CN204885092U - Inside purifier of semiconductor check out test set - Google Patents
Inside purifier of semiconductor check out test set Download PDFInfo
- Publication number
- CN204885092U CN204885092U CN201520474946.1U CN201520474946U CN204885092U CN 204885092 U CN204885092 U CN 204885092U CN 201520474946 U CN201520474946 U CN 201520474946U CN 204885092 U CN204885092 U CN 204885092U
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- CN
- China
- Prior art keywords
- cavity volume
- lithium alloy
- aluminium lithium
- equipment cavity
- alloy sheet
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Abstract
The utility model discloses an inside purifier of semiconductor check out test set, hold chamber, aluminium lithium alloy piece, touch component, feedback control subassembly and collecting board including equipment. The aluminium lithium alloy piece install in equipment holds intracavity portion. Touch component connection the aluminium lithium alloy piece to it gives the aluminium lithium alloy piece to provide the energy. The feedback control subassembly includes sensor and controller, the sensor is installed in equipment appearance intracavity portion, monitoring facilities appearance intracavity portion situation, the controller is connected the sensor respectively and is touched the component, and receiving sensor feedback information and control touch the component. The collecting board is located equipment and is held intracavity and relative with the position of aluminium lithium alloy piece. Through setting up the utility model discloses can shorten the semiconductor effectively and detect device structure time and spare part purge time, increase the lifespan of semiconductor check out test set to increase semiconductor check out test set spare part life.
Description
Technical field
The utility model relates to cleaning equipment, and what be specifically related to is the inner purifier of semiconductor detection.
Background technology
Along with industry manufacture is toward becoming more meticulous development, more and more higher to the purity requirements of production environment and product, the particularly manufacture of semiconductor device, micron-sized contamination particle just can cause great injury to semiconductor device.In correlation technique, the normal semiconductor detector device that uses detects semiconductor device at vacuum state.In order to preventing pollution semiconductor device, semiconductor detector device needs to keep inner cleaning, but semiconductor detector device is often reused itself, is very easily subject to environmental impact, pollutants, thus affects its cleanliness factor and service behaviour
Utility model content
For the problems referred to above, the purpose of this utility model is to provide the inner purifier of semiconductor detection, solve semiconductor detector device and be easily subject to environmental impact, inner pollutants, thus affect the cleanliness factor of semiconductor detector device and the technical problem of service behaviour.
For solving the problems of the technologies described above, the technical solution adopted in the utility model is, the inner purifier of semiconductor detection, comprises equipment cavity volume, also comprises aluminium lithium alloy sheet, touches element, feedback control component and collecting board.It is inner that described aluminium lithium alloy sheet is installed on described equipment cavity volume.Described shake-up element connects described aluminium lithium alloy sheet, and provides the energy to give aluminium lithium alloy sheet.Described feedback control component comprises transducer and controller, and it is inner that described transducer is installed on equipment cavity volume, monitoring equipment cavity volume internal state, and described controller is connecting sensor and shake-up element respectively, and its receiving sensor feedback information also controls to touch element; It is interior and relative with the position of aluminium lithium alloy sheet that described collecting board is located at equipment cavity volume.
As preferably, described transducer comprises the residue transducer detecting residual particles and the temperature sensor measuring aluminium lithium alloy sheet temperature.
As preferably, the inner purifier of described semiconductor detection also comprises cooling device, and described cooling device connects described collecting board.
As preferably, the inner purifier of described semiconductor detection also comprises removable baffle plate, and described removable baffle plate is arranged between aluminium lithium alloy sheet and collecting board, closes or opens the passage between aluminium lithium alloy sheet and collecting board.
As preferably, described equipment cavity volume air pressure inside is lower than the atmospheric pressure outside equipment cavity volume.
As preferably, described equipment cavity volume is also provided with air inlet and gas outlet, and the surface of equipment cavity volume is located in described air inlet and gas outlet, between the inner air inlet of equipment cavity volume and gas outlet, form gas flow channel; Vacuum pump is provided with, by air inlet, gas outlet and gas flow channel control appliance cavity volume air pressure inside outside described equipment cavity volume.
The beneficial effects of the utility model: effectively can shorten semiconductor detection maintenance time and parts cleaning time by arranging the utility model, increase up time of semiconductor detection, thus increase semiconductor detection parts useful life.In addition due to the minimizing of semiconductor detection internal contamination thing, the service behaviour of semiconductor detection is optimized, and semiconductor detection resets time decreased early stage, and operating efficiency improves further.
Accompanying drawing explanation
Accompanying drawing is utilized to be described further utility model, but the embodiment in accompanying drawing does not form any restriction of the present utility model, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawing can also be obtained according to the following drawings.
Fig. 1 is the structural representation of the inner purifier of semiconductor detection, and now baffle plate is in the closed position.
Fig. 2 is the structural representation at another visual angle of Fig. 1.
Fig. 3 is the structural representation of the inner purifier of semiconductor detection, and now baffle plate is in an open position.
Fig. 4 is the structural representation at another visual angle of Fig. 3.
Reference numeral: 102, equipment cavity volume, 104, aluminium lithium alloy sheet, 106, feedback control component, 108, element is touched, 108T, electric heater, 110, collecting board, 112, distillation lithium layer, 114, collecting board surface, 116, transducer, 116R, residue monitoring sensor, 116T, temperature sensor, 118, controller, 120, meter.122, adjuster, 146, power supply, 148, cooling device, 150, removable baffle plate, 154, vacuum pump, 156, gas outlet, 164, gas flow channel, 168, air inlet.
Embodiment
With the following Examples the utility model is further described.
The inner purifier of semiconductor detection, comprises equipment cavity volume 102, also comprises aluminium lithium alloy sheet 104, touches element 108, feedback control component 106 and collecting board 110.It is inner that described aluminium lithium alloy sheet 104 is installed on described equipment cavity volume 102, and described aluminium lithium alloy sheet 104 is detachable and the metallic plate be installed in described equipment cavity volume 102, conveniently changes at any time.In the present embodiment, described aluminium lithium alloy sheet 104 installation site, near described equipment cavity volume 10 inwall, makes to remove part described equipment cavity volume 102 inwall and described aluminium lithium alloy sheet 104 can be driven to depart from described equipment cavity volume 102.
Described shake-up element 108 connects described aluminium lithium alloy sheet 104, and provides the energy to give aluminium lithium alloy sheet 104, and the lithium on aluminium lithium alloy sheet 104 is distilled.Described shake-up element 108 can be electric heater, heating lamp, laser etc., in the present embodiment, described shake-up element 108 is electric heater, described electric heater to be installed in described equipment cavity volume 102 and to contact with aluminium lithium alloy sheet 104, and described electric heater is also connected at the power supply 146 of equipment cavity volume 102 outside.
It is interior and relative with the position of aluminium lithium alloy 104 that described collecting board 110 is located at equipment cavity volume 102, assemble on described collecting board 110 after the lithium distillation of aluminium lithium alloy sheet 104, described collecting board 110 surface forms distillation lithium layer 112, described distillation lithium layer 112 and the pollutant reaction in gas in the residue in equipment cavity volume 102 or the equipment of inflow cavity volume 102.
Described feedback control component 106 comprises transducer 116 and controller 118, and it is inner that described transducer 116 is installed on equipment cavity volume 102, monitoring equipment cavity volume 102 internal state, and send a signal to described controller 118.Described controller 118 is connecting sensor 116 and shake-up element 108 respectively, and its receiving sensor 116 feedback information regulates and controls described shake-up element 108, thus controls the rate of sublimation of lithium in aluminium lithium alloy sheet 104.Described controller 118 comprises meter 120 and adjuster 122, the signal that described meter 120 receiving sensor 116 transmits also is analyzed, and is provided with threshold value, if exceed threshold value in described meter 120, then start adjuster 122, transmission current is to aluminium lithium alloy sheet 104.
In concrete enforcement, described transducer 116 detects the residue transducer 116R of residual particles and measures the temperature sensor 116T of aluminium lithium alloy sheet temperature.
In concrete enforcement, the inner purifier of described semiconductor detection also comprises cooling device 148, and described cooling device 148 connects described collecting board 110.
In concrete enforcement, the inner purifier of described semiconductor detection also comprises removable baffle plate 150, and described removable baffle plate 150 is arranged between aluminium lithium alloy sheet 104 and collecting board 110, closes or opens the passage between aluminium lithium alloy sheet 104 and collecting board 110.
In concrete enforcement, described equipment cavity volume 102 air pressure inside is lower than the atmospheric pressure outside equipment cavity volume 102.
In concrete enforcement, described equipment cavity volume 102 is also provided with air inlet 168 and gas outlet 156, the surface of equipment cavity volume 102 is located in described air inlet 168 and gas outlet 156, between the inner air inlet 168 of equipment cavity volume 102 and gas outlet 156, form gas flow channel 165.Vacuum pump 154 is provided with, by air inlet 168, gas outlet 156 and gas flow channel 165 control appliance cavity volume 102 air pressure inside outside described equipment cavity volume 102.
Finally should be noted that; above embodiment is only in order to illustrate the technical solution of the utility model; but not the restriction to the utility model protection range; although done to explain to the utility model with reference to preferred embodiment; those of ordinary skill in the art is to be understood that; can modify to the technical solution of the utility model or equivalent replacement, and not depart from essence and the scope of the invention technical scheme.
Claims (6)
1. the inner purifier of semiconductor detection, comprises equipment cavity volume, it is characterized in that, also comprises aluminium lithium alloy sheet, touches element, feedback control component and collecting board; It is inner that described aluminium lithium alloy sheet is installed on described equipment cavity volume; Described shake-up element connects described aluminium lithium alloy sheet, and provides the energy to give aluminium lithium alloy sheet; Described feedback control component comprises transducer and controller, and it is inner that described transducer is installed on equipment cavity volume, monitoring equipment cavity volume internal state, and described controller is connecting sensor and shake-up element respectively, and its receiving sensor feedback information also controls to touch element; It is interior and relative with the position of aluminium lithium alloy sheet that described collecting board is located at equipment cavity volume.
2. the inner purifier of semiconductor detection according to claim 1, it is characterized in that, described transducer comprises the residue transducer detecting residual particles and the temperature sensor measuring aluminium lithium alloy sheet temperature.
3. the inner purifier of semiconductor detection according to claim 1, it is characterized in that, also comprise cooling device, described cooling device connects described collecting board.
4. the inner purifier of semiconductor detection according to claim 1 or 3, it is characterized in that, also comprise removable baffle plate, described removable baffle plate is arranged between aluminium lithium alloy sheet and collecting board, closes or opens the passage between aluminium lithium alloy sheet and collecting board.
5. the inner purifier of semiconductor detection according to claim 1, it is characterized in that, described equipment cavity volume air pressure inside is lower than the atmospheric pressure outside equipment cavity volume.
6. the inner purifier of semiconductor detection according to claim 1, it is characterized in that, described equipment cavity volume is also provided with air inlet and gas outlet, and the surface of equipment cavity volume is located in described air inlet and gas outlet, between the inner air inlet of equipment cavity volume and gas outlet, form gas flow channel; Vacuum pump is provided with, by air inlet, gas outlet and gas flow channel control appliance cavity volume air pressure inside outside described equipment cavity volume.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520474946.1U CN204885092U (en) | 2015-06-30 | 2015-06-30 | Inside purifier of semiconductor check out test set |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520474946.1U CN204885092U (en) | 2015-06-30 | 2015-06-30 | Inside purifier of semiconductor check out test set |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204885092U true CN204885092U (en) | 2015-12-16 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520474946.1U Expired - Fee Related CN204885092U (en) | 2015-06-30 | 2015-06-30 | Inside purifier of semiconductor check out test set |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204885092U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108663293A (en) * | 2018-05-23 | 2018-10-16 | 长江存储科技有限责任公司 | Particulate matter detection means and particle detection method |
-
2015
- 2015-06-30 CN CN201520474946.1U patent/CN204885092U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108663293A (en) * | 2018-05-23 | 2018-10-16 | 长江存储科技有限责任公司 | Particulate matter detection means and particle detection method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20151216 Termination date: 20160630 |
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| CF01 | Termination of patent right due to non-payment of annual fee |