CN203249488U - Microwave vacuum device - Google Patents

Microwave vacuum device Download PDF

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Publication number
CN203249488U
CN203249488U CN 201320201697 CN201320201697U CN203249488U CN 203249488 U CN203249488 U CN 203249488U CN 201320201697 CN201320201697 CN 201320201697 CN 201320201697 U CN201320201697 U CN 201320201697U CN 203249488 U CN203249488 U CN 203249488U
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CN
China
Prior art keywords
dieelctric sheet
microwave
cavity
little
vacuum device
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Expired - Fee Related
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CN 201320201697
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Chinese (zh)
Inventor
刘元月
李蔚霞
郭凯雄
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HUNAN YANGDONG MICROWAVE TECHNOLOGY Co Ltd
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HUNAN YANGDONG MICROWAVE TECHNOLOGY Co Ltd
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Priority to CN 201320201697 priority Critical patent/CN203249488U/en
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Publication of CN203249488U publication Critical patent/CN203249488U/en
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Abstract

The utility model discloses a microwave vacuum device. The microwave vacuum device comprises a microwave generator, a cavity and a waveguide tube arranged between the microwave generator and the cavity. The microwave vacuum device further comprises a large medium slice and a small medium slice, wherein the large medium slice is arranged inside the cavity in a sealing mode, the small medium slice is arranged between the waveguide tube and the microwave generator in a sealing mode, the area of the large medium slice is larger than that of the small medium slice, a first sealing space is formed between the large medium slice and the small medium slice, and the air pressure of the first sealing space is smaller than 10Pa or larger than 100Pa. The microwave vacuum device can well prevent the phenomenon of microwave fire striking.

Description

A kind of microwave vacuum device
Technical field
The utility model relates to microwave vacuum technology technical field, relates in particular to a kind of microwave vacuum device.
Background technology
The vacuum plant that uses microwave to heat is arranged in the market, be a kind of from inside to outside, rapidly and uniform body mode of heating.Need the object of heating under the effect of microwave electromagnetic energy, the kinetic energy of material internal molecule or ion increases, and sintering activating energy is reduced, and diffusion coefficient improves, and can carry out the low temperature Fast Sintering, and just oneself is sintered to make crystal grain have little time to grow up.When being used for the sintering of carbide alloy such as the microwave vacuum kiln that uses microwave to heat, can make hardness, bending strength and the coercive force of carbide alloy all obtain raising.
The microwave vacuum device comprise microwave generator, cavity and be arranged on microwave generator and cavity between waveguide, generally speaking, the vacuum seal face of microwave vacuum kiln is in waveguide, this vacuum seal face only has one, what vacuum seal was subject to facing to a side of microwave generator so is atmospheric pressure, probably about 101.325KPa (101.325KPa is the standard atmospheric pressure value), and what be subject to towards a side of cavity is the pressure of inside cavity.
The microwave spark phenomenon easily appears in the microwave vacuum device.The plasma one that the microwave sparking causes is to have consumed microwave energy, the 2nd, and plasma is equivalent to conductor, plays the effect of microwave reflection, and the result can not be imported in the stove microwave energy into, and waveguide, magnetron seriously generate heat, and do not have the effect that adds thermal material.
The relation that typical disruptive field intensity and pressure in the air are found in scientific research as shown in Figure 3, Fig. 3 is the graph of a relation of typical disruptive field intensity and pressure in the air.As can see from Figure 3, minimum to air breakdown field intensity E between the 100Pa at 10Pa, microwave is easy to occur punch-through so, microwave spark phenomenon namely, general microwave vacuum kiln operating pressure just at 10Pa between the 100Pa, vacuum seal is that the microwave spark phenomenon very easily occurs facing to that side of cavity so.
Therefore, how providing a kind of microwave vacuum device, to prevent the generation of microwave spark phenomenon, is the technical problem that present those skilled in the art need to be resolved hurrily.
The utility model content
In view of this, the purpose of this utility model is to provide a kind of microwave vacuum device, to prevent the generation of microwave spark phenomenon.
In order to achieve the above object, the utility model provides following technical scheme:
A kind of microwave vacuum device, comprise microwave generator, cavity and be arranged on waveguide between described microwave generator and the cavity, also comprise large dieelctric sheet and little dieelctric sheet, described large dieelctric sheet sealing is arranged in the described cavity, described little dieelctric sheet sealing is arranged between described waveguide and the described microwave generator, wherein, the area of described large dieelctric sheet forms the first seal cavity greater than the area of described little dieelctric sheet between described large dieelctric sheet and the described little dieelctric sheet.
Preferably, be provided with the disk window between above-mentioned waveguide and the described microwave generator, described little dieelctric sheet is arranged in the described disk window.
Preferably, above-mentioned large dieelctric sheet and/or described little dieelctric sheet are quartz plate or polyfluortetraethylene plate or ceramic wafer.
Preferably, above-mentioned large dieelctric sheet and/or described little dieelctric sheet are flat board or arc.
Preferably, be provided with the first barometric control unit between above-mentioned little dieelctric sheet and the described large dieelctric sheet.
Preferably, above-mentioned the first barometric control unit is vavuum pump.
Preferably, the first barometric control unit described above has the first on-off switch with the channel setting that described the first seal cavity is communicated with.
Preferably, form the second seal cavity between above-mentioned large dieelctric sheet and the described cavity, described the second seal cavity is provided with vacuum plant, and described vacuum plant is vavuum pump.
Preferably, be provided with excitation cavity between above-mentioned little dieelctric sheet and the described microwave generator.
The microwave vacuum device that the utility model provides, comprise microwave generator, cavity and be arranged on waveguide between described microwave generator and the cavity, also comprise large dieelctric sheet and little dieelctric sheet, described large dieelctric sheet sealing is arranged in the described cavity, described little dieelctric sheet sealing is arranged between described waveguide and the described microwave generator, wherein, the area of described large dieelctric sheet is greater than the area of described little dieelctric sheet, and the air pressure between described large dieelctric sheet and the described little dieelctric sheet is less than 10Pa or greater than 100Pa.
Wherein, large dieelctric sheet, waveguide and little dieelctric sheet three form the space of a sealing, i.e. the first seal cavity, large dieelctric sheet and cavity form another seal cavity, i.e. the second seal cavity, air pressure between large dieelctric sheet and the little dieelctric sheet is less than 10Pa or greater than 100Pa, namely the air pressure of the first seal cavity is less than 10Pa or greater than 100Pa, little dieelctric sheet is atmospheric pressure towards a side of microwave generator, probably about 101.325KPa, when air pressure during less than 10Pa or greater than 100Pa, air breakdown field intensity E increases on the contrary, the microwave sparking can not occur in the first seal cavity so, although and large dieelctric sheet towards the air pressure of a side of cavity be 10Pa between the 100Pa, the area of dieelctric sheet is greater than the area of little dieelctric sheet greatly, its microwave field density is less, the microwave sparking so can not occur yet, thereby has prevented the generation of microwave spark phenomenon.
Description of drawings
In order to be illustrated more clearly in the utility model embodiment or technical scheme of the prior art, the below will do to introduce simply to the accompanying drawing of required use in embodiment or the description of the Prior Art, apparently, accompanying drawing in the following describes is embodiment more of the present utility model, for those of ordinary skills, under the prerequisite of not paying creative work, can also obtain according to these accompanying drawings other accompanying drawing.
The structural representation of the first specific embodiment of the microwave vacuum device that Fig. 1 provides for the utility model embodiment;
The structural representation of the second specific embodiment of the microwave vacuum device that Fig. 2 provides for the utility model embodiment;
Fig. 3 is the graph of a relation of typical disruptive field intensity and pressure in the air.
Among upper Fig. 1-3:
Microwave generator 1, excitation cavity 2, little dieelctric sheet 3, waveguide 4, large dieelctric sheet 5, add thermal material 6, cavity 7, the first on-off switch 8, the second on-off switch 9, vavuum pump 10.
The specific embodiment
The utility model embodiment provides a kind of microwave vacuum device, to prevent the generation of microwave spark phenomenon.
For the purpose, technical scheme and the advantage that make the utility model embodiment clearer, below in conjunction with the accompanying drawing among the utility model embodiment, technical scheme among the utility model embodiment is clearly and completely described, obviously, described embodiment is the utility model part embodiment, rather than whole embodiment.Based on the embodiment in the utility model, those of ordinary skills are not making the every other embodiment that obtains under the creative work prerequisite, all belong to the scope of the utility model protection.
Please refer to Fig. 1 and Fig. 2, the structural representation of the first specific embodiment of the microwave vacuum device that Fig. 1 provides for the utility model embodiment; The structural representation of the second specific embodiment of the microwave vacuum device that Fig. 2 provides for the utility model embodiment.
The microwave vacuum device that the utility model embodiment provides, comprise microwave generator 1, cavity 7 and be arranged on microwave generator 1 and cavity 7 between waveguide 4, also comprise large dieelctric sheet 5 and little dieelctric sheet 3, large dieelctric sheet 5 sealings are arranged in the cavity 7, little dieelctric sheet 3 sealings are arranged between waveguide 4 and the microwave generator 1, wherein, the area of large dieelctric sheet 5 is greater than the area of little dieelctric sheet 3, and the air pressure between large dieelctric sheet 5 and the little dieelctric sheet 3 is less than 10Pa or greater than 100Pa.
Wherein, large dieelctric sheet 5, waveguide 4 and little dieelctric sheet 3 threes form the space of a sealing, i.e. the first seal cavity, large dieelctric sheet 5 forms another seal cavity with cavity 7, i.e. the second seal cavity, air pressure between large dieelctric sheet 5 and the little dieelctric sheet 3 is less than 10Pa or greater than 100Pa, namely the air pressure of the first seal cavity is less than 10Pa or greater than 100Pa, little dieelctric sheet 3 is atmospheric pressure towards a side of microwave generator 1, probably about 101.325KPa, when air pressure during less than 10Pa or greater than 100Pa, air breakdown field intensity E increases on the contrary, the microwave sparking can not occur towards a side of microwave generator 1 in so little dieelctric sheet 3, and little dieelctric sheet 3 towards the air pressure of a side of waveguide 4 less than 10Pa or greater than 100Pa, the microwave sparking so can not occur yet, large dieelctric sheet 5 towards the air pressure of a side of waveguide 4 less than 10Pa or greater than 100Pa, the microwave sparking can not occur in the first seal cavity so, although and large dieelctric sheet 5 is that 10Pa is between the 100Pa towards the air pressure of a side of cavity 7, but the area of large dieelctric sheet 5 is greater than the area of little dieelctric sheet 3, its microwave field density is less, the microwave sparking so can not occur yet, thereby has prevented the generation of microwave spark phenomenon.
And, only has a vacuum seal face in the prior art, so this vacuum seal facing to a side of cavity 7 because the insulation material in the cavity 7 and add moisture content in the thermal material 6 and the gaseous volatilization such as colloid, be not easy to accomplish high vacuum, even accomplished high vacuum, the useful composition of material can volatilize during sintering under high vacuum, is unfavorable on the contrary sintering quality, and drawback is a lot.
Concrete, being provided with disk window 11 between waveguide 4 and the microwave generator 1, little dieelctric sheet 3 is arranged in the disk window 11, and the cross-sectional area of disk window 11 is greater than the cross-sectional area of waveguide 4.As shown in Figure 2, little dieelctric sheet 3 is installed in the disk window 11, and the cross-sectional area of disk window 11 is greater than the cross-sectional area of waveguide 4, and this structure can improve the microwave conveying capacity.
Concrete, large dieelctric sheet 5 can be quartz plate, polyfluortetraethylene plate or ceramic wafer, certainly, little dieelctric sheet 3 also can be quartz plate, polyfluortetraethylene plate or ceramic wafer.Quartz plate, polyfluortetraethylene plate and ceramic wafer can be good at realizing microwave wave transparent and sealing air, and can bearing certain pressure.
Concrete, large dieelctric sheet 5 and/or little dieelctric sheet 3 are flat board or arc, the utility model is not specifically limited the shape of large dieelctric sheet 5 and/or little dieelctric sheet 3.
Concrete, forming the first seal cavity between little dieelctric sheet 3 and the large dieelctric sheet 5, the first seal cavity is provided with the first barometric control unit.During use, reconcile air pressure in the first seal cavity by the first barometric control unit, because its air pressure is less than 10Pa or greater than 100Pa, the first barometric control unit can be vavuum pump 10 so, make the first seal cavity form high vacuum, be that its air pressure is less than 0.001Pa, perhaps its air pressure inside is forced down than atmosphere, can both better prevent the generation of microwave spark phenomenon, the first barometric control unit also can be air compressor, so that the air pressure in the first seal cavity is higher than atmospheric pressure, also can realize better preventing the generation of microwave spark phenomenon.
Large dieelctric sheet 5 is the pressure reduction that bears the first seal cavity and the second seal cavity, when the air pressure in the first seal cavity forces down than atmosphere, has also reduced the pressure that large dieelctric sheet 5 bears simultaneously.So large dieelctric sheet 5 does not need thicker material, and it is also easy to install, and adopts bonding get final product of heatproof glue fixedly the time, can certainly adopt the screw threads for fastening mode to connect, and little dieelctric sheet 3 is because area is little, and the cost of material is low, and installation is also than being easier to.
Concrete, the channel setting that the first barometric control unit is communicated with the first seal cavity has the first on-off switch 8, in order to better regulate the air pressure of the first seal cavity inside.
Concrete, forming the second seal cavity between large dieelctric sheet 5 and the cavity 7, the second seal cavity is provided with vacuum plant, and vacuum plant is vavuum pump.So just can better control the air pressure in the second seal cavity.Certainly, on vacuum plant and the passage that the second seal cavity is communicated with the second on-off switch 9 can be set also, convenient control to the air pressure in the second seal cavity, simultaneously, when the vacuum device is vavuum pump, if the first barometric control unit also is vavuum pump 10, both can share vavuum pump 10 so, to reduce equipment cost.
Concrete, be provided with excitation cavity 2 between little dieelctric sheet and the microwave generator, the microwave better effects if.
To the above-mentioned explanation of the disclosed embodiments, make this area professional and technical personnel can realize or use the utility model.Multiple modification to these embodiment will be apparent concerning those skilled in the art, and General Principle as defined herein can be in the situation that do not break away from spirit or scope of the present utility model, in other embodiments realization.Therefore, the utility model will can not be restricted to these embodiment shown in this article, but will meet the widest scope consistent with principle disclosed herein and features of novelty.

Claims (9)

1. microwave vacuum device, comprise microwave generator (1), cavity (7) and be arranged on described microwave generator (1) and described cavity (7) between waveguide (4), it is characterized in that, also comprise large dieelctric sheet (5) and little dieelctric sheet (3), described large dieelctric sheet (5) sealing is arranged in the described cavity (7), described little dieelctric sheet (3) sealing is arranged between described waveguide (4) and the described microwave generator (1), wherein
The area of described large dieelctric sheet (5) forms the first seal cavity greater than the area of described little dieelctric sheet (3) between described large dieelctric sheet (5) and the described little dieelctric sheet (3).
2. microwave vacuum device according to claim 1 is characterized in that, is provided with disk window (11) between described waveguide (4) and the described microwave generator (1), and described little dieelctric sheet (3) is arranged in the described disk window (11).
3. microwave vacuum device according to claim 1 is characterized in that, described large dieelctric sheet (5) and/or described little dieelctric sheet (3) are quartz plate or polyfluortetraethylene plate or ceramic wafer.
4. microwave vacuum device according to claim 1 is characterized in that, described large dieelctric sheet (5) and/or described little dieelctric sheet (3) are flat board or arc.
5. microwave vacuum device according to claim 1 is characterized in that, is provided with the first barometric control unit between described little dieelctric sheet (3) and the described large dieelctric sheet (5).
6. microwave vacuum device according to claim 5 is characterized in that, described the first barometric control unit is vavuum pump (10).
7. microwave vacuum device according to claim 5 is characterized in that, the channel setting that described the first barometric control unit is communicated with described the first seal cavity has the first on-off switch (8).
8. 1 described microwave vacuum device as requested is characterized in that, forms the second seal cavity between described large dieelctric sheet and the described cavity, and described the second seal cavity is provided with vacuum plant, and described vacuum plant is vavuum pump.
9. 1 described microwave vacuum device as requested is characterized in that, is provided with excitation cavity (2) between described little dieelctric sheet (3) and the described microwave generator (1).
CN 201320201697 2013-04-19 2013-04-19 Microwave vacuum device Expired - Fee Related CN203249488U (en)

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Application Number Priority Date Filing Date Title
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Application Number Priority Date Filing Date Title
CN 201320201697 CN203249488U (en) 2013-04-19 2013-04-19 Microwave vacuum device

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104279860A (en) * 2014-09-16 2015-01-14 湖南华冶微波科技有限公司 Microwave vacuum air pressure sintering furnace
CN106152780A (en) * 2016-06-30 2016-11-23 陕西友力实业有限公司 Reaction unit smelted by a kind of microwave heating
CN108516843A (en) * 2018-06-12 2018-09-11 胡俊旭 A kind of microwave sintering method and more gas part microwave agglomerating furnaces
CN112122304A (en) * 2020-08-24 2020-12-25 北京航天新风机械设备有限责任公司 Electric and microwave composite thermal cracking device and method

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104279860A (en) * 2014-09-16 2015-01-14 湖南华冶微波科技有限公司 Microwave vacuum air pressure sintering furnace
CN104279860B (en) * 2014-09-16 2016-01-20 湖南华冶微波科技有限公司 Microwave vacuum gas pressure sintering stove
CN106152780A (en) * 2016-06-30 2016-11-23 陕西友力实业有限公司 Reaction unit smelted by a kind of microwave heating
CN108516843A (en) * 2018-06-12 2018-09-11 胡俊旭 A kind of microwave sintering method and more gas part microwave agglomerating furnaces
CN108516843B (en) * 2018-06-12 2023-05-26 株洲聚润合微波工业炉有限公司 Microwave sintering method and multi-gas microwave sintering furnace
CN112122304A (en) * 2020-08-24 2020-12-25 北京航天新风机械设备有限责任公司 Electric and microwave composite thermal cracking device and method

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C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20131023

Termination date: 20150419

EXPY Termination of patent right or utility model