CN204869281U - Buddha's warrior attendant wire cut electrical discharge machining silica flour filtration system - Google Patents
Buddha's warrior attendant wire cut electrical discharge machining silica flour filtration system Download PDFInfo
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- CN204869281U CN204869281U CN201520557504.3U CN201520557504U CN204869281U CN 204869281 U CN204869281 U CN 204869281U CN 201520557504 U CN201520557504 U CN 201520557504U CN 204869281 U CN204869281 U CN 204869281U
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- pipeline
- filter
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- cutting liquid
- silica flour
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Abstract
The utility model discloses a buddha's warrior attendant wire cut electrical discharge machining silica flour filtration system belongs to buddha's warrior attendant wire -electrode cutting technical field, including cutting liquid collection device, cutting liquid ejiction opening and feeding through the first filtration pipeline between the two, first filter tube is equipped with filtration pump I on the road, still be equipped with between cutting liquid collection device and cutting liquid ejiction opening the intercommunication the two just with the intercommunication pipeline that first filtration pipeline ties for, communicating pipe is equipped with valve III on the road, first filter tube still is equipped with the valve I at the upper reaches that are located filtration pump I on the road, the upper reaches of first filtration pipeline and intercommunication pipeline still are equipped with the detection device of silica flour. The utility model relates to an it is scientific more, reasonable, reduce the waste, practice thrift the energy.
Description
Technical field
The utility model relates to diamond wire cutting technique field, particularly relates to a kind of diamond wire cutting machine silicon powder filtering system.
Background technology
In diamond wire cutting, cutting liquid is that Recovery and recycle utilizes, but in cutting process, a large amount of silica flours can be produced because of edge of a knife cutting, silica flour is dissolved in cutting liquid, and silica flour plays the effect hindering cutting in cutting, and diamond wire cutting force is greatly affected.Along with going deep into of cutting, in cutting liquid, silica flour content gets more and more, and affects increasing; cause silicon chip surface to adhere to serious, be difficult to cleaning, and occur the situations such as oxidation, color spot; therefore, just need to clean the filter pump of filtration system, but; if cleaned filter pump; just need entire machine to shut down, filter pump is taken, loses time; make work discontinuous, affect operating efficiency.
As shown in Figure 1, it is diamond wire cutting machine silicon powder filtering system of the prior art, cutting liquid collected by cutting liquid gathering-device 1, be input in filter pump 5 by the first filter pipeline 3, through the filtration of filter pump 5, then by output pipe, cutting liquid is delivered to cutting liquid ejiction opening 11, silicon chip is cooled, lower the temperature.In the course of work, need to clear up filter pump 5, filter pump 5 is pulled down, must shut down and just can carry out this work, therefore, to the termination, the time-out that cause work, affect the continuity of work, the waste working time, reduce the efficiency of work.
Moreover, in actual production, filter pump has just carried out in a period of time after cleaned and changed misgivings net, in the cutting liquid reclaimed, the content of silica flour is not high, cut quality can't be had influence on, therefore, within the whole working time, filter pump is made all to be in the state of work, the waste of the energy of existence.
Therefore; how to research and develop in a kind of process cleaning filter pump; the work of diamond wire cutting machine is shut down continuously, not; save the working time, increase work efficiency; and it is reasonable in design; the diamond wire cutting machine silicon powder filtering system of economize energy is the technical problem that those skilled in the art need solution badly.
Utility model content
The technical problems to be solved in the utility model, is to provide a kind of diamond wire cutting machine silicon powder filtering system, its design more science, rationally, cut the waste, saved the energy.
For solving the problems of the technologies described above, technical solution adopted in the utility model is:
Diamond wire cutting machine silicon powder filtering system, the first filter pipeline comprising cutting liquid gathering-device, cutting liquid ejiction opening and be communicated with therebetween, described first filter pipeline is provided with filter pump I, be also provided with between cutting liquid gathering-device and cutting liquid ejiction opening both connections and the connecting pipeline arranged side by side with described first filter pipeline; Described connecting pipeline is provided with valve III; Described first filter pipeline is also provided with the valve I of the upstream being positioned at filter pump I; The upstream of described first filter pipeline and connecting pipeline is also provided with the checkout gear of silica flour.
As preferably, also be provided with between described cutting liquid gathering-device and cutting liquid ejiction opening both connections and with described first filter pipeline and connecting pipeline the second filter pipeline arranged side by side, described second filter pipeline is provided with filter pump II and is positioned at the valve II of filter pump II upstream.
As preferably, described valve I, valve II and valve III are magnetic valve, are also provided with the control device that Controlling solenoid valve opens and closes.
As preferably, described filter pump I and filter pump II inside are provided with the cylinder leaching net and filter bag that order number is 100-120.
The beneficial effect adopting technique scheme to produce is:
1, the utility model passes through the new pipeline not having filter pump that increase by is arranged side by side with former pipeline on original filter pipeline, and on two pipelines, all valve is set, the checkout gear of silica flour is set in the upstream of two pipelines, to realize the content being detected silica flour in cutting liquid by checkout gear, when silica flour content is lower, when can not affect Si wafer quality, enable the pipeline not needing to filter; When the silica flour content in cutting liquid is higher, to such an extent as to when affecting the cut quality of silicon chip, close the new pipeline without filtration, open filter pipeline, the silica flour in cutting liquid is filtered, to ensure the quality of silicon chip surface.This system, science, rationally, decreases waste, has saved the energy.
2, the utility model is on the basis of above-mentioned two pipelines, increase Article 2 filter pipeline, this pipeline is provided with the second filter pump and valve II, when the filter pump of the first filter pipeline needs to clean, valve-off I, opens valve II simultaneously, is filtered by the second filter pump, now can take the first filter pump to clean, and not affect the continuity of work.The middle silica flour content that the configuration achieves when cutting liquid is higher, but when filter pump needs again to carry out cleaning, the continuity of cutting machine work, improves operating efficiency.
3, on the basis of said structure, all valves are all set to magnetic valve, by the control of control device to magnetic valve, achieve the automation of work, improve operating efficiency, save human resources.
Accompanying drawing explanation
Fig. 1 is the structural representation of the filtration system of prior art;
Fig. 2 is the structural representation of the utility model embodiment;
Each figure number name is called: 1-cutting liquid gathering-device; 2-silica flour checkout gear; 3-the first filter pipeline; 4-valve I; 5-filter pump I; 6-the second filter pipeline; 7-valve II; 8-filter pump II; 9-valve III; 10-connecting pipeline; 11-cutting liquid ejiction opening.
Detailed description of the invention
Below in conjunction with drawings and Examples, the utility model is described in further detail.
As shown in Figure 2, the utility model comprises cutting liquid gathering-device 1, cutting liquid ejiction opening 11 and is communicated with the first filter pipeline 3 therebetween, described first filter pipeline 3 is provided with filter pump I 5, be also provided with between cutting liquid gathering-device 1 and cutting liquid ejiction opening 11 both connections and the connecting pipeline 10 arranged side by side with described first filter pipeline 3; Described connecting pipeline 10 is provided with valve III 9; Described first filter pipeline 3 is also provided with the valve I 4 of the upstream being positioned at filter pump I 5; The upstream of described first filter pipeline 3 and connecting pipeline 10 is also provided with the checkout gear 2 of silica flour.
The course of work of the present utility model is, first start shooting, filter pump is now in and filters good state, and the checkout gear 2 of silica flour detects that the silica flour content in cutting liquid is lower, can not affect silicon chip surface quality, now valve-off I 4, first filter pipeline 3 is obstructed, opens valve III 9 simultaneously, and cutting liquid is by connecting pipeline 10, spray from cutting liquid ejiction opening 11, cooling down is carried out to silicon chip surface; When after work a period of time, the checkout gear 2 of silica flour detects that the silica flour content in cutting liquid is higher, and when can affect silicon chip surface quality, valve-off III 9, opens simultaneously.
The beneficial effect of said structure is adopted to be: system structure design science, rationally, to decrease waste, saved the energy, ensure that the cut quality of silicon chip surface with minimum energy resource consumption.
Further, also be provided with between described cutting liquid gathering-device 1 and cutting liquid ejiction opening 11 both connections and with described first filter pipeline 3 and connecting pipeline 10 second filter pipeline 6 arranged side by side, described second filter pipeline 6 is provided with filter pump II 8 and is positioned at the valve II 7 of filter pump II 8 upstream.
The utility model is on the basis of above-mentioned two pipelines, increase Article 2 filter pipeline 6, this pipeline 6 is provided with the second filter pump 8 and valve II 7, when the filter pump 5 of the first filter pipeline 3 needs to clean, valve-off I 4, opens valve II 7 simultaneously, is filtered by the second filter pump 8, now can take the first filter pump 5 to clean, and not affect the continuity of work.
The beneficial effect of said structure is adopted to be: the middle silica flour content achieved when cutting liquid is higher, but when filter pump needs again to carry out cleaning, the continuity of cutting machine work, improves operating efficiency.
Further, described valve I 4, valve II 7 and valve III 9 are magnetic valve, are also provided with the control device that Controlling solenoid valve opens and closes.
The beneficial effect of said structure is adopted to be: all valves to be all set to magnetic valve, by the control of control device to magnetic valve, to achieve the automation of work, improve operating efficiency, save human resources.
Further, described filter pump I 5 and filter pump II 8 inside are provided with the cylinder leaching net and filter bag that order number is 100-120.
Adopt the beneficial effect of said structure to be: the filter effect that can improve filter pump, extend the service time of filter pump, reduce the content of silica flour in cutting liquid, ensure the cut quality of silicon chip.
Claims (4)
1. diamond wire cutting machine silicon powder filtering system, the first filter pipeline (3) comprising cutting liquid gathering-device (1), cutting liquid ejiction opening (11) and be communicated with therebetween, described first filter pipeline (3) is provided with filter pump I (5), it is characterized in that: be also provided with between cutting liquid gathering-device (1) and cutting liquid ejiction opening (11) both connections and the connecting pipeline (10) arranged side by side with described first filter pipeline (3); Described connecting pipeline (10) is provided with valve III (9); Described first filter pipeline (3) is also provided with the valve I (4) of the upstream being positioned at filter pump I (5); The upstream of described first filter pipeline (3) and connecting pipeline (10) is also provided with the checkout gear (2) of silica flour.
2. diamond wire cutting machine silicon powder filtering system according to claim 1, it is characterized in that: be also provided with between described cutting liquid gathering-device (1) and cutting liquid ejiction opening (11) both connections and with described first filter pipeline (3) and connecting pipeline (10) the second filter pipeline (6) arranged side by side, described second filter pipeline (6) is provided with filter pump II (8) and is positioned at the valve II (7) of filter pump II (8) upstream.
3. diamond wire cutting machine silicon powder filtering system according to claim 2, is characterized in that: described valve I (4), valve II (7) and valve III (9) are magnetic valve, is also provided with the control device that Controlling solenoid valve opens and closes.
4. the diamond wire cutting machine silicon powder filtering system according to Claims 2 or 3, is characterized in that: described filter pump I (5) and filter pump II (8) inside are provided with the cylinder leaching net and filter bag that order number is 100-120.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520557504.3U CN204869281U (en) | 2015-07-29 | 2015-07-29 | Buddha's warrior attendant wire cut electrical discharge machining silica flour filtration system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520557504.3U CN204869281U (en) | 2015-07-29 | 2015-07-29 | Buddha's warrior attendant wire cut electrical discharge machining silica flour filtration system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204869281U true CN204869281U (en) | 2015-12-16 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520557504.3U Expired - Fee Related CN204869281U (en) | 2015-07-29 | 2015-07-29 | Buddha's warrior attendant wire cut electrical discharge machining silica flour filtration system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204869281U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106007330A (en) * | 2016-07-28 | 2016-10-12 | 浙江明江环保科技有限公司 | Improved double separator for solid-liquid separation of feces |
| CN106007333A (en) * | 2016-07-28 | 2016-10-12 | 浙江明江环保科技有限公司 | Improved excrement solid-liquid dual separator |
-
2015
- 2015-07-29 CN CN201520557504.3U patent/CN204869281U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106007330A (en) * | 2016-07-28 | 2016-10-12 | 浙江明江环保科技有限公司 | Improved double separator for solid-liquid separation of feces |
| CN106007333A (en) * | 2016-07-28 | 2016-10-12 | 浙江明江环保科技有限公司 | Improved excrement solid-liquid dual separator |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20151216 Termination date: 20180729 |