CN204924982U - Inner surface inspection equipment - Google Patents

Inner surface inspection equipment Download PDF

Info

Publication number
CN204924982U
CN204924982U CN201520328121.9U CN201520328121U CN204924982U CN 204924982 U CN204924982 U CN 204924982U CN 201520328121 U CN201520328121 U CN 201520328121U CN 204924982 U CN204924982 U CN 204924982U
Authority
CN
China
Prior art keywords
end side
surface inspection
inspection equipment
gas passage
shell
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201520328121.9U
Other languages
Chinese (zh)
Inventor
野村昭
天野阳一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nidec Tosok Corp
Original Assignee
Nidec Tosok Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nidec Tosok Corp filed Critical Nidec Tosok Corp
Application granted granted Critical
Publication of CN204924982U publication Critical patent/CN204924982U/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Instruments For Viewing The Inside Of Hollow Bodies (AREA)

Abstract

The utility model relates to an inner surface inspection equipment, it is for disposing the end equipment that comes the state of the internal surface of inspection hole in the inside in the hole by the inspection part. It includes: dispose in the end side, and will follow the reflecting part of the distolateral reflection of smooth catatoxy of radial outside incident, the camera unit that make a video recording is carried out the light that comes from the reflecting part, along axially extended optical channel between reflecting part and camera unit, along axially extended first gas passage, from the radial second gas passage of first gas passage orientation, to the leading -in gaseous gas introduction portion of first gas passage, dispose in the end side, and will it is gaseous from the second gas passage to outside exhaust gas vent, and measure by the flow of the leading -in extremely gas of first gas passage or press force measurement portion. The axial scope of optical channel and the axial scope of first gas passage are overlapped. Consequently, the inspection internal surface when measuring the internal diameter, for equipment set up by the process of inspection part only once can, can improve the operating efficiency.

Description

Inner surface inspection equipment
Technical field
The utility model relates to a kind of inner surface inspection equipment of state of inside surface of inspection hole.
Background technology
In the various equipment such as electrical equipment and automobile, there is cartridge or there are the parts in cylindrical hole portion.Parts as this shape are the pipeline flowing through fluid therein, or the position chimeric with miscellaneous part.Therefore, require do not have the error of the defect such as crackle or bubble, formed precision little at the inside surface of tubular.Such as in the cylinder of car engine, require that cylindric inside surface is finish-machined to high precision.
Therefore, in existing technology, about the parts of tubular or the hole portion of parts, in order to the inside surface of inspection hole has zero defect, use inner surface inspection equipment.About inner surface inspection equipment of the prior art, such as, be recorded in No. 2009-69374, Japanese Kokai.
In the existing inner surface inspection equipment described in No. 2009-69374, Japanese Kokai, by changing into image by visual for the inner surface configuration in hole, judge the inside surface whether existing defects in hole.But the inner surface inspection equipment in this publication does not have the function of the internal diameter of measured hole.Therefore, the error by using the internal diameter in inner diameter measurement device measuring this hole different from inner surface inspection equipment to determine whether formed precision.
But, in the prior art, owing to using different equipment inspection inside surfaces and measuring internal diameter, therefore same parts are needed to the operation carrying out being arranged at equipment for twice.And owing to using different equipment inspection inside surfaces and measuring internal diameter, therefore, in order to will abnormal part be detected when checking inside surface and detect the partial association of the trueness error of internal diameter when measuring internal diameter, need to obtain in the position data checked in inside surface with in the consistance measuring the position data in internal diameter.
Utility model content
The purpose of this utility model is to provide a kind of technology that can improve the operating efficiency checking inside surface and measure internal diameter.
First aspect exemplified by the application relates to a kind of inner surface inspection equipment, it extends vertically from cardinal extremity terminad, and the inside in the hole of part being inspected is configured to end described in major general, check the state of the inside surface in the described hole of the formation of described part being inspected, described inner surface inspection equipment comprises: reflecting part, described reflecting part is configured at described end side, and is reflected to described base end side by the light from radial outside incidence; Image unit, described image unit is configured at described base end side relative to described reflecting part, and makes a video recording to the light from described reflecting part; Optical channel, described optical channel extends vertically between described reflecting part and described image unit; First gas passage, described first gas passage extends vertically; Second gas passage, described second gas passage is from the described end side of described first gas passage towards radial direction; Gas introduction part, described gas introduction part imports gas to described first gas passage; Exhausr port, described exhausr port is configured at described end side, and is externally discharged from described second gas passage by described gas; And measurement section, described measurement section measurement is fed to flow or the pressure of the described gas in described first gas passage, the axial range of described optical channel and the axial range overlap of described first gas passage.
Further, be further characterized in that also have the shell of the tubular extended vertically, optical channel and the first gas passage are configured at the inside of shell.Be further characterized in that, also have the inside being contained in shell and the rod-shaped lens extended vertically, rod-shaped lens has reflecting part in the end of end side, and the inside of rod-shaped lens is optical channel.Be further characterized in that, the first gas passage is the space between the outer peripheral face of rod-shaped lens and the inner peripheral surface of shell.Be further characterized in that, the inner peripheral surface of the encirclement rod-shaped lens of shell is cylindric, and rod-shaped lens is cylindric.Be further characterized in that, rod-shaped lens has the recess caved in from the end face of end side to base end side, and recess is reflecting part.Be further characterized in that, the end of the end side of rod-shaped lens is given prominence to than the terminad side, end of the end side of shell, reflecting part be configured to end than the end side of shell at least partially by described end side.Be further characterized in that, shell and rod-shaped lens utilize same material and are formed.Be further characterized in that, shell and rod-shaped lens utilize glass and are formed.Be further characterized in that, inner surface inspection equipment also has the cardinal extremity lid of the opening of the base end side being installed on shell, and cardinal extremity lid has the cardinal extremity installation portion installing rod-shaped lens.
Be further characterized in that, cardinal extremity lid and rod-shaped lens utilize same material and are formed.Be further characterized in that, inner surface inspection equipment also has the end cap of the opening of the end side being installed on shell, and end cap has the fixed orifice of fixing rod-shaped lens.Be further characterized in that, optical channel and the first gas passage are the same space of the inside of shell.Be further characterized in that, inner surface inspection equipment also has: catoptron, and catoptron has reflecting part on the surface of base end side; And support, support is transparent and cylindrically, support is configured at the end of the end side of shell, and supporting catoptron.Be further characterized in that, reflecting part is from base end side towards the expanding cone shape of end side.Be further characterized in that, inner surface inspection equipment has two described exhausr ports, and an exhausr port is to the direction Exhaust Gas contrary with another exhausr port.
First aspect exemplified by the utility model, can improve the operating efficiency checking inside surface and detect internal diameter.
By referring to the detailed description of accompanying drawing to preferred implementation of the present utility model, above-mentioned and other features, key element, step, feature and advantage of the present utility model more clearly can be understood.
Accompanying drawing explanation
The schematic diagram of the inner surface inspection system of Fig. 1 involved by the first embodiment.
The cut-open view of the inner surface inspection equipment of Fig. 2 involved by the first embodiment.
The side view of the inner surface inspection equipment of Fig. 3 involved by the first embodiment.
Fig. 4 is the process flow diagram of the flow chart illustrated in inner surface inspection system.
The cut-open view of the inner surface inspection equipment of Fig. 5 involved by a variation.
The cut-open view of the inner surface inspection equipment of Fig. 6 involved by a variation.
The cut-open view of the inner surface inspection equipment of Fig. 7 involved by a variation.
The cut-open view of the inner surface inspection equipment of Fig. 8 involved by a variation.
Embodiment
Below, with reference to accompanying drawing, the embodiment illustrated in the utility model is described.In addition, in this application, the direction of the centerline axis parallel with shell is called " axis ", the direction orthogonal with central axis is called " radial direction ", be called along the circular arc direction centered by central axis " circumference ".
(1. the first embodiment)
(structure of 1-1. inner surface inspection system)
The schematic diagram of the inner surface inspection system 1 of Fig. 1 involved by the first embodiment.Fig. 2 is the cut-open view of inner surface inspection equipment 10.Fig. 3 is the side view observed from the end side of inner surface inspection equipment 10.As shown in Figure 1, inner surface inspection system 1 has inner surface inspection equipment 10, control part 11, platform 12, gas supply part 13 and monitor 14.
Inner surface inspection equipment 10 is such equipment: extend vertically from cardinal extremity terminad, and the inside being configured at the hole 81 of part being inspected 8 to its end of major general is to check the state of the inside surface in the formation hole 81 of part being inspected 8.Inner surface inspection equipment 10 checks the inside surface in that such as form the various equipment such as electrical equipment and automobile, that the inside surface of cartridge or parts have hole portion.As shown in Figure 2, inner surface inspection equipment 10 has shell 2, rod-shaped lens 3, image unit 4 and light source 5.
Shell 2 be centrally axis 9 extend from base end side terminad side, parts in general cylindrical shape.The shell 2 of present embodiment is formed by glass, but shell 2 also can be formed by other material of metal or the resins etc. such as aluminium.Shell 2 has base end part 21, cylindrical portion 22 and terminal part 23.
Base end part 21 is roughly cylindric positions being positioned at most base end side of shell 2.In the present embodiment, the internal diameter of base end part 21 is larger than the internal diameter of cylindrical portion 22.Light source 5 is configured at the inside of base end part 21.
Cylindrical portion 22 is the roughly cylindric positions extended vertically from base end part 21 towards end side.Rod-shaped lens 3 and the first gas passage 61 described later are configured at the inside of cylindrical portion 22.In the present embodiment, the inner peripheral surface of cylindrical portion 22 is cylindric.That is, the inner peripheral surface of the part of the encirclement rod-shaped lens 3 in shell 2 is cylindric.
Terminal part 23 is the positions of a ring-type part for the opening of the end side of cylindrical portion 22 covered.Terminal part 23 extends from the end of the end side of cylindrical portion 22 towards radially inner side.Further, the end aperture 231 of the circle of fixing for rod-shaped lens intercalation is provided with in the central authorities of terminal part 23.
Rod-shaped lens 3 is cylindrical lens of centrally axis 9 extension.As long as rod-shaped lens 3 of the present utility model is formed by glass, but the high material of light transmission, also can be formed by other the material such as resin.
Rod-shaped lens 3 has the recess 31 caved in from the end face of its end side towards base end side.Recess 31 is formed as from base end side towards the expanding cone shape of end side.The surface of the recess 31 of rod-shaped lens 3 is polished and form reflecting part 32, and the light from radial outside incidence reflects to base end side by reflecting part 32, and is reflected to radial outside by the light from base end side incidence.
In addition, the bus of the cone shape of reflecting part 32 is 45 degree relative to central axis 9.Thus, from radial outside towards the light of central axis 9 incidence reflecting part 32 centrally axis 9 reflect from end side to base end side, and not rod-shaped lens 3 outer peripheral face reflection and towards the base end side end of rod-shaped lens 3.
In addition, in the present embodiment, mirror finish has been carried out to the surface of the recess 31 of rod-shaped lens 3.The reflectivity at reflecting part 32 place can be improved thus.Further, in the present embodiment, reflecting part 32 is configured at the most end side of inner surface inspection equipment 10.Thus, even if in the hole of part being inspected when axis is longer, also can check to the end.
The end of the base end side of rod-shaped lens 3 is grind to form plane cardinal extremity face 33.Cardinal extremity face 33 is relative to central axis 9 arranged perpendicular.
The end of the base end side of rod-shaped lens 3 is supported by cardinal extremity lid 24.Cardinal extremity lid 24 is installed on the end of the base end side of the cylindrical portion 22 of shell 2.Cardinal extremity lid 24 have the opening of the base end side covering cylindrical portion 22 in the plectane portion 241 of tabular, and give prominence to from terminad side, plectane portion 241 in circular cardinal extremity installation portion 242.The inner peripheral surface of cylindrical portion 22 is fixed in the outer peripheral face intercalation of cardinal extremity installation portion 242.Further, the outer peripheral face near the end of the base end side of rod-shaped lens 3 is fixed by intercalation and is installed on the inner peripheral surface of cardinal extremity installation portion 242.Thus, cardinal extremity installation portion 242 keeps the end of the base end side of rod-shaped lens 3.
In addition, shell 2 and cardinal extremity lid 24 can fix by being pressed into, and also can be fixed by additive methods such as bondings.Further, cardinal extremity lid 24 and rod-shaped lens 3 can fix by being pressed into, and also can be fixed by additive methods such as bondings.Further, the seals such as O type ring can also have been got involved between shell 2 and cardinal extremity lid 24 and between cardinal extremity lid 24 and rod-shaped lens 3.
In the present embodiment, in the inside of shell 2, the space of base end part 21 inside was cut off by cardinal extremity lid 24 with being communicated with of the space of the inside of cylindrical portion 22.That is, cardinal extremity lid 24 is communicated with cut-out in the inside of shell 2 by base end side and end side.Thus, gas is prevented to reveal from the end of the base end side of the first gas passage 61 described later.
Further, cardinal extremity lid 24 also can be integrally formed with rod-shaped lens 3.That is, rod-shaped lens 3 also can have fixed part that be equivalent to cardinal extremity lid 24, that be fixed relative to shell.
The inside of the end aperture 231 of the terminal part 23 of shell 2 is fixed in the end side intercalation of rod-shaped lens 3.Rod-shaped lens 3 and terminal part 23 can fix by being pressed into, and also can be fixed by additive methods such as bondings.Further, between rod-shaped lens 3 and terminal part 23, the seals such as O type ring can also have been got involved.In the present embodiment, in the bearing of rod-shaped lens 3 with terminal part 23, the space of the inside of the cylindrical portion 22 of shell 2 is cut-off with being communicated with of space outerpace.Therefore, prevent gas from the end leakage of the end side of the first gas passage 61 described later.
The end of the end side of rod-shaped lens 3 is given prominence to than the terminad side, end of the end side of shell 2.Therefore, reflecting part 32 be configured to end than the end side of shell 2 at least partially by end side.Thus, as illustrated with double dot dash line in Fig. 2, in the end of the end side than shell 2 by the position of end side, the light from radial outside incidence reflects to base end side by reflecting part 32.
The inside of rod-shaped lens 3 is a part for optical channel 30, and it transmits from axial end side towards the light of base end side to cardinal extremity face 33 from reflecting part 32, and the light inputted to cardinal extremity face 33 from light source 5 is transmitted terminad side from axial base end side.
In the present embodiment, the first gas passage 61 is arranged at the inside of shell 2.Further, the second gas passage 62, gas introduction part 63 and exhausr port 64 are arranged at shell 2.
First gas passage 61 is the spaces between the inner peripheral surface of the outer peripheral face of rod-shaped lens 3 and the cylindrical portion 22 of shell 2.First gas passage 61 extends in roughly cylindric vertically in the inside of shell 2.
Second gas passage 62 is formed by from the through through hole to outside surface of the inside surface of cylindrical portion 22.Second gas passage 62 is configured near the distal-side end portion of cylindrical portion 22.The cylindrical portion 22 of present embodiment has two the second gas passages 62.As shown in Figure 2, two the second gas passages 62 are configured at axial same position.Further, as shown in Figure 3, second gas passage 62 is configured at another second gas passage 62 position being relevant to central axis 9 symmetry.
Second gas passage 62 generally perpendicularly extends towards radial outside relative to axial near the end of the end side of the first gas passage 61.Thus, the second gas passage 62 is communicated with near the end of the end side of the first gas passage 61 with the space of the outside of shell 2.
Gas introduction part 63 is formed by from the through through hole to outside surface of the inside surface of cylindrical portion 22.Gas introduction part 63 is configured near the base end side end of cylindrical portion 22.Gas supply part 13 is connected to gas introduction part 63.Thereby, it is possible to provide gas via gas introduction part 63 to the inside of the first gas passage 61 from gas supply part 13.
The opening of the end of the radial outside of the second gas passage 62 is respectively as the exhausr port 64 from the second gas passage 62 externally Exhaust Gas.As described above, because the second gas passage 62 is configured near the end of the end side of cylindrical portion 22, exhausr port 64 is also configured near the end of the end side of inner surface inspection equipment 10.
By said structure, when gas is imported into gas introduction part 63, this gas is carried from gas introduction part 63 to the first gas passage 61.Then this gas enters from the thruster of base end side terminad vertically in the first gas passage 61, discharges respectively from two exhausr ports 64 via two the second gas passages 62 towards radial outside.
In the present embodiment, shell 2, rod-shaped lens 3 and cardinal extremity lid 24 are all formed by glass.Due to the good processing accuracy of glass, thermotolerance is high, and not easily expands, and is therefore applicable to each parts forming inner surface inspection equipment 10.
Because utilize same material to be formed, so the expansion coefficient of shell 2, rod-shaped lens 3 and cardinal extremity lid 24 is identical.Therefore, not influenced by ambient temperature, the alignment of shell 2, rod-shaped lens 3 and cardinal extremity lid 24 can be guaranteed.Thereby, it is possible to guarantee the alignment of optical channel 30 in rod-shaped lens 3 and the first gas passage 61.
Further, by being formed shell 2, rod-shaped lens 3 and cardinal extremity lid 24 by same material, be not easy to produce gap between each parts.In the inner surface inspection equipment 10 of present embodiment, because the first gas passage 61 is configured at the inside of shell 2, if so produce gap between parts, there is gas danger to the external leakage in the inside of base end part 21 or terminad hole 231 from the first gas passage 61.Therefore, each parts are formed effective especially in the present embodiment by same material.
Image unit 4 is for having the CCD camera of camera lens 41.Image unit 4 is configured at base end side relative to reflecting part 32, and makes a video recording to the light of the axis from reflecting part 32.In the present embodiment, the camera lens 41 of image unit 4 is configured at the axial base end side of the aftermentioned peristome 51 of light source 5.That is, camera lens 41 is opposed in axis with the cardinal extremity face 33 of rod-shaped lens 3 across peristome 51.Thus, image unit 4 can be made a video recording via cardinal extremity face 33 and peristome 51 image of radial outside of reflecting part 32 to the reflecting part 32 being mapped in rod-shaped lens 3.
Light source 5 is formed as ring-type, and has peristome 51 in central authorities.Thus, light source 5 and rod-shaped lens 3 be not axially overlapping.Therefore, from the inside of rod-shaped lens 3 towards the light of axial base end side through cardinal extremity lid 24, through comprise peristome 51 shell 2 base end part 21 in space and towards the camera lens 41 of image unit 4.Thus, optical channel 30 extends vertically between reflecting part 32 and the camera lens 41 of image unit 4.That is, the inner space of the inside of rod-shaped lens 3, cardinal extremity lid 24 and base end part 21 forms optical channel 30.Like this, in inner surface inspection equipment 10, optical channel 30 and the first gas passage 61 are all configured at the inside of shell 2.
Light source 5 irradiates light towards end side.As shown in phantom in Figure 2, the light irradiated from light source 5 is incident to rod-shaped lens 3 via cardinal extremity lid 24, and reflects at the outer peripheral face of rod-shaped lens 3, while advance towards end side, and is reflected to radial outside by reflecting part 32.Thus, the part of the light irradiated from light source 5 irradiates the inside surface in hole 81 of part being inspected 8 towards the radial outside of reflecting part 32.Consequently, at base end side, can make a video recording by the image of the inside surface in reflecting part 32 pairs of holes 81.
As shown in Figure 1, in the present embodiment, control part 11 is made up of PC.Control part 11 is electrically connected with image unit 4, light source 5, platform 12, gas supply part 13 and monitor 14.Control part 11 controls the driving of light source 5, platform 12 and gas supply part 13.Further, by the image S4 exported from image unit 4 and the pressure information S132 input control portion 11 exported from the pressure/voltage transformating part 132 of gas supply part 13.Control part 11 calculates the internal diameter S111 in hole 81 according to pressure information S132.Then, the image S4 inputted from image unit 4 and internal diameter S111 exports to monitor 14 by control part 11.
Platform 12 has mounting table 121 and platform drive division 122.Inner surface inspection equipment 10 is placed in mounting table 121.Platform drive division 122 is travel mechanisms of the mounting table 121 such as in inside with motor.Platform drive division 122 makes position (vertical direction orthogonal with x-axis direction and the y-axis direction) movement in the x-axis direction of mounting table 121 (axial, horizontal direction for inner surface inspection equipment 10), y-axis direction (horizontal direction orthogonal with x-axis direction), z-axis direction.
In the present embodiment, by inputting instruction by operator to control part 11, and from control part 11 to platform drive division 122 input position regulating command signal S112.Thus, platform drive division 122 regulates the position of all directions of mounting table 121 according to position adjustments command signal S112.In addition, control part 11 also such as can calculate the target location of all directions of mounting table 121 and outgoing position regulating command signal S112 according to the signal etc. of position-detection sensor (not shown).
Gas supply part 13 has air supply source 131 and pressure/voltage transformating part 132.The gas being adjusted to authorised pressure by regulator equal pressure adjusting mechanism, according to the inner diameter measurement command signal S113 exported from control part 11, is supplied to the first gas passage 61 from gas introduction part 63 by pressure/voltage transformating part 132 by air supply source 131.Consequently, this gas is discharged from exhausr port 64 towards radial outside via the first gas passage 61 and the second gas passage 62.In addition, the gas carried from air supply source 131 such as uses air.
At this moment, the pressure of this gas in pressure/voltage transformating part 132 changes along with the size of the internal diameter of hole 81 near exhausr port 64.The pressure alteration of this gas via pressure/voltage transformating part 132 is become the pressure information S132 as voltage signal and exports to control part 11 by pressure/voltage transformating part 132.Like this, pressure/voltage transformating part 132 measures the pressure of the gas in gas introduction part 63.That is, pressure/voltage transformating part 132 is the measurement section of the pressure measuring the gas be fed in the first gas passage 61.
In addition, the measurement section of the flow of the gas measured in gas introduction part 63 or the first gas passage 61 also can be used to replace pressure/voltage transformating part 132.In that situation, control part 11 calculates the internal diameter S111 in hole 81 according to the flow of the gas in gas introduction part 63.
Monitor 14 is the image S4 of display from control part 11 output and the display of internal diameter S111.In the present embodiment, because image S4 and internal diameter S111 is shown in monitor 14 simultaneously, check therefore, it is possible to image S4 and internal diameter S111 is associated.
In the present embodiment, shell 2 has two exhausr ports 64.Further, an exhausr port 64 is vented round about with another exhausr port 64.That is, two exhausr ports 64 are configured at phase mutual edge distance position farthest circumferential in the outer peripheral face of shell 2.Therefore, it is possible to the internal diameter in more Measurement accuracy hole 81.
(1-2. is about flow chart)
Next, be described with reference to the flow chart of Fig. 4 to the inner surface inspection and inner diameter measurement that employ inner surface inspection system 1.Fig. 4 is the process flow diagram of the flow chart represented in inner surface inspection system 1.
First, part being inspected 8 is arranged at inner surface inspection system 1 (step ST101).Next, instruction is inputted to control part 11 by operator, thus inching is carried out in the position in the x-axis direction of platform drive division 122 pairs of mounting tables 121, y-axis direction and z-axis direction, makes the hole 81 position alignment (step ST102) of inner surface inspection equipment 10 and part being inspected 8.At this moment, make the central axis 9 of inner surface inspection equipment 10 consistent with the central axis 80 in hole 81.Further, near the entrance end of inner surface inspection equipment 10 being configured at hole 81.
Next, control part 11 drive table drive division 122, makes inner surface inspection equipment 10 move to the positive dirction in x-axis direction, while carry out inner surface inspection operation (step ST103).That is, while make the end of inner surface inspection equipment 10 move from the entrance in hole 81 to the end, inner surface inspection operation is carried out.Specifically, driving light source 5 is via the inside surface of reflecting part 32 by illumination directive hole 81, and image unit 4 is made a video recording via the image of reflecting part 32 to this inside surface.Thus, control part 11 is stored in by the image data of this inside surface of the position in x-axis direction.
Next, control part 11 drive table drive division 122, makes inner surface inspection equipment 10 move to the negative direction in x-axis direction, while carry out inner diameter measurement operation (step ST104).That is, while make the end of inner surface inspection equipment 10 move from the end in hole 81 to Way in, inner diameter measurement operation is carried out.Specifically, gas is imported gas introduction part 63 from air supply source 131 via pressure/voltage transformating part 132, control part 11 calculates the internal diameter S111 in hole 81 according to the air pressure measured at pressure/voltage transformating part 132.Thus, control part 11 is stored in by the internal diameter data in the hole 81 of the position in x-axis direction.
Then, after inner surface inspection operation and inner diameter measurement operation terminate, part being inspected 8 is taken off (step ST105) from inner surface inspection system 1.
In the present embodiment, inner surface inspection equipment 10 has carried out inner surface inspection operation and inner diameter measurement operation during the round trip of x-axis direction, but the utility model is not limited to this.Inner surface inspection equipment 10 also can carry out inner surface inspection operation during the round trip of x-axis direction always, next during round trip again, carries out inner diameter measurement operation always.Further, inner surface inspection operation and inner diameter measurement operation also can be carried out simultaneously.
Thus, by using inner surface inspection equipment 10, inner surface inspection and inner diameter measurement can not use equipment separately separately and use an equipment to carry out.Therefore, because the operation of the equipment that part being inspected 8 is arranged at and the operation of part being inspected 8 being taken off of step ST105 being equivalent to step ST101 and step ST102 is only carried out once, therefore improve operating efficiency.
Further, according to said structure, in the present embodiment, the optical channel 30 of inner surface inspection equipment 10 and the overlapping ranges of the first gas passage 61 axis.Thereby, it is possible to the position of the axis of the position of the axis of reflecting part 32 and exhausr port 64 is all configured near the end of inner surface inspection equipment 10.Consequently, even the part being inspected of bottomed cylindrical, also can utilize near an equipment to the bottom in its hole and carry out inner surface inspection and inner diameter measurement.
Further, inner surface inspection operation and inner diameter measurement operation are carried out continuously owing to can clip position adjustment operation, and therefore the easy position by the x direction of the image of the inside surface in the hole of part being inspected and the internal diameter in hole associates.Namely can easily the result of inner surface inspection be associated with the result of inner diameter measurement.
(2. variation)
Although be illustrated the embodiment illustrated in the utility model above, the utility model is not defined as above-mentioned embodiment.
The cut-open view of the inner surface inspection equipment 10A of Fig. 5 involved by a variation.Inner surface inspection equipment 10A has shell 2A, catoptron 3A, image unit 4A and light source 5A.Inner surface inspection equipment 10A illustrated in Fig. 5 has the catoptron 3A replacing rod-shaped lens.Further, inner surface inspection equipment 10A has the support 25A of supporting catoptron 3A.
Catoptron 3A has reflecting part 32A on the surface of base end side.Reflecting part 32A is the face from base end side towards the expanding cone shape of end side.
Support 25A is the transparent of the end of the end side being configured at shell 2A and parts cylindrically.In the example of hgure 5, support 25A is formed by glass.Thus, the light from reflecting part 32 towards radial outside and the light transmission support 25A from radial outside towards reflecting part 32A is made.
In the example of hgure 5, the inside surface of shell 2A has been implemented mirror finish.Therefore, the inside surface high-efficiency reflective light of shell 2A, on the other hand, shell 2A not easily allows light transmission.Thus, shown in dotted line, the light irradiated from light source 5A at the internal surface reflection of shell 2A while towards end side propelling, and utilize reflecting part 32A to reflect to radial outside.This light can by irradiating the inside surface in the hole of part being inspected through support 25A.
Further, as shown in double dot dash line, the light inciding the space of the inside of shell 2 from radial outside via support 25A by reflecting part 32A from axial end side towards base end side.That is, the inner space of shell 2A forms the optical channel 30A transmitted from reflecting part 32A to image unit 4A by light.
On the other hand, when gas is imported into the inside of shell 2A from gas introduction part 63A, this gas moves from base end side terminad effluent in the inside of shell 2A, discharges from two exhausr port 64A via the second gas passage 62A towards mutually opposite direction to the outside of shell 2A.That is, the space of the inside of shell 2A forms the first gas passage 61A.
Like this, in the example of hgure 5, optical channel 30A and the first gas passage 61A is the same space of the inside of shell 2A.Inner surface inspection equipment also can not have rod-shaped lens as shown in Figure 3.
The cut-open view of Fig. 6 inner surface inspection equipment 10B involved by other variation.Inner surface inspection equipment 10B has shell 2B, catoptron 3B, image unit 4B and light source 5B.Further, the shell 2B of inner surface inspection equipment 10B is formed by transparent materials such as glass.The inside surface of shell 2B has been implemented mirror finish except the radial outside of catoptron 3B.
Catoptron 3B has reflecting part 32B on the surface of base end side.Reflecting part 32B is the face from base end side towards the expanding conically shape of end side.Shown in dotted line, the light from light source 5B irradiation and towards end side is reflected by the reflecting part 32B of catoptron 3B, and via shell 2B towards radial direction.On the other hand, as shown in double dot dash line, to be reflected by catoptron 3B and towards axial base end side from the radial outside of shell 2B towards the light of catoptron 3B incidence.
Example like that as shown in Figure 6, by forming shell 2B by transparent material, do not need the transparent support of supporting catoptron 3B and shell 2B to be provided separately.
The cut-open view of the inner surface inspection equipment 10C of Fig. 7 involved by other variation.The side view of Fig. 8 for observing from the end side of the inner surface inspection equipment 10C illustrated in Fig. 7.Inner surface inspection equipment 10C has shell 2C, cardinal extremity lid 24C, end cap 26C, rod-shaped lens 3C, image unit 4C and light source 5C.Inner surface inspection equipment 10C has the end cap 26C of the terminal part replacing shell.
End cap 26C is installed on the opening of the end side of shell 2C.Further, end cap 26C has the fixed orifice 261C of fixing rod-shaped lens 3C.Shell 2C and end cap 26C can fix by being pressed into, and also can be fixed by additive methods such as bondings.Further, end cap 26C and rod-shaped lens 3C can fix by being pressed into, and also can be fixed by additive methods such as bondings.
Further, between shell 2C and end cap 26C and between end cap 26C and rod-shaped lens 3C, the seals such as O type ring can also have been got involved.In the example of Fig. 7 and Fig. 8, in the bearing of shell 2C and end cap 26C and the bearing at end cap 26C and rod-shaped lens 3C, shell 2C is cut-off with being communicated with of space outerpace.
As illustrated in Fig. 7 and Fig. 8, inner surface inspection equipment also can have the end cap of the terminal part replacing shell.
Further, in the above-described embodiment, implement mirror finish at reflecting part, but the utility model is not limited to this.As long as the light from radial outside incidence to specify above reflectivity (such as, 60%) reflection, then also can not be carried out mirror finish by reflecting part.
Light source also can not be configured at the base end side of optical channel.The organic EL sheet material of flexibility etc. of surrounding that also can use the LED near the end being configured at shell as light source or be wound in shell replaces being configured at the lamp of the base end side of optical channel.
In addition, about the shape in the trickle portion of inner surface inspection equipment, also can be different from each accompanying drawing of the application.Further, not producing in the scope of contradiction, also each component occurred in above-mentioned embodiment or variation suitably can be combined.

Claims (16)

1. an inner surface inspection equipment, it extends vertically from cardinal extremity terminad, and is configured at the inside in the hole of part being inspected to end described in major general, checks the state of the inside surface in the described hole of the formation of described part being inspected,
The feature of described inner surface inspection equipment is, comprising:
Reflecting part, described reflecting part is configured at described end side, and is reflected to described base end side by the light from radial outside incidence;
Image unit, described image unit is configured at described base end side relative to described reflecting part, and makes a video recording to the light from described reflecting part;
Optical channel, described optical channel extends vertically between described reflecting part and described image unit;
First gas passage, described first gas passage extends vertically;
Second gas passage, described second gas passage is from the described end side of described first gas passage towards radial direction;
Gas introduction part, described gas introduction part imports gas to described first gas passage;
Exhausr port, described exhausr port is configured at described end side, and is externally discharged from described second gas passage by described gas; And
Measurement section, described measurement section measurement is fed to flow or the pressure of the described gas in described first gas passage,
The axial range of described optical channel and the axial range overlap of described first gas passage.
2. inner surface inspection equipment according to claim 1, is characterized in that,
Described inner surface inspection equipment also has the shell of the tubular extended vertically,
Described optical channel and described first gas passage are configured at the inside of described shell.
3. inner surface inspection equipment according to claim 2, is characterized in that,
Described inner surface inspection equipment also has the inside being contained in described shell and the rod-shaped lens extended vertically,
Described rod-shaped lens has described reflecting part in the end of described end side,
The inside of described rod-shaped lens is described optical channel.
4. inner surface inspection equipment according to claim 3, is characterized in that,
Described first gas passage is the space between the outer peripheral face of described rod-shaped lens and the inner peripheral surface of described shell.
5. the inner surface inspection equipment according to claim 3 or 4, is characterized in that,
The inner peripheral surface of the described rod-shaped lens of encirclement of described shell is cylindric,
Described rod-shaped lens is cylindric.
6. inner surface inspection equipment according to claim 5, is characterized in that,
Described rod-shaped lens has the recess caved in described base end side from the end face of described end side,
Described recess is described reflecting part.
7. inner surface inspection equipment according to claim 3, is characterized in that,
The end of the described end side of described rod-shaped lens is more outstanding to described end side than the end of the described end side of described shell,
Described reflecting part be configured to end than the described end side of described shell at least partially by described end side.
8. inner surface inspection equipment according to claim 3, is characterized in that,
Described shell and described rod-shaped lens utilize same material and are formed.
9. inner surface inspection equipment according to claim 8, is characterized in that,
Described shell and described rod-shaped lens utilize glass and are formed.
10. the inner surface inspection equipment according to claim 3 or 4, is characterized in that,
Described inner surface inspection equipment also has the cardinal extremity lid of the opening of the described base end side being installed on described shell,
Described cardinal extremity lid has the cardinal extremity installation portion installing described rod-shaped lens.
11. inner surface inspection equipment according to claim 10, is characterized in that,
Described cardinal extremity lid and described rod-shaped lens utilize same material and are formed.
12. inner surface inspection equipment according to claim 3, is characterized in that,
Described inner surface inspection equipment also has the end cap of the opening of the described end side being installed on described shell,
Described end cap has the fixed orifice of fixing described rod-shaped lens.
13. inner surface inspection equipment according to claim 2, is characterized in that,
Described optical channel and described first gas passage are the same space of the inside of described shell.
14. inner surface inspection equipment according to claim 13, is characterized in that,
Described inner surface inspection equipment also has:
Catoptron, described catoptron has described reflecting part on the surface of described base end side; And
Support, described support is transparent and cylindrically, described support is configured at the end of the described end side of described shell, and supports described catoptron.
15. inner surface inspection equipment according to claim 1, is characterized in that,
Described reflecting part is from described base end side towards the expanding cone shape of described end side.
16. inner surface inspection equipment according to claim 1, is characterized in that,
Described inner surface inspection equipment has two described exhausr ports,
A described exhausr port discharges described gas to the direction contrary with exhausr port described in another.
CN201520328121.9U 2014-05-26 2015-05-20 Inner surface inspection equipment Expired - Fee Related CN204924982U (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2014107817A JP6294763B2 (en) 2014-05-26 2014-05-26 Inner surface inspection device
JP2014-107817 2014-05-26

Publications (1)

Publication Number Publication Date
CN204924982U true CN204924982U (en) 2015-12-30

Family

ID=54841751

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201520328121.9U Expired - Fee Related CN204924982U (en) 2014-05-26 2015-05-20 Inner surface inspection equipment

Country Status (2)

Country Link
JP (1) JP6294763B2 (en)
CN (1) CN204924982U (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019066516A (en) * 2017-09-28 2019-04-25 日本電産トーソク株式会社 Interior surface inspection device
JP6675749B1 (en) * 2019-12-13 2020-04-01 オンライン・ビジネス・ソリューション株式会社 Cylindrical inner surface inspection device
DE102021131492B4 (en) 2021-11-30 2024-02-08 Tichawa Vision Gmbh Device for testing internal surfaces
KR102461512B1 (en) * 2022-03-27 2022-11-01 주식회사 상아정공 Sleeve inspection device using vision and endoscope

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52147455A (en) * 1976-06-02 1977-12-07 Sumitomo Metal Ind Air mictometer head for pipe bore measurement
JPS59103270U (en) * 1982-12-25 1984-07-11 動力炉・核燃料開発事業団 Pressure pipe inspection equipment that can be separated and combined
JPH01276046A (en) * 1988-04-28 1989-11-06 Olympus Optical Co Ltd Endoscope device
JP2839934B2 (en) * 1990-05-31 1998-12-24 ダイハツ工業株式会社 Inspection method for defects on the inner wall of the cylinder
DE102005059550A1 (en) * 2005-12-13 2007-06-14 Siemens Ag Optical measuring device for measuring inner wall of e.g. ear channel, in animal, has rotatable reflector rotatable around rotary axis so that inner wall of cavity is scanned along line circulating rotary axis
JP2007315805A (en) * 2006-05-23 2007-12-06 Kirin Techno-System Co Ltd Surface inspection device
JP5043571B2 (en) * 2007-09-12 2012-10-10 日本電産トーソク株式会社 Inner surface inspection device
JP5622075B2 (en) * 2010-03-05 2014-11-12 西松建設株式会社 Inspection method

Also Published As

Publication number Publication date
JP2015224877A (en) 2015-12-14
JP6294763B2 (en) 2018-03-14

Similar Documents

Publication Publication Date Title
CN204924982U (en) Inner surface inspection equipment
CN103278100B (en) A kind of bore diameter measuring method based on noncontacting proximity sensor combination
US8467046B2 (en) Goniophotometer
KR20110036910A (en) Cylinder diameter measurement
US20100296082A1 (en) Apparatus and method for measuring total luminous flux
CN109751938B (en) High-precision adjusting method and device for large-caliber tooth-shaped reflector component for space camera
US9733066B2 (en) Shape measuring method and device
US20150113779A1 (en) Method for installation of sensors in rotor blades and installation apparatus
JP6571963B2 (en) Inner surface inspection device
CN209841730U (en) Pipeline endoscopic detection device
CN113916160B (en) System and method for measuring multi-hole coaxiality of tracked vehicle chassis
CN105466855A (en) Sample detecting device based on Herroitt multi-reflect pool
JP2014151393A (en) Work assembly apparatus and work assembly method
WO2024103576A1 (en) Visual detection device, calibration method therefor, and camera calibration member thereof
CN106442354A (en) Gas detecting device
CN110146461B (en) Infrared gas detector
CN102004390B (en) Lens module detection system and detection method thereof
JP2007183145A (en) Method and instrument for measuring tubular bore
KR20160054413A (en) Turbocharger arrangement
CN2276629Y (en) Glass blub axiality measuring apparatus
CN101290290A (en) Laser gas concentration measurement equipment probe device
CN208953467U (en) Inner surface inspection device
CN115684201A (en) Device and method for on-line detection of optical performance of lamp
US8570537B1 (en) Method for bore chamfer measurement
CN209372671U (en) A kind of mechanical-optical setup of gas detector

Legal Events

Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20151230

Termination date: 20210520