CN204924955U - Silicon single crystal crystal orientation irrelevance testing arrangement - Google Patents
Silicon single crystal crystal orientation irrelevance testing arrangement Download PDFInfo
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- CN204924955U CN204924955U CN201520609250.5U CN201520609250U CN204924955U CN 204924955 U CN204924955 U CN 204924955U CN 201520609250 U CN201520609250 U CN 201520609250U CN 204924955 U CN204924955 U CN 204924955U
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Abstract
The utility model provides a silicon single crystal crystal orientation irrelevance testing arrangement, including ordinary light source system, optic system, mirror surface and adjustable angle appearance, ordinary light source system's light export and optic system's smooth entry linkage, optic system exports the parallel light, and on the parallel light aperture that passes mirror surface central authorities beats the measured object on arranging the objective table in, the skew degree that the crystal orientation picture on the mirror surface is reflected back in the test of adjustable angle appearance. The utility model discloses utilize ordinary light source system and optic system in order to form suitable parallel light to carrying out special diffuse reflection processing to the mirror surface and reaching suitable diffuse reflection effect, finally realize the purpose that the light image is clear, do benefit to the angle modulation, the preparation step of adjustable ordinary light source system and mirror surface is simple, the utility model discloses easily preparation and test are convenient, can satisfy the test purpose of test material crystal orientation irrelevance, and test loop is simple.
Description
Technical field
The utility model belongs to material crystal orientation technical field of measurement and test, is specifically related to a kind of silicon single crystal crystal orientation irrelevance proving installation.
Background technology
Monocrystalline and orientation material all show superior performance in fields such as semiconductor, electromagnetics, optics and machineries.In the research process of new structure and functional material and device, can run into polycrystal, the monocrystalline of certain macro-size and a large amount of marginal orientation material, crystal orientation test and monocrystalline quality assessment are more and more subject to the attention of researchist.
Crystal orientation irrelevance is the axle of crystal and crystallographic direction when misfitting, and its angle departed from is called crystal orientation irrelevance.Crystal ingot end face and tested crystal orientation are departed from, and etch pit symmetry will depart from, and utilize this characteristic just can determine crystal orientation irrelevance.The common method that crystal orientation is detected has appearance observation, optical orientation method and X-ray diffraction method, and wherein optical orientation method and X-ray diffraction method are all methods conventional in commercial production.
Current domestic without ordinary light source, the crystal orientation irrelevance tester of mechanical type band simple optical path control system, the general X-ray diffraction mode test crystal that adopts is to change now both at home and abroad, and it is unshielded that domestic X-ray diffractometer belongs to open X-ray, and taking of import is higher.
Utility model content
For solving the problems of the technologies described above, the utility model provides a kind of silicon single crystal crystal orientation irrelevance proving installation, this silicon single crystal crystal orientation irrelevance proving installation realizes the irrelevance test of silicon single crystal crystal orientation by utilizing ordinary light source system, light path system and mechanical angle instrument, the open X-ray solving X-ray diffractometer is unshielded, and import take higher problem.
The utility model is achieved by the following technical programs.
A kind of silicon single crystal crystal orientation irrelevance proving installation that the utility model provides, comprises ordinary light source system, light path system, minute surface and angle adjustable instrument; The described light exit of ordinary light source system is connected with the light entrance of light path system, described light path system exports directional light, and directional light is beaten through the aperture of minute surface central authorities and is being placed on the measured object on objective table, described angle adjustable instrument test is reflected back the departure degree of the crystal orientation figure on minute surface.
Optically focused multiplying arrangement in described light path system, first by ordinary light source optically focused, after then forming grating by grating forming apparatus, then forms zero diopter by directional light forming apparatus, and the directional light scioptics of formation export.
Described objective table is adjustable objective table.
The bulb that described ordinary light source system is adjustable lamp socket and is arranged on adjustable lamp socket.
Described ordinary light source system is adjustable ordinary light source system.
Described lens are the compound lens forming standard parallel light.
Diffuse reflection process is carried out on the surface of described minute surface.
The beneficial effects of the utility model are: utilize ordinary light source system and light path system to form suitable directional light, and special diffuse reflection process is carried out to minute surface reach suitable diffuse effect, finally realize the object that light image is clear, be beneficial to angular adjustment, the making step of adjustable ordinary light source system and minute surface is simple, the utility model is easy to make and convenient test, can meet the test purpose of test material crystal orientation irrelevance, test loop is simple.
Accompanying drawing explanation
Fig. 1 is theory diagram of the present utility model;
Fig. 2 is light path sketch of the present utility model;
In figure: 1-ordinary light source system 1,2-light path system 2,3-minute surface 3,4-objective table 4,5-angle adjustable instrument 5.
Embodiment
Further describe the technical solution of the utility model below, but described in claimed scope is not limited to.
A kind of silicon single crystal crystal orientation irrelevance proving installation as depicted in figs. 1 and 2, comprises ordinary light source system 1, light path system 2, minute surface 3 and angle adjustable instrument 5; The light exit of described ordinary light source system 1 is connected with the light entrance of light path system 2, described light path system 2 exports directional light, and directional light is beaten through the aperture of minute surface 3 central authorities and is being placed on the measured object on objective table 4, described angle adjustable instrument 5 test is reflected back the departure degree of the crystal orientation figure on minute surface 3.
Optically focused multiplying arrangement in described light path system 2, first by ordinary light source optically focused, after then forming grating by grating forming apparatus, then forms zero diopter by directional light forming apparatus, and the directional light scioptics of formation export.
Described objective table 4 is adjustable objective table.
The bulb that described ordinary light source system 1 is adjustable lamp socket and is arranged on adjustable lamp socket; Ordinary light source system 1 is adjustable ordinary light source system, can realize the omnibearing adjustment of light source, and the directional light light intensity realized finally by aperture injection enough meets test needs, crystal orientation figure can normally highlightedly be realized on minute surface.Meanwhile, absorb optically focused and form certain light path by having in the position of reasonable adjusting ordinary light source system, light path system 2 with scioptics system, finally ensure that directional light is mapped to sample surfaces from the aperture of minute surface 3, the crystal orientation figure on sample reflexes on minute surface.
Described lens are the compound lens forming standard parallel light.
Diffuse reflection process is carried out on the surface of described minute surface 3, realizes light image clear.
The light exit of the utility model ordinary light source system 1 receives light path system 2, directional light is formed by light path system 2, directional light to be beaten by the aperture on minute surface 3 and is being placed on the treated silicon single crystal flake sample on objective table 4 by the directional light formed, and utilizes angle adjustable instrument to regulate the departure degree testing out the crystal orientation figure being reflected back minute surface; Objective table 4 can all-around mobile.
Silicon single crystal crystal orientation of the present utility model irrelevance tester is non-X-ray diffraction mode also non-He-Ne Lasers, and the simple volume of complete machine is little.
The utility model utilizes ordinary light source and a simple light path system to form suitable directional light, and special diffuse reflection process is carried out to minute surface, finally realize the object that light image is clear, be beneficial to angular adjustment, adjustable ordinary light source system and mirror process make simple, and convenient test, meet the test purpose of test material crystal orientation irrelevance, test loop is simple.
Test loop of the present utility model is utilized to carry out crystal orientation irrelevance test to silicon single crystal material, according to the test result of reality, the test value of material, in specialized range, meets the test purpose of silicon single crystal material crystal orientation irrelevance, test loop is simple, is easy to make and convenient test.
Claims (7)
1. a silicon single crystal crystal orientation irrelevance proving installation, comprise ordinary light source system (1), light path system (2), minute surface (3), objective table (4) and angle adjustable instrument (5), it is characterized in that: the light exit of described ordinary light source system (1) is connected with the light entrance of light path system (2), described light path system (2) exports directional light, and directional light is beaten be placed on the measured object on objective table (4) through the aperture of minute surface (3) central authorities, described angle adjustable instrument (5) test is reflected back the departure degree of the crystal orientation figure on minute surface (3).
2. silicon single crystal crystal orientation as claimed in claim 1 irrelevance proving installation, it is characterized in that: the optically focused multiplying arrangement in described light path system (2) is first by ordinary light source optically focused, then after forming grating by grating forming apparatus, form zero diopter by directional light forming apparatus again, the directional light scioptics of formation export.
3. silicon single crystal crystal orientation as claimed in claim 1 irrelevance proving installation, is characterized in that: described objective table (4) is adjustable objective table.
4. silicon single crystal crystal orientation as claimed in claim 1 irrelevance proving installation, is characterized in that: described ordinary light source system (1) is adjustable lamp socket and the bulb that is arranged on adjustable lamp socket.
5. silicon single crystal crystal orientation as claimed in claim 1 irrelevance proving installation, is characterized in that: described ordinary light source system (1) is adjustable ordinary light source system.
6. silicon single crystal crystal orientation as claimed in claim 2 irrelevance proving installation, is characterized in that: described lens are the compound lens forming standard parallel light.
7. silicon single crystal crystal orientation as claimed in claim 1 irrelevance proving installation, is characterized in that: diffuse reflection process is carried out on the surface of described minute surface (3).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520609250.5U CN204924955U (en) | 2015-08-13 | 2015-08-13 | Silicon single crystal crystal orientation irrelevance testing arrangement |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520609250.5U CN204924955U (en) | 2015-08-13 | 2015-08-13 | Silicon single crystal crystal orientation irrelevance testing arrangement |
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| CN204924955U true CN204924955U (en) | 2015-12-30 |
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| CN201520609250.5U Active CN204924955U (en) | 2015-08-13 | 2015-08-13 | Silicon single crystal crystal orientation irrelevance testing arrangement |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105092583A (en) * | 2015-08-13 | 2015-11-25 | 中国振华集团永光电子有限公司（国营第八七三厂） | Silicon single crystal orientation deviation testing device with common light source |
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2015
- 2015-08-13 CN CN201520609250.5U patent/CN204924955U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105092583A (en) * | 2015-08-13 | 2015-11-25 | 中国振华集团永光电子有限公司（国营第八七三厂） | Silicon single crystal orientation deviation testing device with common light source |
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