CN104279860B - Microwave vacuum gas pressure sintering stove - Google Patents
Microwave vacuum gas pressure sintering stove Download PDFInfo
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- CN104279860B CN104279860B CN201410471234.4A CN201410471234A CN104279860B CN 104279860 B CN104279860 B CN 104279860B CN 201410471234 A CN201410471234 A CN 201410471234A CN 104279860 B CN104279860 B CN 104279860B
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Abstract
The invention discloses a kind of microwave vacuum gas pressure sintering stove, comprise body of heater, body of heater is connected with vacuum extractor and pressue device, is provided with and sinters for material and to reduce the insulation box body of heat losses in body of heater; Body of heater is provided with for the microwave generating apparatus to body of heater inner chamber feed-in microwave, and microwave generating apparatus comprises microwave source for sending microwave and for the waveguide to feed-in in body of heater of the microwave that sent by microwave source; Microwave generating apparatus is set to one, and waveguide feed-in mouth is towards the center arrangement of the insulation box body in body of heater; Or microwave generating apparatus is set to multiple, the direction of engagement of microwave source and waveguide is mutually arranged vertically on adjacent two microwave generating apparatus, and the center being incubated box body is departed from the feed-in direction of the waveguide engaged with microwave source, the deviation distance that insulation box body center is departed from feed-in direction is the odd-multiple of microwave wavelength.Even, the Fast Sintering of baroque high density component can be realized.
Description
Technical field
The present invention relates to material agglomerating plant field, especially, relate to a kind of microwave vacuum gas pressure sintering stove.
Background technology
Sintering furnace is a kind of under high temperature action, makes the stove and accessory of densifying pulverized material, is mainly used in the material sintering such as structural ceramics, carbide alloy, powder metallurgy.In these material sintering processes, first need to carry out low-temperature defatted, that high temperature sintering improves material density.The main mode of heating of present equipment is resistance heated, eddy-current heating.Because its mode of heating is by heat convection current, radiation delivery to material, often have that the production cycle is long, energy consumption is high, sinter the problems such as uneven, homogeneity of product is poor.Microwave current agglomerating plant all can not meet high temperature, and vacuum, hyperbar fast switch the requirement of sintering.
Summary of the invention
The object of the invention is to provide and proposes that a kind of vacuum hyperbar fast switches, high temperature resistant and warm field uniform microwave vacuum gas pressure sintering device, with solve the existing normal sintering device fabrication cycle long, sinter uneven, and the technical problem that micro-wave pneumatic equipment reaction temperature is low, microwave sintering apparatus cannot be exerted pressure.
For achieving the above object, the technical solution used in the present invention is as follows:
A kind of microwave vacuum gas pressure sintering stove, comprise body of heater, body of heater is connected with the vacuum extractor for vacuumizing the inner chamber of body of heater and the pressue device for pressurizeing in the inner chamber of body of heater, is provided with and sinters for material and to reduce the insulation box body of heat losses in body of heater; Body of heater is provided with for the microwave generating apparatus to body of heater inner chamber feed-in microwave, and microwave generating apparatus comprises microwave source for sending microwave and for the waveguide to feed-in in body of heater of the microwave that sent by microwave source; Microwave generating apparatus is set to one, and waveguide feed-in mouth is towards the center arrangement of the insulation box body in body of heater; Or microwave generating apparatus is set to multiple, the direction of engagement of microwave source and waveguide is mutually arranged vertically on adjacent two microwave generating apparatus, and the center being incubated box body is departed from the feed-in direction of the waveguide engaged with microwave source, the deviation distance that insulation box body center is departed from feed-in direction is the odd-multiple of microwave wavelength.
Further, the energy-feeding antenna of microwave source is placed in wave transparent pressure-resistant part, energy-feeding antenna and wave transparent pressure-resistant part are linked in waveguide jointly, the internal face of waveguide encloses formation microwave cavity, and the microwave transparent wave transparent pressure-resistant part produced to make microwave source enters waveguide cavities and forms the inner chamber of resonant transmission to body of heater at waveguide cavities.
Further, wave transparent pressure-resistant part is the round bottom test tube body of mouth of pipe band annular flange flange, and the opening of wave transparent pressure-resistant part is arranged towards microwave source direction; Wave transparent pressure-resistant part is pressed in waveguide by hold down gag, and hold down gag is pressed in annular flange flange; Hold down gag offers the through hole for making the opening of wave transparent pressure-resistant part be communicated with microwave source; The opening of through hole and wave transparent pressure-resistant part matches.
Further, the top of hold down gag is laid with for inserting microwave source and preventing the installation base of microwave leakage along the outer rim of through hole.
Further, the internal diameter of wave transparent pressure-resistant part isometrical or gradual change vertically vertically; The wall body of wave transparent pressure-resistant part is at least one in high purity quartz wall, alumina walls, silicon nitride wall, devitrified glass wall, polytetrafluoroethylene (PTFE) wall, perfluoroalkoxy resin wall, modified Teflon wall, polyether-ether-ketone resin wall.
Further, waveguide is equipped with for isolate body of heater chamber pressure and penetrate in body of heater microwave superimposed separation layer, for importing microwave the metal interface pipe preventing microwave excessive and the thermal insulation layer for isolating heat to body of heater inner chamber; Superimposed separation layer is plastic layer superimposed successively, withstand voltage glassy layer and plastic layer, and be arranged with the U-shaped metal flange a of hollow outside superimposed separation layer, plastic layer, withstand voltage glassy layer and plastic layer are superimposed on the hollow position of U-shaped metal flange a successively; The first surface shutoff of superimposed separation layer is on the microwave feed-in mouth of waveguide, and second shutoff of superimposed separation layer is on the opening of metal interface pipe first end, and the second termination of metal interface pipe leads to body of heater inner chamber; Thermal insulation layer is placed in the inner chamber of metal interface pipe.
Further, multiple microwave generating apparatus is arranged at the side of body of heater; Or multiple microwave generating apparatus is arranged symmetrically in the both sides of body of heater along the center line of body of heater, microwave source is mutually vertical on relative two microwave generating apparatus with the direction of engagement of waveguide.
Further, body of heater comprising bladder layer for transmitting chamber pressure, being sheathed on the outer metal bearing course for pressure-bearing and isolation microwave of bladder layer and being sheathed on the outer cooling jacket for body of heater cooling of metal bearing course; Cooling jacket adopts water-cooled or air cooling; Metal bearing course adopts high strength stainless steel layer or cast iron layer; Bladder layer adopts at least one in polytetrafluoroethylene floor, perfluoroalkoxy resin layer, modified Teflon layer, polyether-ether-ketone resin layer.
Further, incubation chamber body profile is cuboid, cylinder or cone; And/or the box body center of insulation box body arranges the sintering zone being used for material sintering; And/or the wall body of insulation box body adopts the ceramic fibre wall body of refractoriness >=1700 DEG C; And/or the bottom of insulation box body is provided with the rotary support mechanism for also driving insulation box body to rotate from bottom support insulation box body, rotary support mechanism comprises and being fitted in base plate bottom insulation box body, being supported on bottom base plate and the bull stick extended to outside body of heater and be located at the outer and drive motors for driving bull stick to rotate of body of heater, adopts magnet fluid sealing between bull stick and body of heater.
Further, the opening upper cover of body of heater has fire door, and fire door is encapsulated on body of heater by the U-shaped flange with U-shaped engaging groove, is also provided with cyclic spring pad between body of heater and fire door, and cyclic spring pad is arranged in U-shaped engaging groove.
Further, body of heater is provided with the air inlet pipe of band electrically operated valve, the escape pipe being with electrically operated valve, pressure tester, temperature measuring equipment and explosion-protection equipment; Body of heater peripheral hardware has the controller controlling electrically operated valve opening and closing, and controller connects temperature measuring equipment and pressure tester.
The present invention has following beneficial effect:
Microwave vacuum gas pressure sintering stove, makes body of heater inner chamber become subnormal ambient by vacuumizing, and realizes material deoxygenation under vacuum conditions and binder removal, complete the fast defat of material under vacuum conditions in microwave heating low-temperature section; By cooperatively interacting of pressue device and microwave generating apparatus, under hyperbaric environment, utilize microwave to carry out homogeneous heating, under realizing high-pressure high-temperature environment, microwave sintering is carried out to material, the thermal efficiency is high, sintering velocity is fast, good evenness, packing are high, quality after material process is high; By the combination by microwave, vacuum, high pressure, quick deoxygenation, binder removal can be carried out in microwave heating low-temperature section, deoxygenation, binder removal complete follow-up temperature of continuing rising and switch hyperbar sintering, realize material to sinter fast continuously, get rid of the oxidizable problem of insufficient sintered part caused and the sintering process binder removal speed easy problem leaving standoff effects finished product density on sintered part slowly to eliminate oxygen in sintering chamber.Even, the Fast Sintering of baroque high density component can be realized.The waveguide feed-in mouth of single microwave generating apparatus is towards the center arrangement being incubated box body, microwave forms microwave field in body of heater inner chamber, the center of insulation box body is the center of microwave field, the free molecular flow being in the material of sintering zone in insulation box body affects generation free charge motion loss by microwave field, bound charge turns to the dielectric loss such as polarization loss and heterointerface loss, thus the direct conversion reached from electric energy to heat energy, carry out the Even Sintering of material.When the multiple microwave source of needs provides the high-power energy to carry out microwave sintering, adopt direction of engagement mutual vertically arranged mode on adjacent two microwave generating apparatus of microwave source and waveguide, the deviation distance at insulation box body center is departed from the feed-in direction of microwave is simultaneously the odd-multiple of microwave wavelength, effectively shake to ensure that the microwave energy of each feed-in mouth is formed instead of cancel out each other, thus improve the service efficiency of microwave source, avoid the Problem of Failure of beating the non-life termination of microwave source that the phenomenons such as arc cause.
Except object described above, feature and advantage, the present invention also has other object, feature and advantage.Below with reference to figure, the present invention is further detailed explanation.
Accompanying drawing explanation
The accompanying drawing forming a application's part is used to provide a further understanding of the present invention, and schematic description and description of the present invention, for explaining the present invention, does not form inappropriate limitation of the present invention.In the accompanying drawings:
Fig. 1 is one of structural representation of the microwave vacuum gas pressure sintering stove of the preferred embodiment of the present invention;
Fig. 2 is the structural representation two of the microwave vacuum gas pressure sintering stove of the preferred embodiment of the present invention;
Fig. 3 is the structural representation of the microwave generating apparatus of the preferred embodiment of the present invention;
Fig. 4 is the structural representation of the U-shaped flange of the preferred embodiment of the present invention;
Fig. 5 is the structural representation three of the microwave vacuum gas pressure sintering stove of the preferred embodiment of the present invention;
Fig. 6 be the preferred embodiment of the present invention waveguide on the structural representation of superimposed separation layer.
Marginal data:
1, body of heater; 2, box body is incubated; 3, microwave generating apparatus; 301, microwave source; 302, waveguide; 4, wave transparent pressure-resistant part; 401, annular flange flange; 402, round bottom test tube body; 5, hold down gag; 6, installation base; 7, fire door; 8, U-shaped flange; 9, cyclic spring pad; 10, U-shaped engaging groove; 11, electrically operated valve; 12, air inlet pipe; 13, escape pipe; 14, pressure tester; 15, temperature measuring equipment; 16, through hole; 17, sintering zone; 18, vacuum extractor; 19, gasket seal; 20, rotary support mechanism.
Detailed description of the invention
Below in conjunction with accompanying drawing, embodiments of the invention are described in detail, but the present invention can by the multitude of different ways that limits and cover implement.
Fig. 1 is one of structural representation of the microwave vacuum gas pressure sintering stove of the preferred embodiment of the present invention; Fig. 2 is the structural representation two of the microwave vacuum gas pressure sintering stove of the preferred embodiment of the present invention; Fig. 3 is the structural representation of the microwave generating apparatus of the preferred embodiment of the present invention; Fig. 4 is the structural representation of the U-shaped flange of the preferred embodiment of the present invention; Fig. 5 is the structural representation three of the microwave vacuum gas pressure sintering stove of the preferred embodiment of the present invention; Fig. 6 be the preferred embodiment of the present invention waveguide on the structural representation of superimposed separation layer.
As depicted in figs. 1 and 2, the microwave vacuum gas pressure sintering stove of the present embodiment, comprise body of heater 1, body of heater 1 is connected with the pressue device of vacuum extractor 18 for pressurizeing in the inner chamber to body of heater 1 for vacuumizing the inner chamber of body of heater 1, is provided with and sinters for material and to reduce the insulation box body 2 of heat losses in body of heater 1; Body of heater 1 is provided with for the microwave generating apparatus 3 to body of heater 1 inner chamber feed-in microwave, and microwave generating apparatus 3 comprises microwave source 301 for sending microwave and for the waveguide 302 to feed-in in body of heater 1 of the microwave that sent by microwave source 301.Microwave generating apparatus 3 is set to one, and the waveguide 302 feed-in mouth of the microwave source 301 of microwave generating apparatus 3 is towards the center arrangement of the insulation box body 2 in body of heater 1; Or microwave generating apparatus 3 is set to multiple, microwave source 301 is arranged vertically on adjacent two microwave generating apparatus 3 mutually with the direction of engagement of waveguide 302, and the center being incubated box body 2 is departed from the feed-in direction of the waveguide 302 engaged with microwave source 301, the deviation distance that insulation box body 2 center is departed from feed-in direction is the odd-multiple of microwave wavelength.Deviation distance refers to that insulation box body 2 center is to the vertical range in the feed-in direction of waveguide 302 feed-in body of heater 1, i.e. waveguide 302 feed-in body of heater 1 and depart from the eccentric throw being incubated box body 2 center.In insulation box body, the free molecular flow of the material of sintering zone affects by microwave field, dipole orientations arrangement also swings with the speed up to several hundred million times per second with high-frequency alternating electromagnetic field, molecule re-starts ordered arrangement along with the change direction of the electromagnetic field of high frequency of constantly change, the interference of molecular thermalmotion and intermolecular interaction must be overcome simultaneously, thus produce fierce friction, in this course, microwave energy is the heat energy of dielectric material, show as the rising of temperature of charge, thus form the high temperature sintering of material.Microwave vacuum gas pressure sintering stove, makes body of heater 1 inner chamber become subnormal ambient by vacuumizing, and realizes material deoxygenation under vacuum conditions and binder removal, complete the fast defat of material under vacuum conditions in microwave heating low-temperature section; By cooperatively interacting of pressue device and microwave generating apparatus 3, under hyperbaric environment, utilize microwave to carry out homogeneous heating, under realizing high-pressure high-temperature environment, microwave sintering is carried out to material, the thermal efficiency is high, sintering velocity is fast, good evenness, packing are high, quality after material process is high; By the combination by microwave, vacuum, high pressure, quick deoxygenation, binder removal can be carried out in microwave heating low-temperature section, deoxygenation, binder removal complete follow-up temperature of continuing rising and switch hyperbar sintering, realize material to sinter fast continuously, get rid of the oxidizable problem of insufficient sintered part caused and the sintering process binder removal speed easy problem leaving standoff effects finished product density on sintered part slowly to eliminate oxygen in sintering chamber.Even, the Fast Sintering of baroque high density component can be realized.The waveguide 302 feed-in mouth of single microwave generating apparatus 3 is towards the center arrangement being incubated box body 2, microwave forms microwave field in body of heater 1 inner chamber, the center of insulation box body 2 is the center of microwave field, the free molecular flow being in the material of sintering zone 17 in insulation box body 2 affects generation free charge motion loss by microwave field, bound charge turns to the dielectric loss such as polarization loss and heterointerface loss, thus the direct conversion reached from electric energy to heat energy, carry out the Even Sintering of material.When the multiple microwave source of needs 301 provides the high-power energy to carry out microwave sintering, adopt direction of engagement mutual vertically arranged mode on adjacent two microwave generating apparatus 3 of microwave source 301 and waveguide 302, the deviation distance at insulation box body 2 center is departed from the feed-in direction of microwave is simultaneously the odd-multiple of microwave wavelength, effectively shake to ensure that the microwave energy of each feed-in mouth is formed instead of cancel out each other, thus improve the service efficiency of microwave source 301, avoid the Problem of Failure of beating the non-life termination of microwave source 301 that the phenomenons such as arc cause.
In the present embodiment, waveguide 302 is equipped with for isolate body of heater 1 chamber pressure and penetrate in body of heater 1 microwave superimposed separation layer d, for importing microwave the metal interface pipe preventing microwave excessive and the thermal insulation layer for isolating heat to body of heater 1 inner chamber.Superimposed separation layer d is plastic layer superimposed successively, withstand voltage glassy layer and plastic layer, and be arranged with the U-shaped metal flange a of hollow outside superimposed separation layer d, plastic layer, withstand voltage glassy layer and plastic layer are superimposed on the hollow position of U-shaped metal flange a successively.The first surface shutoff of superimposed separation layer d is on the microwave feed-in mouth of waveguide 302, and second shutoff of superimposed separation layer d is on the opening of metal interface pipe first end, and the second termination of metal interface pipe leads to body of heater 1 inner chamber.Thermal insulation layer is placed in the inner chamber of metal interface pipe.As shown in Figure 6, waveguide 302 is also equipped with for the microwave of waveguide 302 feed-in being penetrated to body of heater 1 inner chamber and isolating the superimposed separation layer d of body of heater 1 chamber pressure.Superimposed separation layer d is plastic layer superimposed successively, withstand voltage glassy layer and plastic layer.The U-shaped metal flange a of hollow is arranged with outside superimposed separation layer d.For preventing microwave leakage.As shown in Figure 6, plastic layer, withstand voltage glassy layer and plastic layer are superimposed on the hollow position of U-shaped metal flange a successively, and U-shaped metal flange a two ends have been fitted and connected flange b respectively.For solving the problem of atmospheric pressure sealing, to ensure that material in body of heater 1 or gas pressure can not enter microwave source 301, wiper seal prevented microwave source 301 from damaging by high pressure in body of heater 1 simultaneously.The heat resistance of plastic spacer is compared with the poor heat resistance of glass, and general heat resisting temperature is about 300 DEG C, but its withstand voltage properties is better; And the heat resisting temperature of glass is higher, the upper limit temperature of heat tolerance as quartz glass is 1200 DEG C, therefore adopts the mode of combination to carry out, can improve heat resisting temperature, also can reduce the gross thickness of encapsulant, be beneficial to penetrating of microwave.Preferably, high pressure resistant glass or plastic spacer can be individually adopted to seal.
As shown in Figure 1, Figure 2 and Figure 3, in the present embodiment, the energy-feeding antenna of microwave source 301 is placed in wave transparent pressure-resistant part 4, and energy-feeding antenna and wave transparent pressure-resistant part 4 are linked in waveguide 302 jointly.The internal face of waveguide 302 encloses formation microwave cavity, and the microwave transparent wave transparent pressure-resistant part 4 produced to make microwave source 301 enters waveguide 302 inner chamber and forms the inner chamber of resonant transmission to body of heater 1 at waveguide 302 inner chamber.The microwave feed-in mouth of body of heater 1 inner chamber adopts waveguide 302 to carry out microwave feed-in, the mode utilizing microwave to penetrate from wave transparent pressure-resistant part 4 wall body is fed into waveguide 302 inner chamber by coming from the microwave that microwave source 301 sends, utilize the wall body of the wall body of waveguide 302 and wave transparent pressure-resistant part 4 to bear the gas pressure coming from body of heater 1 inner chamber, effectively prevent gas from overflowing from the microwave feed-in mouth of body of heater 1 inner chamber.The resistance to compression of microwave transmission position is carried out by wave transparent pressure-resistant part 4 and the combining structure of waveguide 302, effectively prevent the situation that air-flow leaks, thus ensure gas pressure and the internal temperature of body of heater 1 inner chamber, effectively can enter into by waveguide 302 microwave source 301 disabler that microwave source 301 causes by barrier air simultaneously.The internal face of waveguide 302 encloses formation microwave cavity, the microwave transparent wave transparent pressure-resistant part 4 that microwave source 301 sends enters into waveguide 302 inner chamber, and resonance is formed in the microwave cavity that the internal face of waveguide 302 encloses formation, thus by microwave transfer in target cavity, realize the microwave energy-feeding to body of heater 1 inner chamber.Preferably, the wall body of waveguide 302 adopts withstand voltage wall body.
As shown in Figure 1, Figure 2 and Figure 3, in the present embodiment, wave transparent pressure-resistant part 4 is the round bottom test tube body 402 of mouth of pipe band annular flange flange 401.Round bottom test tube body 402 is the structural feature of construction profile as round bottom test tube.Annular flange flange 401 is fixed and the action plane of compression seal on wave transparent pressure-resistant part 4 for providing hold down gag 5.The opening of wave transparent pressure-resistant part 4 is arranged towards microwave source 301 direction.Wave transparent pressure-resistant part 4 is pressed in waveguide 302 by hold down gag 5, and hold down gag 5 is pressed in annular flange flange 401.By arranging annular flange flange 401 to improve the contact area in compaction process, improve the air-tightness of connecting portion.The opening of the round bottom test tube body 402 of wave transparent pressure-resistant part 4 is towards microwave source 301, and round bottom is towards withstand voltage waveguide 302, when being subject to the gas pressure that target cavity passes over, by round bottom construction resistance to compression, round bottom construction expands the contact area with air-flow, and by the stream pressure dividing potential drop step by step that the outside dimension progressively expanded will be subject to, anti-pressure ability is stronger.Hold down gag 5 offers the through hole 16 for making the opening of wave transparent pressure-resistant part 4 be communicated with microwave source 301.Through hole 16 matches with the opening of wave transparent pressure-resistant part 4.Thus reduce microwave source 301 through the obstruction of wave transparent pressure-resistant part 4 to withstand voltage waveguide 302 energy regenerative, improve microwave feed-in rate.The aperture of through hole 16 is 20mm-30mm.Preferably, the aperture of through hole 16 is 26mm.Preferably, the bottom of hold down gag 5 is fitted with gasket seal 19, and hold down gag 5 is pressed on the upper of wave transparent pressure-resistant part 4 by gasket seal 19.Thus improve the air-tightness of link position.Preferably, the internal diameter of wave transparent pressure-resistant part 4 isometrical or gradual change footpath vertically vertically.Preferably, wave transparent pressure-resistant part 4 adopts gradual change gauge structure.When adopting the round bottom test tube body 402 in gradual change footpath, spout diameter differs 3mm-5mm with pipe tail internal diameter, thus raising wave transparent pressure-resistant part 4 comes from the gas pressure of target cavity, makes the microwave source antenna being in wave transparent pressure-resistant part 4 inner chamber normally work from effects of air pressure simultaneously.
As shown in Figure 1, Figure 2 and Figure 3, in the present embodiment, the top of hold down gag 5 is laid with for inserting microwave source 301 and preventing the installation base 6 of microwave leakage along the outer rim of through hole 16.Preferably, the boss height of installation base 6 is 1mm, and width is 3mm.For embedding the bottom of microwave source 301, and being connected with the copper packing compression fit bottom microwave source 301, effectively preventing microwave leakage.
As shown in Figure 1, Figure 2 and Figure 3, in the present embodiment, the internal diameter of wave transparent pressure-resistant part 4 is isometrical or gradual change footpath vertically vertically.The wall body of wave transparent pressure-resistant part 4 is at least one in high purity quartz wall, alumina walls, silicon nitride wall, devitrified glass wall, polytetrafluoroethylene (PTFE) wall, perfluoroalkoxy resin wall, modified Teflon wall, polyether-ether-ketone resin wall.Can according to different assembling needs, and pressure needs, and selects different walled structure and wall thickness, thus ensure the temperature in overall structure gas pressure in use and cavity.The wall body of wave transparent pressure-resistant part 4 can adopt the wall body of a type, or adopts polytype wall body to be superimposed with each other.
As depicted in figs. 1 and 2, in the present embodiment, multiple microwave generating apparatus 3 are arranged at the side of body of heater 1; Or multiple microwave generating apparatus 3 is arranged symmetrically in the both sides of body of heater 1 along the center line of body of heater 1, microwave source 301 is mutually vertical on relative two microwave generating apparatus 3 with the direction of engagement of waveguide 302.Effectively vibrate to ensure that the microwave energy of each feed-in mouth is formed instead of cancel out each other, thus improve the service efficiency of microwave source 301, avoid the Problem of Failure of beating the non-life termination of microwave source 301 that the phenomenons such as arc cause.
As depicted in figs. 1 and 2, in the present embodiment, body of heater 1 comprises bladder layer for transmitting chamber pressure, be sheathed on the outer metal bearing course for pressure-bearing and isolation microwave of bladder layer and be sheathed on the outer cooling jacket cooled for body of heater 1 of metal bearing course.Cooling jacket adopts water-cooled or air cooling.Metal bearing course adopts high strength stainless steel layer or alloy-layer.Bladder layer adopts at least one in polytetrafluoroethylene floor, perfluoroalkoxy resin layer, modified Teflon layer, polyether-ether-ketone resin layer.Bladder layer can adopt the structure sheaf of a type, or adopts polytype structure sheaf to be superimposed with each other.The material of said structure layer is existing material.
As shown in Figure 1, in the present embodiment, insulation box body 2 profile is cuboid, cylinder or cone.The box body center of insulation box body 2 arranges the sintering zone 17 being used for material sintering.The wall body of insulation box body 2 adopts the ceramic fibre wall body of refractoriness >=1700 DEG C.Insulation box body 2 is the key factors affecting heat-insulation system heat insulation effect, good heat preservation mechanism, the heat of material conversion can be stayed as much as possible sintering region to realize the sintering temperature, the raising microwave energy efficiency that need, reduce the transmission of heat as far as possible simultaneously, to ensure that insulation box body 2 outside wall temperature is in the normal serviceability temperature of polytetrafluoroethylliner liner, thus the bearing capacity of body of heater 1 inner bag can be ensured.The material of above-mentioned wall body is existing material.
As shown in Figure 5, in the present embodiment, the bottom of insulation box body 2 is provided with the rotary support mechanism 20 for also driving insulation box body 2 to rotate from bottom support insulation box body 2.Rotary support mechanism 20 plays a part fixing to insulation box body 2 and supports; Rotary support mechanism 20 is with spinfunction, and the material being beneficial to be incubated each position in box body 2 all can be subject to microwave uniformly.Rotary support mechanism 20 comprises and being fitted in base plate bottom insulation box body 2, being supported on bottom base plate and the bull stick extended to outside body of heater 1 and be located at the outer and drive motors for driving bull stick to rotate of body of heater 1.Rotary support mechanism 20 plays a part fixing to insulation box body 2 and supports; Rotary support mechanism 20 is with spinfunction, is beneficial to each position material in insulation box body 2 and all can be subject to microwave uniformly.Magnet fluid sealing is adopted between bull stick and body of heater 1.Wherein magnet fluid sealing has the following advantages: good stability, do not condense, do not precipitate, do not decompose; Saturation magnetization is high.
In the present embodiment, the bottom of insulation box body 2 is provided with for the supporting mechanism from bottom support insulation box body 2.Supporting mechanism plays a part fixing to insulation box body 2 and supports.Supporting mechanism comprises the base plate that is fitted in bottom insulation box body 2 and to be supported on bottom base plate and the support member inner affixed with body of heater 1.
As shown in Figure 2 and Figure 4, in the present embodiment, the opening upper cover of body of heater 1 has fire door 7, and fire door 7 is encapsulated on body of heater 1 by the U-shaped flange 8 with U-shaped engaging groove 10, also be provided with cyclic spring pad 9 between body of heater 1 and fire door 7, cyclic spring pad 9 is arranged in U-shaped engaging groove 10.The compressive property of connecting portion is good, and good airproof performance, effectively prevents microwave leakage.
As depicted in figs. 1 and 2, in the present embodiment, body of heater 1 is provided with the air inlet pipe 12 of band electrically operated valve 11, the escape pipe 13 being with electrically operated valve 11, pressure tester 14, temperature measuring equipment 15 and explosion-protection equipment.Body of heater 1 peripheral hardware has the controller controlling electrically operated valve 11 opening and closing, and controller connects temperature measuring equipment 15 and pressure tester 14.Air inlet and employing electric control valve of giving vent to anger, realize automatic constant pressure control by PLC.
During enforcement, in order to solve the problem of fast defat, pressure sintering, a kind of microwave vacuum hyperbar agglomerating plant provided by the invention, comprises inlet duct, microwave generating apparatus, insulation box body 2, pressure tester 14, controller, temperature measuring equipment 15, exhaust apparatus, vacuum extractor 18.Microwave generating apparatus is arranged on high pressure resistant body of heater 1, and inlet duct, vacuum extractor 18 are all equipped with motor-operated control valve, facilitate atmosphere detection control.2 ~ 10 microwave generating apparatus 3 are distributed in high pressure body of heater both sides.Temperature measuring equipment is arranged on high pressure boiler tube, adopts multi-point combination formula, detects sintering regional temperature through heat-insulation system.Pressure tester is provided with Explosion-proof valve.Insulation box body 2 is placed in high pressure resistant body of heater 1, and the sintering region that sintered sample is placed in attemperator sinters.Microwave generating apparatus adopts rectangular waveguide to be connected with body of heater 1, and the sealing between rectangular waveguide and body of heater 1 adopts high pressure resistant glassy layer, plastic spacer and high-pressure glass layer to carry out superimposed sealing successively, can bear the pressure of more than 50MPa.
The wall body of insulation box body 2 is resistant to elevated temperatures ceramic fibre wall body.
Microwave vacuum hyperbar agglomerating plant, is placed in the sintering region of insulation box body 2, microwave generating apparatus 3 feed-in microwave by sintered sample, material absorbs microwave and heats up, and opens vacuum system, carries out low temperature binder removal.After binder removal completes, switch vacuum extractor 18, the automatically controlled control valve of gas handling system, pass into the required pressure of material sintering, carry out intensification pressure sintering, and guarantee the security of operation of equipment by the pressure needed for pressure detecting control system Quality control sintering.
What force the polar molecule in material by the electromagnetic field of microwave carries out ordered arrangement from unordered, and in electric field high frequency conversion process, polar molecule quick rotation, friction generates heat mutually, and material is from inner and to heat together outward.Have that the thermal efficiency is high, sintering rate be fast, the feature of homogeneous temperature, sanitation and hygiene.Achieve vacuum simultaneously, air pressure fast switches, meet quick binder removal when sample sinters, the fine and close requirement completed in same equipment of pressurization.
Adopt microwave hyperbar sintering furnace, overcome that traditional hyperbar sintering period is long, energy consumption is high, sinter uneven, that homogeneity of product is poor shortcoming.Also overcome simultaneously traditional microwave sintering furnace cannot pressure sintering, shortcoming that sample density is not high.Achieve under microwave field, vacuum and anticyclonic quick conversion simultaneously.Inlet duct, exhaust apparatus, vacuum extractor 18 are installed on body of heater 1, and adopt motor-operated control valve to be connected.
As illustrated in fig. 1 and 2, microwave generating apparatus 3 is arranged on body of heater 1, is connected with body of heater 1 by rectangular waveguide, and 2 ~ 10 microwave generation systems are distributed in body of heater both sides, homonymy microwave source interval 20 ~ 50cm.Rectangular waveguide adopts that high pressure resistant glassy layer, plastic spacer and high pressure resistant glassy layer are superimposed successively to be sealed, gas-insulated by body of heater 1 and microwave generating apparatus 3, and withstand voltage glass bears gas pressure.Be provided with insulation box body 2 in body of heater 1, the wall body of insulation box body 2 is the ceramic fibre wall body of refractoriness more than 1700 DEG C.Sintering zone 17 is provided with in insulation box body 2.Temperature measuring equipment 15 is arranged on body of heater 1, adopts multi-point combination formula, detects the temperature of sintering zone 17 through insulation box body 2.Air inlet pipe 12, escape pipe 13, vacuum extractor 18 are installed on body of heater 1, and adopt motor-operated control valve to be connected.Pressure tester 14, controller are arranged on body of heater 1, pressure during detection and control sintering.Air inlet pipe 12, microwave generating apparatus 3, pressure tester 14, controller, temperature measuring equipment 15, escape pipe 13, vacuum extractor 18 are by controller centralized Control.
What microwave generating apparatus 3 was installed is high-power technical grade magnetron.The microwave that magnetron exports is fed in whole body of heater 1 by rectangular waveguide.The furnace wall of body of heater 1 adopts Special high-strength steel wall, ensures that body of heater 1 has enough strength and stiffness.Adopt U-shaped flange to add elastomeric pad between body of heater 1 and fire door 7 to seal, ensure that the air-tightness of body of heater and the leakage of microwave are in national standard allowed band.
Sintered material puts into sintering zone 17, and absorb the microwave of microwave generating apparatus 3 feed-in, vacuum extractor 18 is started working, and the burnt gas of material, steam, flue gas is drained into fast outside body of heater.After binder removal completes, controller adjustment gas handling system, vacuum system, electrically operated valve, pass into the required atmosphere of material sintering and pressure.Detection control signal is sent to controller by pressure tester 14, and controller, by adjusting the electrically operated valve 11 of tracheae, air inlet pipe, adjusts the pressure in body of heater 1.Explosion-protection equipment on pressure tester 14 limits the upper pressure limit that body of heater 1 bears.
By temperature measuring equipment 15 feedback information to controller, control the feed-in microwave power size of microwave generating apparatus 3 each position magnetron, the technological temperature realizing sintered material controls.
The rate of heat addition is fast, efficiency is high, the temperature difference is even, microwave field can be realized under vacuum, hyperbar fast switch, more existing agglomerating plant is with the obvious advantage.
Microwave sintering is realized by the insulation box body 2 in the microwave generating apparatus on body of heater 1, body of heater 1 and the temperature measuring equipment 15 from body of heater 1 in insertion incubation chamber body.Wherein microwave generating apparatus 3 produces and carries microwave in the burner hearth of body of heater 1 inner chamber, after microwave and the material in insulation box body 2 intercouple, is heat energy by converting electric energy; In the heat energy insulation box body 2 changed is collected in, thus realize the sintering that heats up; And temperature measuring equipment 15 is by measuring and feeding back the temperature in insulation box body 2, regulates the input power size in microwave generating apparatus 3 by temperature-controlling system, increase or reduce the size that electric energy conversion becomes heat energy, and then realize high temperature sintering.
In addition, the realization of vacuum is realized by the gas handling system (air inlet pipe 12 and electrically operated valve 11) on body of heater 1, system of giving vent to anger (escape pipe 13 and electrically operated valve 11) and vacuum extractor 18.The step of vacuumizing is, opens system valve of giving vent to anger, and closes gas handling system valve, opens vavuum pump and carries out vacuumizing process.
The realization of high pressure is undertaken by with under type: withstand voltage body of heater, gas handling system (air inlet pipe 12 and electrically operated valve 11), system of giving vent to anger (escape pipe 13 and electrically operated valve 11), pressure tester 14 combine realization.Wherein first withstand voltage body of heater refers to that hearth wall is welded by high strength steel or is cast to form; Next comprises the encapsulation process of the gas handling system on body of heater 1, system of giving vent to anger, pumped vacuum systems device 18, temperature measuring equipment 15, pressure tester 14 and microwave generating apparatus 3 and body of heater 1 junction; Again also comprise the encapsulation process of fire door 7.In the necessary factor of above-mentioned formation is withstand voltage body of heater, except the sealing of microwave generating apparatus 3, all existing maturation process can realize.
Microwave, vacuum, high pressure combine: even, the Fast Sintering that can realize baroque high density component.Wherein the effect of microwave is homogeneous heating, and the effect of vacuum is deoxygenation and binder removal, and the effect of high pressure is pressure sintering.If be used alone vacuum-microwave agglomerating furnace when sintering, the density of sintered product is lower, does not reach the mechanical property requirements of functional material.And adopting separately microwave-high-pressure sinter, then the oxygen sintered in chamber is got rid of insufficient, and sintered part is oxidizable; In addition, sintering process binder removal speed is comparatively slow, on sintered part, easily leaves space and then affect sintered density.If carry out separately the process of vacuum binder removal, then need to carry out intensification binder removal, cooling transfer, then the operation of the pressure sintering that heats up, technique is comparatively loaded down with trivial details, and there is the waste of heat.The structure of microwave, vacuum, high pressure, can carry out quick binder removal in microwave heating low-temperature section, and binder removal completes follow-up temperature of continuing rising and switches hyperbar sintering, can realize continuous Fast Sintering.Compared with-outage gas pressure sintering true with conventional heating, have the feature of fast, the overall homogeneous heating of sintering velocity, the product disperse phase of acquisition is trickle, contributes to improving mechanical property.And sinter compared with (being sintered by mould pressurizing with hydraulic pressure) with microwave hot-press simultaneously, can the blank of sintering structure complexity.This is because microwave hot-press sintering is by the restriction of mould, the simple blank of profile can only be sintered, then by cutting the blank of burning till, cutting, the technique such as polishing carries out processing and could obtain baroque structural member.
Body of heater 1 is cylindrical withstand voltage body of heater, body of heater 1 is provided with simultaneously microwave generating apparatus 3, temperature measuring equipment 15, insulation box body 2, gas handling system, system of giving vent to anger, pressure tester 14, vacuum extractor 18 and integrated control system.Each device cooperatively interacts, and is convenient to the continued operation realizing microwave, vacuum, high pressure.
Microwave generating apparatus 3: different because of material wave-sucking performance and treating capacity, microwave generating apparatus 3 can single or multiple microwave source composition.During single microwave source, microwave feed-in mouth is arranged on the centre position of body of heater side; And when the multiple microwave source of needs provides high-power, microwave feed-in mouth distributes according to certain rules in body of heater side.The long limit of two wherein adjacent microwave feed-in mouths is mutually vertical, and disalignment is the odd-multiple of wavelength.Effectively vibrate to ensure that the microwave energy of each feed-in mouth is formed instead of cancel out each other, thus improve the service efficiency of microwave source, avoid the Problem of Failure of playing the non-life-span end of a period of microwave source that the phenomenons such as arc cause.
Temperature measuring equipment: thermocouple temperature measurement or infrared measurement of temperature can be adopted.When adopting thermocouple temperature measurement, thermocouple need be inserted from burner hearth the position near sintering region in heat-insulation system, to ensure accurate thermometric.When adopting infrared measurement of temperature, needing to arrange on body of heater can the infrared temperature measurement window (thermometric window adopts withstand voltage infrared glass to seal) of high pressure sealing, and infrared radiation thermometer is connected on thermocouple temperature measurement seat.Thermocouple temperature measurement seat also can replace with infrared measurement of temperature seat.Above-mentioned two kinds of thermometric modes all need to adopt multi-point combination formula observing and controlling temperature, to ensure the uniformity sintering temperature field, region.
Insulation box body 2: insulation box body 2 is placed in body of heater 1, and wall body adopts the ceramic fibre wall body of refractoriness >=1700 DEG C, is cuboid or barrel-shaped.Sintering zone 17 is in the center of heat-preserving container.Heat-preserving container combination and ceramic fibre wall body are the key factors affecting heat-insulation system heat insulation effect.Good heat-insulation system, can stay sintering region as much as possible to realize the sintering temperature, the raising microwave energy efficiency that need, reduce the transmission of heat simultaneously as far as possible, leak pressure to avoid the too high pressure seal caused of temperature by the heat of material conversion.
Pressure tester 14: because pressure sensor can be subject to microwave interference, therefore need to arrange wave suppression device in pressure detecting position, this wave suppression device can be the metallic plate of single hole or densely covered circular aperture, can guarantee the degree of accuracy of pressure detecting.
The hyperbar sealing of microwave generation system is the bottleneck place of micro-wave pneumatic equipment.This is because the most ripe microwave feed-in structure of application can not bear the pressure of more than 0.3MPa at present, and in current feed-in structure, the effect of blind plate is low pressure seal and prevents dust, volatile matter, steam etc. from entering microwave generation system thus the normal work of guarantee microwave generator, and can not withstand high pressures.Therefore, improving its voltage endurance capability in the mode increasing blind plate size in this patent, can realize hyperbar, is again that the microwave field that the microwave feed-in mode retaining maturation is at present brought is even, the optimum method of uniform temperature fields.
The sealing of waveguide 302 and body of heater 1 connecting portion: traditional structure sealing ring is elastic material, has good sealing; And the rigidity material of glass, cannot seal with the rigid structure of body of heater, plastic spacer need be adopted to seal.The invention process waveguide 302 and the structure of the sealing of body of heater 1 connecting portion are spacer layer, glassy layer, spacer layer are formed by stacking (sandwich structure of pad+glass+pad) successively, the mode of combination is adopted to carry out, the sealing of equipment can be improved, be beneficial to penetrating of microwave, avoid glass unbalance stress, the problem of easy crushing simultaneously.Withstand voltage glass bears gas pressure for realizing hyperbar, in conjunction with vacuum and microwave sintering, can realize the pressurization of complex-shaped component, Fast Sintering.Body of heater, furnace wall adopt Special high-strength steel plate object to be the voltage endurance capability ensureing body of heater, in conjunction with vacuum and microwave sintering, can realize the pressurization of complex-shaped component, Fast Sintering.
U-shaped structure height dislocation, knuckle anti-microwave leakage.Realize as shown in Figure 4, upper flange has a U-shaped projection, and lower flange has a U groove, places elastomeric pad in groove, and during work, upper flange U-shaped projection press-in U groove, compresses elastomeric pad, seal other.Meanwhile, the knuckle that two flange binding faces and U-shaped projection and U groove are formed, effectively prevents microwave leakage.
It is that mode by vacuumizing realizes that the burnt gas of material, steam, flue gas drain into outside body of heater fast, and vacuum makes to form negative pressure in body of heater, thus is beneficial to the quick discharge of burnt gas, steam and flue gas.
Realize the vacuum under microwave field, hyperbar fast switches: first, fast switch relative common process, common process first heats up and carries out the operation of vacuum binder removal, and after being cooled to room temperature subsequently, hyperbar sintering is carried out in transfer again.In this patent, vacuum system, gas handling system and pressure detecting system are arranged on body of heater, can carry out Valve controlling by integrated control system to the pressure detected, vacuum pumping, supply gas, be vented and pressurized operation.Vacuum and pressure switch only needs within several minutes, complete.
The foregoing is only the preferred embodiments of the present invention, be not limited to the present invention, for a person skilled in the art, the present invention can have various modifications and variations.Within the spirit and principles in the present invention all, any amendment done, equivalent replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (9)
1. a microwave vacuum gas pressure sintering stove, comprises body of heater (1),
It is characterized in that,
Described body of heater (1) is connected with vacuum extractor (18) for vacuumizing the inner chamber of described body of heater (1) and the pressue device for pressurizeing in the inner chamber to described body of heater (1),
Be provided with in described body of heater (1) and sinter for material and to reduce the insulation box body (2) of heat losses;
Described body of heater (1) is provided with for the microwave generating apparatus (3) to described body of heater (1) inner chamber feed-in microwave,
Described microwave generating apparatus (3) comprises microwave source (301) for sending microwave and for the waveguide (302) to described body of heater (1) interior feed-in of the microwave that sent by described microwave source (301);
Described microwave generating apparatus (3) is set to one, and described waveguide (302) feed-in mouth is towards the center arrangement of the described insulation box body (2) in described body of heater (1); Or
Described microwave generating apparatus (3) is set to multiple, described microwave source (301) is arranged vertically on adjacent two described microwave generating apparatus (3) mutually with the direction of engagement of described waveguide (302), and the center of described insulation box body (2) is departed from the feed-in direction of the described waveguide (302) engaged with described microwave source (301), and deviation distance is the odd-multiple of microwave wavelength;
The energy-feeding antenna of described microwave source (301) is placed in wave transparent pressure-resistant part (4), and described energy-feeding antenna and described wave transparent pressure-resistant part (4) are linked in described waveguide (302) jointly,
The internal face of described waveguide (302) encloses formation microwave cavity, and wave transparent pressure-resistant part (4) described in the microwave transparent produced to make described microwave source (301) enters described waveguide (302) inner chamber and forms the inner chamber of resonant transmission to described body of heater (1) at described waveguide (302) inner chamber;
The wall body of described waveguide (302) adopts withstand voltage wall body.
2. microwave vacuum gas pressure sintering stove according to claim 1, is characterized in that,
The round bottom test tube body (402) that described wave transparent pressure-resistant part (4) is mouth of pipe band annular flange flange (401),
The opening of described wave transparent pressure-resistant part (4) is arranged towards described microwave source (301) direction;
Described wave transparent pressure-resistant part (4) is pressed in described waveguide (302) by hold down gag (5),
Described hold down gag (5) is pressed in described annular flange flange (401);
Described hold down gag (5) offers the through hole (16) for making the opening of described wave transparent pressure-resistant part (4) be communicated with described microwave source (301);
Described through hole (16) matches with the opening of described wave transparent pressure-resistant part (4);
The outer rim of described through hole (16) is laid with for inserting described microwave source (301) and preventing the installation base (6) of microwave leakage.
3. microwave vacuum gas pressure sintering stove according to claim 2, is characterized in that,
The internal diameter isometrical or gradual change vertically vertically of described wave transparent pressure-resistant part (4);
The wall body of described wave transparent pressure-resistant part (4) is at least one in high purity quartz wall, alumina walls, silicon nitride wall, devitrified glass wall, polytetrafluoroethylene (PTFE) wall, perfluoroalkoxy resin wall, modified Teflon wall, polyether-ether-ketone resin wall.
4. microwave vacuum gas pressure sintering stove according to claim 1, is characterized in that,
Described waveguide (302) is equipped with for isolate described body of heater (1) chamber pressure and penetrate in described body of heater (1) microwave superimposed separation layer (d), for importing microwave the metal interface pipe preventing microwave excessive and the thermal insulation layer for isolating heat to described body of heater (1) inner chamber;
Described superimposed separation layer (d) is plastic layer superimposed successively, withstand voltage glassy layer and plastic layer,
Be arranged with U-shaped metal flange (a) of hollow outside described superimposed separation layer (d), plastic layer, withstand voltage glassy layer and plastic layer are superimposed on the hollow position of described U-shaped metal flange (a) successively;
The first surface shutoff of described superimposed separation layer (d) on the microwave feed-in mouth of described waveguide (302),
Second shutoff of described superimposed separation layer (d) on the opening of described metal interface pipe first end,
Second termination of described metal interface pipe leads to described body of heater (1) inner chamber;
Described thermal insulation layer is placed in the inner chamber of described metal interface pipe.
5. microwave vacuum gas pressure sintering stove according to any one of claim 1 to 4, is characterized in that,
Multiple described microwave generating apparatus (3) are arranged at the side of described body of heater (1); Or
Multiple described microwave generating apparatus (3) is arranged symmetrically in the both sides of described body of heater (1) along the center line of body of heater (1), and described microwave source (301) is arranged vertically on relative two described microwave generating apparatus (3) mutually with the direction of engagement of described waveguide (302).
6. microwave vacuum gas pressure sintering stove according to any one of claim 1 to 4, is characterized in that,
Described body of heater (1) comprises bladder layer for transmitting chamber pressure, be sheathed on the outer metal bearing course for pressure-bearing and isolation microwave of described bladder layer and be sheathed on the outer cooling jacket cooled for described body of heater (1) of described metal bearing course;
Described cooling jacket adopts water-cooled or air cooling;
Described metal bearing course adopts high strength stainless steel layer or alloy-layer;
Described bladder layer adopts at least one in polytetrafluoroethylene floor, perfluoroalkoxy resin layer, modified Teflon layer, polyether-ether-ketone resin layer.
7. microwave vacuum gas pressure sintering stove according to any one of claim 1 to 4, is characterized in that,
Described insulation box body (2) profile is cuboid, cylinder or cone; And/or
The box body center of described insulation box body (2) arranges the sintering zone (17) being used for material sintering; And/or
The wall body of described insulation box body (2) adopts the ceramic fibre wall body of refractoriness >=1700 DEG C; And/or
The bottom of described insulation box body (2) is provided with for from being incubated box body (2) described in bottom support and driving the rotary support mechanism (20) that described insulation box body (2) rotates,
Described rotary support mechanism (20) comprise be fitted in described insulation box body (2) bottom base plate, to be supported on bottom base plate and to extend to the outer bull stick of described body of heater (1) and be located at the drive motors of described body of heater (1) outward and for driving bull stick to rotate
Magnet fluid sealing is adopted between described bull stick and described body of heater (1).
8. microwave vacuum gas pressure sintering stove according to any one of claim 1 to 4, is characterized in that,
The opening upper cover of described body of heater (1) has fire door (7),
Described fire door (7) is encapsulated on described body of heater (1) by the U-shaped flange (8) with U-shaped engaging groove (10),
Cyclic spring pad (9) is also provided with between described body of heater (1) and described fire door (7),
Described cyclic spring pad (9) is arranged in described U-shaped engaging groove (10).
9. microwave vacuum gas pressure sintering stove according to any one of claim 1 to 4, is characterized in that,
Described body of heater (1) is provided with the air inlet pipe (12) of band electrically operated valve (11), the escape pipe (13) being with electrically operated valve (11), pressure tester (14), temperature measuring equipment (15) and explosion-protection equipment;
Described body of heater (1) peripheral hardware has the controller controlling described electrically operated valve (11) opening and closing,
Described controller connects described temperature measuring equipment (15) and described pressure tester (14).
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