CN204783872U - Heavy -calibre high vacuum oil diffusion pump - Google Patents
Heavy -calibre high vacuum oil diffusion pump Download PDFInfo
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- CN204783872U CN204783872U CN201520504889.7U CN201520504889U CN204783872U CN 204783872 U CN204783872 U CN 204783872U CN 201520504889 U CN201520504889 U CN 201520504889U CN 204783872 U CN204783872 U CN 204783872U
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Abstract
The utility model discloses a diffusion pump especially relates to a heavy -calibre high vacuum oil diffusion pump, and it is fit for being applied to vacuum furnace, vacuum coating machine. Heavy -calibre high vacuum oil diffusion pump, it includes the pump body, the pump core subassembly of setting in the pump body, wherein the heater setting is in pump body bottom, be equipped with in the gas vent of the pump body and keep off oily device, the pump body has adopted protruding cavity configuration, pump core subassembly is installed perpendicularly in the pump body in the central oil groove, pump core subassembly structure is that from interior to exterior sets gradually the one -level honeycomb duct, second grade honeycomb duct and tertiary honeycomb duct constitute overall structure, honeycomb duct upper portions at different levels all are equipped with sombrero shape divergent nozzle, injection nozzle vertical welding is in the bottom of tertiary honeycomb duct, one -level honeycomb duct high higher than second grade honeycomb duct, the tertiary honeycomb duct of high ratio of second grade honeycomb duct is high. The utility model has the characteristics of heavy -calibre, ultimate vacuum degree are high, pumping rate is high, return that oily rate is low, power consumption is low.
Description
Technical field
The utility model relates to a kind of diffusion pump, particularly relates to a kind of heavy caliber high vacuum oil diffuse pump, and it is applicable to being applied to vacuum furnace, vacuum coater.
Background technique
High vacuum oil diffuse pump belongs to the one of jet vacuum pump, and it is operated in high vacuum region, using low-voltage high speed oil vapor as working medium.The pumping process of pump is that pumped gas is diffused in oil vapor jet the process being carried to pump discharge and getting rid of.It is made up of assemblies such as the pump housing, pump core assembly, heater, oil guards.The pump housing mostly adopts the manufacture of carbon steel or stainless steel; Pump core assembly is made up of nozzle and honeycomb duct, and pump core assembly is the critical component of high vacuum oil diffuse pump, and material mainly contains aluminium or stainless steel; Heater is made up of metal shell, high-temperature heat-resistance ceramic dish and heating module; Exhaust ports is equipped with oil guard, prevents mist of oil from entering vacuum equipment, reduces the pollution to vacuum equipment.Oil diffusion pump, except being widely used in general industry, being specially adapted to those and requiring large container of being taken out is carried out to rapid evacuation and gets rid of rapidly the manufacturing process that processed material releases a large amount of gas in processing procedure.Such as: vacuum metallurgy, the equipment etc. of vacuum heat treatment equipment and vacuum coating.
Traditional high vacuum oil diffuse pump is mainly divided into two kinds according to the shape of the pump housing, for straight chamber and two kinds, convex chamber, its bore is between 100-1000 millimeter, due to difficulty of processing and integrally-built restriction, make do not have bore to be greater than the more bigbore high vacuum oil diffuse pump of 1000 millimeters on the market at present.Because the high vacuum oil diffuse pump of prior art arrangement cannot produce more bigbore vacuum pump, its application is restricted.The pumping speed of traditional high vacuum oil diffuse pump is little, and original speed of exhaust is maximum only can reach 32000L/s, and limiting vacuum is low, and ultimate vacuum is up to 7 × 10
-5pa, the vacuum time that reaches capacity is long, and fluid return rate is high, and power consumption is large.
Summary of the invention
The utility model is exactly to solve the problems of the technologies described above, and a kind of heavy caliber high vacuum oil diffuse pump provided, the feature that it has heavy caliber, ultimate vacuum is high, the speed of exhaust is high, fluid return rate is low, power consumption is low.
In order to achieve the above object, the utility model is lower by following technical proposals examination:
High vacuum oil diffuse pump, it comprises the pump housing, be arranged on the pump core assembly in the pump housing, wherein heater is arranged on bottom the pump housing, oil guard is provided with in the relief opening of the pump housing, the pump housing have employed convex cavity configuration, pump core assembly is vertically mounted in the center oil groove in the pump housing, pump core assembly structure sets gradually one-level honeycomb duct from the inside to the outside, secondary honeycomb duct and three grades of honeycomb ducts form overall structure, honeycomb duct top at different levels is equipped with umbrella crown shape divergent nozzle, jet nozzles is vertically welded in the bottom of three grades of honeycomb ducts, the aspect ratio secondary honeycomb duct of one-level honeycomb duct is high, aspect ratio three grades of honeycomb ducts of secondary honeycomb duct are high.
The intermediate diameter dimension in the convex chamber of the above-mentioned pump housing is 1.25 times of air inlet caliber size, employing two sides, the inner and outer welding place welded structure of the pump housing, and the flange at pump housing air inlet bore place adopts carbon steel overall structure.
Be provided with full water jacket cooling jacket outside the above-mentioned pump housing, cooling jacket is water jacket type cooling jacket or water cooling copper pipe type cooling jacket.
The water jacket wall of above-mentioned water jacket type cooling jacket is adopted as corrosion resistant plate, and inside is wound around pump housing outside by round steel and forms current deflecting structure; The structure of water cooling copper pipe type cooling jacket is that cooling copper tube is wound around pump housing outer wall, and cooling water flows in cooling copper tube, and cooling copper tube adopts copper tube, and cooling copper tube and pump housing wall contacts place adopt brazing spot welding, then adopts soldering full weld structure.
The top of above-mentioned pump core assembly supports fastening by bracket assembly and pump housing inwall, and bracket assembly structure is as follows: supporting sleeve is welded on and is positioned on middle support ring, and strut is connected with supporting sleeve by screw thread.
The bottom of the above-mentioned pump housing is provided with viewing window and temperature detecting resistance, wherein viewing window is manufactured by stainless steel, viewing window structure is for being that the first oxygen free copper sealing gasket is installed on little flange mouth place, little flange welds with small takeover, little flange top is installed blank flange and is connected fastening piece with stainless steel hexagon head spiral shell, nut, plain washer, second oxygen free copper sealing gasket is arranged on main flange, supervisor's flange welds with main adapter, and the second oxygen free copper sealing gasket is connected fastening with viewing window flange by stainless steel hexagon head bolt, nut, plain washer.
The spray angle of the umbrella crown shape divergent nozzle of above-mentioned pump core assembly is 55-65 degree, and the spray angle of jet nozzles is 11-14 degree.
The concrete structure of above-mentioned pump core assembly is: one-level honeycomb duct bottom is connected fastening with one-level honeycomb duct top; Three grades of honeycomb ducts and secondary honeycomb duct are linked together by three grades of supporting sleeves; Secondary honeycomb duct and one-level honeycomb duct top are installed with secondary supporting sleeve and are connected; Three grades of gap pads are arranged on three grades of honeycomb duct tops; Three grades of cap of spraying nozzle are placed on three grades of honeycomb ducts; Secondary gap pad is arranged on secondary honeycomb duct; Secondary nozzle cap is connected with one-level honeycomb duct upper contact; One-level gap pad is placed on the neutral position of first order jet nozzle seat; First order jet nozzle cap is installed on one by bolt and first order jet nozzle seat, and screwed structure installment is passed through on one-level honeycomb duct in first order jet nozzle seat and one-level honeycomb duct top.
The structure of above-mentioned heater is as follows: the bottom of metal shell is provided with universal caster wheel, is provided with furnace bottom, heat-resistant insulating board, heat-stable ceramic dish, nichrome heating wire according to this in metal shell by lower from upper.
Above-mentioned oil guard is vertically mounted on the exhaust ports of the pump housing, oil guard it be by be positioned on the gear beam hanger at center and gear beam hanger by lower from upper interval, staggered Semicircular baffle forms.
Owing to adopting technique scheme, the utility model tool is had the following advantages and effect:
For meeting the requirement of market to the large pumping speed high vacuum oil diffuse pump of heavy caliber, the applicant designs domestic specification relatively large high vacuum oil diffuse pump more bigbore than relatively large KT1200-2000 millimeter, its feature is to improve more than 40% than the pump speed of exhaust in the same industry, and design pumping speed is 60000-180000L/s.Heating time of the utility model diffusion pump is short improves working efficiency for user, decreases pumpdown time, shortens the operating time of production process, and reduce power consumption cost.The utility model heavy caliber high vacuum oil diffuse pump compact structure, is convenient to installation, operation, transport, maintenance.
The structure of the pump housing have employed convex chamber form, the intermediate diameter dimension in convex chamber is 1.25 times of caliber size, through verification experimental verification in order to better obtain higher speed of exhaust index, the intermediate diameter dimension of the pump housing is adopted to be that the design of 1.25 times of caliber size can reach the best speed of exhaust.The pump housing adopts carbon steel manufacture, and two sides, inner and outer welding place is welded, and have passed through the polishing rust-removal technique that first polishing rust-removal, polishing, finishing polish are loaded down with trivial details, makes pump body reach design vacuum equipment high requirement.Outside have employed cooling effect full water jacket type cooling structure preferably, outside water jacket wall is adopted as corrosion resistant plate and avoids pump in Long-Time Service work because the problem of water quality causes the etching problem of pump water jacket, greatly improve the working life of diffusion pump, inside is wound around pump housing outside by round steel and forms current deflecting pattern, area of contact and the water flow of cooling water and the pump housing are provided to greatest extent, sufficiently lower the temperature of pump housing internal surface, reduce pump fluid in the pump body surface attachment time, avoid the double evaporation-cooling of pump liquid, decrease and return oil mass, reduce the quality that the pollution of vacuum chamber is improve to vacuum chamber product.Pump housing flange adopts quality carbon steel overall processing manufacturing structure, rational technique, and accurate process equipment, ensure that the roughness required by flange sealing surface, serve effect to the sealing of vacuum equipment.Design and installation oil level observation device in the pump housing, manufactured by stainless steel, its effect service condition with observing pump liquid easy to use, drains the oil when being easy to oiling and cleaning in the pump housing, and visor can observe pump oil service condition at any time clearly, entirety is stainless steel metal flange seal, form is metal edge of a knife sealing flange, and at high operating temperatures, service time is long for its feature, not easily leak, installation and maintenance are convenient.Pump oil temperature measuring equipment is installed, the temperature of pump liquid work has been showed by oil temperature digital display meter, be convenient to the use working condition of observing pump.
What pump core assembly structure adopted is monolithic construction, be beneficial to the integrity when Installation and Debugging, be provided with oil baffle in the structure, when the blast avoiding work fluid to produce in high-temperature heating process, boiling phenomenon, work fluid follows entrained by oil vapor at a high speed, and reduces vacuum chamber pollution etc.The material of pump core assembly have employed the higher mirror finished stainless steel plate material manufacture of price; ensure that the degree of finish of pump core assembly component surface; pump work fluid is glided fast; decrease the attachment time of pump fluid on pump core assembly part surface; greatly reduce the pollution of the pump liquid fluid return rate to vacuum chamber, protective action is served to the product workpiece in vacuum chamber.In manufacturing process, have employed advanced plasma blanking cutting process simultaneously and be equipped with rationally perfect production technology code, maintain strict control over gate of the quality monitoring in process of production to control the quality of product, first-class production line, makes the product of the manufacturing reach internal class level.Conclusive effect is served for obtaining higher degree of vacuum.
In exhaust ports, oil guard is installed, oil guard is perpendicular to the exhaust ports being placed in the pump housing, be made up of multiple semicircle catch and gear beam hanger, gear beam hanger rotates in nut to be installed firmly, the oil guard be made up of multiple semicircle catch, decrease the pump fluid of following in oil vapor entrained in pump exhaust process, reduce the pollution to preevacuation pump and vacuum system.
Pump core assembly is vertically mounted in the oil groove of pump housing center, by bracket assembly and pump housing inwall firm supporting, avoids pump core assembly in transport and using process to rock, affects using effect.
Heater assembly, heater is by metal shell, the nichrome heating wire composition of high-temperature heat-resistance ceramic dish three disc type and high-quality.Heater assembly is close to bottom the pump housing, is easy to, to the pump oil heating in the diffusion pump pump housing, greatly reduce power consumption, serve energy-conservation effect.The nichrome heating wire quality of high-quality is good, long service life, is easy to change and maintenance.Bottom has installed Universal rotary horn ring additional, convenient transport and installation.
The utility model has that bore reaches 1200-2000 millimeter, ultimate vacuum is up to 5 × 10
-5pa, the speed of exhaust is up to 60000-180000L/s, and reached capacity in 5 hours vacuum requirement, good cooling results, and fluid return rate reduces, and long service life, power consumption is low, energy-conserving and environment-protective.
Accompanying drawing explanation
Fig. 1 is overall structure schematic diagram of the present utility model.
Fig. 2 is the structural representation of pump core assembly.
Fig. 3 is the structural representation of viewing window.
Fig. 4 is the structural representation of bracket assembly.
Fig. 5 is the plan structure schematic diagram of heater.
Fig. 6 is the main TV structure schematic diagram of heater.
Fig. 7 is the structural representation of oil guard.
Fig. 8 is working principle structural drawing of the present utility model.
In figure, 1, the pump housing, 2, bracket assembly, 3, pump core assembly, 4, oil guard, 5, locking nut, 6, strut, 7, ground runners, 8, viewing window, 9, temperature detecting resistance, 10, heater, 11, first order jet nozzle cap, 12, one-level gap pad, 13, first order jet nozzle seat, 14, one-level honeycomb duct top, 15, secondary nozzle cap, 16, secondary gap pad, 17, secondary honeycomb duct, 18, secondary supporting sleeve, 19, three grades of cap of spraying nozzle, 20, three grades of gap pads, 21, three grades of honeycomb ducts, 22, three grades of supporting sleeves, 23, jet nozzles, 24, one-level honeycomb duct bottom, 25, gear beam hanger, 26, Semicircular baffle, 27, metal shell, 28, universal caster wheel, 29, ceramic disk, 30, furnace bottom, 31, nichrome heating wire, 32, little flange, 33, first oxygen free copper sealing gasket, 34, blank flange, 35, second oxygen free copper sealing gasket, 36, viewing window flange, 37, main flange, 38, main adapter, 39, small takeover, 40, support ring, 41, supporting sleeve, 42, strut, 43, cooling jacket.
Embodiment
As shown in Figure 1, the utility model heavy caliber high vacuum oil diffuse pump, its structure is as follows: it comprises the pump housing 1, the pump core assembly 3 be arranged in the pump housing 1, be arranged on the heater 10 bottom the pump housing 1, the oil guard 4 be arranged in the pump housing 1 relief opening, the top of pump core assembly 3 supports fastening by bracket assembly 2 and the pump housing 1 inwall, the pump housing 1 by locking nut 5, strut 6, runners 7 be supported in ground, the bottom of the pump housing 1 is provided with viewing window 8 and temperature detecting resistance 9.
Pump oil temperature measuring equipment temperature detecting resistance 9 is installed, the temperature of pump liquid work has been showed by oil temperature digital display meter, is convenient to the use working condition of observing pump.
As shown in Figure 1, the structure of the pump housing 1 have employed convex chamber form, the pumping speed of size on pump of convex chamber size directly has impact, the intermediate diameter dimension in convex chamber is 1.25 times of air inlet caliber size, through verification experimental verification in order to better obtain higher speed of exhaust index, the intermediate diameter dimension of the pump housing is adopted to be that the design of 1.25 times of air inlet caliber size can reach the best speed of exhaust; The pump housing 1 adopts carbon steel manufacture, employing two sides, the inner and outer welding place welded structure of the pump housing 1, makes pump body reach the requirement of design vacuum equipment; The flange at the pump housing 1 air inlet bore place adopts carbon steel overall structure, ensure that the roughness required by flange sealing surface, improves vacuum equipment sealability.Be provided with full water jacket cooling jacket 46 outside the pump housing 1, cooling jacket 46 is water jacket type cooling jacket or water cooling copper pipe type cooling jacket.The water jacket wall of water jacket type cooling jacket is adopted as corrosion resistant plate and avoids pump in Long-Time Service work because the problem of water quality causes the etching problem of pump water jacket, greatly improve the working life of diffusion pump, inside is wound around pump housing outside by round steel and forms current deflecting structure, area of contact and the water flow of cooling water and the pump housing are provided to greatest extent, sufficiently lower the temperature of pump housing internal surface, reduce pump fluid in the pump body surface attachment time, avoid the double evaporation-cooling of pump liquid, decrease and return oil mass, reduce the quality that the pollution of vacuum chamber is improve to vacuum chamber product.The structure of water cooling copper pipe type cooling jacket is that cooling copper tube is wound around pump housing outer wall, cooling water flows in cooling copper tube, cooling copper tube adopts copper tube, cooling copper tube and pump housing wall contacts place adopt brazing spot welding, then soldering full weld structure is adopted, substantially increase the area of contact of copper pipe and pump housing outer wall, reach best cooling effect.
As shown in Figure 2, pump core assembly 3 is vertically mounted in the pump housing in the oil groove of center, by bracket assembly and pump housing inwall firm supporting, avoids pump core assembly in transport and using process to rock, affects using effect; Its structure is as follows: pump core assembly 3 it be arrange one-level honeycomb duct, secondary honeycomb duct 17 and three grades of honeycomb ducts from the inside to the outside to form overall structures, honeycomb duct top at different levels is equipped with umbrella crown shape divergent nozzle, jet nozzles 23 is vertically welded in the bottom of three grades of honeycomb ducts 21, the aspect ratio secondary honeycomb duct 17 of one-level honeycomb duct is high, and aspect ratio three grades of water conservancy diversion 21 pipes of secondary honeycomb duct 17 are high; The spray angle of three umbrella crown shape divergent nozzles is 55-65 degree, and best angle is 60 degree; The spray angle of jet nozzles 23 is 11-14 degree, and best angle is 125 degree; Four nozzles adopt described spray angle, accelerate the discharge of evacuation medium in the pump housing, can reach best jeting effect, reach the effect improving the speed of exhaust; Such pump core assembly structure is adopted to be design the core technology that suction port bore is 1200-2000 millimeter.Its more specifically structure be: one-level honeycomb duct bottom 24 and one-level honeycomb duct top 14 by bolt, nut, plain washer install be connected fastening; Three grades of honeycomb ducts 21 and secondary honeycomb duct 17 are linked together by three grades of supporting sleeves 22, and bolt, plain washer, installation connect respectively; Secondary honeycomb duct 17 and one-level honeycomb duct top 14 are installed with secondary supporting sleeve 18 and are connected, and bolt, plain washer, installation connect respectively, three grades of gap pads 20 are arranged on three grades of honeycomb duct 21 tops, and connect fastening with bolt, nut, plain washer, ensure uniformity and the stability of three grades of gap pads; Three grades of cap of spraying nozzle 19 are placed on three grades of honeycomb ducts 21, and connect fastening with bolt, nut, plain washer; Secondary gap pad 16 is arranged on secondary honeycomb duct 17, and connects fastening with bolt, nut, plain washer, ensures uniformity and the stability in secondary gap; Secondary nozzle cap 15 contacts with one-level honeycomb duct top 14 and connects, and leads to and connects fastening with bolt, nut, plain washer; One-level gap pad 12 is placed on the neutral position of first order jet nozzle seat 13; First order jet nozzle cap 11 is installed on one by bolt and first order jet nozzle seat 13, and first order jet nozzle seat 12 passes through screwed structure installment on one-level honeycomb duct with one-level honeycomb duct top 14.The utility model pump core adopts the structural type of multiple umbrella crown shape divergent nozzle and honeycomb duct composition entirety; be beneficial to the integrity when Installation and Debugging; the material of pump core assembly have employed the manufacture of mirror finished stainless steel plate material; ensure that the degree of finish of pump core assembly component surface; pump work fluid is glided fast; decrease the attachment time of pump fluid on pump core assembly part surface, greatly reduce the pollution of the pump liquid fluid return rate to vacuum chamber, protective action is served to the product workpiece in vacuum chamber.
As shown in Figure 3, viewing window 8 is provided with in the bottom of the pump housing 1, viewing window 8 is manufactured by stainless steel, its effect is easy to use and observes the service condition of pump liquid, drain the oil when being easy to oiling and cleaning in the pump housing, visor can observe pump oil service condition at any time clearly, oil level glass 8 is installed bottom the pump housing 1, its each parts adopt stainless steel manufacture, its concrete structure is: the first oxygen free copper sealing gasket 33 is installed on little flange 32 mouthfuls place, little flange 32 welds with small takeover 39, little flange 32 top is installed blank flange 34 and is used stainless steel hexagon head spiral shell, nut, plain washer connects fastening piece, second oxygen free copper sealing gasket 35 is arranged on main flange 37, supervisor's flange 37 welds with main adapter 38, second oxygen free copper sealing gasket 35 and viewing window flange 36 are by stainless steel hexagon head bolt, nut, plain washer connects fastening.
As shown in Figure 4, bracket assembly 2 structure is as follows: supporting sleeve 41 is welded on and is positioned on middle support ring 40, and strut 42 is connected with supporting sleeve 41 by screw thread.
As shown in Figure 5 and Figure 6, the structure of heater 10 is as follows: the bottom of metal shell 27 is provided with universal caster wheel 28, furnace bottom 30, heat-resistant insulating board, heat-stable ceramic dish 29, nichrome heating wire 31 is provided with by lower according to this from upper in metal shell 27, be specially: three layers of heat-resistant insulating board are installed on furnace bottom 30 top, heat-stable ceramic dish 29 is placed in neutral position, nichrome heating wire 31 curl up be arranged on heat-stable ceramic dish 29 groove in, nichrome heating wire 31 is connected with external power supply by electrical connector.Heater assembly is close to bottom the pump housing, is easy to, to the pump oil heating in the diffusion pump pump housing, greatly reduce power consumption, serve energy-conservation effect.The nichrome heating wire quality of high-quality is good, long service life, is easy to change and maintenance.Bottom has installed Universal rotary horn ring additional, convenient transport and installation.
As shown in Figure 7, oil guard 4 is vertically mounted on the exhaust ports of the pump housing, oil guard 4 it be by the gear beam hanger 25 being positioned at center, and on gear beam hanger 25 by lower from upper interval, staggered Semicircular baffle 26 forms, when it avoid the explosive boiling that work fluid produces in high-temperature heating process, work fluid follows entrained by oil vapor at a high speed, and reduces the effect polluted vacuum chamber.
As shown in Figure 8, working principle of the present utility model is as follows: the critical piece of high vacuum oil diffuse pump has the pump housing, pump core and heater etc., pump oil in pump housing oil cauldron is heated to boiling temperature, produces a large amount of oil vapors, and oil vapor sprays at a high speed by nozzle at different levels is directed through honeycomb duct at different levels.Because the partial pressure of pumped gas near diffusion pump suction port is higher than the partial pressure of this gas in vapor stream, so pumped gas molecule is just constantly diffused in vapor stream.Oil vapor clashes into pumped gas molecule, makes pumped gas molecule along the direction high-speed motion of steam a fluid stream.Gas molecule is encountered pump housing inwall and is reflected again, then is subject to the collision of vapor stream and again flows to pump wall along vapor stream direction.Through collision rift several times, gas molecule is compressed to rough vacuum end, then the vapor stream sprayed by stage further nozzle carries out multistage compression, is finally taken away by preevacuation pump.And oil vapor turns back in oil cauldron and is again heated after being condensed on the pump wall of cooling, periodic duty like this.
Through testing inspection, the air inlet bore adopting said structure to make is that its ultimate vacuum of high vacuum oil diffuse pump of 1200 millimeters is up to 5 × 10
-5pa, the speed of exhaust is up to 60000L/s, and reached capacity in 5 hours vacuum requirement, and power consumption is 28Kw; The air inlet bore adopting said structure to make is that its ultimate vacuum of high vacuum oil diffuse pump of 1600 millimeters is up to 5 × 10
-5pa, the speed of exhaust is up to 130000L/s, and reached capacity in 5 hours vacuum requirement, and power consumption is 48Kw; The air inlet bore adopting said structure to make is that its ultimate vacuum of high vacuum oil diffuse pump of 2000 millimeters is up to 5 × 10
-5pa, the speed of exhaust is up to 180000L/s, and reached capacity in 5 hours vacuum requirement, and power consumption is 55Kw.
Claims (10)
1. heavy caliber high vacuum oil diffuse pump, it comprises the pump housing, be arranged on the pump core assembly in the pump housing, it is characterized in that heater is arranged on bottom the pump housing, oil guard is provided with in the relief opening of the pump housing, the pump housing have employed convex cavity configuration, pump core assembly is vertically mounted in the center oil groove in the pump housing, pump core assembly structure sets gradually one-level honeycomb duct from the inside to the outside, secondary honeycomb duct and three grades of honeycomb ducts form overall structure, honeycomb duct top at different levels is equipped with umbrella crown shape divergent nozzle, jet nozzles is vertically welded in the bottom of three grades of honeycomb ducts, the aspect ratio secondary honeycomb duct of one-level honeycomb duct is high, aspect ratio three grades of honeycomb ducts of secondary honeycomb duct are high.
2. heavy caliber high vacuum oil diffuse pump according to claim 1, it is characterized in that the intermediate diameter dimension in the convex chamber of the described pump housing is 1.25 times of air inlet caliber size, employing two sides, the inner and outer welding place welded structure of the pump housing, the flange at pump housing air inlet bore place adopts carbon steel overall structure.
3. heavy caliber high vacuum oil diffuse pump according to claim 1 and 2, is characterized in that being provided with full water jacket cooling jacket outside the described pump housing, and cooling jacket is water jacket type cooling jacket or water cooling copper pipe type cooling jacket.
4. heavy caliber high vacuum oil diffuse pump according to claim 3, is characterized in that the water jacket wall of described water jacket type cooling jacket is adopted as corrosion resistant plate, and inside is wound around pump housing outside by round steel and forms current deflecting structure; The structure of water cooling copper pipe type cooling jacket is that cooling copper tube is wound around pump housing outer wall, and cooling water flows in cooling copper tube, and cooling copper tube adopts copper tube, and cooling copper tube and pump housing wall contacts place adopt brazing spot welding, then adopts soldering full weld structure.
5. heavy caliber high vacuum oil diffuse pump according to claim 1, it is characterized in that the top of described pump core assembly supports fastening by bracket assembly and pump housing inwall, bracket assembly structure is as follows: supporting sleeve is welded on and is positioned on middle support ring, and strut is connected with supporting sleeve by screw thread.
6. heavy caliber high vacuum oil diffuse pump according to claim 1, it is characterized in that the bottom of the described pump housing is provided with viewing window and temperature detecting resistance, wherein viewing window is manufactured by stainless steel, viewing window structure is for being that the first oxygen free copper sealing gasket is installed on little flange mouth place, little flange welds with small takeover, little flange top is installed blank flange and is used stainless steel hexagon head spiral shell, nut, plain washer connects fastening piece, second oxygen free copper sealing gasket is arranged on main flange, supervisor's flange welds with main adapter, second oxygen free copper sealing gasket and viewing window flange are by stainless steel hexagon head bolt, nut, plain washer connects fastening.
7. heavy caliber high vacuum oil diffuse pump according to claim 1, it is characterized in that the spray angle of the umbrella crown shape divergent nozzle of described pump core assembly is 55-65 degree, the spray angle of jet nozzles is 11-14 degree.
8. the heavy caliber high vacuum oil diffuse pump according to claim 1 or 7, is characterized in that the concrete structure of described pump core assembly is: one-level honeycomb duct bottom is connected fastening with one-level honeycomb duct top; Three grades of honeycomb ducts and secondary honeycomb duct are linked together by three grades of supporting sleeves; Secondary honeycomb duct and one-level honeycomb duct top are installed with secondary supporting sleeve and are connected; Three grades of gap pads are arranged on three grades of honeycomb duct tops; Three grades of cap of spraying nozzle are placed on three grades of honeycomb ducts; Secondary gap pad is arranged on secondary honeycomb duct; Secondary nozzle cap is connected with one-level honeycomb duct upper contact; One-level gap pad is placed on the neutral position of first order jet nozzle seat; First order jet nozzle cap is installed on one by bolt and first order jet nozzle seat, and screwed structure installment is passed through on one-level honeycomb duct in first order jet nozzle seat and one-level honeycomb duct top.
9. heavy caliber high vacuum oil diffuse pump according to claim 1, it is characterized in that the structure of described heater is as follows: the bottom of metal shell is provided with universal caster wheel, in metal shell, be provided with furnace bottom, heat-resistant insulating board, heat-stable ceramic dish, nichrome heating wire by lower according to this from upper.
10. heavy caliber high vacuum oil diffuse pump according to claim 1, it is characterized in that described oil guard is vertically mounted on the exhaust ports of the pump housing, oil guard it be by be positioned on the gear beam hanger at center and gear beam hanger by lower from upper interval, staggered Semicircular baffle forms.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520504889.7U CN204783872U (en) | 2015-07-14 | 2015-07-14 | Heavy -calibre high vacuum oil diffusion pump |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520504889.7U CN204783872U (en) | 2015-07-14 | 2015-07-14 | Heavy -calibre high vacuum oil diffusion pump |
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|---|---|
| CN204783872U true CN204783872U (en) | 2015-11-18 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104989679A (en) * | 2015-07-14 | 2015-10-21 | 辽宁真龙真空设备制造有限公司 | Large-caliber high vacuum oil diffusion pump |
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- 2015-07-14 CN CN201520504889.7U patent/CN204783872U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104989679A (en) * | 2015-07-14 | 2015-10-21 | 辽宁真龙真空设备制造有限公司 | Large-caliber high vacuum oil diffusion pump |
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