CN204773075U - PLC chip beveled tip face automatic cutting device - Google Patents

PLC chip beveled tip face automatic cutting device Download PDF

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Publication number
CN204773075U
CN204773075U CN201520424083.7U CN201520424083U CN204773075U CN 204773075 U CN204773075 U CN 204773075U CN 201520424083 U CN201520424083 U CN 201520424083U CN 204773075 U CN204773075 U CN 204773075U
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CN
China
Prior art keywords
cutting blade
tilting member
plc chip
vertical column
angle
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201520424083.7U
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Chinese (zh)
Inventor
杨志援
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Hunan Jingtu Technology Co Ltd
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Hunan Jingtu Technology Co Ltd
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Filing date
Publication date
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Priority to CN201520424083.7U priority Critical patent/CN204773075U/en
Application granted granted Critical
Publication of CN204773075U publication Critical patent/CN204773075U/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Abstract

The utility model discloses a PLC chip beveled tip face automatic cutting device, including main beam, perpendicular post, cutter crossbeam and cutting blade, the main beam is the monolithic stationary supporting member of device, and perpendicular post is connected with the main beam for with cutting blade suspension in the wafer top of treating the cutting, the cutter crossbeam sets up on perpendicular post, is used for setting up cutting blade, and cutting blade sets up on the cutter crossbeam, and connect by drive device and realize the cutting wafer, cutting blade personally submits 8 slopes and sets up with vertical. The utility model discloses incline into required angle with cutting blade, then the wafer cutting to needing the beveled tip face, the cutter slope can obtain the required terminal surface draft angle of PLC chip naturally, and cutting blade that the conjugate selecting is suitable can save terminal surface grinding and polishing technology, has improved production efficiency, reduction in production cost.

Description

PLC chip angled end-face automatic cutting device
Technical field
The utility model belongs to fiber optic communication component processing technical field, is specifically related to a kind of PLC chip angled end-face automatic cutting device.
Background technology
PLC slab guide integrated chip is the integrated optical device of based semiconductor plane machining technology.PLC chip 1 is both be bonded together with the transparent adhesive tape that refraction index mates after Coupling completes with the connection of optical fiber or fiber array 2.For reducing the loss that light produces in faying face reflection, end face needs a gradient, usually becomes 8 ° of angles with vertical plane, as shown in Figure 1.Automatic cutting equipment and the technology of semicon industry wafer is generally used in the cutting of PLC wafer aborning at present, the cutting equipment shown in Fig. 2 is adopted to cut wafer 9, wafer 9 is that level is placed on fixture (mucous membrane framework), then be placed on there is Incision Machine's chuck on carry out cutting, the chip end face that wafer after cutting obtains is right angle, therefore, the PLC chip of right angle end face just can obtain required angled end-face by using specific fixture to carry out end surface grinding polishing, as shown in Figure 3.
The grinding technics of PLC chip angled end-face will through corase grind, and fine grinding and polishing three process, required precision is high, processes greatly consuming time, and productive manpower time cost is high.
Utility model content
The technical problem that the utility model solves is: cause follow-up grinding process technique complexity, long defect consuming time for current PLC chip cutting right angle end face, a kind of novel PLC chip oblique section automatic cutting device is provided, follow-up end surface grinding technique can be simplified, enhance productivity, reduce production cost.
The utility model adopts following technical scheme to realize:
PLC chip angled end-face automatic cutting device, comprising:
Main beam 4 is the overall fixed support component of device;
Vertical column 5, is connected with main beam 4, for being suspended in above wafer to be cut by cutting blade 7;
Cutter crossbeam 6, is arranged on vertical column 5, for arranging cutting blade 7;
Cutting blade 7, is arranged on cutter crossbeam 6, is connected realize cutting crystal wafer by driving arrangement;
Described cutting blade 7 is obliquely installed with vertical plane.
Further, the angle of described cutting blade 7 and vertical plane is between ± 8 °.
As a kind of preferred version of the present utility model, described vertical column 5 vertically arranges and is rigidly connected with main beam 4, is fixed part;
Described cutter crossbeam 6 is rotatably hinged with vertical column 5, is tilting member;
Be provided with angle adjusting mechanism 3 between described cutter crossbeam 6 and vertical column 5, realize the tilt adjustments of cutting blade 7.
As another kind of preferred version of the present utility model, described main beam 4 is fixedly installed, and is fixed part;
Described vertical column 5 is rotatably hinged with main beam 4, and be tilting member, described cutter crossbeam 6 is vertical with vertical column 5 to be arranged and is rigidly connected;
Be provided with angle adjusting mechanism 3 between described main beam 4 and vertical column 5, realize the tilt adjustments of cutting blade 7.
In above-mentioned two schemes, rotatably hinged by hinge arrangement 301 between described fixed part and tilting member.
Preferably, described angle adjusting mechanism 3 comprises and is installed in horizontal location block 302 on fixed part and oblique angle locating piece 303, described tilting member is between horizontal location block 302 and oblique angle locating piece 303, wherein, described horizontal location block 302 is when cutting blade 7 is in vertical position and tilting member aligned contact, described oblique angle locating piece 303 when cutting blade 7 is in obliquity and tilting member aligned contact, is locked by alignment pin 304 between described fixed part and tilting member.
Preferably, described angle adjusting mechanism 3 comprises the locating slot 306 be arranged on fixed part, described tilting member is positioned at locating slot 306, there is in described locating slot 306 horizontal position and Wei Liangge side, oblique angle, respectively when cutting blade 7 is in vertical position and obliquity time and tilting member aligned contact, be embedded with positioning sliding block 307 and push rod 305 in described locating slot 306, contact with tilting member respectively and be locked at horizontal level and obliquity.
Preferably, described angle adjusting mechanism 3 comprises the oblique angle locating piece 303 be arranged on fixed part, described oblique angle locating piece 303 is when cutting blade 7 is in obliquity and tilting member aligned contact, described tilting member by connecting rod link 309 and a connecting rod 308 hinged, realize cutting blade 7 to vertical position for adjusting tilting member.
Preferably, the hydraulic cylinder of described push rod 305 or connecting rod 308 and linear drives, cylinder or linear electric motors are connected.
Preferably, described angle adjusting mechanism 3 comprises and is arranged on levels electromagnetic iron 310 on fixed part and oblique angle electromagnet 311, described tilting member is between levels electromagnetic iron 310 and oblique angle electromagnet 311, wherein, described levels electromagnetic iron 310 when cutting blade 7 is in vertical position and tilting member located by electromagnetic adsorption, described oblique angle electromagnet 311 when cutting blade 7 is in obliquity and tilting member located by electromagnetic adsorption.
Described angle adjusting mechanism 3 comprises the angle-controlled motor 313 be fixed on fixed part, and the motor driving shaft 312 of described angle-controlled motor 313 is connected with tilting member by key 314, realizes between fixed part and tilting member rotatably hinged.
As another kind of preferred version of the present utility model, adopt between described main beam 4, vertical column 5, cutter crossbeam 6 and cutting blade 7 and be rigidly connected, wherein, by being obliquely installed between described vertical column 5 and main beam 4, between described cutter crossbeam 6 and vertical column or between described cutting blade 7 and cutter crossbeam 6, realize angle between cutting blade 7 and vertical plane between ± 8 °.
Cutting equipment is reformed by the utility model, allows cutting blade be inclined to required angle, and then to needing the wafer of angled end-face to cut, cutter tilts naturally to obtain end face draft angle needed for PLC chip.Coordinate and select suitable blade, end surface grinding glossing can be saved.
The end face angle that the utility model achieves PLC chip is formed in the surface trimming of wafer, is selected by suitable cutting blade, PLC chip end surface grinding technique consuming time is simplified, improves production efficiency, reduces production cost.Meanwhile, the utility model can regulate the angle of cutter cutting, and simultaneously but also can inclined cut, applicability be stronger for the perpendicular cuts that not only can realize wafer.
Below in conjunction with the drawings and specific embodiments, the utility model is described in further detail.
Accompanying drawing explanation
Fig. 1 is the connection diagram of PLC chip and optical fiber or fiber array.
Fig. 2 is the cutting equipment structural representation of existing PLC chip.
Fig. 3 is the angled end-face grinding schematic diagram of existing PLC chip.
Fig. 4 is the PLC angled end-face automatic cutting equipment schematic diagram of embodiment 1.
Fig. 5 is the PLC angled end-face automatic cutting equipment schematic diagram of embodiment 2.
Fig. 6 is the schematic diagram of angle adjusting mechanism when cutting blade is in vertical position in embodiment 3.
Fig. 7 is the schematic diagram of angle adjusting mechanism when cutting blade is in obliquity in embodiment 3.
Fig. 8 is the schematic diagram of angle adjusting mechanism when cutting blade is in vertical position in embodiment 4.
Fig. 9 is the schematic diagram of angle adjusting mechanism when cutting blade is in obliquity in embodiment 4.
Figure 10 is the schematic diagram of angle adjusting mechanism when cutting blade is in vertical position in embodiment 5.
Figure 11 is the schematic diagram of angle adjusting mechanism when cutting blade is in obliquity in embodiment 5.
Figure 12 is the schematic diagram of angle adjusting mechanism when cutting blade is in vertical position in embodiment 6.
Figure 13 is the schematic diagram of angle adjusting mechanism when cutting blade is in obliquity in embodiment 6.
Figure 14 is the front schematic view of the angle adjusting mechanism in embodiment 7.
Figure 15 is the side view of the angle adjusting mechanism in embodiment 7.
Number in the figure:
PLC chip, 2-optical fiber or fiber array, 3-angle adjusting mechanism, 4-main beam, 5-vertical column, 6-cutter crossbeam, 7-cutting blade, 8-fixture, 9-wafer;
301-hinge arrangement, 302-horizontal location block, 303-oblique angle locating piece, 304-alignment pin, 305-push rod, 306-locating slot, 307-positioning sliding block, 308-connecting rod, 309-connecting rod link, 310-levels electromagnetic iron, 311-oblique angle electromagnet, 312-motor driving shaft, 313-angle-controlled motor, 314-key, 315-motor set bolt.
Detailed description of the invention
Embodiment 1
See Fig. 4, PLC chip angled end-face automatic cutting device comprises the fixture 8 of main beam 4, vertical column 5, cutter crossbeam 6, cutting blade 7 and fixing wafer 9, fixture 8 adopts mucous membrane framework, and wafer 9 is placed on mucous membrane framework, is then placed on the chuck with Incision Machine's and fixes.Main beam 4 is the overall fixed support component of device, vertical column 5 is connected with main beam 4, cutting blade 7 is suspended in above wafer to be cut, cutter crossbeam 6 is arranged on vertical column 5, for arranging cutting blade 7, cutting blade 7 is arranged on cutter crossbeam 6, and be connected with driving arrangement (as motor) and realize automatic rotation cutting crystal wafer, in conjunction with see Fig. 1, PLC chip 1 requires to have angled end-face, and preferably require to tilt 8 ° just to reach optimum translucent effect with vertical plane, therefore, cutting blade 7 and the vertical plane of the present embodiment are obliquely installed, the requirement of concrete corresponding PLC angled end-face and vertical plane are the angle of ± 8 °.
Concrete, in the present embodiment, vertical column 5 vertically arranges and is rigidly connected with main beam 4, as a fixed part, rotatably hinged by hinge arrangement 301 between cutter crossbeam 6 and vertical column 5, cutter crossbeam 6 is a tilting member, angle adjusting mechanism 3 is provided with, by level and the tilt adjustments tilting to realize cutting blade 7 to respective angles of adjustment cutter crossbeam 6 between cutter crossbeam 6 and vertical column 5.
Embodiment 2
See Fig. 5, the difference of the present embodiment and embodiment 1 is: main beam 4 is fixedly installed, and is fixed part; Vertical column 5 is rotatably hinged with main beam 4 hinge arrangement 301, for tilting member, cutter crossbeam 6 is vertical with vertical column 5 to be arranged and is rigidly connected, between main beam 4 and vertical column 5, be provided with angle adjusting mechanism 3, realized the tilt adjustments of cutting blade 7 to respective angles by Integral swinging vertical column 5 and cutter crossbeam 6.
Embodiment 3
In conjunction with see Fig. 4, Fig. 6 and Fig. 7, the present embodiment is on the basis of embodiment 1, the angle adjusting mechanism 3 adopted comprises horizontal location block 302, oblique angle locating piece 303 and alignment pin 304, horizontal location block 302 and oblique angle locating piece 303 are installed on vertical column 5, employing upper-lower position distributes, cutter crossbeam 6 one end is hinged by hinge arrangement 301 and vertical column 5, and stage casing is between horizontal location block 302 and oblique angle locating piece 303.
Wherein, when cutting blade 7 is in vertical position, now cutter crossbeam 6 correspondence should be horizontal and with horizontal location block 302 aligned contact; When cutting blade 7 is in obliquity, now cutter crossbeam 6 correspondence should tilt and with oblique angle locating piece 303 aligned contact, it is downward-sloping that the accompanying drawing 7 of the present embodiment only shows cutter crossbeam 6, in embody rule, cutter crossbeam 6 can be inclined upwardly or downward-sloping, no matter be that cutter crossbeam 6 is horizontal or obliquity, all locked by alignment pin 304 between cutter crossbeam 6 and vertical column 5.
The present embodiment can be applicable in embodiment 2 equally, corresponding horizontal location block 302, oblique angle locating piece 303 are arranged on the main beam as fixed part, because vertical column is vertically arranged, therefore horizontal location block 302 and oblique angle locating piece 303 adopt right position to distribute, its operation principle as above, does not repeat at this.
Embodiment 4
In conjunction with see Fig. 4, Fig. 8 and Fig. 9, the present embodiment is on the basis of embodiment 1, the angle adjusting mechanism 3 adopted comprises locating slot 306, positioning sliding block 307 and push rod 305, locating slot 306 is arranged on vertical column 5, cutter crossbeam 6 one end is hinged by hinge arrangement 301 and vertical column 5, stage casing is inlaid in locating slot 306, has horizontal position and Wei Liangge side, oblique angle in locating slot 306.
When cutting blade 7 is in vertical position, cutter crossbeam 6 correspondence be horizontal and with the horizontal position side aligned contact in locating slot 306, now cutter crossbeam 6 realizes the positioning and locking of cutter crossbeam by the positioning sliding block 307 promoted below locating slot; When cutting blade 7 is in obliquity, cutter crossbeam 6 correspondence be in obliquity and with side, position, the oblique angle aligned contact in locating slot 306, it is downward-sloping that the accompanying drawing 7 of the present embodiment only shows cutter crossbeam 6, in embody rule, cutter crossbeam 6 can be inclined upwardly or downward-sloping, now positioning sliding block 307 should be pushed open, stretched out cutter crossbeam 6 positioning compression on the side, position, oblique angle of locating slot 306 by the push rod 305 be inlaid in locating slot, push rod 305 can be connected with the hydraulic cylinder of linear drives, cylinder or linear electric motors, realizes stretching out and regaining action.
The present embodiment can be applicable in embodiment 2 equally, and corresponding locating slot 306 is arranged on the main beam as fixed part, and its setting direction is perpendicular with arranging on vertical column.
Embodiment 5
See Fig. 4, Figure 10 and Figure 11, the present embodiment is on the basis of embodiment 1, the angle adjusting mechanism 3 adopted comprises oblique angle locating piece 303 and connecting rod 308, the present embodiment difference from Example 3 is: on vertical column 5, be only provided with oblique angle locating piece 303, and cutter crossbeam 6 is connected with a connecting rod 308 by connecting rod link 309, the hydraulic cylinder of connecting rod 308 and linear drives, cylinder or linear electric motors connect, the horizontal level of cutter crossbeam 6 and the positioning and locking of obliquity is realized by connecting rod 308, oblique angle locating piece 303 obliquity is spacing simultaneously, ensure the angle of inclination of cutting blade 7.
When cutting blade 7 is in vertical position, cutter crossbeam 6 keeps level and realizes locking under the effect of connecting rod 308; When cutting blade 7 is in obliquity, cutter crossbeam 6 compresses with oblique angle locating piece 303 aligned contact under the driving of connecting rod 308, realizes cutting blade 7 and carries out inclined cut.
The present embodiment can be applicable in embodiment 2 equally, and corresponding oblique angle locating piece 303 is arranged on the main beam as fixed part, and connecting rod 308 horizontally set drives vertical column to swing together with cutter crossbeam.
Embodiment 6
See Fig. 4, Figure 12 and Figure 13, the present embodiment is on the basis of embodiment 1, the angle adjusting mechanism 3 adopted comprises levels electromagnetic iron 310 and oblique angle electromagnet 311, levels electromagnetic iron 310 and oblique angle electromagnet 311 are installed on vertical column 5, adopt the setting that distributes up and down, cutter crossbeam 6 one end is hinged by hinge arrangement 301 and vertical column 5, stage casing is between levels electromagnetic iron 310 and oblique angle electromagnet 311, difference from Example 3 is: the present embodiment does not need to adopt alignment pin to carry out the location of cutter crossbeam, electromagnet had both realized the limit function of cutter crossbeam, also realize positioning and locking by the electromagnetic attraction of electromagnet simultaneously.The cutter crossbeam 6 of the present embodiment needs to adopt can be made by the material of electromagnetic adsorption.
When cutting blade 7 is in vertical position, levels electromagnetic iron 310 is energized, oblique angle electromagnet 311 power-off, and cutter crossbeam 6 adsorbs with levels electromagnetic iron under the electromagnetic attraction effect of levels electromagnetic iron 310, keeps level; When cutting blade 7 is in obliquity, oblique angle electromagnet 311 is energized, levels electromagnetic iron 310 power-off, and cutter crossbeam 6 adsorbs with oblique angle electromagnet under the electromagnetic attraction effect of oblique angle electromagnet 311, keeps tilting.
The present embodiment can be applicable in embodiment 2 equally, corresponding levels electromagnetic iron 310 and oblique angle electromagnet 311 are arranged on the main beam as fixed part, because vertical column is vertically arranged, levels electromagnetic iron 310 and oblique angle electromagnet 311 adopt right position to arrange, its operation principle as above, does not repeat at this.
Embodiment 7
See Fig. 4, Figure 14 and Figure 15, the present embodiment is on the basis of embodiment 1, the angle adjusting mechanism 3 adopted is angle-controlled motor 313, angle-controlled motor 313 is fixed on vertical column 5 by motor set bolt 315, the motor driving shaft 312 of angle-controlled motor 313 is connected with cutter crossbeam 6 by key 314, realizes between vertical column 5 and cutter crossbeam 6 rotatably hinged.
The level of cutting blade 7 and inclination control, rotated by angle-controlled motor 313 carry its tools crossbeam 6 and realize.The automated procedures that angle-controlled motor 313 easily realizes integral device control.
The present embodiment can be applicable in embodiment 2 equally, and angle-controlled motor 313 is fixed on the main beam as fixed part, and motor driving shaft 312 is connected with vertical column.
Embodiment 8
See Fig. 4 and Fig. 5, the difference of the present embodiment and embodiment 1, embodiment 2 is: the present embodiment does not have angle adjusting mechanism, and cutting blade only has a kind of state, namely with the heeling condition of vertical plane in ± 8 °.
In the present embodiment, all adopt between main beam 4, vertical column 5, cutter crossbeam 6 and cutting blade 7 and be rigidly connected, wherein, by being obliquely installed between vertical column 5 and main beam 4, between cutter crossbeam 6 and vertical column or between cutting blade 7 and cutter crossbeam 6, the angle realized between cutting blade 7 and vertical plane is at ± 8 °.
These are only that the concrete case study on implementation of the utility model illustrates, rights protection scope of the present utility model can not be limited with this.All equivalences done according to the utility model application claims and description change and amendment, all in the scope of the utility model protection.

Claims (12)

1.PLC chip angled end-face automatic cutting device, is characterized in that comprising:
Main beam (4) is the overall fixed support component of device;
Vertical column (5), is connected with main beam (4), for being suspended in above wafer to be cut by cutting blade (7);
Cutter crossbeam (6), is arranged on vertical column (5), for arranging cutting blade (7);
Cutting blade (7), is arranged on cutter crossbeam (6), is connected realize cutting crystal wafer by driving arrangement;
Described cutting blade (7) and vertical plane are obliquely installed.
2. PLC chip angled end-face automatic cutting device according to claim 1, the angle of described cutting blade (7) and vertical plane is between ± 8 °.
3. PLC chip angled end-face automatic cutting device according to claim 2, described vertical column (5) vertically arranges and is rigidly connected with main beam (4), is fixed part;
Described cutter crossbeam (6) is rotatably hinged with vertical column (5), is tilting member;
Be provided with angle adjusting mechanism (3) between described cutter crossbeam (6) and vertical column (5), realize the tilt adjustments of cutting blade (7).
4. PLC chip angled end-face automatic cutting device according to claim 2, described main beam (4) is fixedly installed, and is fixed part;
Described vertical column (5) is rotatably hinged with main beam (4), and be tilting member, described cutter crossbeam (6) is vertical with vertical column (5) to be arranged and is rigidly connected;
Be provided with angle adjusting mechanism (3) between described main beam (4) and vertical column (5), realize the tilt adjustments of cutting blade (7).
5. the PLC chip angled end-face automatic cutting device according to claim 3 or 4, rotatably hinged by hinge arrangement (301) between described fixed part and tilting member.
6. PLC chip angled end-face automatic cutting device according to claim 5, described angle adjusting mechanism (3) comprises and is installed in horizontal location block (302) on fixed part and oblique angle locating piece (303), described tilting member is positioned between horizontal location block (302) and oblique angle locating piece (303), wherein, described horizontal location block (302) is when cutting blade (7) is in vertical position and tilting member aligned contact, described oblique angle locating piece (303) is when cutting blade (7) is in obliquity and tilting member aligned contact, locked by alignment pin (304) between described fixed part and tilting member.
7. PLC chip angled end-face automatic cutting device according to claim 5, described angle adjusting mechanism (3) comprises the locating slot (306) be arranged on fixed part, described tilting member is positioned at locating slot (306), there is in described locating slot (306) horizontal position and Wei Liangge side, oblique angle, respectively when cutting blade (7) is in vertical position and obliquity time and tilting member aligned contact, positioning sliding block (307) and push rod (305) is embedded with in described locating slot (306), contact with tilting member respectively and be locked at horizontal level and obliquity.
8. PLC chip angled end-face automatic cutting device according to claim 5, described angle adjusting mechanism (3) comprises the oblique angle locating piece (303) be arranged on fixed part, described oblique angle locating piece (303) is when cutting blade (7) is in obliquity and tilting member aligned contact, described tilting member is hinged by connecting rod link (309) and a connecting rod (308), realizes cutting blade (7) to vertical position for adjusting tilting member.
9. the PLC chip angled end-face automatic cutting device according to claim 7 or 8, the hydraulic cylinder of described push rod (305) or connecting rod (308) and linear drives, cylinder or linear electric motors are connected.
10. PLC chip angled end-face automatic cutting device according to claim 5, described angle adjusting mechanism (3) comprises and is arranged on levels electromagnetic iron (310) on fixed part and oblique angle electromagnet (311), described tilting member is positioned between levels electromagnetic iron (310) and oblique angle electromagnet (311), wherein, described levels electromagnetic iron (310) when cutting blade (7) is in vertical position and tilting member located by electromagnetic adsorption, described oblique angle electromagnet (311) when cutting blade (7) is in obliquity and tilting member located by electromagnetic adsorption.
11. PLC chip angled end-face automatic cutting devices according to claim 3 or 4, described angle adjusting mechanism (3) comprises the angle-controlled motor (313) be fixed on fixed part, the motor driving shaft (312) of described angle-controlled motor (313) is connected with tilting member by key (314), realizes between fixed part and tilting member rotatably hinged.
12. PLC chip angled end-face automatic cutting devices according to claim 1, adopt between described main beam (4), vertical column (5), cutter crossbeam (6) and cutting blade (7) and be rigidly connected, wherein, by being obliquely installed between described vertical column (5) and main beam (4), between described cutter crossbeam (6) and vertical column or between described cutting blade (7) and cutter crossbeam (6), realize angle between cutting blade (7) and vertical plane between ± 8 °.
CN201520424083.7U 2015-06-18 2015-06-18 PLC chip beveled tip face automatic cutting device Expired - Fee Related CN204773075U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201520424083.7U CN204773075U (en) 2015-06-18 2015-06-18 PLC chip beveled tip face automatic cutting device

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Application Number Priority Date Filing Date Title
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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106898783A (en) * 2015-12-18 2017-06-27 中国科学院大连化学物理研究所 A kind of fuel cell membrane electrode die-cutting apparatus and application method
CN108372598A (en) * 2018-01-23 2018-08-07 江阴华芯源半导体装备有限公司 Stick machine is drawn in full-automatic silicon crystal bar numerical control
CN108582515A (en) * 2018-01-31 2018-09-28 重庆周全装饰工程有限公司 A kind of wall column finishing cutter device
CN110000943A (en) * 2019-05-27 2019-07-12 湖州东科电子石英有限公司 The slot stick grooving processes of quartz long boat
CN114505970A (en) * 2022-04-15 2022-05-17 河北圣昊光电科技有限公司 Scribing head rotation adjusting device and scribing machine

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106898783A (en) * 2015-12-18 2017-06-27 中国科学院大连化学物理研究所 A kind of fuel cell membrane electrode die-cutting apparatus and application method
CN108372598A (en) * 2018-01-23 2018-08-07 江阴华芯源半导体装备有限公司 Stick machine is drawn in full-automatic silicon crystal bar numerical control
CN108582515A (en) * 2018-01-31 2018-09-28 重庆周全装饰工程有限公司 A kind of wall column finishing cutter device
CN110000943A (en) * 2019-05-27 2019-07-12 湖州东科电子石英有限公司 The slot stick grooving processes of quartz long boat
CN114505970A (en) * 2022-04-15 2022-05-17 河北圣昊光电科技有限公司 Scribing head rotation adjusting device and scribing machine
CN114505970B (en) * 2022-04-15 2022-07-08 河北圣昊光电科技有限公司 Scribing head rotation adjusting device and scribing machine
WO2023197516A1 (en) * 2022-04-15 2023-10-19 河北圣昊光电科技有限公司 Rotary adjusting device for dicing head, and dicer

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Granted publication date: 20151118

Termination date: 20210618