaid graphite rod Connection Block 621 is configured with a pair joining of graphite screwed hole 6211, this graphite heating unit adjacent with two in described one group of graphite heating unit 61 respectively to graphite rod connecting thread hole 6211 is connected.As the description to aforesaid one group of protective gas escape pipe 52; in order to avoid one group of graphite heating rod 611 occurs amount of deflection because of too tediously long; therefore each graphite heating rod of this group graphite heating rod 611 can be divided into two sections, and be connected with aforesaid graphite rod connecting thread hole 6211 in the position corresponding to graphite heating rod Connection Block 621.And then as shown in Figure 4, wherein one piece of graphite connection strap in a pair graphite connection strap 612 is connected with one end end winding support of one group of graphite heating rod 611 by graphite nut 6121, and another piece of graphite connection strap in a pair graphite connection strap 612 is connected with the other end end winding support of one group of graphite heating rod 611 by graphite nut 6121 equally.

In the present embodiment, the quantity of aforesaid electrode interface 13 has six, the quantity of aforesaid one group of graphite heating unit 61, one group of graphite electrode columns 62 and described feeding mechanism 7 respectively has six, and forms the electric connecting relation of three phase mains by six feeding mechanisms 7 and external power source circuit.At the present embodiment, six graphite heating unit 61 respectively have two graphite heating rods 611.

Please continue to refer to Fig. 4, the electrode interface spacer 132 that one is raised in the surface of electrode interface 13 is configured with on aforesaid electrode interface 13 and around the surrounding of the electrode interface through hole 131 of electrode interface 13, a felt pad bottom sealing ring 732 is embedded with in the bottom of aforesaid felt pad 73, this felt pad bottom sealing ring 732 contacts with the upper surface of electrode interface 13, circumferencial direction on the hole wall of aforesaid felt pad electrode resigning hole 731 and around hole wall is embedded with a hole wall sealing ring 7311, the wall contacts of this hole wall sealing ring 7311 and described electrode interface spacer 132.

As shown in Figure 4, a terminal plate electrode fixing holes 751 is offered at the middle part of aforesaid electrode connection plate 75 and corresponding to the position of described electrode 76, and external power cord connecting hole 752 is respectively offered at the two ends of electrode connection plate 75, terminal plate electrode fixing holes 751 is fixed on electrode 76.

Preferably, on former electrodes terminal plate 75 and the one end being positioned at electrode connection plate 75 offers a clamping slot 753, one end of this clamping slot 753 communicates with former electrodes plate electrode fixing hole 751, and the other end communicates with the external world, be provided with one and use for making clamping slot 753 closed in one end of electrode connection plate 75 and corresponding to the position of clamping slot 753 and make terminal plate electrode fixing holes 751 reliably be clamped in clamping slot closure screws 754 on electrode 76, and be equipped with a binding nut 7541 at the end of this clamping slot closure screws 754, when operating clockwise this binding nut 7541, the groove gap of clamping slot 753 diminishes gradually, namely closed trend is formed, thus make terminal plate electrode fixing holes 751 tie tight on (being clamped in) electrode 76 just as the effect of hoop, otherwise with example.

Preferably, aforesaid electrode connection plate 75 is equipped with a location supporting screw 755, this positioning support screw 755 is bearing on aforesaid fixed head 74.

Still see Fig. 4 and Fig. 5, as preferred scheme, aforesaid feeding mechanism 7 can also include an electrode cooling device 77, this electrode cooling device 77 comprises warter connection 771 and a cooling water pipe 772, the lower end of warter connection 771 is threaded with the top of former electrodes 76, specifically, the chamber wall in the cooling of electrode chamber 762 of electrode 76 is positioned at top and is configured with cooling of electrode chamber internal thread 7621, and external screw thread 7714 is configured with in the bottom of warter connection 771, this is outer is 7714 to be threaded with cooling of electrode chamber internal thread 7621, the upper end of warter connection 771 is configured to inlet pipeline and connects mouth 7711, and be extended with a water return pipeline at the sidepiece of warter connection 771 and connect mouth 7712, cooling water pipe 772 connects mouth 7711 from inlet pipeline and introduces and be stretched in cooling of electrode chamber 762 from the bottom in warter connection chamber 7713 behind the warter connection chamber 7713 by way of warter connection 771.It can thus be appreciated that water return pipeline connects mouth 7712 and communicates with warter connection chamber 7713, and warter connection chamber 7713 communicates with cooling of electrode chamber 762.Due to the cooling principle of electrode cooling device 77 and aforementioned furnace shell cooling body 11 similar, thus applicant repeats no more.

Refer to Fig. 8, Fig. 8 clearly show that furnace shell vacuumizes interface 12a and communicates with boiler tube chamber 41, and stove cylinder vacuumizes the situation that interface 12b communicates with furnace shell chamber ventilating duct 12d.And have clearly revealed siege 411 is supported on the length direction in boiler tube chamber 41 bottom by siege support 4111.Show six feeding mechanisms 7 in addition, formed the electric connecting relation of three-phase and four-line by known electric connecting mode and external power source circuit.

When sintering as aluminium nitride chip product, open and be positioned at the left port of furnace shell 1 and/or the furnace shell end cap 15 of right output port, the container such as aforesaid saggar or the crucible that fill product are placed on siege 411, then furnace shell end cap 15 is closed, and enable aforesaid end cap seal mechanism 8, make the accent in boiler tube chamber 41, the accent in boiler tube heating arrangements chamber 42 and the port of furnace shell chamber ventilating duct be in reliable closed state.Then nitrogen protection gas is introduced by protective gas retraction mechanism 5 to boiler tube chamber 41; then namely after protective gas introducing terminates, vacuumize interface 12a by boiler tube to vacuumize boiler tube chamber 41; vacuumize interface 12b by stove cylinder to vacuumize furnace shell chamber ventilating duct 12d, vacuum is illustrated by vacuumizing with boiler tube the vacuum meter that interface 12a and stove cylinder vacuumize in vacuum-pumping pipeline that interface 12b is connected simultaneously.Again then, heated by boiler tube heating arrangements 6, to the product sintering on siege 411, sintering temperature is about 2000 DEG C, enables furnace shell cooling body 11 simultaneously, and make end cap cooling medium spacer 152 be in water circulation cooling for reflux state in the process of sintering.After the technological requirement by regulation completes sintering, make boiler tube heating arrangements 6 be in out-of-work state, and furnace shell cooling body 11 and end cap cooling medium spacer 152 are still in water circulation cooling for reflux state.When temperature in boiler tube chamber 41 is down to less than 1200 DEG C (being disclosed by the temperature monitor be disposed on heating arrangements cavity temperature detector mounting interface 12i), fan coolling mechanism 9 is worked, fan 93 is driven by motor 91, Inner eycle is forced and accelerating cooling by fan 93, when temperature is down to about 300 DEG C, open furnace shell end cap 15, then after naturally cooling to normal temperature, the product of sintering is taken out from siege 411.

In sum, the technical scheme that the utility model provides compensate for the shortcoming in prior art, successfully completes invention task, has cashed the technique effect referred in the superincumbent technique effect hurdle of applicant faithfully, and can yet be regarded as is a ultimate attainment technical scheme.

Claims (10)

1. the furnace lining structure of a high-temperature vacuum sintering furnace, comprise a furnace shell (1), this furnace shell (1) has a furnace shell cooling body (11), and on furnace shell (1), connect boiler tube vacuumize interface (12a), stove cylinder vacuumizes interface (12b), protective gas interface tube (12c) and electrode interface (13), respectively expand at the left end port of the length direction of furnace shell (1) and the position of right-hand member port and be provided with a furnace shell flange (14), and be equipped with a furnace shell end cap (15) at the position corresponding to this furnace shell flange (14), one boiler tube (4), this boiler tube (4) is arranged in described furnace shell (1), and be positioned at the center of furnace shell (1), to be parallel to the length direction in boiler tube chamber (41) and the bottom being positioned at boiler tube chamber (41) is provided with a siege (411) in the boiler tube chamber (41) of this boiler tube (4), described boiler tube vacuumizes interface (12a) and communicates with the boiler tube chamber (41) of described boiler tube (4), one protective gas retraction mechanism (5), this protective gas retraction mechanism (5) is arranged in described boiler tube chamber (41), and is stretched over furnace shell (1) and is connected with protective gas supply source pipeline outward corresponding to the position of described protective gas interface tube (12c), one boiler tube heating arrangements (6), this boiler tube heating arrangements (6) is arranged on described boiler tube (4) outward, and be stretched over furnace shell (1) in the position corresponding to described electrode interface (13) to be electrically connected with feeding mechanism (7) outward, it is characterized in that described furnace lining structure comprises: a stove cylinder (2), this stove cylinder (2) is to be placed on the outer state of described boiler tube (4) and to be arranged in the furnace shell chamber of furnace shell (1) with the state of the length direction being parallel to described furnace shell (1) simultaneously, and maintain space between the furnace shell chamber wall of the furnace tube outer wall of this stove cylinder (2) and furnace shell (1), furnace shell chamber ventilating duct (12d) is configured to by this space, described stove cylinder vacuumizes interface (12b) and communicates with this furnace shell chamber ventilating duct (12d), stove cylinder door closure circle (21) is respectively equipped with at the left end port of the length direction of stove cylinder (2) and the position of right-hand member port, this stove cylinder door closure circle (21) is concordant with described furnace shell flange (14), one stove cylinder inner sleeve (3), pastes in the stove cylinder chamber that this stove cylinder inner sleeve (3) is arranged on stove cylinder (2) and with the chamber wall in stove cylinder chamber and touches, space is maintained between the outer wall of described boiler tube (4) and described stove cylinder inner sleeve (3), be configured to boiler tube heating arrangements chamber (42) by this space, described boiler tube heating arrangements (6) is arranged in this boiler tube heating arrangements chamber (42), described stove cylinder (2) is made up of one group of stove shell ring section (23), scarf each other between adjacent stove shell ring section (23), and the stove cylinder door closure (211) be equipped in the position of the middle section corresponding to described stove cylinder door closure circle (21) for closing the stove cylinder chamber of stove cylinder (2), one group of described stove shell ring section (23) and stove cylinder door closure (211) are made by graphite, described stove cylinder inner sleeve (3) is carbon fiber lining, described boiler tube (4) is made up of celion, the inwall of described stove cylinder door closure circle (21) is configured to taper surface (212), and be configured with an embedding chamber of stove cylinder (213) at stove cylinder door closure circle (21) towards the side of described stove cylinder (2), and offer a graphite annulus caulking groove (214) at stove cylinder door closure (21) back to the edge of the side of stove cylinder (2) and around the circumferencial direction of stove cylinder door closure circle (21), a graphite annulus (2141) is embedded with in this graphite annulus caulking groove (214), the periphery of described stove cylinder door closure (211) matches with described taper surface (212).

2. the furnace lining structure of high-temperature vacuum sintering furnace according to claim 1, it is characterized in that on described furnace shell (1), be provided with the pressure detector mounting interface (12c), temperature measuring device mounting interface (12f), the installation of TC interface (12g) and the pyroscan mounting interface (12h) that communicate with the boiler tube chamber (41) of described boiler tube (4), and on furnace shell (1), be also provided with heating arrangements cavity temperature detector mounting interface (12i) communicated with described boiler tube heating arrangements chamber (42); Sections caulking groove (231) the mutually scarf of each two adjacent stove shell ring sections in one group of described stove shell ring section (23) by compensating each other.

3. the furnace lining structure of high-temperature vacuum sintering furnace according to claim 1, it is characterized in that described furnace shell cooling body (11) comprises furnace shell cooling spacer (111), one group of cooling medium introduces interface (112) and one group of thermal medium extraction interface (113), furnace shell cooling spacer (111) is formed on described furnace shell (1), one group of cooling medium introducing interface (112) is formed in furnace shell (1) in the position of the bottom of the length direction corresponding to furnace shell (1) with space state and goes up and be connected with cooling medium supply source by cooling medium introduction pipeline, this group cooling medium introducing interface (112) all cools spacer (111) and communicates with furnace shell, one group of thermal medium extraction interface (113) is formed in furnace shell (1) in the position on the top of the length direction corresponding to furnace shell (1) with space state and goes up and be connected with described cooling medium supply source by thermal medium extraction pipeline and form cooling medium closed circuit, this group thermal medium extraction interface (113) all cools spacer (111) and communicates with furnace shell.

4. the furnace lining structure of high-temperature vacuum sintering furnace according to claim 1, it is characterized in that at the left end of the length direction of described furnace shell (1) and right-hand member and be fixed with axis pin base (16) back to the position of the side of described furnace shell end cap (15) around the circumferencial direction of furnace shell (1) with space state corresponding to described furnace shell flange (14), axis pin base (16) is hinged with a tie down screw (161) by bearing pin (1611), and be equipped with a handwheel (1612) at the end of this tie down screw (161), described furnace shell end cap (15) towards the side of furnace shell (1) and correspond to furnace shell flange (14) position expand be provided with a furnace shell end cap flange (151), the end caps pawl (1511) that quantity is equal and position is corresponding of quantity and described axis pin base (16) is fixed with space state around the circumferencial direction of furnace shell end cap flange (151) back to the side of furnace shell flange (14) at this furnace shell end cap flange (151), probe into or exit the lock pawl groove (15111) of end caps pawl (1511) by described tie down screw (161) and clockwise or counterclockwise operation done to described handwheel (1612) and makes furnace shell end cap (15) to the port closed of furnace shell (1) or remove closed, go up at described furnace shell (1) and be also fixed with a pair furnace shell hinge seat (17) in the position with described axis pin base (16), and above and in the position corresponding to a pair furnace shell hinge seat (17) be fixed with a pair furnace shell end cap chain connection head (156) at described furnace shell end cap (15), this is respectively hinged by connector bearing pin (1561) and a pair furnace shell hinge seat (17) to furnace shell end cap chain connection head (156), furnace shell end cap (15) is configured with end cap cooling medium spacer (152), this end cap cooling medium spacer (152) is introduced interface (153) and end cap thermal medium and is drawn interface (154) by being formed in end cap cooling medium that is on furnace shell end cap (15) and that communicate with end cap cooling medium spacer (152) and form circulation cooling circuit with cooling medium supply source, and on furnace shell end cap (15), be also provided with one for the accent in the boiler tube chamber (41) to described boiler tube (4) and close or remove closed end cap seal mechanism (8) to the accent of described boiler tube heating arrangements chamber (42), in described furnace shell chamber ventilating duct (12d), being parallel to furnace shell chamber ventilating duct (12d) space state being provided with stove cylinder cushion block (22) for locating described stove cylinder (2).

5. the furnace lining structure of high-temperature vacuum sintering furnace according to claim 4, it is characterized in that described end cap seal mechanism (8) comprises moving-coil and drives acting cylinder (81), moving-coil supporting Connection Block (82), moving-coil (83), cover plate mounting (84), spring bearer plate (85), back shroud (86), stove cylinder closing cap (87), boiler tube lid (88) and guard ring (89), moving-coil drives acting cylinder (81) to be fixed on the side of described furnace shell end cap (15) back to described furnace shell (1) with horizontal boom state, and be positioned at the edge of furnace shell end cap (15), this moving-coil drives the moving-coil of acting cylinder (81) to drive acting cylinder post (811) to be stretched in the furnace shell end cap chamber (155) of furnace shell end cap (15), moving-coil supporting Connection Block (82) is fixing with furnace shell end cap (15) in furnace shell end cap chamber (155), guard ring (89) is fixed with state and the chamber diapire of the chamber diapire in furnace shell end cap chamber (155) that soars by one group of guard ring holder (891), and offer a guard ring air vent (892) in the middle position of the bottom of this guard ring (89), and offer a pair of cover plate mounting bearing pin adjusting hole (893) on sidewall in guard ring (89), this is to cover plate mounting bearing pin adjusting hole (893) around the circumferencial direction of the sidewall of guard ring (89) apart 180 ° and be in mutual aspectant state, an acting cylinder post resigning hole (894) is offered on diapire in guard ring (89) and in the position that corresponds to described moving-coil driving acting cylinder post (811), moving-coil (83) is arranged in furnace shell end cap chamber (155) in the position in the outside that corresponds to guard ring (89), and on this moving-coil (83), be provided with moving-coil supporting Connection Block attachment screw (831) and an acting cylinder post holder (832), this acting cylinder post holder (832) is equipped with an acting cylinder post and is fixedly connected with screw (8321), moving-coil supporting Connection Block attachment screw (831) is connected with described moving-coil supporting Connection Block (82), and the acting cylinder styletable face screw (8111) that acting cylinder post is fixedly connected with in the distal end faces that screw (8321) and moving-coil drive acting cylinder post (811) is connected, and on moving-coil (83), offer a pair of moving-coil pin shaft hole (833), this is to moving-coil pin shaft hole (833) around the circumferencial direction of moving-coil (83) apart 180 ° and corresponding with described a pair of cover plate mounting bearing pin adjusting hole (893), cover plate mounting (84) corresponds in moving-coil (83), and this cover plate mounting (84) is insinuated in described a pair of cover plate mounting bearing pin adjusting hole (893) by a pair of cover plate mounting bearing pin screw (841) and is connected with guard ring (89) after through described a pair of moving-coil pin shaft hole (833), cover plate mounting (84) is also fixed with one group of cover plate seat ring (842), and be fixed with cover plate mounting screw rod (843) in the middle position of cover plate mounting (84), spring bearer plate (85) is fixed back to the side of back shroud (86) with cover plate mounting (84), and fix with the base portion of cover plate mounting screw (843) simultaneouslyBack shroud (86) is shelved on described one group of cover plate seat ring (842), and offer a back shroud screw hole (861) in the middle position of this back shroud (86), this back shroud screw hole (861) is nested with on cover plate mounting screw rod (843), stove cylinder closing cap (87) is being arranged on cover plate mounting screw rod (843) by being opened in the stove cylinder closing cap screw hole (871) of its middle position back to the position of the side of cover plate mounting (84) corresponding to back shroud (86), and be fixed with an insulation cover plate (872) towards the side of boiler tube lid (88) at this stove cylinder closing cap (87), a boiler tube lid swivel nut hole (881) is offered in the middle position of boiler tube lid (88), a boiler tube lid swivel nut (8811) is provided with in this boiler tube lid swivel nut hole (881), the central authorities of this boiler tube lid swivel nut (8811) form a swivel nut internal thread hole, this swivel nut internal thread hole is threaded with the swivel nut connecting thread head (8431) of the end of cover plate mounting screw rod (843), and be equipped with a boiler tube box nut (882) for boiler tube lid (88) is seized on both sides by the arms at the position screw thread that boiler tube lid swivel nut (8811) leans out boiler tube lid swivel nut hole (881), the nut bore (8821) of this boiler tube box nut (882) is threaded with described swivel nut connecting thread head (8431) equally, the described furnace shell end cap (15) of right-hand member that corresponds to described furnace shell (1) is provided with a fan coolling mechanism (9).

6. the furnace lining structure of high-temperature vacuum sintering furnace according to claim 5, it is characterized in that described fan coolling mechanism (9) comprises motor (91), motor water cooling but overlaps (92) and fan (93), the middle position that motor (91) is corresponding to described furnace shell end cap (15) is fixed on furnace shell end cap (15) by motor fixing seat (912) with the horizontally-arranged state of level, the motor shaft (911) of this motor (91) is stretched in described furnace shell end cap chamber (155), motor water cooling but overlaps (92) is arranged on motor (91) with sealing state, but overlapping on (92) at this motor water cooling is provided with into water interface (921) and water outlet mouthpiece (922), water outlet mouthpiece (922) was connected with the motor bearing seat water inlet (913) on the motor bearing seat being formed in motor (91) by communicating pipe (9221), motor bearing seat is configured with a motor bearing seat delivery port (914), water inlet interface (921) is respectively connected with water circulation cooling device pipeline by pipeline with motor bearing seat delivery port (914), position and motor shaft (911) that fan (93) is corresponding to described guard ring air vent (892) are fixed.

7. the furnace lining structure of high-temperature vacuum sintering furnace according to claim 1, it is characterized in that going up at described boiler tube (4) and being fixed with a nut connector (43) in the position corresponding to described protective gas interface (12c) by nut (431), described protective gas retraction mechanism (5) comprises a protective gas inlet tube (51) and one group of protective gas escape pipe (52), one end of protective gas inlet tube (51) to be inserted in the position corresponding to protective gas interface (12c) in protective gas interface (12c) and is being connected with described nut connector (43) threaded engagement afterwards passing described stove cylinder (2), the other end leans out protective gas interface (12c) and is connected with described protective gas supply source pipeline, one group of protective gas escape pipe (52) passes through in end to be connected in series protective gas communicating pipe (53) each other, and this group protective gas escape pipe (52) is respectively fixed by escape pipe hanger (521) spaced apart chamber, the boiler tube chamber wall with the boiler tube chamber (41) of boiler tube (4), respectively protective gas fairlead (522) is offered with space state at the length direction of this group protective gas escape pipe (52), the middle position being positioned at the length direction of a middle protective gas escape pipe in one group of protective gas escape pipe (52) is equipped with a three-way connection (523), this three-way connection (523) is same to be connected with described nut connector (43) threaded engagement and to communicate with the tube chamber of protective gas inlet tube (51), one group of described protective gas escape pipe (52), protective gas communicating pipe (53), escape pipe hanger (521) and three-way connection (523) are made by celion.

8. the furnace lining structure of high-temperature vacuum sintering furnace according to claim 1, is characterized in that described electrode interface (13) is positioned at the middle part of the length direction of described furnace shell (1) and the quantity of this electrode interface (13) has circumferencial direction around furnace shell (1) with one of equidistant intervals distributions group; Go up described stove cylinder (2) and offer the quantity graphite electrode post holes (24) equal with the quantity of electrode interface (13) in the position corresponding to described electrode interface (13); The quantity of described feeding mechanism (7) is equal with the quantity of electrode interface (13) and be fixedly connected with electrode interface (13); described boiler tube heating arrangements (6) comprises the quantity one group graphite heating unit (61) equal with the quantity of described feeding mechanism (7) and one group of graphite electrode columns (62), one group of graphite heating unit (61) is arranged in described boiler tube heating arrangements chamber (42) around the circumferencial direction of described boiler tube (4) with equidistant intervals state, and this group graphite heating unit (61) is respectively made up of one group of graphite heating rod (611) and a pair graphite connection strap (612), one group of graphite heating rod (611) is not only spaced but also mutual parallel in length direction maintenance, wherein one piece of graphite connection strap in a pair graphite connection strap (612) is connected with the end, one end of one group of graphite heating rod (611), and another piece of graphite connection strap in a pair graphite connection strap (612) is connected with the other end end of one group of graphite heating rod (61), the bottom of one group of graphite electrode columns (62) is respectively configured with a graphite rod Connection Block (621), the graphite heating unit that this graphite rod Connection Block (621) is adjacent with two in described one group of graphite heating unit (61) is connected, and the position that the top of one group of graphite electrode columns (62) is corresponding to described graphite electrode post holes (24) is connected with described feeding mechanism (7), and on the outer wall on the top of this group graphite electrode columns (62), be respectively configured with graphite electrode columns external screw thread (622), this graphite electrode columns external screw thread (622) is equipped a graphite electrode columns and limits nut (6221), an Electrode connection screwed hole (623) is offered in the middle position on the top of graphite electrode columns (62), this Electrode connection screwed hole (623) is blind hole.

9. the furnace lining structure of high-temperature vacuum sintering furnace according to claim 8, it is characterized in that described feeding mechanism (7) comprises, lower insulation sleeve (71, 72), felt pad (73), fixed head (74), electrode connection plate (75) and electrode (76), the middle part of lower insulation sleeve (72) is positioned at described graphite electrode post holes (24), the upper end of lower insulation sleeve (72) leans out graphite electrode post holes (24) and on the outer wall of this upper end, is provided with insulation sleeve and connects external screw thread (721), and the lower end of lower insulation sleeve (72) leans out graphite electrode post holes (24) equally and be insinuated in described boiler tube heating arrangements chamber (42), the outer wall of the lower end of this lower insulation sleeve (72) is provided with lower insulation sleeve and limits nut screw connection external screw thread (722), limit on nut screw connection external screw thread (722) at this lower insulation sleeve and be equipped with insulation sleeve restriction nut (7221), lower insulation sleeve (72) is limited on described stove cylinder (2) by this lower insulation sleeve limits nut (7221), graphite heating rod hole (723) is configured with in the middle position of the length direction of lower insulation sleeve (72), the chamber wall of the bottom of the upper insulation mantle cavity (711) of upper insulation sleeve (71) is configured with upper insulation sleeve and connects internal thread (7111), on this, insulation sleeve connects internal thread (7111) and connects external screw thread (721) threaded engagement with described upper insulation sleeve, the top of upper insulation sleeve (71) is insinuated in described electrode interface (13), the top of described graphite electrode columns (62) is insinuated in upper insulation mantle cavity (711) by way of graphite heating rod hole (723), and limit nut (6221) by described graphite electrode columns to limit, felt pad (73) is arranged on described electrode interface (13), a felt pad electrode resigning hole (731) is offered in the middle position of this felt pad (73), this felt pad electrode resigning hole (731) is corresponding with described upper insulation mantle cavity (711), fixed head (74) is stacked on felt pad (73), and this fixed head (74) is fixed together with felt pad (73) and electrode interface (13) by one group of fixed head screw (741), go up at fixed head (74) and offer fixed head electrode resigning hole (742) in the position corresponding to felt pad electrode resigning hole (731), electrode connection plate (75) is fixed on electrode (76), and this electrode connection plate (75) is connected with external power source circuit electrical, and the lower end of electrode (76) is configured with an electrode thread connector (761) with narrow contracting state, this electrode thread connector (761) and described Electrode connection screwed hole (623) are connected, a cooling of electrode chamber (762) is configured with in the middle position on electrode (76) top.

10. the furnace lining structure of high-temperature vacuum sintering furnace according to claim 8, it is characterized in that being configured with a pair joining of graphite screwed hole (6211) on described graphite rod Connection Block (621), this graphite heating unit adjacent with two in described one group of graphite heating unit (61) respectively to graphite rod connecting thread hole (6211) is connected; Wherein one piece of graphite connection strap in a pair described graphite connection strap (612) is connected with one end end winding support of described one group of graphite heating rod (611) by graphite nut (6121), and another piece of graphite connection strap in a pair graphite connection strap (612) is connected with the other end end winding support of one group of graphite heating rod (611) by graphite nut (6121) equally.