CN204957624U - Electronic type actuator and vibration excitation device - Google Patents

Abstract

The utility model provides an electronic type actuator, this electronic type actuator includes: the fixed part of tube -shape, accomodate in the section of thick bamboo of fixed part, at the epaxial mobilizable movable part of a section of thick bamboo, and the elastic mechanism of setting between fixed part and movable part. Still provide a vibration excitation device, it includes: the shaking table, the horizontal actuator of drive shaking table on the horizontal direction, with the vertical actuator of drive shaking table in the vertical direction, horizontal actuator is for to configure section of thick bamboo axle towards the horizontal direction into electronic type actuator. According to the utility model discloses an embodiment can reduce the load of electronic type actuator, makes the movable part lightweight, improves drive properties.

Description

Power type actuator and exciting device

Technical field

The utility model relates to power type actuator and exciting device.

Background technology

There will be a known at middle power type actuators used such as experimental set-ups.Power type actuator is for being called the one in the linear motor of voice coil motor (VCM:VoiceCoilMotor).The power type actuator of vibration test is described in patent documentation 1.The existing power type actuator recorded in patent documentation 1 is configured to, and the propulsive effort produced by voice coil motor mechanism bears the whole load putting on actuator.

Prior art document

Patent documentation

Patent documentation 1: Japanese Unexamined Patent Publication 6-323950 publication

Utility model content

The technical matters that utility model will solve

When the object of the power type actuator counterweight in vertical by patent documentation 1 carries out exciting, power type actuator is not only used for making in the live load of (comprising the movable part of object and power type actuator, the joggling table) movements such as object in generation, and also consumes more electric power in the static weight producing the weight for supporting object.Therefore need to use high-capacity coil., there is the weight that increases movable part and reduce the problem of exciting performance in its result.

The utility model completes in view of the above problems, its object is to the load by reducing power type actuator and makes movable part lightweight, improves driveability.

For the technical scheme of dealing with problems

According to the utility model one embodiment, provide a kind of power type actuator, it comprises: the fixed part of tubular; Be accommodated in the cylinder of fixed part, moveable movable part on cylinder axle; And the elastic mechanism be arranged between fixed part and movable part.

In above-mentioned power type actuator, can be following structure, movable part be flexibly remained on the center position on cylinder axis direction by elastic mechanism relative to fixed part.

In above-mentioned power type actuator, can be following structure, elastic mechanism comprises: the fixture construction portion being fixed on fixed part; Be fixed on the movable formations of movable part; And the elastic element be arranged between fixture construction portion and movable formations, elastic element has been applied in and has preloaded.

In above-mentioned power type actuator, can be following structure, elastic element comprises air bellow or coil spring.

In above-mentioned power type actuator, can be following structure, fixture construction portion has: towards the first stationary plane of cylinder axis direction; And second stationary plane reverse with the first stationary plane, movable formations has: first movable surface relative with the first stationary plane; And second movable surface relative with the second stationary plane, elastic element comprises: be clipped in the first elastic element between the first stationary plane and the first movable surface; And the second elastic element be clipped between the second stationary plane and the second movable surface.

In above-mentioned power type actuator, can be following structure, fixture construction portion comprises the dividing plate being fixed on fixed part, and movable formations comprises: first pressing plate relative with dividing plate; With second pressing plate relative with dividing plate in the opposition side of the first pressing plate, first elastic element is arranged between dividing plate and the first pressing plate, second elastic element is arranged between dividing plate and the second pressing plate, fixture construction portion comprises the bar being fixed on movable part, be provided with the through hole passed for bar at dividing plate, the first pressing plate is the first flange part being formed at bar.

In above-mentioned power type actuator, can be following structure, bar has external thread part, and the second pressing plate is the second flange part being formed at the nut engaged with external thread part.

In above-mentioned power type actuator, can be following structure, the first elastic element and the second elastic element be coil spring.

According to the utility model one embodiment, provide a kind of exciting device, it comprises: joggling table; Drive the horizontal actuator of joggling table in the horizontal direction; With the vertical actuator driving joggling table in vertical, horizontal actuator is cylinder axle is configured to the described power type actuator towards horizontal direction.

In above-mentioned exciting device, can be following structure, vertical actuator comprises: the fixed part of tubular; Movable part, its part is accommodated in the hollow bulb of fixed part, and the axis direction of fixed part is driven reciprocally; Support the air bellow of movable part from below.

The effect of utility model

According to an embodiment of the present utility model, the load of power type actuator can be reduced, make movable part lightweight, improve driveability.

Accompanying drawing explanation

Fig. 1 is the birds-eye view of the exciting device of the utility model embodiment.

Fig. 2 is the lateral plan of the exciting device of the utility model embodiment.

Fig. 3 is the lateral plan of the exciting device of the utility model embodiment.

Fig. 4 is the birds-eye view of the Z axis exciting unit of the utility model embodiment.

Fig. 5 is the lateral plan of the Z axis exciting unit of the utility model embodiment.

Fig. 6 is the lateral plan of the Z axis exciting unit of the utility model embodiment.

Fig. 7 is the birds-eye view of the X-axis exciting unit of the utility model embodiment.

Fig. 8 is the lateral plan of the X-axis exciting unit of the utility model embodiment.

Fig. 9 is the front elevation of the X-axis exciting unit of the utility model embodiment.

Figure 10 is the lateral plan of the vertical drive power type actuator of the utility model embodiment.

Figure 11 is the front elevation of the vertical drive power type actuator of the utility model embodiment.

Figure 12 is the longitudinal section of the vertical drive power type actuator of the utility model embodiment.

Figure 13 is the longitudinal section near the neutral spring device of the horizontal drive power type actuator amplifying the utility model embodiment.

Figure 14 is the External view of the intersection guides of the utility model embodiment.

Figure 15 is the birds-eye view of the A type linear guide device of the utility model embodiment.

Figure 16 is the lateral plan of the A type linear guide device of the utility model embodiment.

Figure 17 is the front elevation of the A type linear guide device of the utility model embodiment.

Figure 18 is the birds-eye view of the Type B linear guide device of the utility model embodiment.

Figure 19 is the lateral plan of the Type B linear guide device of the utility model embodiment.

Figure 20 is the front elevation of the Type B linear guide device of the utility model embodiment.

Figure 21 illustrates the track configurations figure being installed on the top board of relaying framework.

Figure 22 is the cross sectional drawing of cylindrical bearing formula linear guide device.

Figure 23 is the I-I section drawing of Figure 22.

Figure 24 represents the roller of linear guide device and the configuration relation figure of holding element.

Figure 25 amplifies the birds-eye view near joggling table.

Figure 26 is the figure near the spring device of the bearing unit amplifying X-axis exciting unit.

Figure 27 is the diagram of block of the driving control system of the exciting device of the utility model embodiment.

Figure 28 is the cross sectional drawing of ball bearing type linear guide device.

Figure 29 is the birds-eye view near the joggling table of the exciting device amplifying the utility model second embodiment.

Figure 30 is the lateral plan near the joggling table of the exciting device amplifying the utility model second embodiment.

Figure 31 is the movable part External view of the Z axis exciting unit of the utility model second embodiment.

Figure 32 is the relaying framework External view of the utility model second embodiment.

Figure 33 is the block diagram of the Y-axis track of the XY slide block of the utility model second embodiment.

Figure 34 is the birds-eye view near the joggling table of the exciting device amplifying the utility model the 3rd embodiment.

Figure 35 is the birds-eye view near the joggling table of the exciting device amplifying the utility model the 4th embodiment.

Figure 36 is the lateral plan near the joggling table of the exciting device amplifying the utility model the 4th embodiment.

Figure 37 is the lateral plan of the exciting device of the utility model the 5th embodiment.

Figure 38 is the lateral plan of the exciting device of the utility model the 5th embodiment.

Figure 39 is the birds-eye view of the exciting device of the utility model the 6th embodiment.

Figure 40 is the lateral plan of the exciting device of the utility model the 6th embodiment.

Detailed description of the invention

Hereinafter, with reference to the accompanying drawings of embodiment of the present utility model.

In addition, the symbol that key element annotation just same or corresponding in each figure is same or corresponding, and the repetitive description thereof will be omitted.

< first embodiment >

Fig. 1 is the birds-eye view of the mechanism part 10 of the power type 3 axle exciting device 1 (hereinafter referred to as " exciting device 1 ") of the utility model first embodiment.In the following description, left and right directions in Fig. 1 is set to X-direction (right direction being set to X-axis positive dirction), above-below direction is set to Y direction (lower direction is set to Y-axis positive dirction), the direction perpendicular to paper is set to Z-direction (being set to Z axis positive dirction by from paper rear side towards the direction of face side).In addition, Z-direction is vertical, and X-axis and Y direction are horizontal directions.In addition, Fig. 2 and Fig. 3 is the lateral plan of exciting device 1 respectively.In addition, Fig. 2 is the figure watching exciting device 1 towards Y-axis negative direction (the upper direction in Fig. 1), Fig. 3 is the figure watching exciting device 1 towards X-axis negative direction (left direction in Fig. 1).

As shown in Figure 1, the mechanism part 10 of exciting device 1 comprises: the joggling table 400 of the fixing measured body (not shown) in surface thereon; Joggling table 400 is carried out respectively in X-axis, Y-axis and Z-direction to 3 exciting unit (X-axis exciting unit 100, Y-axis exciting unit 200 and Z axis exciting unit 300) of exciting; With the device pedestal 500 installing each exciting unit 100,200 and 300.

Fig. 4 is the birds-eye view of Z axis exciting unit 300, Fig. 5 and Fig. 6 is the lateral plan of Z axis exciting unit 300.In addition, Fig. 5 is that Fig. 6 is the figure watching Z axis exciting unit 300 towards X-axis negative direction towards the figure of Y-axis negative direction viewing Z axis exciting unit 300.

In addition, Fig. 7, Fig. 8 and Fig. 9 are the birds-eye view of X-axis exciting unit 100, lateral plan and front elevation respectively.In addition, Fig. 7, Fig. 8 and Fig. 9 are towards the figure of Z axis negative direction, Y-axis negative direction and X-axis negative direction viewing X-axis exciting unit 100 respectively.

Each exciting unit 100,200 and 300 is the direct acting exciting unit comprising power type actuator (voice coil motor) respectively.Joggling table 400 and each exciting unit 100,200 and 300 link via the diaxon slide block (YZ slide block 160, ZX slide block 260 and XY slide block 360) as slip connect mechanism respectively.Exciting device 1 uses each exciting unit 100,200 and 300, carries out exciting to joggling table 400 and the measured body be fixed on joggling table 400 on orthogonal 3 direction of principal axis.

Figure 27 is the diagram of block of the schematic configuration of the driving control system 1a representing exciting device 1.Driving control system 1a comprises: the control part 20 controlling whole device action; The measurement unit 30 of the vibration of measurement joggling table 400; Control part 20 is supplied to the power supply unit 40 of electric power; And carry out the interface portion 50 of input and output with outside.

Interface portion 50 comprise such as with carry out between user input and output user interface, for be connected with various networks such as LAN (local area network) network interface, for the USB (USB) that is connected with external mechanical and with more than in the various communication interfaces such as GPIB (general purpose interface bus).In addition, user interface such as comprises more than in the various input/output units such as the various indicating device such as various display equipment, mouse or touch pad, Touch Screen, video camera, chopping machine, scanner, buzzer phone, loud speaker, microphone, storage card reader such as various operating switch, telltale, LCD (Liquid Crystal Display).

Measurement unit 30 comprises 3 axis vibration sensor (3 shaft vibration pick-up) 32 being installed on joggling table 400, and the signal (such as speed signal or acceleration signal) 3 axis vibration sensor 32 exported amplifies and is sent to control part 20 after digital conversion.In addition, the vibration of 3 axis vibration sensor 32 independent detection X-axis, Y-axis and Z-direction.In addition, measurement unit 30 calculates the various parameters (such as, speed, acceleration/accel, amplitude, power spectrum density etc.) of the vibrational state representing joggling table 400 according to the signal of 3 axis vibration sensor 32, and is sent to control part 20.Control part 20 is according to the exciting waveform inputted through interface portion 50 and the signal from measurement unit 30, control inputs, to the alternating current size of drive coil (aftermentioned) of each exciting unit 100,200 and 300 and frequency, can make joggling table 400 vibrate with the amplitude of hope and frequency.

Then, the structure of each exciting unit 100,200 and 300 is described.As aftermentioned, X-axis exciting unit 100 and Y-axis exciting unit 200 comprise horizontal drive power type actuator (hereinafter referred to as " horizontal actuator ") 100A and 200A respectively.In addition, Z axis exciting unit 300 comprises vertical driving power type actuator (hereinafter referred to as " vertical actuator ") 300A.

Vertical actuator 300A comprises the air bellow 330 (aftermentioned) of the weight (static weight) for supporting measured body and joggling table.In addition, horizontal actuator 100A and 200A comprises applying respectively makes joggling table return the neutral spring (retracing spring of the recuperability of center position (initial point, reference position), pull back spring, neutralspring) mechanism 130,230 (aftermentioned).X-axis exciting unit 100 and Y-axis exciting unit 200 are except comprising neutral spring device 130,230 to replace except air bellow 330, identical with the structure of Z axis exciting unit 300, so represent each exciting unit, the structure of Z axis exciting unit 300 is described in detail.

Figure 10 is the lateral plan of vertical actuator 300A, and Figure 11 is its front elevation.In addition, Figure 12 is the longitudinal section of Z axis exciting unit 300 (vertical actuator 300A).Vertical actuator 300A comprises: the fixed part 310 with cylindrical body 312; With the movable part 320 be accommodated in the cylinder of fixed part 310.Movable part 320 can relative to mobile on fixed part 310 in the vertical direction (Z-direction).Movable part 320 comprises: roughly columned main frame 322; Be installed on the drive coil 352 of main frame 322 bottom coaxially.In addition, in the upper end of main frame 322, the relaying framework 324 roughly the same with main frame 322 diameter is installed coaxially.

Drive coil 352 is installed on the lower end of main frame 322 via drive coil holding member 351.It is trapezoidal that main frame 322 forms in the more larger mode of downside external diameter the circular cone that side slowly tilts.In addition, main frame 322 has: the connecting rod 322a extended on center shaft; And the top board 322b to configure with central axis and base plate 322c.Top board 322b and base plate 322c is linked by connecting rod 322a.The through base plate 322c of connecting rod 322a, extends downwards further.In addition, top board 322b is provided with relaying framework 324.

In addition, the inner side magnetic pole 316 with the substantially cylindrical shape of cylindrical body 312 arranged coaxial is fixed with in the inside of the cylindrical body 312 of fixed part 310.Cylindrical body 312 and inner side magnetic pole 316 are formed by magnetic substance.Inner side magnetic pole 316 external diameter less than the internal diameter of drive coil 352, drive coil 352 be configured at inner side the outer peripheral face of magnetic pole 316 and the inner peripheral surface of cylindrical body 312 clip between gap.In addition, having at the cylinder internal fixtion of inner side magnetic pole 316 only can at the bearing 318 of Z-direction bearing connecting rod 322a movably.

Be formed with multiple recess 312b at the inner peripheral surface 312a of cylindrical body 312, in each recess 312b, be accommodated with excitation coil 314.When DC current (exciting current) flow into excitation coil 314, in the position that the inner peripheral surface 312a of cylindrical body 312 is close and relative with the outer peripheral face of inner side magnetic pole 316, the radial direction of cylindrical body 312 produces magnetic field as shown by arrow A.In this condition, when drive current flow into drive coil 352, the direction of principal axis and Z-direction of drive coil 352 produce Lorentz force, thus drive movable part 320 in the Z-axis direction.

In addition, in the cylinder of inner side magnetic pole 316, storage is free gas spring 330.Fixed part 310 is fixed in the lower end of air bellow 330, and upper end is fixed with connecting rod 322a.Air bellow 330 supports main frame 322 from below via connecting rod 322a.That is, air bellow 330 is utilized to support the weight (static weight) of movable part 320, the XY slide block 360 supported by movable part 320, joggling table 400 and measured body.Therefore, by arranging air bellow 330 in Z axis exciting unit 300, do not need the weight (static weight) being supported movable part 320 and joggling table 400 etc. by the propulsive effort (Lorentz force) of Z axis exciting unit 300, need only be provided for the live load that movable part 320 grade is vibrated, the drive current (i.e. power consumption) being therefore supplied to Z axis exciting unit 300 reduces.In addition, owing to decreasing necessary propulsive effort, therefore, it is possible to make drive coil 352 miniaturization, thus the lightweight of movable part 320 is realized, thereby, it is possible to drive Z axis exciting unit 300 with higher frequency.In addition, because do not need the large flip-flop being used for the weight supporting movable part 320 and joggling table 400 etc. to be supplied to drive coil, so power supply unit 40 can adopt small-sized and simple structure.

In addition, when driving the movable part 320 of Z axis exciting unit 300, fixed part 310 also bears large antagonistic force (disturbance force) on axle drive shaft (Z axis) direction.By arranging air bellow 330 between movable part 320 and fixed part 310, the disturbance force transmitted from movable part 320 to fixed part 310 can be relaxed.Thus, the vibration of movable part 320 such as can be prevented via fixed part 310, device pedestal 500 and exciting unit 100,200, transmit to joggling table 400 as noise element.

Herein, the structure of horizontal actuator 100A (Fig. 8) is described.As mentioned above, horizontal actuator 100A except arrange neutral spring device 130 (Figure 13) with replace air bellow 330 (Figure 12) be with the difference of vertical actuator 300A except, other both basic structure is common.In addition, horizontal actuator 200A is also the structure identical with the horizontal actuator 100A of following explanation.The fixed part 110 of horizontal actuator 100A flexibly links with movable part 120 by neutral spring device 130.

Figure 13 is the longitudinal section of the horizontal actuator 100A amplified near neutral spring device 130.Towards the back view of the neutral spring device 130 of X-axis positive dirction viewing in dotted line frame.

Neutral spring device 130 comprises: convex support 131, connecting rod 132, nut 133 and a pair coil spring (compression coil spring) 134,135.The flange part 131a of convex support 131 is fixed on the bottom of fixed part 110.In addition, the top board 131b central authorities of convex support 131 are provided with the through hole 131b1 passed for connecting rod 132.

Connecting rod 132 is configured to extend in the X-axis direction.One end (right-hand member in Figure 13) of connecting rod 132 is provided with flange part 132b, and the front end (left end of Figure 13) via the connecting rod 122a of flange part 132b and movable part 120 links.In addition, be formed with in the other end (left part of Figure 13) of connecting rod 132 the male screw portion 132a engaged with nut 133.

The coil spring 134 of a pair coil spring 134,135 covering connecting rod 132, side is clamped by the flange part of nut 133 and the top board 131b (coil (elastic element) back plate) of convex support 131.The coil spring 135 of the opposing party is clamped by the flange part 132b of top board 131b and connecting rod 132.By tightening nut 133, apply to preload to a pair coil spring 134,135.The position of the recuperability balance of 2 coil springs 134,135 is the center position (or initial point or reference position) of the movable part 120 of horizontal actuator 100A.When movable part 120 leaves from center position, by spring device 130 (being directly, a pair coil spring 134,135), movable part 120 effect is returned to the recuperability in the direction of center position.Thus, movable part 120 always can carry out the round driving to Z-direction using center position as center, eliminate the pendulous problem in position of movable part 120 in driving.

Then, get back to the explanation of vertical braking device 300A, illustrating can at axis direction slidably from the structure of the movable part supporting device 340 on the top of side supporting movable part 320.As shown in Fig. 6 and Figure 12, the movable part supporting device 340 of present embodiment comprises lead-frame 342 and Z axis linear guide device 344.In addition, Z axis linear guide device 344 uses the structure identical with A type linear guide device 364A (Figure 17-Figure 19) described later.Z axis linear guide device 344 comprises Z axis track 344a and Z axis balladeur train 344b.In the side of the main part 324a of relaying framework 324,4 the Z axis track 344a extended in Z-direction are equally spaced installed in the circumferential direction.Specifically, at the X-direction two ends of main part 324a with Y direction two ends are each fixes a Z axis track 344a.

In addition, at the upper surface of fixed part 310 (cylindrical body 312), the inner peripheral surface along cylindrical body 312 (90 ° of intervals) is fixed with 4 lead-frame 342 at equal intervals.The fixed block (also referred to as gusset, corner pieces or L-type support) that lead-frame 342 is is L-shaped with the cross section of rib reinforcement.The Z axis balladeur train 344b engaged with Z axis track 344a is fixed at the erection part 342u of each lead-frame 342.

Z axis balladeur train 344b has rotatable multiple roller 344c (aftermentioned) as rotor, forms the Z axis linear guide device 344 of roller bearing mechanism together with Z axis track 344a.That is, movable part 320 is at the relaying framework 324 on top, by being supported from side the 4 groups of supporting constructions (movable part supporting device 340) formed by lead-frame 342 and Z axis linear guide device 344, can avoid moving in X-axis and Y direction.Thus, prevent movable part 320 from vibrating in X-axis and Y direction and cross-talk occurs.In addition, by using Z axis linear guide device 344, movable part 320 can move smoothly to Z-direction.In addition, as mentioned above, because the bottom of movable part 320 is also only can be supported by bearing 318 in the mode of Z-direction movement, rotate so also can be limited in around X-axis, Y-axis and Z axis, N/R vibration (by controlling to the vibration beyond the motion of going forward side by side of Z-direction) not easily occurs.

In addition, also consider when linking movable part 320 and lead-frame 342 with Z axis linear guide device 344, the lead-frame 342 being fixed on fixed part 310 is installed Z axis track 344a, and supporting is slidably installed on the structure of the Z axis balladeur train 344b of movable part 320 on Z axis track 344a.But present embodiment in contrast, installs Z axis track 344a at movable part 320, installs Z axis balladeur train 344b in lead-frame 342.By adopting this installation constitution, N/R can be suppressed to vibrate.Because Z axis track 344a is more lightweight than Z axis balladeur train 344b, and (therefore the size on driving direction (Z-direction) is grown, the quality of per unit length is little), and mass distribution is in the driven direction even, so when movable part 320 fixes Z axis track 344a, the variation of mass distribution during driving Z axis exciting unit 300 is little, therefore, it is possible to suppress the vibration produced because mass distribution variation.In addition, because Z axis track 344a lower than the center of gravity of Z axis balladeur train 344b (namely short to the distance of center of gravity from installation surface), so moment of inertia is little when drawer at movable side fixes Z axis track 344a.Therefore, easily make the resonance frequency of fixed part 310 high more than exciting frequency band (such as 0 ~ 100Hz) by this structure, can suppress because resonance causes exciting precision to reduce.

Then, the structure of the XY slide block 360 linking Z axis exciting unit 300 and joggling table 400 is described.As shown in Figs. 4-6, the XY slide block 360 of present embodiment comprises 4 groups of intersections guides (hreinafter referred to as " intersection guides ") 364.

Figure 14 represents the External view of intersection guides 364.The guides 364 that intersects makes each balladeur train overlap fix A type linear guide device 364A described later and Type B linear guide device 364B in the mode that movable direction is orthogonal.

Figure 15 to 17 figure represents the External view of A type linear guide device 364A.Figure 15, Figure 16 and Figure 17 are the birds-eye view of A type linear guide device 364A, lateral plan (from the figure of downside viewing in Figure 15) and front elevation (figure watched from left side Figure 15) respectively.A type linear guide device 364A comprises track 364Aa and balladeur train 364Ab.

In addition, Figure 18 to 20 figure represents the External view of Type B linear guide device 364B.Figure 18, Figure 19, Figure 20 are the birds-eye view of Type B linear guide device 364B, lateral plan (from the figure of downside viewing in Figure 18) and front elevation (figure watched from left side Figure 18) respectively.Type B linear guide device 364B comprises track 364Ba and balladeur train 364Bb.

A type linear guide device 364A is provided with 4 and fixes balladeur train mounting hole (hereinafter referred to as " the mounting hole ") 364Ab3 using screw as bolt at 4 angles of the balladeur train upper surface of balladeur train 364Ab.4 mounting hole 364Ab3 are formed as each summit of its line of centers by the square SqA (Figure 15 represents with long and short dash line) of balladeur train upper surface.

In addition, Type B linear guide device 364B is provided with 4 and fixes the balladeur train mounting hole 364Bb3 using screw as bolt at 4 angles of the balladeur train upper surface of balladeur train 364Bb.4 mounting hole 364Bb3 are formed as each summit of its line of centers by the square SqB (Figure 18 represents with long and short dash line) of balladeur train upper surface.

In addition, the interval (that is, the length of side of square SqA) of the interval (that is, the length of side of square SqB) forming mounting hole 364Bb3 and the mounting hole 364Ab3 forming A type linear guide device 364A unanimously.Thus, even if A type linear guide device 364A is overlapping on movable direction upper limit of variation 90 degree ground with Type B linear guide device 364B, each 4 mounting hole 364Bb3 are consistent with the position of mounting hole 364Ab3, can link balladeur train 364Bb and balladeur train 364Ab by 4 support bolts.In addition, because using the mounting hole 364Ab3 of balladeur train 364Ab as screw, and using the mounting hole 364Bb3 of balladeur train 364Bb as cut hole, so just balladeur train 364Ab and balladeur train 364Bb need not directly can be linked via coupling plate.Thereby, it is possible to make intersection guides 364 miniaturization and lightweight.In addition, make intersection guides 364 miniaturization by omitting coupling plate, the rigidity of intersection guides 364 improves (namely characteristic oscillation number is high), and exciting performance improves.Specifically, the little exciting of vibrating noise can be realized at higher frequencies.In addition, the electric power that exciting intersects needed for guides (that is, the driving of mechanism part 10) can also be reduced

In addition, notch part 364Ab2 and 364Bb2 of L-shaped is formed respectively at 4 angles of the balladeur train upper surface of balladeur train 364Ab and balladeur train 364Bb.In addition, in the movable direction central authorities of balladeur train 364Ab and balladeur train 364Bb, notch part 364Ab1 and 364Bb1 (in figure dash area) of U-shaped is formed with in Width (above-below direction of Figure 15, Figure 18) both sides.In other words, remove each 4 flange part 364Ab4 and 364Bb4 for the formation of mounting hole 364Ab3 and 364Bb3, the edge, Width both sides of balladeur train 364Ab and balladeur train 364Bb is eliminated.Thus, the lightweight of balladeur train 364Ab and balladeur train 364Bb is realized.

Because the guides 364 that intersects is formed by intersecting special small-sized of guides and the A type linear guide device 364A of light weight and Type B linear guide device 364B as mentioned above, thus become small-sized, light weight and high rigidity.Thus, the guides 364 that intersects can realize the XY slide block (slip connect mechanism) that resonance frequency is high, vibrating noise is little.

In addition, balladeur train 364Ab and balladeur train 364Bb, except mounting hole 364Bb3,364Ab3, has same configuration each other.Further, track 364Aa and track 364Ba has same configuration.Thus, even if combination A type linear guide device 364A and Type B linear guide device 364B uses, also weight balancing can not be destroyed.

In addition, each balladeur train 364Ab, 364Bb have roughly 2 rotational symmetries (360 °/2 Rotational Symmetry) respectively around the axle of above-below direction (perpendicular to the direction of paper in Figure 15, Figure 18), but not tool 4 rotational symmetries (360 °/4 Rotational Symmetry).Thus, moving direction (left and right directions of Figure 15, Figure 18) is different to the response characteristic (that is, vibration characteristic) of external force with horizontal (above-below direction of Figure 15, Figure 18).Make there are in fact 2 rotational symmetries respectively and the roughly equal each other balladeur train 364Ab of weight distribution and balladeur train 364Bb 90-degree rotation and the balladeur train (hereinafter referred to as " intersect balladeur train ") intersecting guides 364 linked around the axle (rotation axes of symmetry twice of each balladeur train 364Ab, 364Bb) of above-below direction, roughly 4 rotational symmetries can be obtained, more even to the response characteristic of external force between 2 linear movement directions (X-direction and Y-direction).

By linking movable part 320 and the joggling table 400 of Z axis exciting unit 300 via above-mentioned intersection guides 364, joggling table 400 can link in X-direction and Y direction slidably with the movable part 320 of Z axis exciting unit 300.

Figure 21 illustrates the upper surface figure being installed on the configuration relation of track 364Aa, 364Ba of 4 intersection guidess 364 of the top board 324b of relaying framework 324.In the XY slide block 360 of present embodiment, the direction being installed on 4 tracks (specifically each 2 tracks 364Aa, 364Ba) of top board 324b above alternately changes in X-direction (left and right directions of Figure 21) and Y direction (above-below direction of Figure 21).By this configuration, make the mass distribution equalization of 4 intersection guides 364 entirety, realize the vibration characteristic that directivity is less.

In addition, as shown in figure 21, A type linear guide device 364A alternately changes at each guides 364 that intersects with the configuration relation up and down (that is, being fixed on track 364Aa, 364Ba of the top board 324b of relaying framework 324) of Type B linear guide device 364B.Thus, the fine difference of the mass distribution of A type linear guide device 364A and Type B linear guide device 364B is averaged, and can realize the vibration characteristic that directivity is less.

So, via can with the XY slide block 360 that slides of friction resistance ground in X-direction and Y direction, link Z axis exciting unit 300 and joggling table 400, thus, even if joggling table 400 vibrates respectively because of X-axis exciting unit 100 and Y-axis exciting unit 200 in X-direction and Y direction, the vibration component of joggling table 400 in X-direction and Y direction also can not transmit to Z axis exciting unit 300.

In addition, the power in X-axis and Y direction can not be applied because of the driving of Z axis exciting unit 300 to joggling table 400 completely.Thus the little exciting of cross-talk can be carried out.

Then, the structure of the YZ slide block 160 (Fig. 7, Fig. 8) linking X-axis exciting unit 100 and joggling table 400 is described.YZ slide block 160 comprises: at the armite 162 that movable part 120 (the relaying framework 124) front end face of X-axis exciting unit 100 is fixing; 1 group of Y-axis linear guide device 164A of armite 162 (X-axis exciting unit 100) and joggling table 400 can be linked in the Y-axis direction slidably; With 3 groups of Z axis linear guide device 164B that can link X-axis exciting unit 100 and joggling table 400 in the Z-axis direction slidably.In addition, Y-axis linear guide device 164A comprises 1 Y-axis track 164Aa and 3 Y-axis balladeur train 164Ab.In addition, Z axis linear guide device 164B comprises 1 Z axis track 164Ba and 1 Z axis balladeur train 164Bb.

As shown in Figure 7, armite 162 is formed with the diameter of movable part 120 (relaying framework 124) in the same size in X-axis exciting unit 100 side.By this structure, the disturbance force of X-axis exciting unit 100 can balancedly be passed to armite 162.In addition, armite 162 is expanded to the size with the same length of Y-axis track 164Aa in joggling table 400 side.By this structure, can support endlong throughout it by the Y-axis track 164Aa longer than relaying framework 124 to diameter.

In addition, armite 162 in order to realize lightweight, and is provided with 5 through in the Z-axis direction circular hole 162a in the Y-axis direction at equal intervals.Be formed at the circular hole 162a quantity of armite 162, diameter and interval to determine according to armite 162 size and the disturbance force size putting on armite 162 etc.

The Y-axis track 164Aa extended in the Y-axis direction is fixed on the movable part 120 of X-axis exciting unit 100 via armite 162 and relaying framework 124.In addition, Y-axis track 164Aa is equiped with 3 the Y-axis balladeur train 164Ab engaged with Y-axis track 164Aa slidably.

3 the Z axis track 164Ba extended in the Z-axis direction equally spaced install in the Y-axis direction in the side that joggling table 400 is relative with X-axis exciting unit 100.In addition, each Z axis track 164Ba is equiped with the Z axis balladeur train 164Bb engaged with Z axis track 164Ba slidably.

In addition, the Y-axis balladeur train 164Ab of present embodiment is the structure identical with the balladeur train 364Ab of above-mentioned A type linear guide device 364a, and Z axis balladeur train 164Bb is the structure identical with the balladeur train 364Bb of above-mentioned Type B linear guide device 364B.In addition, Y-axis balladeur train 164Ab also can use the balladeur train 364Bb of Type B linear guide device 364B, and Z axis balladeur train 164Bb also can use the balladeur train 364Ab of A type linear guide device 364a.

Y-axis balladeur train 164Ab and Z axis balladeur train 164Bb are linked by 4 support bolts and are formed and intersect the balladeur train (intersect balladeur train) of guides 364.That is, Y-axis track 164Aa links with 3 Z axis track 164Ba via 3 intersection balladeur trains.By this structure, joggling table 400 can link slidably with the movable part 120 of X-axis exciting unit 100 in Y direction and Z-direction.

So, via the YZ slide block 160 that can slide in Y direction and Z-direction with friction resistance, and link X-axis exciting unit 100 and joggling table 400, thus, even if joggling table 400 vibrates respectively because of Y-axis exciting unit 200 and Z axis exciting unit 300 in Y direction and Z-direction, the vibration component of joggling table 400 in Y direction and Z-direction also can not transmit to X-axis exciting unit 100.

In addition, the power in Y-axis and Z-direction can not be applied because of the driving of X-axis exciting unit 100 to joggling table 400 completely.Thus the little exciting of cross-talk can be carried out.

In addition, link Y-axis exciting unit 200 and also have the structure identical with YZ slide block 160 with the ZX slide block 260 of joggling table 400, joggling table 400 links with the movable part of the mode can slided in Z-direction and X-direction and Y-axis exciting unit 200.Therefore, even if joggling table 400 vibrates respectively because of Z axis exciting unit 300 and X-axis exciting unit 100 in Z-direction and X-direction, the vibration component of joggling table 400 in Z-direction and X-direction also can not transmit to Y-axis exciting unit 200.

In addition, the power in Z axis and X-direction can not be applied because of the driving of Y-axis exciting unit 200 to joggling table 400 completely.Thus the little exciting of cross-talk can be carried out.

As mentioned above, each exciting unit 100,200 and 300 can not disturb each other mutually, and joggling table 400 thus can be made correctly to vibrate on each axle drive shaft direction.In addition, because the movable part of each exciting unit 100,200 and 300 by lead-frame and linear guide device only can the mode of movement in the driven direction support, so not easily vibrate on non-driven direction.Thus, the vibration on not controlled non-driven direction also can not put on joggling table 400 from each exciting unit 100,200 and 300.Therefore, by the driving of each exciting unit 100,200 and 300 of correspondence, the vibration on each direction of principal axis of joggling table 400 can correctly be controlled.

Then, for movable part supporting device 140,240,340, YZ slide block 160, the internal structure of linear guide device mechanism (track and balladeur train) that uses in ZX slide block 260 and XY slide block 360 etc., illustrate for the Z axis linear guide device 344 (Z axis balladeur train 344b, Z axis track 344a) of movable part supporting device 340.In addition, as mentioned above, Z axis linear guide device 344 is the mechanism identical with A type linear guide device 364A.In addition, the internal structure of Type B linear guide device 364B, except mounting hole 364Bb3, is the structure identical with Z axis linear guide device 344.In addition, other linear guide device mechanisms used in the mechanism part 10 of exciting device 1 are also the structure identical with Z axis linear guide device 344.

Figure 22 is the section drawing of the Z axis linear guide device 344 (Z axis track 344a and Z axis balladeur train 344b) cutting off movable part supporting device 340 with the one side of the long axis normal with Z axis track 344a (i.e. XY plane).In addition, Figure 23 is the I-I section drawing of Figure 22.The Z axis linear guide device 344 of present embodiment uses roller as rotor.High position precision and rigidity can be obtained by using roller.

The both lateral sides face of Z axis track 344a is in fig. 22 formed with extension in the Z-axis direction respectively and cross section is trapezoidal groove 344a1.In addition, as shown in Figure 22 and Figure 23, Z axis balladeur train 344b is formed with in the mode of surrounding Z axis track 344a the groove 344b5 extended in the Z-axis direction.The protrusion 344b6 that the groove 344a1 along Z axis track 344a extends is formed at each sidewall of groove 344b5.Protrusion 344b6 is formed with a pair inclined-plane parallel with each inclined-plane of the trapezoidal groove 344a1 of Z axis track 344a.Gap is formed with respectively between total 4 inclined-planes and total 4 inclined-planes of the protrusion 344b6 relative respectively with these inclined-planes of a pair groove 344a1 of Z axis track 344a.Be accommodated with roller 344c1,344c2,344c3,344c4 of multiple stainless steel in these 4 gaps respectively and rotatably keep and link the resinous holding element 344c5 (Figure 23) of roller.Roller 344c1,344c2,344c3,344c4 are clipped by the inclined-plane of groove 344a1 and the inclined-plane of protrusion 344b6 and are kept respectively.

In addition, in the inside of Z axis balladeur train 344b, be formed with 4 rollers respectively abreast with above-mentioned 4 gaps and keep out of the way path 344b1,344b2,344b3,344b4.As shown in figure 23, roller is kept out of the way path 344b1,344b2,344b3,344b4 and is communicated with corresponding above-mentioned gap at its two ends.Thus, the circulating path for making roller 344c1,344c2,344c3,344c4 and holding element 344c5 circulate is formed.

When Z axis balladeur train 344b moves in the Z-axis direction along Z axis track 344a, multiple roller 344c1,344c2,344c3,344c4 circulate together with holding element 344c5 in each circulating path 344b1,344b2,344b3,344b4.Z axis balladeur train 344b is supported by multiple roller 344c1,344c2,344c3,344c4.In addition, rotated by roller 344c1,344c2,344c3,344c4, keep the slight drag in Z-direction.Therefore, even if the large load applying on the direction different from Z-direction is in Z axis linear guide device 344, Z axis balladeur train 344b still can move along Z axis track 344a smoothly.

Figure 24 is the figure of the configuration relation representing roller and holding element 344c5.As shown in figure 24, the holding element 344c5 linking multiple roller (such as roller 344c4) has: be configured at the multiple spacer portion 344c5b between roller 344c4; With a pair ribbon 344c5a linking multiple spacer portion 344c5b.The two ends of each spacer portion 344c5b are individually fixed in a pair ribbon 344c5a, form the holding element 344c5 of scalariform.Each roller 344c4 is kept in the space surrounded by a pair adjacent spacer portion 344c5b and a pair ribbon 344c5a.

In addition, by arranging the spacer portion 344c5b of the low holding element 344c5 of hardness between roller 344c4, can prevent the damaged or abrasion of the oil film that produces because each roller 344c4 directly contacts with narrow area of contact, friction drag diminishes, and the life-span also significantly extends.

X-axis exciting unit 100 and Y-axis exciting unit 200 also comprise movable part supporting device 140,240.The movable part 120 (relaying framework 124) of X-axis exciting unit 100 is supported by lead-frame from both sides via X-axis linear guide device in the both direction (Y-axis and Z-direction) vertical with driving direction (X-axis).Similarly, the movable part (relaying framework) of Y-axis exciting unit 200 is supported by lead-frame from both sides via Y-axis linear guide device in the both direction (Z axis and X-direction) vertical with driving direction (Y-axis).The movable part of X-axis exciting unit 100 and Y-axis exciting unit 200 is all configured to axis direction towards level.Thus, in the exciting unit of the prior art not having movable part supporting device, movable part is by means of only connecting rod suspention supporting, hang down downwards because of weight own in the front (joggling table 400 side) of movable part, the reason that friction force when this becomes driving and N/R vibration increase.In the present embodiment, because the movable part of X-axis exciting unit 100 and Y-axis exciting unit 200 is supported by lead-frame from below, the problems referred to above can be eliminated.

Then, the structure of joggling table 400 is described.Joggling table 400 (Fig. 8) has honeycomb structure, comprising: top board 401; From the frame portion 410 that top board 401 circumference is sagging; The bottom 402 of XY slide block 360 is installed at lower surface; With the honeycomb core 420 clipped with bottom 402 by top board 401, frame portion 410.

Figure 25 is by the planar view after expanding near joggling table 400.As shown in figure 25, as the top board 401 of table top be square (square or rectangular) the 4 jiaos sheet materials by the corner cut shape (roughly anistree shape) after linear ablation.In addition, top board 401 also can for square 4 jiaos be excised by circular arc after shape.Frame portion 410 is also be the frame-shaped parts that corner cut shape engages with sheet material.Frame portion 410 has: a pair Y wall portion 411,415 extended in the Y-axis direction; The a pair X wall portion 413,417 extended in the X-axis direction; With 4 corner cut wall portion 412,414,416,418.Corner cut wall portion 412 links one end of Y wall portion 411 and one end of X wall portion 413, corner cut wall portion 414 links the other end of X wall portion 413 and one end of Y wall portion 415, corner cut wall portion 416 links the other end of Y wall portion 415 and one end of X wall portion 417, and corner cut wall portion 418 links the other end of X wall portion 417 and the other end of Y wall portion 411.That is, parallel with the table top of joggling table 400 cross section have with top board 401 identical square 4 jiaos cut after shape.

In addition, joggling table 400 comprises from the sagging multiple ribs (421,422,423,431,432,433,441,442,443,451,452,453) of top board 401 lower surface.These multiple ribs are combined into honeycomb and form core 420.

A pair Y wall portion 411,415 links via 3 ribs 431,432,433 extended in the X-axis direction.Rib 431 is by connected to each other for one end of Y wall portion 411,415, and rib 433 is by connected to each other for the other end of Y wall portion 411,415, and rib 432 is by connected to each other for the Y direction central portion of Y wall portion 411,415.

A pair X wall portion 413,417 links via 3 ribs 421,422,423 extended in Y direction.Rib 421 links one end of X wall portion 413 and the other end of X wall portion 417, and rib 423 links the other end of X wall portion 413 and one end of X wall portion 417, and rib 422 is by connected to each other for the central portion of the Y direction of X wall portion 413,417.

Rib 441,442,443 (namely tilts 45 degree relative to X-axis and Y-axis) abreast with corner cut wall portion 414,418 respectively and configures.Rib 441 links Y wall portion 411 and X wall portion 417, and rib 443 links Y wall portion 411 and X wall portion 417.In addition, rib 421 and the connecting part of rib 431 and the connecting part of rib 423 and rib 433 link by rib 442.

Rib 451,452,453 (namely tilts 45 degree relative to X-axis and Y-axis) abreast with corner cut wall portion 412,416 respectively and configures.Rib 451 links Y wall portion 411 and X wall portion 413, and rib 453 links Y wall portion 415 and X wall portion 417.In addition, rib 421 and the connecting part of rib 433 and the connecting part of rib 423 and rib 431 link by rib 452.

So, joggling table 400 has light weight and high rigidity by adopting honeycomb structure, and thus, resonance frequency uprises, and can realize the exciting of higher frequency.

In addition, as shown in figure 25, joggling table 400 has 4 rotational symmetries around Z axis.Thus the few vibration characteristic of directivity can be realized.

In addition, as mentioned above, joggling table 400 is formed as the corner cut shape after being cut at foursquare 4 angles.By cutting 4 angles do not used, lightweight can be realized.In addition, by cutting lower and 4 angles that resonance frequency is low of rigidity, the raising of high rigidization and resonance frequency can be realized.

In addition, as shown in Fig. 7 and Figure 25,3 Z axis track 164Ba are individually fixed in (specifically, an end of rib 431,432,433) in the elongated surfaces of the rib 431,432,433 extended in the X-axis direction.Therefore, 3 Z axis track 164Ba are supported with high rigidity in the X-direction of joggling table 400 being carried out to exciting.

Similarly, 3 Z axis track 264Ba are individually fixed in (specifically, an end of rib 421,422,423) in the elongated surfaces of the rib 421,422,423 extended in the Y-axis direction.Therefore, 3 Z axis track 264Ba are supported with high rigidity in the Y direction of joggling table 400 being carried out to exciting.

So, Z axis track 164Ba and 264Ba is installed on the high position of the rigidity of joggling table 400.Thus, even if joggling table 400 is excited via Z axis track 164Ba and 264Ba, joggling table 400 also can not significantly be out of shape, and particularly can not produce large vibrating noise at low frequency region.

Then, illustrate that the fixed part by each exciting unit is installed on the structure of device pedestal 500.

As shown in Figs. 4-6, the fixed part 310 of Z axis exciting unit 300 is via a pair bearing unit 350 (the fixed part supporting device of X-direction both sides being configured at Z axis exciting unit 300, also relocation mechanism or elastic bearing mechanism is claimed), be installed on the upper surface of device pedestal 500.As shown in Figure 6, each bearing unit 350 comprises: moveable block 358, a pair corner pieces (fixed block) 352 and a pair linear guide device 354.Moveable block 358 is the support units of fixed part 310 side being installed on Z axis exciting unit.A pair corner pieces 352 is oppositely disposed respectively with the Y direction both ends of the surface of moveable block 358, and is fixed on the upper surface of device pedestal 500.Y direction two ends and each corner pieces 352 of moveable block 358 are linked in Z-direction slidably respectively by linear guide device 354.

The balladeur train 354b that linear guide device 354 comprises track 354a and engages with track 354a.In the Y direction both ends of the surface of moveable block 358, track 354a is installed.In addition, the balladeur train 354b engaged with relative track 354a is installed in each corner pieces 352.In addition, be configured with a pair air bellow 356 arranged in the Y-axis direction between moveable block 358 and device pedestal 500, moveable block 358 is supported by device pedestal 500 across a pair air bellow 356.

So, Z axis exciting unit 300, its fixed part 310 is by possessing the bearing unit 350 of linear guide device 354 and air bellow 356, flexibly supported on driving direction (Z-direction) relative to device pedestal 500, therefore, the strong antagonistic force (disturbance force) putting on the Z-direction of fixed part 310 when driving Z axis exciting unit 300 can not directly be passed to device pedestal 500, and will particularly significantly be decayed by radio-frequency component by air bellow 356.Thus, the vibrating noise being passed to joggling table 400 from Z axis exciting unit 300 via device pedestal 500 and other exciting unit 100,200 is significantly reduced.

As shown in Figs. 7-9, the fixed part 110 of horizontal actuator 100A, via a pair bearing unit 150 of Y direction both sides being configured at X-axis exciting unit 100, is installed on the upper surface of device pedestal 500.Each bearing unit 150 comprises: the fixed block 152 being fixed on the T-shaped of device pedestal 500 upper surface; Be installed on the moveable block 158 of the roughly cubic of fixed part 110 side of X-axis exciting unit 100; With the linear guide device 154 linking fixed block 152 and moveable block 158 in the mode that can slide in the X-axis direction.

Moveable block 158 is bolted to fixed part 110 side of horizontal actuator 100A.In the Y direction two sides of the fixed part 110 for installing moveable block 158, arranging and there is the center shaft parallel with Z axis and the plane of bending 110a of cylinder planar recessed to the inside.In addition, the plane of bending 158a corresponding with plane of bending 110a is also formed with in the face relative with fixed part 110 of moveable block 158.When moveable block 158 is installed on the side of fixed part 110, the plane of bending 110a of fixed part 110 is chimeric with the plane of bending 158a of moveable block 158, and fixed part 110 cannot move in the Z-axis direction relative to moveable block 158.In addition, be fitted together to by this, fixed part 110 is to the movement of X-axis and Y direction, and the rotation around X-axis, Y-axis and Z axis is also limited, and fixed part 110 is reliably kept by moveable block 158.In addition, owing to being the lock structure of convex surface (plane of bending 158a) and concave curved surface (plane of bending 110a), with the protuberance (protrusion 6158a) of the square shape of the 6th embodiment described later compared with the lock structure of recess (square groove 6110a), be not easy to produce gap between convex architecture and concave architecture, the vibrating noise caused because of flutter (chattering) is less likely to occur.

Linear guide device 154 comprises: the track 154a that the upper surface being installed on fixed block 152 also extends in the X-axis direction; Be installed on the lower surface of moveable block 158 and a pair balladeur train 154b engaged with track 154a.In addition, arm (support plate) 152a of the L-shaped extended up is fixed with in the side of the X-axis negative direction side of fixed block 152.Spring device 156 is provided with between moveable block 158 and arm 152a.

Figure 26 is the lateral plan near the spring device 156 of amplification bearing unit 150 (Fig. 8).Spring device 156 comprises: bolt 156a, adapter plate 156b, ring 156c, nut 156d, coil spring 156e, dash plate 156f, pad 156g and nut 156h.Be provided with the through hole 152ah extended in the X-axis direction on the top of the arm 152a of fixed block 152, bolt 156a is by this through hole 152ah.Moveable block 158 is fixed on via adapter plate 156b in the front end of bolt 156a.In addition, the leading section of bolt 156a is inserted in cylindric ring 156c.

What ring 156c was clipped in that bolt 156a is screwed into is fixed between nut 156d and adapter plate 156b.In addition, the front of bolt 156a is inserted into coil spring 156e.Coil spring 156e is clipped between adapter plate 156b and arm 152a and is kept.In addition, ring 156c is embedded into the leading section of coil spring 156e, and the leading section of coil spring 156e is fixed in moveable block 158 across ring 156c.

In addition, coil spring 156e is the cartridge (antirattle spring) compression coil spring of steel being embedded to the viscoelastic bodies such as acrylic resin (shock absorber) and obtaining.Also coil spring monomer can be used to replace antirattle spring.In addition, also with coil spring array or independent shock absorber (such as vibration-proof rubber or oil-pressure damper) can be set side by side.

Be screwed into 2 nut 156h in the head side of bolt 156a and be fixed.In addition, bolt 156a is by being located at the through hole of dash plate 156f and pad 156g respectively.Dash plate 156f is clipped between pad 156g (and 2 nut 156h) and arm 152a.Dash plate 156f is such as formed by the resin such as vibration-proof rubber or polyurethane (that is, rubber elastomer and/or viscoelastic body).

Applying preloading to coil spring 156e, on horizontal actuator 100A during non-applied load, bolt 156a abuts with arm 152a (fixed block 152) across nut 156h, pad 156g and dash plate 156f.Thus, the center position that the recuperability that the horizontal actuator 100A being fixed on moveable block 158 is configured at coil spring 156e and dash plate 156f balances.That is, spring device 156 is also a kind of neutral spring device.

When X-axis exciting unit 100 pairs of joggling tablees 400 carry out exciting in X-axis positive dirction, its antagonistic force is passed to the moveable block 158 of bearing unit 150, is passed to fixed block 152 (arm 152a) further via spring device 156 (coil spring 156e).Because coil spring 156e transmits the vibration component beyond its low resonance frequency hardly, so the vibrating noise transmitted from X-axis exciting unit 100 to device pedestal 500 by bearing unit 150 can be suppressed.

In addition, when X-axis exciting unit 100 pairs of joggling tablees 400 carry out exciting in X-axis negative direction, its antagonistic force is passed to fixed block 152 (arm 152a) via the moveable block 158 of bearing unit 150 and spring device 156 (dash plate 156f).Because dash plate 156f transmits the vibration of high frequency hardly, so the vibrating noise transmitted from X-axis exciting unit 100 to device pedestal 500 by bearing unit 150 can be suppressed.

In addition, the antagonistic force of X-axis positive dirction is less than the antagonistic force of X-axis negative direction.Thus, in present embodiment, use the small-sized and dash plate 156f of cheapness as the elastic element of antagonistic force bearing X-axis positive dirction.When the antagonistic force of X-axis positive dirction is large, coil spring also can be used to replace dash plate 156f, be set to the structure same with neutral spring device 130.

Pass through said structure, the fixed part 110 of X-axis exciting unit is by possessing the bearing unit 150 (fixed part supporting device) of linear guide device 154 and spring device 156, relative to device pedestal 500 on driving direction (X-direction) by mildly elastic support, therefore, when driving X-axis exciting unit 100, the strong antagonistic force (disturbance force) putting on the X-direction of fixed part 110 directly can not be passed to device pedestal 500, particularly radio-frequency component and be attenuated to relatively large extent by spring device 156.Thus, the vibrating noise being passed to joggling table 400 from X-axis exciting unit 100 significantly reduces.

Y-axis exciting unit 200 also comprises the horizontal actuator 200A with horizontal actuator 100A same structure.The fixed part 210 of horizontal actuator 200A is also flexibly supported by device pedestal 500 in the Y-axis direction via a pair bearing unit 250 (Fig. 1).Bearing unit 250 is the structure identical with the bearing unit 150 of X-axis exciting unit, therefore omits the repeat specification in thin portion.

As mentioned above, adopt the structure flexibly being supported each exciting unit 100,200 and 300 by the bearing unit 150,250,350 comprising elastic element (air bellow or spring device), therefore, the transmission of the vibration (noise) of particularly radio-frequency component between the exciting unit via device pedestal 500 can be suppressed, so more high-precision exciting can be realized.

In addition, on the bearing unit 350 of supporting Z axis exciting unit 300, except the live load for exciting measured body and joggling table 400, also apply the weight (static weight) of Z axis exciting unit 300, joggling table 400 and measured body.For this reason, have employed more small-sized and the air bellow 356 of large load can be supported.In addition, large static weight is not applied, therefore, it is possible to use more small-sized coil spring to the bearing unit 150 of supporting X-axis exciting unit 100 and the bearing unit 250 of supporting Y-axis exciting unit 200.

< variation >

In the above-described embodiment, use and have and employ the linear guide device of roller 344c2 as cylindrical bearing (coro bearng) mechanism of rotor, but also can use the linear guide device with the roller bearing mechanism using other kind rotors.As shown in the cross sectional drawing of Figure 28, rotor in the gap of track 1344a and balladeur train 1344b, can use the linear guide device 1344 with ball-bearing casing (ball-bearing casing) mechanism employing ball 1344c1,1344c2,1344c3,1344c4.

In addition, compared with rotor and track and balladeur train with the ball bearing mechanism of point cantact, comparatively large with the area of contact of the roller bearing mechanism of linear contact lay, high rigidity can be obtained, therefore, be obviously conducive to improving resonance frequency.Thus, when high-frequency region carries out vibration-testing, should as the linear guide device of above-mentioned embodiment use cylindrical bearing formula.But, do not need whole linear guide device all to use cylindrical bearing formula person.Such as, also can use the linear guide device of cylindrical bearing formula at the position that the amount of movement of movable part supporting device 340 and slip connect mechanism (YZ slide block 160, ZX slide block 260 and XY slide block 360) etc. is many, use the linear guide device of ball bearing type at the position that the amount of movement of fixed part supporting device (bearing unit 150,250 and 350) etc. is fewer.In addition, as long as required resonance frequency characteristic can be obtained, also the linear guide device of ball bearing type can be used by part or all linear guide device.

< second embodiment >

Then, the second embodiment of the present utility model is described.Second embodiment and above-mentioned first embodiment difference part are the structure of diaxon slide block (slip connect mechanism) and the shape of movable part.When second embodiment is below described, mainly for the discrepancy with the first embodiment, and omit the explanation of the structure common with the first embodiment.

Figure 29 and Figure 30 is birds-eye view near the joggling table 2400 of the exciting device amplifying the utility model second embodiment and lateral plan respectively.

In first embodiment, the balladeur train of Type B linear guide device 364B of the balladeur train being formed with the A type linear guide device of the mounting hole of screw with the mounting hole being formed with cut hole is only directly linked with bolt, and form and intersect balladeur train.In contrast, in this second embodiment, adopt the structure of the balladeur train linking 2 different linear guide devices of movable direction via coupling plate (way station).The structure of present embodiment compares with the first embodiment, although parts (coupling plate and bolt) quantity increases, weight and assembling are increased man-hour, exciting performance reduces, but do not need to use special linear guide device (A type and Type B linear guide device), and the general linear guide device that market is sold can be used.

As shown in Figure 29 and Figure 30, the YZ slide block 2160 of exciting device 2000 links Y-axis linear guide device 2165 and 3 Z axis linear guide devices 2167 via coupling plate 2166.Y-axis linear guide device 2165 comprises: 1 the Y-axis track 2165a being fixed on armite 2162; And 3 the Y-axis balladeur train 2165b to engage slidably with this Y-axis track 2165a.3 Y-axis balladeur train 2165b arrange at equal intervals in Y direction and are fixed on armite 2162.

In addition, Z axis linear guide device 2167 comprises 1 Z axis track 2167a and 1 Z axis balladeur train 2167b.The Z axis track 2167a of 3 Z axis linear guide devices 2167 arranges at equal intervals in Y direction, and is fixed on the side relative with YZ slide block 2160 of joggling table 2400.In addition, each Z axis balladeur train 2167b is fixed on coupling plate 2166.One group that Y-axis balladeur train 2165b and Z axis balladeur train 2167b are corresponding clips coupling plate 2166 and is fixed on relative position.

Similarly as shown in figure 29, the ZX slide block 2260 of exciting device 2000 links X-axis linear guide device 2265 and 3 Z axis linear guide devices 2267 via coupling plate 2266.X-axis linear guide device 2265 comprises: 1 the X-axis track 2265a being fixed on armite 2262; And 3 the X-axis balladeur train 2265b to engage slidably with this X-axis track 2265a.3 X-axis balladeur train 2265b arrange at equal intervals in X-direction and are fixed on armite 2262.

In addition, Z axis linear guide device 2267 comprises 1 Z axis track 2267a and 1 Z axis balladeur train 2267b.The Z axis track 2267a of 3 Z axis linear guide devices 2267 arranges at equal intervals in X-direction, and is fixed on the side relative with ZX slide block 2260 of joggling table 2400.In addition, each Z axis balladeur train 2267b is fixed on coupling plate 2266.One group that X-axis balladeur train 2265b and Z axis balladeur train 2267b are corresponding clips coupling plate 2266 and is fixed on relative position.

In addition, as shown in Figure 29 and Figure 30, XY slide block 2360 links 2 X-axis linear guide devices 2365 and 2 Y-axis linear guide devices 2367 via 4 coupling plates 2366.

Each X-axis linear guide device 2365 comprises: 1 the X-axis track 2365a being fixed on joggling table 2400 lower surface; And 2 the X-axis balladeur train 2365b to engage slidably with this X-axis track 2365a.

In addition, each Y-axis linear guide device 2367 comprises: 1 the Y-axis track 2367a being fixed on the top board 2324b upper surface of the relaying framework 2324 of Z axis exciting unit; And 2 the Y-axis balladeur train 2367b to engage slidably with this Y-axis track 2367a.

Each X-axis balladeur train 2365b fixes with 1 Y-axis balladeur train 2367b via coupling plate 2366 respectively.Specifically, a side in 2 X-axis balladeur train 2365b that each X-axis track 2365a installs and the Y-axis balladeur train 2367b engaged with a side of Y-axis track 2367a link, and the opposing party's X-axis balladeur train 2365b and the Y-axis balladeur train 2367b engaged with the opposing party's Y-axis track 2367a links.That is, the X-axis balladeur train 2365b that links through coupling plate 2366 of each X-axis track 2365a and Y-axis balladeur train 2367b and linking with each Y-axis track 2367a.By this structure, joggling table 2400 can link with relaying framework 2324 slidably in X-direction and Y direction.

In addition, as shown in figure 29, the Z axis track 2167a1 of the Y-axis negative direction end of YZ slide block 2160 is configured on the same plane vertical with Y-axis with the X-axis track 2365a1 of the Y-axis negative direction end of XY slide block 2360.Similarly, the Z axis track 2167a3 of the Y-axis positive dirction end of YZ slide block 2160 is configured on the same plane vertical with Y-axis with the X-axis track 2365a2 of the Y-axis positive dirction end of XY slide block 2360.In other words, joggling table 2400 is applied 2 (2167a1 and 2167a2) at two ends in 3 Z axis track 2167a of the YZ slide block 2160 of the power of X-direction, be configured at respectively roughly on same plane with 2 X-axis track 2365a (2365a1 and 2365a2) of XY slide block 2360.

By this structure, because the moment of torsion around the Z axis putting on each intersection balladeur train 2364 (X-axis balladeur train 2365b, Y-axis balladeur train 2367b) of XY slide block 2360, lower with the distortion of the Z axis balladeur train 2167b putting on YZ slide block 2160, so the less correct exciting of noise can be carried out, and the fault rate of X-axis balladeur train 2365b, Y-axis balladeur train 2367b and Z axis balladeur train 2167b lowers, and realizes the more excellent exciting device of durability.

Particularly, except Z axis track 2167a being installed on the side of joggling table 2400, Z axis balladeur train 2167b in vertical direction can not excited outside, by Z axis track 2167a and X-axis track 2365a is configured on same plane, distortion (moment of torsion around Z axis) can not be applied to Z axis balladeur train 2167b, by this effect that is multiplied, significantly can alleviate the noise of vibration, the fault rate of Z axis balladeur train 2167b also significantly reduces.

In addition, ZX slide block 2260 is also formed in the same manner as YZ slide block 2160.That is, ZX slide block 2260 is configured on the same plane vertical with X-axis with the Y-axis track 2367a1 of XY slide block 2360 at X-axis negative direction end at the Z axis track 2267a1 of X-axis negative direction end.Similarly, ZX slide block 2260 is configured on the same plane vertical with X-axis with the Y-axis track 2367a2 of XY slide block 2360 at X-axis positive dirction end at the Z axis track 2267a3 of X-axis positive dirction end.

By these structures, can realize particularly in the raising of significantly raising and the durability of the exciting precision of high-frequency region.

Figure 31 is the External view of the movable part 2320 of Z axis exciting unit.In addition, Figure 32 is the External view of relaying framework 2324.As shown in figure 32, relaying framework 2324 comprises: with main frame 2322 roughly with the main part 2324a in footpath; The top board 2324b of main part 2324a upper end is installed on level.Top board 2324b has the width (X-direction size) larger than the external diameter of main part 2324a and the substantially rectangular flat parts of length (Y direction size).

The a pair step 2324b1 extended in Y direction is formed, upper surface central portion 1 step higher than periphery in the X-axis direction of top board 2324b at the top board 2324b upper surface of relaying framework 2324.A pair Y-axis track 2367a of XY slide block 2360 is configured along this pair step 2324b1.That is, step 2324b1 is the locating structure for Y-axis track 2367a being installed on the tram on top board 2324b.By arranging a pair step 2324b1, a pair Y-axis track 2367a merely need only be installed along step 2324b1, namely can be configured on top board 2324b to high parallelism.

Figure 33 is the block diagram of the Y-axis track 2367a of XY slide block 2360.As shown in figure 33, be formed in Y-axis track 2367a at its direction of principal axis multiple through hole 2367ah of configuration side by side.Y-axis track 2367a by make bolt pass screw 2324b2 that through hole 2367ah is screwed into the top board 2324b being arranged on relaying framework 2324, and is fixed in top board 2324b.

In present embodiment, interval (and interval of the bolt hole of the top board) s of the through hole 2367ah of Y-axis track 2367a, for less than 2 times (below preferable width W of the width W of Y-axis track 2367a, more preferably width W 50 ~ 80%, 60 ~ 70% of further preferable width W) and shorter than general interval.So, by shortening the fixed interval of Y-axis track 2367a, Y-axis track 2367a can not bend, and is fixed on the top board 2324b of relaying framework 2324 strongly.

In addition, in the second above-mentioned embodiment, Y-axis track 2367a is fixed on the top board 2324b of relaying framework 2324, and X-axis track 2365a is fixed on joggling table 2400, but on the contrary, also can be configured to fix Y-axis track 2367a at joggling table 2400, and fix X-axis track 2365a at the movable part of Z axis exciting unit.

In addition, in the second above-mentioned embodiment, XY slide block 2360 comprises 2 X-axis linear guide devices 2365 (X-axis track 2365a) and 2 Y-axis linear guide devices 2367 (Y-axis track 2367a), but, also can be the structure comprising more than 3 X-axis track 2365a and/or Y-axis linear guide device 2367.In this case, each X-axis track 2365a and each Y-axis track 2367a also link respectively via intersecting balladeur train 2364.That is, n bar X-axis track 2365a and m bar Y-axis track 2367a is linked by n × m intersection balladeur train 2364.

< the 3rd embodiment >

Then, the 3rd embodiment of the present utility model is described.3rd embodiment and above-mentioned second embodiment difference part are the structure of YZ slide block and ZX slide block.The explanation of the 3rd embodiment is mainly for the discrepancy with the second embodiment below, to the incomplete structure explanation common with the second embodiment.

Figure 34 is the birds-eye view near the joggling table 3400 of the exciting device amplifying the utility model the 3rd embodiment.

In above-mentioned second embodiment, fix Z axis track 2167a and 2267a respectively in the side relative with Y-axis exciting unit with X-axis exciting unit of joggling table.On the other hand, in the 3rd embodiment, fix Y-axis track 3165a and X-axis track 3265a respectively in the side relative with Y-axis exciting unit with X-axis exciting unit of joggling table 3400.By adopting this structure, even if when the joggling table using thickness (Z-direction size) thinner, as shown in figure 30, also can prevent Z axis track 2167 from giving prominence to up and down from the upper and lower surface of joggling table 2400, improve the degree of freedom of measured body setting on a vibration table.

In addition, as second embodiment adopt the structure of Z axis track 2167a and 2267a of YZ slide block 2160 and ZX slide block 2260 is installed on joggling table 2400, because the Z axis balladeur train 2167b of YZ slide block 2160, coupling plate 2166 and X-axis balladeur train 2165b, and the Z axis balladeur train 2267b of ZX slide block 2260, coupling plate 2266 and Y-axis balladeur train 2265b can not be driven up and down, so can suppress along with the driving up and down of these parts and vibrating noise occurs.

In addition, in the YZ slide block 2160 (ZX slide block 2260) of above-mentioned second embodiment, multiple Y-axis balladeur train 2165b (X-axis balladeur train 2265b) and multiple Z axis balladeur train 2167b (2267b) are individually fixed in 1 large coupling plate 2166 (2266), form 1 large-scale intersection balladeur train 2164 (2264).On the other hand, in the YZ slide block 3160 (ZX slide block 3260) of the 3rd embodiment, 1 Y-axis balladeur train 3165b (X-axis balladeur train 3265b) and 1 Z axis balladeur train 3167b (3267b) are individually fixed in 1 little coupling plate 3166 (3266), form small-sized intersection balladeur train 3164 (3264), and link Z axis track 3167a (3267a) and Y-axis track 3165a (X-axis track 3265a) by multiple small-sized intersection balladeur train 3164 (3264).

So, by intersecting small-sized, the lightweight of balladeur train 3164,3264, easy high-speed driving intersection balladeur train 3164,3264, in addition, the resonance frequency that can improve intersection balladeur train 3164,3264 will make vibrating noise reduce.

In addition, in the 3rd embodiment, the top board 3324b of the movable part of Z axis exciting unit is formed with the planar dimension of roughly the same with joggling table 3400 (or size is larger than it).Thus, even if by the length dilatation that is installed on the Y-axis track 2367a (X-axis track 3365a) of top board 3324b upper surface to the length of joggling table 3400 in the overall with of Y direction (X-direction) roughly the same (or being greater than), also the total length of Y-axis track 3367a (X-axis track 3365a) can be supported from below by top board 3324b, can all the time with high non-yielding prop joggling table 3400.

< the 4th embodiment >

Then, the 4th embodiment of the present utility model is described.4th embodiment and above-mentioned second embodiment difference part are diaxon slide block (slip connect mechanism) the i.e. structure of YZ slide block 4160 and ZX slide block 4260.Below illustrate the 4th embodiment time mainly for the discrepancy with the second embodiment, the formation common with the second embodiment is omitted the description.In addition, because ZX slide block 4260 has the structure common with YZ slide block 4160, so omit illustrating of ZX slide block 4260.

Figure 35 and Figure 36 is birds-eye view near the joggling table 4400 of the exciting device amplifying the utility model the 4th embodiment and lateral plan respectively.

The YZ slide block 4160 of the 4th embodiment comprises 2 Y-axis linear guide devices, 4165,2 Z axis linear guide devices 4167 and links their coupling plate 4166.In addition, in the 4th embodiment, the Z axis track 4167 of YZ slide block 4160 is not directly fixed on joggling table 4400, but is fixed on joggling table 4400 via relay arm 4168.

The thickness (Z-direction size) of relay arm 4168 is size roughly equal with the thickness of joggling table 4400 in joggling table 4400 side, and in Z axis linear guide device 4167 side, is expanded to size roughly equal with the track length of Z axis linear guide device 4167.By this structure, the track of Z axis linear guide device 4167 is throughout being supported by relay arm 4168 endlong.

In addition, the width (Y direction size) of relay arm 4168 is in Z axis linear guide device 4167 side, for size roughly equal with the configuration space of 2 Z axis linear guide devices 4167, and in joggling table 4400 side, be expanded to the roughly equal size of configuration space with 2 of XY slide block X-axis track 4367a.In other words, by making the configuration space of Z axis linear guide device 4167 less than the configuration space of X-axis track 4367a, to make small-sized, the lightweight of YZ slide block 4160.In addition, by using relay arm 4168, between the track and joggling table 4400 of Z axis linear guide device 4167, guarantee certain distance, the degree of freedom therefore arranging measured body on a vibration table improves.

< the 5th embodiment >

Then, the 5th embodiment of the present utility model is described.5th embodiment is an example of the Uniaxle excitation device only comprising 1 exciting unit (Z axis exciting unit 5300).The explanation of the 5th embodiment is mainly for the discrepancy with the first embodiment below, and omits the explanation of the structure common with the first embodiment.

Figure 37 and Figure 38 is lateral plan and the birds-eye view of the exciting device 5000 of the utility model the 5th embodiment respectively.

5th embodiment, because only at single shaft direction exciting, so joggling table 5400 is not via XY slide block, and is directly installed on the upper surface of the movable part 5320 of Z axis exciting unit 5300.

In addition, 4 movable part supporting devices 5340 directly support joggling table 5400 but not the movable part 5320 of Z axis exciting unit 5300.Thus, can effectively suppress joggling table at the vibrating noise of Y direction and Z-direction.

In addition, exciting device 5000 comprises the antagonistic force framework 5600 of the gate for measured body W to be pressed on joggling table 5400 from top.Antagonistic force framework 5600 is fixed on the upper surface of the fixed part (cylindrical body) 310 of Z axis exciting unit 5300.In addition, the lower surface in the beam portion 5610 of antagonistic force framework 5600 is provided with the chuck assembly 5610 of fixing measured body W.Chuck assembly 5610 comprises the load transducer (or piezoelectric type load transducer) detecting and put on the power of the Z-direction of measured body W.

By the effect of the air bellow 356 (Figure 12) of Z axis exciting unit 5300, between joggling table 5400 and antagonistic force framework 5600, clip measured body W, and the static weight of regulation is applied to measured body W.That is, when adopting the exciting device 5000 of the 5th embodiment, the static weight of regulation can be applied measured body W, carry out the test of exciting measured body W.

< the 6th embodiment >

Then, the 6th embodiment of the present utility model is described, the 6th embodiment is an example of the diaxon exciting device comprising 2 exciting unit (X-axis exciting unit 6100, Z axis exciting unit 6300).The explanation of the 6th embodiment below, mainly for the discrepancy with the first embodiment, and omits the explanation of the structure common with the first embodiment.

Figure 39 and Figure 40 is birds-eye view and the lateral plan of the exciting device 6000 of the utility model the 6th embodiment respectively.

In 6th embodiment, at both direction (driving direction of each exciting unit and perpendicular 1 direction) exciting joggling table 6400.Thus, each exciting unit 6100,6300 and joggling table 5400 link slidably on the driving direction of other exciting unit 6300,6100.Specifically, X-axis exciting unit 6100 and joggling table 6400 can be linked in the Z-axis direction slidably by Z axis slide block 6160, and Z axis exciting unit 6300 and joggling table 6400 can be linked in the Z-axis direction slidably by X-axis slide block 6360.

Z axis slide block 6160 comprises: Z axis linear guide device 6164; With the armite 6162 that this Z axis linear guide device 6164 is linked with the movable part of X-axis exciting unit 6100.Z axis linear guide device 6164 comprises 1 Z axis track of installation 1 Z axis balladeur train.In addition, Z axis balladeur train is fixed on armite 6162, and Z axis track is fixed on the side of joggling table 6400 via relay arm 6168.

X-axis slide block 6360 comprises 2 X-axis linear guide devices 6164.Each X-axis linear guide device 6164 comprises 1 X-axis track for installing 3 X-axis balladeur trains.

The fixed part of X-axis exciting unit 6100 is fixed on device pedestal 6500 via bearing unit 6150.In addition, the fixed part of Z axis exciting unit 6300 is fixed on device pedestal 6500 via bearing unit 6350.

Bearing unit 6350 is the structure roughly the same with the bearing unit 350 of the first embodiment.In addition, bearing unit 6150 is different from the bearing unit 150 of the first embodiment, is provided with 2 air bellows 6156 be arranged in the Z-axis direction, replaces spring device 156.

In X-axis exciting unit 6100, form square groove 6110a in the Y direction two sides of the fixed part of level brake.In addition, the protrusion 6158a chimeric with square groove 6110a is formed in the moveable block of bearing unit.By the Qian He of this square groove 6110a with protrusion 6158a, the fixed part of X-axis exciting unit 6100 does not move in the X-axis direction relative to the moveable block of bearing unit.

It is more than the explanation of the illustrative embodiment of the utility model.Embodiment of the present utility model is not limited to above-mentioned explanation, can do various distortion in the technical thought range that the record by technical scheme shows.Such as, according to the structure of the embodiment that the appropriately combined those skilled in the art of record in the structure of the exemplary embodiment expressed in this specification sheets etc. and/or this specification sheets commonly use etc. and the structure obtained, be also contained in the embodiment of the application's utility model.

The respective embodiments described above are examples the utility model being applied to power type exciting device, but the utility model is not limited to this structure, use the exciting device of the exciting unit of other kinds direct acting exciting unit, linear motor etc. of direct acting switching mechanism (such as, combine turning motor or oil pressure rotation motor and feed screw mechanism etc. to rotate-) also can be applied to the utility model.

Such as, the exciting device 1 of the first embodiment is example the utility model being applicable to 3 axle power type exciting devices, and certainly, the utility model also can be applied to the power type exciting device of single shaft and diaxon.

In addition, first embodiment uses air bellow as the buffer of the vibration of attenuating supporting unit 350 (fixed part supporting device), but also can use the spring of other kinds with vibration-isolating effect (coil spring of such as steel) or elastic body (vibration-proof rubber etc.) and form.

The linear guide device quantity (1,2,3,4, more than 5) of each axle of slip connect mechanism and configuration, suitably select according to the size of joggling table, the size of measured body or weight distribution and test condition (frequency, amplitude) etc.In addition, intersection guides 364 quantity that the XY slide block 360 of the first embodiment comprises also is not limited to 4, also can be according to the load of the size of joggling table, measured body and test condition etc. 5,6,7,8,9 or its more than.

In addition, the Uniaxle excitation device of the 5th embodiment comprises antagonistic force framework 5600, but also can not possess antagonistic force framework 5600 and form.In addition, also can antagonistic force framework be set in 2 axles and 3 axle exciting devices and form.Now, antagonistic force framework is such as fixed on device pedestal.

The explanation of Reference numeral

1 ... power type 3 axle exciting device (exciting device),

10 ... mechanism part,

20 ... control part,

30 ... measurement unit,

40 ... power supply unit,

50 ... interface portion,

100 ... X-axis exciting unit,

160 ... YZ slide block,

200 ... Y-axis exciting unit,

260 ... ZX slide block,

300 ... Z axis exciting unit,

360 ... XY slide block,

400 ... joggling table,

500 ... device pedestal.

Claims (10)

1. a power type actuator, is characterized in that, comprising:

The fixed part of tubular;

Be accommodated in the cylinder of described fixed part, moveable movable part on cylinder axle; With

Be arranged on the elastic mechanism between described fixed part and described movable part.

2. power type actuator as claimed in claim 1, is characterized in that:

Described movable part is flexibly remained on the center position on described cylinder axis direction by described elastic mechanism relative to described fixed part.

3. power type actuator as claimed in claim 1, is characterized in that:

Described elastic mechanism comprises:

Be fixed on the fixture construction portion of described fixed part;

Be fixed on the movable formations of described movable part; With

Be arranged on the elastic element between described fixture construction portion and described movable formations,

Described elastic element has been applied in and has preloaded.

4. power type actuator as claimed in claim 3, is characterized in that:

Described elastic element comprises air bellow or coil spring.

5. the power type actuator as described in claim 3 or 4, is characterized in that:

Described fixture construction portion has: towards the first stationary plane of described cylinder axis direction; And second stationary plane reverse with described first stationary plane,

Described movable formations has: first movable surface relative with described first stationary plane; And second movable surface relative with described second stationary plane,

Described elastic element comprises: be clipped in the first elastic element between described first stationary plane and described first movable surface; And the second elastic element be clipped between described second stationary plane and described second movable surface.

6. power type actuator as claimed in claim 5, is characterized in that:

Described fixture construction portion comprises the dividing plate being fixed on described fixed part,

Described movable formations comprises: first pressing plate relative with described dividing plate; With second pressing plate relative with described dividing plate in the opposition side of described first pressing plate,

Described first elastic element is arranged between described dividing plate and described first pressing plate,

Described second elastic element is arranged between described dividing plate and described second pressing plate,

Described fixture construction portion comprises the bar being fixed on described movable part,

The through hole passed for described bar is provided with at described dividing plate,

Described first pressing plate is the first flange part being formed at described bar.

7. power type actuator as claimed in claim 6, is characterized in that:

Described bar has external thread part,

Described second pressing plate is the second flange part being formed at the nut engaged with described external thread part.

8. power type actuator as claimed in claim 5, is characterized in that:

Described first elastic element and described second elastic element are coil spring.

9. an exciting device, is characterized in that, comprising:

Joggling table;

Drive the horizontal actuator of described joggling table in the horizontal direction; With

Vertical drives the vertical actuator of described joggling table,

Described horizontal actuator is be configured to cylinder axle towards the power type actuator according to any one of the claim 1 to 8 of horizontal direction.

10. exciting device as claimed in claim 9, is characterized in that:

Described vertical actuator comprises:

The fixed part of tubular;

Movable part, its part is accommodated in the hollow bulb of described fixed part, and the axis direction of described fixed part is driven reciprocally; With

Support the air bellow of described movable part from below.