CN204174276U - For the preparation of the chemical vapor depsotition equipment of gas turbine blade coating on inner surface - Google Patents
For the preparation of the chemical vapor depsotition equipment of gas turbine blade coating on inner surface Download PDFInfo
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- CN204174276U CN204174276U CN201420622491.9U CN201420622491U CN204174276U CN 204174276 U CN204174276 U CN 204174276U CN 201420622491 U CN201420622491 U CN 201420622491U CN 204174276 U CN204174276 U CN 204174276U
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Abstract
The utility model discloses a kind of chemical vapor depsotition equipment for the preparation of gas turbine blade coating on inner surface, comprise vacuum furnace body, gas supply control system and vacuum and exhaust treatment system.Gas supply control system accurately controls reaction gas, carrier gas and shielding gas flow amount, and reactant gases enters blade interior cooling duct reaction by air guiding base and generates coating, realizes all standing of blade inner duct top coat; Protection gas covers blade outer surface by gas pipe line, and the reactant gases Long contact time preventing blade outer surface and inner duct from flowing out and reacting generates the coating being harmful to thickness; Adopt vacuum tightness that alkali lye circulation vacuum pump system held reaction chamber is given and in and HCl gas in tail gas, the aluminum chloride gas passed in gaseous reactant and tail gas reacts and generates particulate solid.The utility model structure is simple, easy to operate, and vent gas treatment ability is strong, and production efficiency is high, can meet the performance of blade inner duct surface protection coating and industrial production and environmental requirement.
Description
Technical field
The utility model belongs to chemical vapor depsotition equipment technical field, is specifically related to a kind of chemical vapor depsotition equipment for the preparation of gas turbine blade coating on inner surface.
Background technology
A large amount of internal combustion turbine gas turbine blade long service result shows: under high-temperature fuel gas, inner duct airflow scouring and thermal stresses Circulation, and oxidation, creep, thermal etching, cracking etc. that blade interior cooling duct causes are the key factors affecting the gas turbine blade life-span.Therefore, apply supercoat on gas turbine blade inner duct surface (hereinafter referred to as leaflet inner faces), carry heavy alloyed resistance to high temperature oxidation, anti-sulfur-bearing exhaust gas corrosion, resistance to high temperature corrosion rate capacity, extend the work-ing life of gas turbine blade.At present, external internal combustion turbine gas turbine blade internal surface generally adopts aluminide coating material, and preparation technology is mainly chemical vapour deposition (CVD) method.The shortcomings such as CVD easy blocking cooling hole, easy-sintering, the infiltration layer that can effectively avoid conventional solid powder calorizing and Paste aluminising method to exist is uneven, effectively can not only control diffusion coating thickness, aluminium content and structure, and low activity and high reactivity aluminide all can be deposited on complex-shaped workpiece surface.But, application CVD technique is prepared gas turbine blade coating on inner surface and is still had the following disadvantages: (1) is in gas turbine blade internal surface gas phase aluminising process, blade outer surface forms certain thickness aluminide coating simultaneously, and will the thermal fatigue resistance of reduction thermal barrier coating when the MCrAlY coating of blade outer surface or thermal barrier coating surface or bottom (i.e. blade base surface) exist aluminide coating.Moreover modern gas turbines gas turbine blade coating on inner surface fraction of coverage requires to reach 100%, and coating coverage is decided by that metal halide gas cools circulation and the deposition conditions in duct in blade interior.At present, under the prerequisite of gas turbine blade cooling hole all without blocking, the domestic deposition not yet developed a kind of feasible CVD equipment and technique and can effectively avoid making metal halide at blade outer surface, makes coating on inner surface fraction of coverage reach 100% simultaneously.(2) tail gas given off in CVD technique coating procedure comprises unreacted HCl gas, carrier gas (hydrogen or argon gas), unreacted or reaction intermediate gas (AlCl
3, AlCl
2and AlCl) etc., wherein, AlCl
3, AlCl
2with the aluminum chloride gas condensation after fixing such as AlCl, deposit in the duct and block gas exhaust duct, the HCl gas of unreacting gas is met water and is easily generated the extremely strong acid of corrodibility, causes erosion, the security that serious threat equipment runs to device hardware.Moreover these settlings not easy cleaning, adds equipment cleaning time and fund input.(3) noxious gas emission containing Cl ion, in air, causes environmental pollution.
Utility model content
The purpose of this utility model is to provide a kind of chemical vapor depsotition equipment for the preparation of gas turbine blade coating on inner surface, to realize all standing of blade inner duct top coat, blade outer surface generates without the coating of harmful thickness simultaneously, and effectively control the damage of tail gas to equipment and the pollution of environment, meet coating performance and industrial production and environmental requirement.
For achieving the above object, the utility model adopts following technical scheme to be achieved:
For the preparation of the chemical vapor depsotition equipment of gas turbine blade coating on inner surface, comprise vacuum furnace body, gas supply control system and vacuum and exhaust treatment system, wherein, the circumference of vacuum furnace body and top are followed successively by stove heat insulating material for external layer from outside to inside, outer furnace shell, refractory liner and well heater, stainless steel inner container is provided with in vacuum furnace body, stainless steel inner container is by being arranged on the reaction chamber base seal of vacuum furnace body bottom in vacuum furnace body, the chamber of stainless steel inner container is divided into coating reaction room and exhaust emissions district, coating reaction room is configured with the center gas pipe line be connected with gas supply control system, some Ar gas gas pipe lines, the circumference of center gas pipe line is provided with some supports, each support is provided with an air guiding base, each air guiding base is all connected with center gas pipe line by horizontal duct, the bottom of each air guiding base is porous gas breaker plate, placed some Al-Cr alloying pellets in porous gas breaker plate, the blade root of blade is arranged on the top of air guiding base, and the blade root of blade is completely buried in the high temperature resistant inert filler of its circumference setting,
Gas supply control system is respectively arranged with the outlet of Ar gas, reactant gases S1 exports and gaseous reactant S2 exports, and the outlet of Ar gas is connected with the entrance of some Ar gas gas pipe lines respectively, and reactant gases S1 outlet is connected with the entrance of center gas pipe line;
Reaction chamber base is provided with gas exhaust duct, gas exhaust duct is connected with the alkali lye circulation vacuum pump in exhaust treatment system with vacuum by horizontal exhaust duct, electric motor is used for providing power for alkali lye circulation vacuum pump, alkali lye circulation vacuum pump is provided with vapor pipe, and alkali lye circulation vacuum pump is connected with NaOH solution pond with secondary conduit respectively by one-level conduit; Gaseous reactant S2 outlet is connected with horizontal exhaust duct.
The utility model further improves and is: the material selection trade mark of stainless steel inner container is the stainless steel of 1Cr25Ni20Si2.
The utility model further improves and is: the bottom of vacuum furnace body and reaction chamber base is supported by some ground supports.
The utility model further improves and is: gas supply control system comprises Ar gas high pressure tank, gaseous reactant S2 high pressure tank, H
2gas high pressure tank and HCl high pressure tank; Wherein, the Ar gas outlet of Ar gas high pressure tank is provided with gas pressure reducer, and the outlet of this gas pressure reducer is connected by the entrance of some flow of digit display variable valve with some Ar gas gas pipe lines; The gaseous reactant S2 of gaseous reactant S2 high pressure tank is exported and is connected with horizontal exhaust duct by gas pressure reducer, mass flowmeter successively; H
2gas high pressure tank and HCl high pressure tank enter mixing tank respectively by gas pressure reducer, mass flowmeter, the outlet of mixing tank connects the entrance of low-temperature metal halogenide maker by Mgs, be provided with Al metallic particle bed in low-temperature metal halogenide maker, the outlet of low-temperature metal halogenide maker is by flow of digit display variable valve ligation gas S1 entrance.
The utility model further improves and is: gas exhaust duct center is provided with axial gas preheater, before entering horizontal exhaust duct, condensation occurs for preventing tail gas.
The utility model further improves and is: sealed by the first O-ring seals and the second O-ring seals between reaction chamber base and vacuum furnace body.
Compared with prior art, the utility model has following beneficial effect:
1, the chemical vapor depsotition equipment for the preparation of gas turbine blade coating on inner surface that provides of the utility model, realizes all standing of blade inner duct top coat, ensures that blade outer surface generates without the coating of harmful thickness simultaneously.
2, the chemical vapor depsotition equipment for the preparation of gas turbine blade coating on inner surface that provides of the utility model, structure is simple, operation is convenient, effectively can control the damage of obnoxious flavour to equipment and the pollution of environment in tail gas, shorten the batch production cycle, meet the requirement of suitability for industrialized production and environmental protection.
In sum, the utility model gas supply control system accurately controls reactant gases, protection gas and other working gass pass into vacuum furnace body and exhaust gas processing device, and the coating reaction district in vacuum furnace body is configured with the gas pipe line be connected with gas supply control system, reactant gases is by reaction chamber center gas pipe line and enter blade inner duct by air guiding base, react with leaflet inner faces alloy substrate and form coating, protection gas covers blade outer surface by reaction chamber both sides gas pipe line, the reactant gases Long contact time preventing outside surface and inner duct from flowing out and reacting generates the coating of harmful thickness, adopt alkali lye circulation vacuum pump and support equipment thereof, maintain reaction chamber vacuum state and in and HCl gas in tail gas, CO
2, CO, NO
xreact generate particulate solid Deng aluminum chloride gas unreacted in gas and tail gas, particulate solid can easily rinse out by water, effectively shortens the scavenging period of equipment when working continuously.
Accompanying drawing explanation
Fig. 1 is one-piece construction schematic diagram of the present utility model.
Fig. 2 is the structural representation of blade air guiding base.
Fig. 3 is gas supply control system schema.
Wherein: 1. vacuum furnace body; 2. refractory liner; 3. well heater; 4. stainless steel inner container; 5a. center gas pipe line; 5b.Ar gas gas pipe line; 6. short tube; 7. air guiding base; 8. support; 9. Axial Thermal radiation shield; 10. reaction chamber base; 11. gas exhaust ducts; 12. axial gas preheaters; 13. first O-ring seals, 14. second O-ring seals; 15. gas supply control systems; 16a.Ar gas high pressure tank; 16b. gaseous reactant S2 high pressure tank; 16c.H
2gas high pressure tank; 16d.HCl high pressure tank; 17. gas pressure reducers; 18. mass flowmeters; 19. flow of digit display variable valve; 20. mixed gas tanks; 21. electromagnetic valve switch; 22. low-temperature metal halogenide makers; 23.Al metallic particle bed; 24. gas operated devices; 25. horizontal exhaust ducts; 26. alkali lye circulation vacuum pumps; 27. electric motor; 28. vapor pipes; 29. one-level conduits; 30. secondary conduits; 31.NaOH solution pool; 32. porous gas breaker plates; 33.Al-Cr alloying pellet; 34. high temperature resistant inert fillers; B. ground supports seat; S. blade; S1. reactant gases, i.e. H
2+ AlCl
3gas; S2. gaseous reactant, i.e. CO
2, CO or NOx gas.
Embodiment
Below in conjunction with accompanying drawing, the utility model is described in further detail.
With reference to Fig. 1, a kind of chemical vapor depsotition equipment preparing internal combustion turbine gas turbine blade inner duct top coat of the utility model, comprising one can evacuated vacuum furnace body 1, it adopts elevation type double-layer structure, (do not shown in figure by conventional hydraulic mechanism or other machinery, do not belong to the utility model content) promote, vacuum furnace body is made up of burner hearth refractory materials, stove heat insulating material for external layer, outer furnace shell etc., to ensure that body of heater appearance is in lower temperature levels; A gas supply control system 15, can pass into low-temperature metal halide gas, carrier gas in described vacuum furnace body together with other working gass; And an alkali lye circulation vacuum pump and exhaust treatment system.
Be uniformly distributed having heaters 3 around the vertical type square burner hearth refractory liner 2 of vacuum furnace body 1 of the present utility model, well heater 3 and the conjuncted installation of vacuum furnace body 1, for pending blade S heats, the homogeneity of heating in stove can be ensured simultaneously.Hearth inner lining stainless steel inner container 4, stainless steel inner container is back-off cup-shape, and lower edge sealing relies on and compresses O-ring seals 13, and the pyroreaction room defined by stainless steel inner container 4 relies on body of heater from resealing.The thermopair (not shown) of configuration is by entering reaction chamber and blade S flexible contact bottom vacuum furnace body 1, observed temperature is passed to heating and temperature controlling system (do not show in figure, do not belong to the utility model content), change heating frequency accordingly, or carry out thermostatic control.Working gas enters in reaction chamber by center gas pipe line 5a, and gas pipe line needs according to technique the center and the periphery that are arranged in reaction chamber, and is communicated with gas supply control system 15, thus realizes the weight feed of gas.Blade S is fixed on support 8 by air guiding base 7, and support 8 is fastening or be welded on the gas pipe line 5a of reaction chamber center.Air guiding base 7 is connected by a short tube 6 with center gas pipe line 5a; reactant gases enters the internal cooling duct of blade S successively by center gas pipe line 5a, short tube 6, air guiding base 7, protection gas argon gas then arrives blade S outside surface by the Ar gas gas pipe line 5b of reaction chamber both sides.Support 8 lowermost end is furnished with the Axial Thermal radiation shield 9 be made up of superalloy plate, this can reduce the thermal radiation to reaction chamber base 10, reaction chamber base 10 is arranged on vacuum furnace body 1 and ground supports seat B, supporting seat B is vertically placed on level ground, and reaction chamber base 10 pairs of stainless steel inner containers 4 and support 8 play a supportive role.Tail gas is discharged by reaction chamber lower end gas exhaust duct 11, and gas exhaust duct 11 upper end open is positioned at Axial Thermal radiation shield 9 times, and lower end extends to outside reaction chamber base 10, and is communicated with horizontal exhaust duct 25.The center of gas exhaust duct 11 is provided with axial gas preheater 12, and can ensure that tail gas remains gaseous phase before entering horizontal exhaust duct 25, in tail gas, obnoxious flavour is processed by exhaust gas processing device.The sealing of body of heater 1 external world relies on and compresses O RunddichtringO 14.
In the vacuum of the utility model equipment and exhaust treatment system, horizontal exhaust duct 25 one end is communicated with the gas exhaust duct 11 of body of heater 1 lower end, the other end and alkali lye circulation vacuum pump system connectivity, employing conventional heating element (not shown) guarantees AlCl, AlCl in horizontal exhaust duct 25
2, AlCl
3all the time gaseous phase is maintained Deng material.Alkali lye circulating vacuum pump system comprises alkali lye circulation vacuum pump 26, electric motor 27, vapor pipe 28 and NaOH solution pond 31, the H in tail gas
2enter atmospheric environment through the gas-liquid separator of liquid-ring vacuum pump by vapor pipe 28 with Ar gas, the NaOH solution generation neutralization reaction in HCl gas and vacuum pump, reduce sour gas to the corrosion rate of equipment.Vacuum pump one end is communicated with NaOH solution pond 31 by one-level conduit 29, secondary conduit 30, so that the circulation of NaOH solution upgrades, the other end is communicated with reaction chamber, maintains the vacuum tightness that reaction chamber is given.Reactant gases S2 is communicated with horizontal exhaust duct 25 by gas operated device 24, can with aluminum chloride gas (AlCl, the AlCl in tail gas
2and AlCl
3) react the stable particulate solid (temperature of reaction is about 800 DEG C, does not show in well heater figure) of generation herein, the easy-to-use water cleaning of this particulate solid.
With reference to Fig. 2, there is a porous gas breaker plate 32 bottom of the utility model Leaf air guiding base 7, and the screen cloth (not shown) on this plate placed many Al-Cr alloying pellets 33, and its distribution of sizes is between 0.95cm ~ 1.27cm.AlCl
3gas, by the Al-Cr alloying pellet 33 of high temperature, will be converted into high reactivity aluminum chloride gas, as AlCl, AlCl
2, this kind of gas can form high reactivity Al atom, thus optimizes chemical vapor deposition processes.Air guiding base 7 top portion is furnished with air outlet, and the distribution of air outlet and size are formulated according to actual blade bottom cooling air inlet mouth.Except blade is exposed in reaction chamber, the blade root of blade S is completely buried in high temperature resistant inert filler 34, and blade root outside surface can be avoided to contact with the direct of reactant gases.
With reference to Fig. 3, in gas supply control system 15 of the present utility model, gas circuit (S1, S2, Ar) is distributed with respectively gas pressure reducer 17, mass flowmeter 18 and flow of digit display variable valve 19.Gas pressure reducer 17 is communicated with high pressure tank 16, and the other end is connected with mass flowmeter 18, and the other end of mass flowmeter 18 is communicated with mixed gas tank 20.Opened respectively by gas pressure reducer 17 and gas HCl and carrier gas H is housed
2high pressure tank 16, adjustments of gas reducing valve 17 controls gas HCl and H
2flow, mass flowmeter 18 shows HCl and H respectively
2gas flow values, HCl and H
2gas enters after mixed gas tank 20 mixes with suitable proportion, controlled to enter low temperature (100 ~ 600 DEG C) metal halide gas maker 22 (not showing in its heating unit figure) by electromagnetic valve switch 21, the Al metallic particle bed 23 that wherein gas HCl flows through 300 DEG C generates AlCl
3gas.Thereafter, by flow of digit display variable valve 19, carrier gas H
2carry AlCl
3gas enters the center gas pipe line 5a in body of heater 1.Meanwhile, open gas pressure-reducing regulating valve 17, control argon flow amount by adjustments of gas decompression valve 17 and flow of digit display variable valve 19, argon gas enters the Ar gas gas pipe line 5b in body of heater 1; Open gas pressure-reducing regulating valve 17, control reactant gases S2 by gas pressure-reducing regulating valve 17 and mass flowmeter 18 and enter exhaust treatment system with certain flow by the gas operated device 24 on horizontal exhaust duct 25, exhaust treatment system introduces CO by gas operated device (24)
2, CO or NO
xgas enters horizontal exhaust duct (25), reacts generate particulate solid with unreacted aluminum chloride gas.
Be now that the blade S internal surface of Ni base alloy is prepared NiAl coating for example and set forth the principle of work of the utility model equipment with matrix:
Pending blade S is fixed on the air guiding base 7 in reaction chamber; shove charge seals; forvacuum before heating; then the air in the emptying body of heater of argon gas is passed into; then about 1.33Pa is evacuated to; heater blade S to 1010 DEG C under argon shield, keeps homo(io)thermism, opens the H in gas supply control system 15
2, HCl and S2 gas, HCl gas enters low-temperature metal halogenide maker 22, and the Al prill with 300 DEG C reacts and generates AlCl
3gas, subsequently by suitable proportion, H
2carry AlCl
3(i.e. air-flow S1) enters reaction chamber center gas pipe line 5a with certain flow rate, and reactant gases S2 enters horizontal exhaust duct 25.Wherein, argon gas flow velocity in high-temperature reaction process in Ar gas gas pipe line 5b remains within the scope of 14.16 ~ 28.32L/min, the coat-thickness that argon gas flow rate control scope is formed according to blade outer surface is herein formulated, the existence of certain thickness coating on the thermal fatigue resistance of blade surface thermal barrier coating without impact.The flow velocity of gas S2 is formulated according to the flow velocity of tail gas in gas exhaust duct 11, and the flow rate of gas S2 and tail gas is 0.012:1.Equipment runs certain hour, working time requires to formulate according to actual coating, close vacuum furnace body 1 to heat and temperature control system, after cooling to about 600 DEG C with the furnace, stop supply response gas S1, when furnace body temperature is reduced to about 100 DEG C, stop all gas supply, heating unit work and vacuum system work, the gas turbine blade handled well is come out of the stove.
Claims (6)
1. for the preparation of the chemical vapor depsotition equipment of gas turbine blade coating on inner surface, it is characterized in that: comprise vacuum furnace body (1), gas supply control system (15) and vacuum and exhaust treatment system, wherein, the circumference of vacuum furnace body (1) and top are followed successively by stove heat insulating material for external layer from outside to inside, outer furnace shell, refractory liner (2) and well heater (3), stainless steel inner container (4) is provided with in vacuum furnace body (1), stainless steel inner container (4) is sealed in vacuum furnace body (1) by the reaction chamber base (10) being arranged on vacuum furnace body (1) bottom, the chamber of stainless steel inner container (4) is divided into coating reaction room and exhaust emissions district, coating reaction room is configured with the center gas pipe line (5a) be connected with gas supply control system (15), some Ar gas gas pipe lines (5b), the circumference of center gas pipe line (5a) is provided with some supports (8), each support (8) is provided with an air guiding base (7), each air guiding base (7) is all connected with center gas pipe line (5a) by horizontal duct (6), the bottom of each air guiding base (7) is porous gas breaker plate (32), placed some Al-Cr alloying pellets (33) in porous gas breaker plate (32), the blade root of blade (S) is arranged on the top of air guiding base (7), and the blade root of blade (S) is completely buried in the high temperature resistant inert filler (34) of its circumference setting,
Gas supply control system (15) is respectively arranged with the outlet of Ar gas, reactant gases S1 exports and gaseous reactant S2 exports, the outlet of Ar gas is connected with the entrance of some Ar gas gas pipe lines (5b) respectively, and reactant gases S1 outlet is connected with the entrance of center gas pipe line (5a);
Reaction chamber base (10) is provided with gas exhaust duct (11), gas exhaust duct (11) is connected with the alkali lye circulation vacuum pump (26) in exhaust treatment system with vacuum by horizontal exhaust duct (25), electric motor (27) is for providing power for alkali lye circulation vacuum pump (26), alkali lye circulation vacuum pump (26) is provided with vapor pipe (28), and alkali lye circulation vacuum pump (26) is connected with NaOH solution pond with secondary conduit (30) respectively by one-level conduit (29); Gaseous reactant S2 outlet is connected with horizontal exhaust duct (25).
2. the chemical vapor depsotition equipment for the preparation of gas turbine blade coating on inner surface according to claim 1, is characterized in that: the material selection trade mark of stainless steel inner container (4) is the stainless steel of 1Cr25Ni20Si2.
3. the chemical vapor depsotition equipment for the preparation of gas turbine blade coating on inner surface according to claim 1, is characterized in that: the bottom of vacuum furnace body (1) and reaction chamber base (10) is supported by some ground supports (B).
4. the chemical vapor depsotition equipment for the preparation of gas turbine blade coating on inner surface according to claim 1, is characterized in that: gas supply control system (15) comprises Ar gas high pressure tank (16a), gaseous reactant S2 high pressure tank (16b), H
2gas high pressure tank (16c) and HCl high pressure tank (16d); Wherein, the Ar gas outlet of Ar gas high pressure tank (16a) is provided with gas pressure reducer (17), and the outlet of this gas pressure reducer (17) is connected by the entrance of some flow of digit display variable valve (19) with some Ar gas gas pipe lines (5b); The gaseous reactant S2 of gaseous reactant S2 high pressure tank (16b) is exported and is connected with horizontal exhaust duct (25) by gas pressure reducer (17), mass flowmeter (18) successively; H
2gas high pressure tank (16c) and HCl high pressure tank (16d) enter mixing tank (20) respectively by gas pressure reducer (17), mass flowmeter (18), the outlet of mixing tank (20) connects the entrance of low-temperature metal halogenide maker (22) by Mgs (21), be provided with Al metallic particle bed (23) in low-temperature metal halogenide maker (22), the outlet of low-temperature metal halogenide maker (22) is by flow of digit display variable valve (19) ligation gas S1 entrance.
5. the chemical vapor depsotition equipment for the preparation of gas turbine blade coating on inner surface according to claim 1, it is characterized in that: gas exhaust duct (11) center is provided with axial gas preheater (12), entering the front generation condensation of horizontal exhaust duct (25) for preventing tail gas.
6. the chemical vapor depsotition equipment for the preparation of gas turbine blade coating on inner surface according to claim 1, is characterized in that: sealed by the first O-ring seals (13) and the second O-ring seals (14) between reaction chamber base (10) and vacuum furnace body (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420622491.9U CN204174276U (en) | 2014-10-24 | 2014-10-24 | For the preparation of the chemical vapor depsotition equipment of gas turbine blade coating on inner surface |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420622491.9U CN204174276U (en) | 2014-10-24 | 2014-10-24 | For the preparation of the chemical vapor depsotition equipment of gas turbine blade coating on inner surface |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204174276U true CN204174276U (en) | 2015-02-25 |
Family
ID=52563100
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420622491.9U Expired - Fee Related CN204174276U (en) | 2014-10-24 | 2014-10-24 | For the preparation of the chemical vapor depsotition equipment of gas turbine blade coating on inner surface |
Country Status (1)
| Country | Link |
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| CN (1) | CN204174276U (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107523802A (en) * | 2017-08-16 | 2017-12-29 | 南京龙力机械制造有限公司 | A kind of consersion unit for chemical vapor deposition |
| CN107860219A (en) * | 2017-11-17 | 2018-03-30 | 长沙市凤英机械科技有限公司 | A kind of industrial production sealing reaction chamber |
| CN113798701A (en) * | 2021-09-28 | 2021-12-17 | 北京理工大学珠海学院 | Gas turbine blade punching method and gas turbine blade punching system |
| CN114150288A (en) * | 2021-11-11 | 2022-03-08 | 武汉材料保护研究所有限公司 | Penetrant generator, chemical vapor deposition reaction device and vapor deposition method |
| CN115786759A (en) * | 2022-11-11 | 2023-03-14 | 广州众山精密科技有限公司 | Equipment and method for preparing near-net-shape aluminum-based silicon carbide foil by gas-phase aluminizing |
-
2014
- 2014-10-24 CN CN201420622491.9U patent/CN204174276U/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107523802A (en) * | 2017-08-16 | 2017-12-29 | 南京龙力机械制造有限公司 | A kind of consersion unit for chemical vapor deposition |
| CN107523802B (en) * | 2017-08-16 | 2019-04-05 | 南京龙力机械制造有限公司 | A kind of consersion unit for chemical vapor deposition |
| CN107860219A (en) * | 2017-11-17 | 2018-03-30 | 长沙市凤英机械科技有限公司 | A kind of industrial production sealing reaction chamber |
| CN113798701A (en) * | 2021-09-28 | 2021-12-17 | 北京理工大学珠海学院 | Gas turbine blade punching method and gas turbine blade punching system |
| CN114150288A (en) * | 2021-11-11 | 2022-03-08 | 武汉材料保护研究所有限公司 | Penetrant generator, chemical vapor deposition reaction device and vapor deposition method |
| CN115786759A (en) * | 2022-11-11 | 2023-03-14 | 广州众山精密科技有限公司 | Equipment and method for preparing near-net-shape aluminum-based silicon carbide foil by gas-phase aluminizing |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150225 Termination date: 20181024 |