CN204832765U - 一种多头纳米压印装置 - Google Patents
一种多头纳米压印装置 Download PDFInfo
- Publication number
- CN204832765U CN204832765U CN201520436329.2U CN201520436329U CN204832765U CN 204832765 U CN204832765 U CN 204832765U CN 201520436329 U CN201520436329 U CN 201520436329U CN 204832765 U CN204832765 U CN 204832765U
- Authority
- CN
- China
- Prior art keywords
- bull
- nano
- fixed
- substrate
- template
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Shaping Of Tube Ends By Bending Or Straightening (AREA)
Abstract
Description
Claims (8)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201520436329.2U CN204832765U (zh) | 2015-06-24 | 2015-06-24 | 一种多头纳米压印装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201520436329.2U CN204832765U (zh) | 2015-06-24 | 2015-06-24 | 一种多头纳米压印装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
CN204832765U true CN204832765U (zh) | 2015-12-02 |
Family
ID=54690346
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201520436329.2U Expired - Fee Related CN204832765U (zh) | 2015-06-24 | 2015-06-24 | 一种多头纳米压印装置 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN204832765U (zh) |
-
2015
- 2015-06-24 CN CN201520436329.2U patent/CN204832765U/zh not_active Expired - Fee Related
Similar Documents
Publication | Publication Date | Title |
---|---|---|
Peng et al. | Micro hot embossing of thermoplastic polymers: a review | |
Baldacchini | Three-dimensional microfabrication using two-photon polymerization: fundamentals, technology, and applications | |
WO2017059745A1 (zh) | 大面积微纳图形化的装置和方法 | |
CN102707378B (zh) | 一种应用压印技术制作硅酮微纳光学结构的方法 | |
CN102566262B (zh) | 一种适用于非平整衬底晶圆级纳米压印的装置 | |
JP5546893B2 (ja) | インプリント方法 | |
CN106476266B (zh) | 一种利用纤维材料对光固化零件进行层内复合的方法 | |
CN101403855A (zh) | 紫外/热压固化型纳米压印方法与压印机 | |
CN102173238A (zh) | 真空压印装置、真空压合装置及层状光学组件的制造方法 | |
CN103926789A (zh) | 纳米压印模板、系统以及压印方法 | |
Liu et al. | Polymeric microlens array fabricated with PDMS mold-based hot embossing | |
CN203317755U (zh) | 立体成型装置 | |
CN111438859A (zh) | 一种图案化纳米阵列模板及其制备方法和应用 | |
JP2010030057A (ja) | インプリント型、インプリント装置、インプリント型の製造方法、及び構造体の製造方法 | |
CN204832765U (zh) | 一种多头纳米压印装置 | |
CN103926790A (zh) | 具有对准式自动脱模紫外纳米压印装置及方法 | |
CN105034344B (zh) | 一种大面积纳米压印软模具复制装置及方法 | |
Park et al. | Fabrication of nano-precision PDMS replica using two-photon photopolymerization and vacuum pressure difference technique | |
JP5540628B2 (ja) | ナノインプリントパターン形成方法 | |
Tu et al. | Droplet spreading nanoimprinting method for micro-/nano-fabrication | |
JP2006043953A (ja) | 光学的立体造形方法および装置 | |
CN203445141U (zh) | 压印装置 | |
JP2012227430A (ja) | ナノインプリント装置及び離型方法 | |
CN107473177A (zh) | 一种3d立体微纳结构的制作方法 | |
CN204640788U (zh) | 一种大面积纳米压印软模具复制装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right |
Effective date of registration: 20170524 Address after: Wuzhong District Jinfeng Road Suzhou city Jiangsu province 215101 No. 198 Canton Technology Park Building 9 Co-patentee after: NANJING PENGPAI NEW MATERIAL TECHNOLOGY CO., LTD. Patentee after: Suzhou Ting Ting Photoelectric Technology Co., Ltd. Address before: Qixia District of Nanjing City, Jiangsu province 210028 and Yan Road, No. 371 Southeast University Science Park by building C405 Patentee before: NANJING PENGPAI NEW MATERIAL TECHNOLOGY CO., LTD. |
|
TR01 | Transfer of patent right | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20151202 Termination date: 20180624 |
|
CF01 | Termination of patent right due to non-payment of annual fee |