CN204854637U - System for measure parabolic principal reflection mirror off -axis volume of off -axis and off -axis angle - Google Patents
System for measure parabolic principal reflection mirror off -axis volume of off -axis and off -axis angle Download PDFInfo
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- CN204854637U CN204854637U CN201520498859.XU CN201520498859U CN204854637U CN 204854637 U CN204854637 U CN 204854637U CN 201520498859 U CN201520498859 U CN 201520498859U CN 204854637 U CN204854637 U CN 204854637U
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- axis
- mirror
- optical axis
- autocollimation theodolite
- measured
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Abstract
The utility model relates to a system for measure parabolic principal reflection mirror off -axis volume of off -axis and off -axis angle, this system include optical axis sighting rod A, optical axis sighting rod B, auto -collimation theodolite A, auto -collimation theodolite B, auto -collimation theodolite C, interferometer, planar mirror and facet mirror, auto -collimation theodolite A, optical axis sighting rod A, optical axis sighting rod B and auto -collimation theodolite B are in on the same optical axis in proper order, auto -collimation theodolite B is in on the same optical axis with auto -collimation theodolite C, the off -axis speculum that awaits measuring is arranged in between auto -collimation theodolite B and the auto -collimation theodolite C, the facet mirror is attached on the off -axis speculum that awaits measuring, the focus of interferometer and the focus coincidence of the off -axis speculum that awaits measuring, the spherical wave that the interferometer sent forms the reverberation after the off -axis speculum reflection of awaiting measuring, planar mirror arranges in the light path of reverberation place. The utility model provides a system that can carry out the precision measurement to the off -axis volume and the off -axis angle of off -axis speculum.
Description
Technical field
The utility model belongs to optics assembling field, relates to a kind of measurement mechanism, particularly relates to a kind ofly to measure the system of off axis paraboloid mirror principal reflection mirror from axle amount and off-axis angle.
Background technology
Two important indicators that how off axis reflector mirror has compared on-axis reflectors, be from axle amount and off-axis angle respectively, this two indices reflects the bias of the relatively female mirror optical axis of off axis reflector mirror, and namely off axis reflector mirror is relative to the side-play amount of systematic optical axis.According to the version feature of off-axis optical system, the usual bore of primary mirror is comparatively large, and usually adopts parabola form.For large-caliber off-axis catoptron, because himself bore is larger, if the cutting mode adopting female mirror to be separated is processed, then the bore of female mirror will be larger and difficulty of processing is larger, therefore the processing of heavy caliber primary mirror adopted usually to the mode of single part processing.The mode of single part processing is comparatively large for the mismachining tolerance from axle amount and off-axis angle, and the initial alignment precision of off axis paraboloid mirror principal reflection mirror in system architecture can be made lower.Off-axis optical system due to degree of freedom more, make the variable in Computer Aided Assembly Process Planning process more, if initial alignment precision is too low, line iteration equation is not restrained, thus is difficult to the misalignment rate solving off-axis optical system.Therefore how accurately measure off axis paraboloid mirror principal reflection mirror from axle amount and off-axis angle, realize off axis paraboloid mirror principal reflection mirror in systems in which high-precision initial alignment be vital for the assembling of off-axis optical system.
Utility model content
In order to solve the above-mentioned technical matters existed in background technology, the utility model provides and a kind ofly can carry out from axle amount and off-axis angle the system accurately measured to off axis reflector mirror.
Technical solution of the present utility model is: the utility model provides a kind ofly measures the system of off axis paraboloid mirror principal reflection mirror from axle amount and off-axis angle, it is characterized in that: described system comprises optical axis mark post A, optical axis mark post B, autocollimation theodolite A, autocollimation theodolite B, autocollimation theodolite C, interferometer, plane mirror and facet mirror; Described autocollimation theodolite A, optical axis mark post A, optical axis mark post B and autocollimation theodolite B are on same optical axis successively; Described autocollimation theodolite B and autocollimation theodolite C is on same optical axis; Off axis reflector mirror to be measured is placed between autocollimation theodolite B and autocollimation theodolite C; Described facet mirror is attached on off axis reflector mirror to be measured; The focus of described interferometer overlaps with the focus of off axis reflector mirror to be measured; The spherical wave that described interferometer sends forms reflected light after off axis reflector mirror reflection to be measured; Described plane mirror is placed in the light path of reflected light place.
Above-mentioned facet mirror to be placed between off axis reflector mirror to be measured and autocollimation theodolite C and to be attached on off axis reflector mirror to be measured.
The focus of above-mentioned interference instrument overlaps with the focus of off axis reflector mirror to be measured and is positioned on the optical axis at autocollimation theodolite A, optical axis mark post A, optical axis mark post B and autocollimation theodolite B place.
The precision of above-mentioned autocollimation theodolite A, autocollimation theodolite B and autocollimation theodolite C is all better than 0.5 ".
The utility model has the advantages that: the utility model detects the light path principle of off axis paraboloid mirror principal reflection mirror based on aberration-free point, to go forward side by side row space Reference Transforming by arranging benchmark optical axis, finally achieve the accurate measurement from axle amount and off-axis angle, for the accurate initial alignment of principal reflection mirror in off-axis optical system provides data accurately.
Accompanying drawing explanation
Fig. 1 is measurement off axis paraboloid mirror principal reflection mirror provided by the utility model from the structural representation of the system of axle amount and off-axis angle;
Fig. 2 is the structural representation of the optical axis mark post that the utility model adopts;
Wherein:
1-optical axis mark post A; 2-optical axis mark post B; 3-autocollimation theodolite A; 4-autocollimation theodolite B; 5-autocollimation theodolite C; 6-interferometer; 7-plane mirror; 8-off axis reflector mirror to be measured; 9-facet mirror.
Embodiment
The utility model provides a kind of system measuring off axis paraboloid mirror principal reflection mirror, as shown in Figure 1, this system comprises optical axis mark post A1, optical axis mark post B2, autocollimation theodolite A3, autocollimation theodolite B, autocollimation theodolite C, interferometer, plane mirror and facet mirror; Autocollimation theodolite A, optical axis mark post A, optical axis mark post B and autocollimation theodolite B are on same optical axis successively; Autocollimation theodolite B and autocollimation theodolite C is on same optical axis; Off axis reflector mirror to be measured is placed between autocollimation theodolite B and autocollimation theodolite C; Facet mirror is attached on off axis reflector mirror to be measured; The focus of interferometer overlaps with the focus of off axis reflector mirror to be measured; The spherical wave that interferometer sends forms reflected light after off axis reflector mirror reflection to be measured; Plane mirror is placed in the light path of reflected light place.Facet mirror to be placed between off axis reflector mirror to be measured and autocollimation theodolite C and to be attached on off axis reflector mirror to be measured.The focus of interferometer overlaps with the focus of off axis reflector mirror to be measured and is positioned on the optical axis at autocollimation theodolite A, optical axis mark post A, optical axis mark post B and autocollimation theodolite B place.
The system of off-axis optical system primary optical axis position can be determined to comprise 1 be optical axis mark post A, 2 for optical axis mark post B, as shown in Figure 2, optical axis mark post A and optical axis mark post B determines reference light shaft position; 3 is autocollimation theodolite A, 4 is that autocollimation theodolite B, 5 is autocollimation theodolite C, autocollimation theodolite A, the autocollimatic precision of autocollimation theodolite B and autocollimation theodolite C is all better than 0.5 "; 6 is interferometer, is used for measuring the face shape situation of catoptron; 7 is plane mirror, reflects for autocollimatic light path; 8 is off axis reflector mirror to be measured; 9 is facet mirror, is attached to the behind of off axis reflector mirror to be measured, as the back benchmark of off axis reflector mirror to be measured.
Actual measurement step of the present utility model is:
Optical axis mark post A1 is top, optical axis mark post B2 is top determines a benchmark optical axis;
Autocollimation theodolite A3, autocollimation theodolite B4 and benchmark optical axis punching, thus ensure autocollimation theodolite A3, autocollimation theodolite B4 and benchmark optical axis coincidence;
Autocollimation theodolite B4 turn 90 degrees, and with autocollimation theodolite C5 to mirror, now the optical axis of autocollimation theodolite C5 becomes 90 degree of angles with benchmark optical axis, is at this moment turn 90 degrees and benchmark optical axis coincidence by autocollimation theodolite C5;
Interferometer 6, plane mirror 7 and off axis reflector mirror 8 to be measured constitute the aberrationless point surface testing light path of off axis reflector mirror, wherein the focus of interferometer 6 overlaps with the focus of off axis reflector mirror 8 to be measured, the spherical wave that interferometer 6 sends becomes directional light after off axis reflector mirror 8 to be measured reflects, interfere with the reference light of interferometer 6 after plane mirror 7 reflects, thus obtain the face graphic data of off axis reflector mirror 8 to be measured;
The orientation of plane mirror 7 and pitching are positioned by autocollimation theodolite C5, regulate plane mirror 7 to make itself and autocollimation theodolite C5 autocollimation, illustrate that the optical axis of now plane mirror 7 is parallel with benchmark optical axis;
During adjustment aberrationless point surface testing light path, also need by the focal adjustments of interferometer 6 on reference light axis, thus ensure that the light after off axis reflector mirror 8 to be measured reflects is parallel with benchmark optical axis;
Regulate orientation and the pitching of off axis reflector mirror 8 to be measured, the face shape that off axis reflector mirror 8 to be measured is detected in light path at this is best, now the optical axis of off axis reflector mirror 8 to be measured and benchmark optical axis coincidence;
By the distance measured between off axis reflector mirror 8 center to be measured and benchmark optical axis can obtain off axis reflector mirror from axle amount size;
Facet mirror autocollimation after regulating autocollimation theodolite C5 to make autocollimation theodolite C5 and off axis reflector mirror 8 to be measured, the angle that now autocollimation theodolite C5 turns over is the off-axis angle size of off axis reflector mirror 8 to be measured.
Above measuring system, can accurately measuring from axle amount and off-axis angle realization off axis reflector mirror based on the aberration-free point Cleaning Principle of off axis reflector mirror.
Claims (4)
1. measure the system of off axis paraboloid mirror principal reflection mirror from axle amount and off-axis angle, it is characterized in that: described system comprises optical axis mark post A, optical axis mark post B, autocollimation theodolite A, autocollimation theodolite B, autocollimation theodolite C, interferometer, plane mirror and facet mirror; Described autocollimation theodolite A, optical axis mark post A, optical axis mark post B and autocollimation theodolite B are on same optical axis successively; Described autocollimation theodolite B and autocollimation theodolite C is on same optical axis; Off axis reflector mirror to be measured is placed between autocollimation theodolite B and autocollimation theodolite C; Described facet mirror is attached on off axis reflector mirror to be measured; The focus of described interferometer overlaps with the focus of off axis reflector mirror to be measured; The spherical wave that described interferometer sends forms reflected light after off axis reflector mirror reflection to be measured; Described plane mirror is placed in the light path of reflected light place.
2. measurement off axis paraboloid mirror principal reflection mirror according to claim 1 is from the system of axle amount and off-axis angle, it is characterized in that: described facet mirror to be placed between off axis reflector mirror to be measured and autocollimation theodolite C and to be attached on off axis reflector mirror to be measured.
3. measurement off axis paraboloid mirror principal reflection mirror according to claim 2 is from the system of axle amount and off-axis angle, it is characterized in that: the focus of described interferometer overlaps with the focus of off axis reflector mirror to be measured and is positioned on the optical axis at autocollimation theodolite A, optical axis mark post A, optical axis mark post B and autocollimation theodolite B place.
4. the measurement off axis paraboloid mirror principal reflection mirror according to claim 1 or 2 or 3, from the system of axle amount and off-axis angle, is characterized in that: the precision of described autocollimation theodolite A, autocollimation theodolite B and autocollimation theodolite C is all better than 0.5 ".
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520498859.XU CN204854637U (en) | 2015-07-10 | 2015-07-10 | System for measure parabolic principal reflection mirror off -axis volume of off -axis and off -axis angle |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520498859.XU CN204854637U (en) | 2015-07-10 | 2015-07-10 | System for measure parabolic principal reflection mirror off -axis volume of off -axis and off -axis angle |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204854637U true CN204854637U (en) | 2015-12-09 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520498859.XU Withdrawn - After Issue CN204854637U (en) | 2015-07-10 | 2015-07-10 | System for measure parabolic principal reflection mirror off -axis volume of off -axis and off -axis angle |
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| CN (1) | CN204854637U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105157578A (en) * | 2015-07-10 | 2015-12-16 | 中国科学院西安光学精密机械研究所 | System and method of measuring off-axis amount and off-axis angle of off-axis paraboloid main reflector |
| CN108844466A (en) * | 2018-03-14 | 2018-11-20 | 四川大学 | A kind of ultraprecise displacement lasers method for sensing |
| CN109798865A (en) * | 2017-11-16 | 2019-05-24 | 上海微电子装备（集团）股份有限公司 | A kind of the optical axis direct detection device and detection method of zoom system, pancreatic system |
-
2015
- 2015-07-10 CN CN201520498859.XU patent/CN204854637U/en not_active Withdrawn - After Issue
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105157578A (en) * | 2015-07-10 | 2015-12-16 | 中国科学院西安光学精密机械研究所 | System and method of measuring off-axis amount and off-axis angle of off-axis paraboloid main reflector |
| CN105157578B (en) * | 2015-07-10 | 2017-09-22 | 中国科学院西安光学精密机械研究所 | Measure off axis paraboloid mirror principal reflection mirror amount and the system and method for off-axis angle off axis |
| CN109798865A (en) * | 2017-11-16 | 2019-05-24 | 上海微电子装备（集团）股份有限公司 | A kind of the optical axis direct detection device and detection method of zoom system, pancreatic system |
| CN108844466A (en) * | 2018-03-14 | 2018-11-20 | 四川大学 | A kind of ultraprecise displacement lasers method for sensing |
| CN108844466B (en) * | 2018-03-14 | 2019-11-08 | 四川大学 | A kind of ultraprecise displacement lasers method for sensing |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20151209 Effective date of abandoning: 20170922 |
|
| AV01 | Patent right actively abandoned |
Granted publication date: 20151209 Effective date of abandoning: 20170922 |
|
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |