CN204825045U - A chemical vapor deposition equipment for preparing multielement calorize thing coating of modifying - Google Patents
A chemical vapor deposition equipment for preparing multielement calorize thing coating of modifying Download PDFInfo
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- CN204825045U CN204825045U CN201520481643.2U CN201520481643U CN204825045U CN 204825045 U CN204825045 U CN 204825045U CN 201520481643 U CN201520481643 U CN 201520481643U CN 204825045 U CN204825045 U CN 204825045U
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Abstract
The utility model provides a chemical vapor deposition equipment for preparing multielement calorize thing coating of modifying, includes vacuum "The reaction chamber", the gaseous control system of supply and vacuum and vent gas treatment system in, and its equipment technology parameter flexibility improves, and coating composition is nimble, controllable, and the product uniformity is good, has all set gradually gaseous relief pressure valve, volume flow rate meter and mass flow controller on each way process gas pipeline of gaseous supply control system, realizes the high control system 0 of chemical vapor deposition technology. The utility model has the advantages of simple structure, and convenient for operation, no embedding technology, need not not scribble the after -clearing, the many emissions of industrial waste water have been reduced, can satisfy modified calorize thing coating industrial production and environmental protection requirement, especially be used for cold turbine blade of aeroengine membrane or the ground electricity generation production with the modified calorize thing coating of cold passageway surface multielement in the heavy gas turbine turbine blade, uniform thickness of the coating layer, pore surface coating all standing in the blade, guarantee simultaneously that the blade surface does not have the coating formation of harmful thickness.
Description
Technical field:
The utility model relates to the equipment in a kind of aluminide coating processing procedure, particularly relates to a kind of chemical vapor depsotition equipment for the preparation of multielement modified aluminide coating.
Background technology:
Chemical vapour deposition (ChemicalVaporDeposition is called for short CVD) is a kind of noncontact diffusion technique.When utilizing CVD technology, a kind of metal chloride gas determining composition can be produced at stove outer (about 100 ~ 600 DEG C of temperature of reaction) in advance, then the cavity (about 200 ~ 1200 DEG C of cavity temperatures) being imported into high temperature reaction stove is inner, and reacts with workpiece surface and form coating.Therefore, utilize CVD technology aluminising to prepare aluminide coating and there is greatly superiority, first, in CVD technology, reactant gases is passed through workpiece surface by compression, form relatively uniform coating, thus the discharge of wastewater, the coating easy-sintering that cause are cleaned in the painting can effectively avoiding aluminum diffused steel and Paste aluminising method to exist afterwards and infiltration layer is uneven and the shortcoming such as workpiece with hole plug-hole; Second; the gas forming process of CVD technology and workpiece and gas reaction process are distinct; thus gas chemistries easily adjusts, particularly at multiple reactive elements such as workpiece surface codeposition Al, Si and doping Hf, Zr, Y, Ce, La, protectiveness aluminium diffusion coating can be formed.It is reported, multiple permeation forms the aluminide coating of modification, can significantly improve the resistance to high temperature corrosion performance of single calorized coating, comprises and reduces oxide growth speed, improves the protection life-span etc. of oxide film adhesivity and prolongation coating.At present, the turbine nozzle vane of the various turbojet engine 80% of aviation field China, and land with and marine turbine, such as the position such as wing, blade, position that the thermal etching of terrestrial power generation internal combustion turbine is serious all adopt this type coating.
In sum, be necessary to provide a kind of chemical vapor depsotition equipment, first, may be used for the aluminide diffusion coating preparing multielement codeposition or doped element modification, as modified aluminide coatings such as Al-Cr, Al-Si, Al-Pt, Al-Cr-Si, Al-Cr-Ta, Al-Re (Re=rare earth element), and the uniformities such as the composition of coating, microstructure, thickness; The second, may be used for the selectivity preparation of complex geometry workpiece appearance surface coatings with holes, the particularly preparation of the cold propeller for turboprop airfoil blade of film and/or terrestrial power generation internal combustion turbine turbine cooling blade inner cooling path top coat.
Utility model content:
Main purpose of the present utility model is to provide a kind of chemical vapor depsotition equipment for the preparation of multielement modified aluminide coating, for the cold turbine blade of aircraft engine film or terrestrial power generation heavy duty gas turbine turbine blade inner cooling path surface aluminide coating production, coated component is flexible, controlled, homogeneity of product is good, realize all standing of blade inner duct top coat, blade outer surface generates without the coating of harmful thickness simultaneously.
For achieving the above object, the utility model adopts following technical scheme to be achieved:
For the preparation of a chemical vapor depsotition equipment for multielement modified aluminide coating, comprise for the formation of the vacuum reaction chamber of vacuum, gas supply control system and vacuum and exhaust treatment system, the circumference of vacuum reaction chamber and top are followed successively by stove heat insulating material for external layer from outside to inside, outer furnace shell, refractory liner and well heater, the bottom of vacuum reaction chamber is provided with the lift bottom pedestal for carrying workpiece, vacuum reaction indoor are provided with stainless steel inner container, stainless steel inner container is sealed to vacuum reaction indoor by bottom pedestal, the chamber of stainless steel inner container is divided into coating reaction room and exhaust emissions district, bottom pedestal is configured with the inert gas inleting pipe road and process gas intake ducting that communicate with described vacuum reaction chamber, the circumference in inert gas inleting pipe road is provided with some layers of support, each support is provided with workpiece air guiding base, each air guiding base is all connected with process gas intake ducting by horizontal duct, trade union college is on the top of air guiding base,
Gas supply control system is respectively arranged with the first pneumatic outlet, the second pneumatic outlet and the 3rd pneumatic outlet, first pneumatic outlet is connected with the inert gas entrance in inert gas inleting pipe road, and the second pneumatic outlet is connected with the second process gas inlet with the first process gas inlet of process gas intake ducting respectively with the 3rd pneumatic outlet;
Bottom pedestal is provided with gas exhaust duct, and gas exhaust duct is connected with the alkali lye circulation vacuum pump in exhaust treatment system with vacuum by horizontal exhaust duct, and electric motor is used for providing power for alkali lye circulation vacuum pump, and alkali lye circulation vacuum pump is provided with vapor pipe.
The utility model further improves and is: the material selection trade mark of stainless steel inner container is the stainless steel of 1Cr25Ni20Si2.
The utility model further improves and is: gas supply control system comprises rare gas element high pressure tank, H
2gas high pressure tank and HCl gas high pressure gas-holder, wherein, the first pneumatic outlet of rare gas element high pressure tank connects the inert gas entrance in inert gas inleting pipe road by gas pressure reducer, volumetric flow meter, H
2gas high pressure tank and HCl gas high pressure gas-holder are respectively by gas pressure reducer, volumetric flow meter is connected mixing tank with mass flow controller, the outlet of mixing tank connects Al metal halide maker entrance respectively by Mgs, Si metal halide maker and other metal halide maker entrances, Al metal halide maker entrance, second pneumatic outlet of Si metal halide maker and other metal halide makers, 3rd pneumatic outlet is respectively by volumetric flow meter, first process gas inlet of mass flow controller Joining Technology gas inlet pipeline, second process gas inlet.
The utility model further improves and is: be provided with gas operated device and Al metallic particle bed in Al metal halide maker, be provided with gas operated device and Si metallic particle bed in Si metal halide maker, other metal halide makers are provided with gas operated device and other metallic particle bed.
The utility model further improves and is: gas exhaust duct center is provided with axial gas preheater, before entering horizontal exhaust duct, condensation occurs for preventing tail gas.
The utility model further improves and is: sealed by the first O-ring seals and the second O-ring seals between reaction chamber base and vacuum furnace body.
The utility model further improves and is: the circumference in inert gas inleting pipe road is also provided with Axial Thermal radiation shield, and this Axial Thermal radiation shield is between bottom pedestal and lowest layer support.
The utility model further improves and is: the bottom of vacuum reaction chamber and bottom pedestal is all by ground supports seat supports.
Relative to prior art, the utility model has following advantage:
1) chemical vapor depsotition equipment for the preparation of multielement modified aluminide coating that provides of the utility model, processing parameter handiness improves, aluminide coating composition can be controlled, as multielement codeposition or other elements that adulterate, as Hf, Zr, Y, Ce, La improve coating performance, prepared coating low surface defect density, diffusion evenly, and can change the activity of aluminium in deposition process.
2) chemical vapor depsotition equipment for the preparation of multielement modified aluminide coating that provides of the utility model, can be used for the cold turbine blade of aircraft engine film or the production of terrestrial power generation heavy duty gas turbine turbine blade inner cooling path top coat, and uniform coating thickness, all standing of blade inner duct top coat, ensure that blade outer surface generates without the coating of harmful thickness simultaneously.
3) chemical vapor depsotition equipment for the preparation of multielement modified aluminide coating that provides of the utility model, without embedding process, need not be coated with rear cleaning, decrease the discharge of waste water in entrapping method calorize technique.
4) chemical vapor depsotition equipment for the preparation of multielement modified aluminide coating that provides of the utility model, in enormous quantities, industrial applications design, structure is simple, operation is convenient, and homogeneity of product well, meets industrialization production requirements.
Accompanying drawing illustrates:
Fig. 1 is one-piece construction schematic diagram of the present utility model.
Fig. 2 is gas supply control system schema.
In figure: 1. vacuum reaction chamber; 2. refractory liner; 3. well heater; 4. stainless steel inner container; 5a. inert gas inleting pipe road; 5b. process gas intake ducting; 6. horizontal duct; 7. air guiding base; 8. support; 9. Axial Thermal radiation shield; 10. bottom pedestal; 11. gas exhaust ducts; 12. axial gas preheaters; 13. first O-ring seals, 14. second O-ring seals; 15. gas supply control systems; 16a. rare gas element high pressure tank; 16b.H
2gas high pressure tank; 16c.HCl gas high pressure gas-holder; 17. gas pressure reducers; 18. volumetric flow meters; 19. mass flow controllers; 20. mixed gas tanks; 21. electromagnetic valve switch; 1#.Al metal halide maker; 2#.Si metal halide maker; Other metal halide makers of 3#.; 22. gas operated devices; 23.Al metallic particle bed; 24.Si metallic particle bed; 25. other metallic particle bed; 26. horizontal exhaust ducts; 27. alkali lye circulation vacuum pumps; 28. electric motor; 29. waste gas exhaust pipes; S1, S2, S3. gas supply control system pneumatic outlet; S1a. inert gas entrance; S2a, S3a. process gas inlet; B. ground supports seat; S. workpiece.
Embodiment:
Below in conjunction with accompanying drawing, the utility model is described in further detail.
With reference to Fig. 1, a kind of chemical vapor depsotition equipment for the preparation of multielement modified aluminide coating of the utility model, comprising one can evacuated vacuum reaction chamber 1, it adopts elevation type double-layer structure, (do not shown in figure by conventional hydraulic mechanism or other machinery, do not belong to the utility model content) promote, vacuum furnace body is made up of burner hearth refractory materials, stove heat insulating material for external layer, outer furnace shell etc., to ensure that body of heater appearance is in lower temperature levels; A gas supply control system 15, can pass into described vacuum reaction indoor together with other working gass by each metal halide reactant gases; And an alkali lye circulating vacuum pump system.
Be uniformly distributed having heaters 3 around the vertical type square burner hearth refractory liner 2 of vacuum reaction chamber 1 of the present utility model, well heater 3 and the conjuncted installation of vacuum reaction chamber 1, for pending workpiece S heats, the homogeneity of heating in stove can be ensured simultaneously.Hearth inner lining stainless steel inner container 4, stainless steel inner container is back-off cup-shape, and lower edge sealing relies on compression first O-ring seals 13, and the pyroreaction room defined by stainless steel inner container 4 relies on body of heater from resealing.Configuration thermopair (not shown) by enter bottom vacuum reaction chamber 1 and with workpiece S flexible contact, observed temperature is passed to heating and temperature controlling system (do not show in figure, do not belong to the utility model content), change heating frequency accordingly, or carry out thermostatic control.Intake ducting needs according to technique the center and the periphery that are arranged in reaction chamber, and be communicated with gas supply control system 15, rare gas element enters in reaction chamber by inert gas inleting pipe road 5a, process gas is entered in reaction chamber by process gas intake ducting 5b, thus realizes the weight feed of gas.Workpiece S is fixed on support 8 by air guiding base 7, and support 8 is fastening or be welded on reaction chamber inert gas inleting pipe road 5a.Air guiding base 7 is connected by horizontal duct 6 with process gas intake ducting 5b; process gas enters the internal gutter of workpiece S successively by process gas intake ducting 5b, horizontal duct 6, air guiding base 7, protection gas argon gas then arrives workpiece S outside surface by inert gas inleting pipe road 5a.Support 8 lowermost end is furnished with the Axial Thermal radiation shield 9 be made up of superalloy plate, this can reduce the thermal radiation to reaction chamber bottom pedestal 10, reaction chamber bottom pedestal 10 is arranged on vacuum reaction chamber 1 and ground supports seat B, ground supports seat B is vertically placed on level ground, and reaction chamber bottom pedestal 10 pairs of stainless steel inner containers 4 and support 8 play a supportive role.Tail gas is discharged by reaction chamber lower end gas exhaust duct 11, and gas exhaust duct 11 upper end open is positioned at Axial Thermal radiation shield 9 times, and lower end extends to outside reaction chamber bottom pedestal 10, and is communicated with horizontal exhaust duct 26 one end.The center of gas exhaust duct 11 is provided with axial gas preheater 12, can ensure that tail gas remains gaseous phase before entering horizontal exhaust duct 26.Horizontal exhaust duct 26 the other end and alkali lye circulation vacuum pump system connectivity, adopt conventional heating element (not shown) to guarantee that in horizontal exhaust duct 26, waste gas maintains gaseous phase all the time.Alkali lye circulating vacuum pump system comprises alkali lye circulation vacuum pump 27, electric motor 28, vapor pipe 29, the H in tail gas
2enter atmospheric environment through the gas-liquid separator of liquid-ring vacuum pump by vapor pipe 29 with Ar gas, the NaOH solution generation neutralization reaction in HCl gas and vacuum pump, reduce sour gas to the corrosion rate of equipment.The sealing of body of heater 1 external world relies on and compresses O RunddichtringO 14.
With reference to Fig. 2, in gas supply control system 15 of the present utility model, the first pneumatic outlet S1, the second pneumatic outlet S2 and the 3rd pneumatic outlet S3 are distributed with gas pressure reducer 17, volumetric flow meter 18 and mass flow controller 19 respectively.Gas pressure reducer 17 is communicated with high pressure tank 16, and the other end is connected with volumetric flow meter 18, and the other end of volumetric flow meter 18 is communicated with mixed gas tank 20.Opened respectively by gas pressure reducer 17 and gas HCl and carrier gas H is housed
2high pressure tank 16, adjustments of gas reducing valve 17 and volumetric flow meter 18 control gas HCl and H
2flow, HCl and H
2gas enters after mixed gas tank 20 mixes with suitable proportion, controlled to enter metal halide gas maker (not showing in its heating unit figure) by electromagnetic valve switch 21, wherein, the Al metallic particle bed 23 that in Al metal halide maker 1#, gas HCl flows through 300 DEG C generates AlCl
3with AlClx mixed gas; The Si metallic particle bed 24 that in Si metal halide maker 2#, gas HCl flows through 300 DEG C generates SiCl
4and SiCl
xmixed gas; In other metal halide makers 3#, gas HCl (can adjust gaseous constituent according to concrete technology) flows through other metal/alloy grain beds of 430 DEG C (can adjust temperature according to concrete technology), as Hf, Zr, Ce, Ni-Mg alloy, generate corresponding process gas.Thereafter, by volumetric flow meter 18 and mass flow controller 19 Controlling Technology gas, carrier gas H
2carry various coating process gas and enter process gas intake ducting 5b in body of heater 1 according to processing requirement.Meanwhile, according to technique needs, open gas pressure-reducing regulating valve 17, control argon flow amount by adjustments of gas decompression valve 17, volumetric flow meter 18, mass flow controller 19, argon gas enters the inert gas inleting pipe road 5a in body of heater 1.
Now thinking that the workpiece S internal surface with internal gutter structure prepares Al-Cr-Si aluminide coating is the principle of work that example sets forth the utility model equipment:
Pending workpiece S is fixed on the special air guiding base 7 in reaction chamber; shove charge seals; forvacuum before heating; then the air in the emptying body of heater of argon gas is passed into; then be evacuated to about 1.33Pa, heated parts S to 1010 DEG C under argon shield, keep homo(io)thermism; subsequently by suitable proportion, open the H in other metal halide makers 3# in gas supply control system 15
2, HCl high pressure tank, HCl gas stream through Cr metallic particles reaction generate CrCl
xmixed gas, subsequently H
2carry CrCl
xreaction chamber is entered with certain flow rate through process gas intake ducting 5b; After equipment runs certain hour, working time requires to formulate according to actual coating, closes CrCl
xmixed gas generates gas circuit, opens the H in 1# metal halide maker
2, HCl high pressure tank, HCl gas stream through Al metallic particles reaction generate AlCl
xmixed gas, H
2carry AlCl
xreaction chamber is entered through process gas intake ducting 5b with certain flow rate; The same, after equipment runs certain hour, close AlCl
xmixed gas generates gas circuit, opens the H in Si metal halide maker 2#
2, HCl high pressure tank, HCl gas stream through Si metallic particles reaction generate SiCl
xmixed gas, H
2carry SiCl
xreaction chamber is entered through process gas intake ducting 5b with certain flow rate.In this technological process, the argon gas flow velocity in inert gas inleting pipe road 5a remains in 14.16 ~ 28.32L/min (this flow velocity can adjust according to concrete technology) scope.Equipment runs certain hour, and after prepare by the coating of required thickness and structure, closedown vacuum reaction chamber 1 heats and temperature control system, stopping coating reaction gas SiCl
xsupply, when cooling to about 100 DEG C with the furnace, stop argon gas feed, heating unit work and vacuum system work, the workpiece handled well is come out of the stove.
Claims (8)
1. for the preparation of a chemical vapor depsotition equipment for multielement modified aluminide coating, it is characterized in that, comprise for the formation of the vacuum reaction chamber (1) of vacuum, gas supply control system (15) and vacuum and exhaust treatment system, the circumference of vacuum reaction chamber (1) and top are followed successively by stove heat insulating material for external layer from outside to inside, outer furnace shell, refractory liner (2) and well heater (3), the bottom of vacuum reaction chamber (1) is provided with lift bottom pedestal (10) for carrying workpiece, stainless steel inner container (4) is provided with in vacuum reaction chamber (1), stainless steel inner container (4) is sealed in vacuum reaction chamber (1) by bottom pedestal (10), the chamber of stainless steel inner container (4) is divided into coating reaction room and exhaust emissions district, bottom pedestal (10) is configured with the inert gas inleting pipe road (5a) and process gas intake ducting (5b) that communicate with described vacuum reaction chamber (1), the circumference in inert gas inleting pipe road (5a) is provided with some layers of support (8), each support (8) is provided with workpiece air guiding base (7), each air guiding base (7) is all connected with process gas intake ducting (5b) by horizontal duct (6), workpiece (S) is arranged on the top of air guiding base (7),
Gas supply control system (15) is respectively arranged with the first pneumatic outlet (S1), the second pneumatic outlet (S2) and the 3rd pneumatic outlet (S3), first pneumatic outlet (S1) is connected with the inert gas entrance (S1a) of inert gas inleting pipe road (5a), and the second pneumatic outlet (S2) is connected with the second process gas inlet (S3a) with first process gas inlet (S2a) of process gas intake ducting (5b) respectively with the 3rd pneumatic outlet (S3);
Bottom pedestal (10) is provided with gas exhaust duct (11), gas exhaust duct (11) is connected with the alkali lye circulation vacuum pump (27) in exhaust treatment system with vacuum by horizontal exhaust duct (26), electric motor (28), for providing power for alkali lye circulation vacuum pump (27), alkali lye circulation vacuum pump (26) is provided with vapor pipe (29).
2. a kind of chemical vapor depsotition equipment for the preparation of multielement modified aluminide coating according to claim 1, is characterized in that: the material selection trade mark of stainless steel inner container (4) is the stainless steel of 1Cr25Ni20Si2.
3. a kind of chemical vapor depsotition equipment for the preparation of multielement modified aluminide coating according to claim 1, is characterized in that: gas supply control system (15) comprises rare gas element high pressure tank (16a), H
2gas high pressure tank (16b) and HCl gas high pressure gas-holder (16c), wherein, first pneumatic outlet (S1) of rare gas element high pressure tank (16a) connects the inert gas entrance (S1a) in inert gas inleting pipe road (5a) by gas pressure reducer (17), volumetric flow meter (18), H
2gas high pressure tank (16b) and HCl gas high pressure gas-holder (16c) are respectively by gas pressure reducer (17), volumetric flow meter (18) is connected mixing tank (20) with mass flow controller (19), the outlet of mixing tank (20) connects Al metal halide maker (1#) entrance respectively by Mgs (21), Si metal halide maker (2#) and other metal halide maker (3#) entrances, Al metal halide maker (1#) entrance, second pneumatic outlet (S2) of Si metal halide maker (2#) and other metal halide makers (3#), 3rd pneumatic outlet (S3) is respectively by volumetric flow meter (18), first process gas inlet (S2a) of mass flow controller (19) Joining Technology gas inlet pipeline (5b), second process gas inlet (S3a).
4. a kind of chemical vapor depsotition equipment for the preparation of multielement modified aluminide coating according to claim 3, it is characterized in that: in Al metal halide maker (1#), be provided with gas operated device (22) and Al metallic particle bed (23), be provided with gas operated device (22) and Si metallic particle bed (24) in Si metal halide maker (2#), other metal halide makers (3#) are provided with gas operated device (22) and other metallic particle bed (25).
5. a kind of chemical vapor depsotition equipment for the preparation of multielement modified aluminide coating according to claim 1, it is characterized in that: gas exhaust duct (11) center is provided with axial gas preheater (12), entering the front generation condensation of horizontal exhaust duct (26) for preventing tail gas.
6. a kind of chemical vapor depsotition equipment for the preparation of multielement modified aluminide coating according to claim 1, is characterized in that: sealed by the first O-ring seals (13) and the second O-ring seals (14) between reaction chamber base (10) and vacuum furnace body (1).
7. a kind of chemical vapor depsotition equipment for the preparation of multielement modified aluminide coating according to claim 1, it is characterized in that: the circumference of inert gas inleting pipe road (5a) is also provided with Axial Thermal radiation shield (9), this Axial Thermal radiation shield (9) is positioned between bottom pedestal (10) and lowest layer support (8).
8. a kind of chemical vapor depsotition equipment for the preparation of multielement modified aluminide coating according to claim 1, is characterized in that: the bottom of vacuum reaction chamber (1) and bottom pedestal (10) is all supported by ground supports seat (B).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520481643.2U CN204825045U (en) | 2015-07-06 | 2015-07-06 | A chemical vapor deposition equipment for preparing multielement calorize thing coating of modifying |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520481643.2U CN204825045U (en) | 2015-07-06 | 2015-07-06 | A chemical vapor deposition equipment for preparing multielement calorize thing coating of modifying |
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|---|---|
| CN204825045U true CN204825045U (en) | 2015-12-02 |
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|---|---|---|---|
| CN201520481643.2U Expired - Fee Related CN204825045U (en) | 2015-07-06 | 2015-07-06 | A chemical vapor deposition equipment for preparing multielement calorize thing coating of modifying |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN107523802A (en) * | 2017-08-16 | 2017-12-29 | 南京龙力机械制造有限公司 | A kind of consersion unit for chemical vapor deposition |
| CN112011785A (en) * | 2020-10-10 | 2020-12-01 | 常州艾恩希纳米镀膜科技有限公司 | Waste gas neutralizing system for CVD coating equipment |
| CN114150288A (en) * | 2021-11-11 | 2022-03-08 | 武汉材料保护研究所有限公司 | Penetrant generator, chemical vapor deposition reaction device and vapor deposition method |
| CN114672761A (en) * | 2022-03-11 | 2022-06-28 | 沈阳梅特科航空科技有限公司 | Hollow blade inner and outer surface codeposition modified aluminide coating and preparation process thereof |
| CN115786759A (en) * | 2022-11-11 | 2023-03-14 | 广州众山精密科技有限公司 | Equipment and method for preparing near-net-shape aluminum-based silicon carbide foil by gas-phase aluminizing |
-
2015
- 2015-07-06 CN CN201520481643.2U patent/CN204825045U/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107523802A (en) * | 2017-08-16 | 2017-12-29 | 南京龙力机械制造有限公司 | A kind of consersion unit for chemical vapor deposition |
| CN107523802B (en) * | 2017-08-16 | 2019-04-05 | 南京龙力机械制造有限公司 | A kind of consersion unit for chemical vapor deposition |
| CN112011785A (en) * | 2020-10-10 | 2020-12-01 | 常州艾恩希纳米镀膜科技有限公司 | Waste gas neutralizing system for CVD coating equipment |
| CN114150288A (en) * | 2021-11-11 | 2022-03-08 | 武汉材料保护研究所有限公司 | Penetrant generator, chemical vapor deposition reaction device and vapor deposition method |
| CN114672761A (en) * | 2022-03-11 | 2022-06-28 | 沈阳梅特科航空科技有限公司 | Hollow blade inner and outer surface codeposition modified aluminide coating and preparation process thereof |
| CN115786759A (en) * | 2022-11-11 | 2023-03-14 | 广州众山精密科技有限公司 | Equipment and method for preparing near-net-shape aluminum-based silicon carbide foil by gas-phase aluminizing |
| CN115786759B (en) * | 2022-11-11 | 2024-06-04 | 广州众山精密科技有限公司 | Equipment and method for preparing near-net-shaped aluminum-based silicon carbide foil by gas phase aluminizing |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20151202 Termination date: 20180706 |