CN204758482U - Multi -functional optical material testing arrangement - Google Patents

Multi -functional optical material testing arrangement Download PDF

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Publication number
CN204758482U
CN204758482U CN201520073076.7U CN201520073076U CN204758482U CN 204758482 U CN204758482 U CN 204758482U CN 201520073076 U CN201520073076 U CN 201520073076U CN 204758482 U CN204758482 U CN 204758482U
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China
Prior art keywords
laser
sample chamber
catoptron
sample
optical material
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CN201520073076.7U
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Chinese (zh)
Inventor
沙鹏飞
周翊
赵江山
单耀莹
彭卓君
丁金滨
宋兴亮
范元媛
李慧
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Institute of Microelectronics of CAS
Aerospace Information Research Institute of CAS
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Academy of Opto Electronics of CAS
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Abstract

The utility model discloses a multi -functional optical material testing arrangement includes laser instrument, first portion speculum, first sample room, second portion speculum, second sample room, holophote and third sample room, wherein, the laser of laser instrument output at first passes through the beam split is carried out in first portion reflection, the laser entry of transmission to the first sample room in, laser entry to the second portion speculum of reflection, the second portion speculum is to following the laser of first portion speculum reflection carries out the beam split, laser entry to the second sample room of reflection, and the laser of transmission is gone into to holophote. Holophote is used for laser -bounce to the third sample room from the transmission of second portion speculum. The utility model discloses a multi -functional optical material testing arrangement novel structure has realized the function of a tractor serves several purposes, and convenience of customers is and the cost is reduced.

Description

A kind of multifunctional optical material proving installation
Technical field
The utility model relates to a kind of multifunctional optical material proving installation.Described device can carry out optical material purity detecting, the test of optical material damage threshold, can be used in carrying out pre-irradiation to optical material and put to improve damage threshold, be particularly useful for optical material and the optical thin film element of ultraviolet band.
Background technology
The purity detecting of optical material and the damage threshold of raising optical thin film and laser material are be engaged in the scholar institute questions of common interest that laser is studied and prepared by material always.At present along with the application & development of photoetching technique, for the optical material CaF of ultraviolet band 2obtain the extensive concern of scholars.Due to the CaF of low-purity 2material can obvious absorbing laser energy, causes the wavefront distortion of Output of laser and produces serious colour center phenomenon, and the purity detecting therefore for this material is requisite link before it uses.In addition the cost of this material and coating cost all very high, therefore to the test of its damage threshold and to improve its damage threshold be also be engaged in scholar institute questions of common interest prepared by laser research and material.
At present, the more effective method improving optical thin film and material damage threshold value is exactly carry out radiation treatment with the laser lower than damage threshold to optical thin film and material.Because laser pre-irradiation optical thin film and material are except removing the H of its adsorption 2o, CO 2with outside dust, can also play laser polishing effect to its surface, what its surface was become is bright and clean, even, careful.The more important thing is, make the micromechanism on its surface there occurs change and effects on surface defect have repair.Thus the surface structure of sample is become more complete, therefore improve the ability of resisting laser damage.
Existed in the market for the test of optical thin film element damage threshold and the device of optical material purity detecting, but its function is unique and cost is very high,
Utility model content
(1) technical matters that will solve
Technical problem to be solved in the utility model is the test that current optical material proving installation can only carry out single parameter, uses inconvenient and with high costs.
(2) technical scheme
The utility model proposes a kind of multifunctional optical material proving installation, comprise laser instrument, Part I catoptron, the first sample chamber, Part II catoptron, the second sample chamber, completely reflecting mirror and the 3rd sample chamber, wherein, first the laser that described laser instrument exports carry out light splitting through described Part I reflection, the laser of transmission incides in the first sample chamber, and the laser of reflection incides Part II catoptron; Described Part II catoptron carries out light splitting to the laser from described Part I catoptron reflection, and the laser of reflection incides the second sample chamber, and the laser of transmission enters to Part III catoptron; Completely reflecting mirror is used for the laser reflection from the transmission of Part II catoptron to the 3rd sample chamber.
According to embodiment of the present utility model, described optical material proving installation also comprises the first variable attenuation sheet, the second variable attenuation sheet and the 3rd variable attenuation sheet, it is arranged between Part I catoptron and the first sample chamber, between Part II catoptron and the second sample chamber, between completely reflecting mirror and the 3rd sample chamber respectively, and each variable attenuation sheet is for regulating the energy of the laser inciding each sample room.
According to embodiment of the present utility model, described first sample chamber be connected internally to a spectrometer, thus, the optical material sample in this first sample chamber laser irradiate under produce fluorescence can be sent to spectro-metre; Described spectrometer, for showing and storing the spectral information of the fluorescence detected, by obtained spectral information and known standard spectrum information being contrasted, measures the purity of institute's photometry material sample thus.
According to embodiment of the present utility model, the second sample chamber and and the second variable attenuation sheet between a laser beam expanding orthopedic systems is set, this laser beam expanding orthopedic systems be used for laser beam is expanded and shaping; The optical material sample be placed in this second sample chamber can carry out laser pre-irradiation.
According to embodiment of the present utility model, a laser contracting bundle orthopedic systems is set between the 3rd variable attenuation sheet and the 3rd sample chamber, this laser contracting bundle orthopedic systems is used for carrying out contracting bundle and shaping to laser, and the laser being irradiated to the sample in the 3rd sample chamber carries out damage threshold test for carrying out this sample.
According to embodiment of the present utility model, between described 3rd variable attenuation sheet and the 3rd sample chamber, a Part III catoptron is also set, its for part be reflected into be mapped to the 3rd sample chamber laser to an energy meter, this energy meter is for measuring by the energy of this Part III catoptron reflection, by the reflectivity of known Part III catoptron, thus the energy density of the laser on the sample that is irradiated in the 3rd sample chamber can be calculated.
According to embodiment of the present utility model, all placements at 45 ° with optical axis of described Part I catoptron and Part II catoptron.
According to embodiment of the present utility model, described each sample room has laser entrance and laser exit, and is sealed by optical mirror slip at laser entrance and laser exit place.
According to embodiment of the present utility model, the light transmitted from described each sample room is received by light absorbent or light barrier.
(3) beneficial effect
Multifunctional optical material proving installation novel structure of the present utility model, achieves the function of a tractor serves several purposes, facilitates user and reduce cost.
Accompanying drawing explanation
Fig. 1 is the principle assumption diagram of multifunctional optical material proving installation of the present utility model;
Fig. 2 is the structural representation of the device of an embodiment of the present utility model.
Embodiment
For making the purpose of this utility model, technical scheme and advantage clearly understand, referring to accompanying drawing, the utility model is described in further detail.
Fig. 1 is the principle assumption diagram of multifunctional optical material proving installation of the present utility model.As shown in Figure 1, this proving installation comprises laser instrument 1, multiple catoptron installing mechanism 41,42,43, multiple sample chamber 21,22,23.Wherein each catoptron installing mechanism and each sample room one_to_one corresponding.Sample chamber is for loading the optical material that need test, and the laser received from laser instrument 1 or catoptron installing mechanism irradiates optical material.Should be noted, in this Fig. 1, only show three catoptron installing mechanisms and three sample chambers, but the utility model is not limited to specific number.
Described catoptron installing mechanism 41,42,43 can be used for installing various catoptron, comprises completely reflecting mirror or partially reflecting mirror.Further, catoptron installing mechanism also can not install any catoptron, and can install under the duty of proving installation, change, removal catoptron, be directed in each sample room with the laser making laser instrument 1 launch any one or more.
Wherein, the laser that the first catoptron installing mechanism 41 sends for receiving laser instrument 1, and when it installs completely reflecting mirror, the laser inciding this first catoptron installing mechanism 41 from laser instrument is directed to the second catoptron installing mechanism 42; When it does not install catoptron, the laser inciding this first catoptron installing mechanism 41 from laser instrument is directed to first sample chamber 21 corresponding with this first catoptron installing mechanism 41.Or on the contrary, when it does not install catoptron, the laser inciding this first catoptron installing mechanism 41 from laser instrument is directed to the second catoptron installing mechanism 42; When it installs completely reflecting mirror, the laser inciding this first catoptron installing mechanism 41 from laser instrument is directed to first sample chamber 21 corresponding with this first catoptron installing mechanism 41.Fig. 1 illustrate only the previous case.
The laser that second catoptron installing mechanism 42 sends for receiving the first catoptron installing mechanism 41, and, when it installs completely reflecting mirror, the laser inciding this second catoptron installing mechanism 42 from the first catoptron installing mechanism 41 is respectively directed to second sample chamber 22 corresponding with this second catoptron installing mechanism 42; When it does not install catoptron, the laser inciding this second catoptron installing mechanism 42 from the first catoptron installing mechanism 41 is respectively directed to the 3rd catoptron installing mechanism 43.
Similar, other catoptron installing mechanisms also at installation completely reflecting mirror and can guide to next catoptron or corresponding sample chamber respectively under not installing catoptron two states.That is, when it does not install catoptron, the laser inciding this catoptron installing mechanism from last catoptron installing mechanism is directed to next catoptron installing mechanism, when it installs completely reflecting mirror, the laser inciding this catoptron installing mechanism from laser instrument is directed to sample chamber corresponding with it.
Thus, by changing on catoptron installing mechanism whether install catoptron, and which kind of catoptron being installed, same measurement mechanism can being realized and can test different properties of sample in multiple sample chamber simultaneously.
Fig. 2 is the structural representation of the multifunctional optical material proving installation of an embodiment of the present utility model.The device of this embodiment possesses three kinds of purposes simultaneously, is respectively the purity of detecting optical material, the damage threshold of measuring optical thin-film component and laser pre-irradiation optical thin film element and material improves its damage threshold.
As shown in Figure 2, first the laser that laser instrument 1 exports carry out light splitting through a Part I mirror M 1 (being installed on the first catoptron installing mechanism).In this embodiment, the reflecting surface of this Part I mirror M 1 and the placement at 45 ° of the optical axis direction of this laser.From the laser of Part I mirror M 1 transmission through a first variable attenuation sheet A1, this first can carry out energy attenuation to laser by attenuator A1, entered in the first sample chamber 21 by the laser of energy attenuation, be placed with optical material sample in first sample chamber, the laser making optical material sample be incident to the first sample chamber 21 irradiates.
By regulating the first variable attenuation sheet A1, the light intensity on the optical material sample that is irradiated in the first sample chamber 21 can be changed.Optical material is with CaF 2material is the CaF of example, low-purity 2material is under the irradiation of deep ultraviolet band of light, and the impurity component contained by it can produce a large amount of fluorescence spectrums, therefore just can obtain its purity by analyzing its spectral information, irradiating, can select highly purified optical material according to different sample.
According to a kind of preferred implementation, by an optical fiber F the first sample chamber 21 is connected internally to a spectrometer 3, thus, the fluorescence that the optical material sample in described first sample chamber 1 produces under laser irradiates is sent to spectro-metre 3.Spectrometer 3, for showing and storing the spectral information of the fluorescence detected, by obtained spectral information and known standard spectrum information being contrasted, also can measure the purity of institute's photometry material sample.
On the other hand, the laser that laser instrument 1 exports, through Part I mirror M 1, is carried out light splitting through a Part II mirror M 2 (being installed on the second catoptron installing mechanism) again by the laser reflected.Equally, the Part II mirror M 2 in this embodiment and optical axis placement at 45 °.Wherein, energy attenuation is carried out by the laser that this Part II mirror M 2 reflects through a second variable attenuation sheet A2.Entered in the second sample chamber 22 by the laser of energy attenuation, be also placed with optical material sample in the second sample chamber, the laser making this optical material sample be incident to the second sample chamber 22 irradiates.By regulating the second variable attenuation sheet A2, the light intensity be irradiated on sample can be changed.
It should be noted that, in order to make the laser of the optical material sample be irradiated in the second sample chamber 22 even, in this embodiment, a laser beam expanding orthopedic systems can be set between the second variable attenuation sheet A2 and the second sample chamber 22, for expanding and shaping laser beam.Such as, the hot spot exported when laser instrument is rectangular light spot, when length breadth ratio is greater than 5, as shown in Figure 1, can increase in the optical path be made up of the first lens L1 and the second lens L2 expand orthopedic systems, expand the narrow direction size of laser, the light after expanding is a square hot spot, size and laser length direction measure-alike, thus can uniform irradiation on the optical material sample of the second sample chamber 22.
The optical material sample be placed in the second sample chamber 22 can carry out laser pre-irradiation.The H of its adsorption can be removed through the optical sample of laser pre-irradiation 2o, CO 2with outside dust, can also play laser polishing effect to its surface, what its surface was become is bright and clean, even, careful.The more important thing is, make the micromechanism on its surface there occurs change and effects on surface defect have repair.Thus the surface structure of sample is become more complete, therefore improve the ability of resisting laser damage.
Again on the one hand, laser instrument 1 export and reflected through a completely reflecting mirror M (being installed on the 3rd catoptron installing mechanism) again through the laser of the reflection of Part I mirror M 1 and the transmission of Part II mirror M 2 successively.In this embodiment, this completely reflecting mirror M also placement at 45 ° with optical axis.The laser being totally reflected mirror M reflection carries out energy attenuation through a 3rd variable attenuation sheet A3.Be irradiated to again in a Part III mirror M 3 by the laser of the 3rd variable attenuation sheet A3 energy attenuation and carry out light splitting, tap into sample chamber 3 from the laser straight of Part III mirror M 3 transmission.By the energy density of laser on the sample that regulates the 3rd variable attenuation sheet A3 to change to be irradiated in the 3rd sample chamber 23.Also be placed with optical material sample in 3rd sample chamber 23, the laser making this optical material sample be incident to the 3rd sample chamber 23 irradiates.To be irradiated on the sample in the 3rd sample chamber 23 laser for carrying out sample damage threshold testing.
The laser reflected through Part III mirror M 3 is received by an energy meter E, this energy meter E is partially reflected the energy of mirror M3 reflection from the laser of lens L4 transmission for measuring, by the reflectivity of known partially reflecting mirror M3, thus the energy density of the laser on the sample that is irradiated in the 3rd sample chamber 23 can be calculated.
It should be noted that equally, diminish to make the laser size of the optical material sample be irradiated in the 3rd sample chamber 23 thus improve its energy density, in this embodiment, a laser can be arranged contract and restraint orthopedic systems, for carrying out contracting bundle and shaping to laser between the 3rd variable attenuation sheet A3 and the 3rd sample chamber 23.Such as, the hot spot that laser instrument exports is rectangular light spot, length breadth ratio is greater than 5, so increase the contracting bundle orthopedic systems be made up of the 3rd lens L3 and the 4th lens L4 between the 3rd variable attenuation sheet A3 and the 3rd sample chamber 23, contracting bundle is carried out to the cross direction size of laser, light after contracting bundle is a square hot spot, size and the narrow direction of laser measure-alike.
The first sample chamber 22, sample chamber 21, second in this embodiment and the 3rd sample chamber 23 have similar structure, all there is laser entrance and laser exit, and sealed by optical mirror slip at laser entrance and laser exit place, the light transmitted from sample chamber is accepted by light absorbent or light barrier B1 ~ B3, prevents transmitted light from damaging user of service.In addition, all N can be filled with in each sample indoor 2gas, for preventing the gas in sample chamber from producing ozone after laser irradiates, causes the decay of laser energy.
According to above with reference to the device described by Fig. 2, the laser that laser instrument exports can measure the parameter of three optical elements simultaneously by the means of light splitting, be respectively the purity of detecting optical material, the damage threshold of measuring optical thin-film component and laser pre-irradiation optical thin film element and material improves its damage threshold.The laser that laser instrument exports variable attenuation sheet A1, A2 and A3 are housed respectively in three light paths of divide, by the transmitance of adjustment attenuator, the energy of three road laser can be regulated continuously, convenient for users to use, improve the scope of application of equipment.
In order to meet the different service condition of user, this device can be arranged in three tunnel light splitting by mode partially reflecting mirror M1 and M2 being replaced with completely reflecting mirror which be in off working state.Such as, M1 is replaced by completely reflecting mirror, in light path, only has the light splitting of B2 and B3 two-way to use; If M2 is replaced by completely reflecting mirror, the light splitting of B1 and B2 two-way in light path, is only had to use; If M1 and M2 is replaced by completely reflecting mirror entirely, in light path, only have B2 mono-road light available; If remove M1, light path, by no longer light splitting, only has B1 mono-road light available in light path; If M1 is replaced by completely reflecting mirror remove M2 simultaneously, in light path, only have B3 mono-road light available.Therefore user can adjust light path as required flexibly, completes required test purpose.In addition, this device also has expanded function, can according to user's request, change M into partially reflecting mirror, Output of laser is continued to be divided into even five tunnels, four tunnels, simultaneously for the parameter such as purity, damage threshold of measuring optical material, thus greatly improve the service efficiency of this device, reduce the use cost of user.
Above-described specific embodiment; the purpose of this utility model, technical scheme and beneficial effect are further described; be understood that; the foregoing is only specific embodiment of the utility model; be not limited to the utility model; all within spirit of the present utility model and principle, any amendment made, equivalent replacement, improvement etc., all should be included within protection domain of the present utility model.

Claims (9)

1. a multifunctional optical material proving installation, comprises laser instrument, Part I catoptron, the first sample chamber, Part II catoptron, the second sample chamber, completely reflecting mirror and the 3rd sample chamber, wherein,
First the laser that described laser instrument exports carry out light splitting through described Part I reflection, and the laser of transmission incides in the first sample chamber, and the laser of reflection incides Part II catoptron;
Described Part II catoptron carries out light splitting to the laser from described Part I catoptron reflection, and the laser of reflection incides the second sample chamber, and the laser of transmission enters to completely reflecting mirror;
Completely reflecting mirror is used for the laser reflection from the transmission of Part II catoptron to the 3rd sample chamber.
2. multifunctional optical material proving installation as claimed in claim 1, it is characterized in that, described optical material proving installation also comprises the first variable attenuation sheet, the second variable attenuation sheet and the 3rd variable attenuation sheet, it is arranged between Part I catoptron and the first sample chamber, between Part II catoptron and the second sample chamber, between completely reflecting mirror and the 3rd sample chamber respectively, and each variable attenuation sheet is for regulating the energy of the laser inciding each sample room.
3. multifunctional optical material proving installation as claimed in claim 2, it is characterized in that, described first sample chamber be connected internally to a spectrometer, thus, the optical material sample in this first sample chamber laser irradiate under produce fluorescence can be sent to spectro-metre; Described spectrometer, for showing and storing the spectral information of the fluorescence detected, by obtained spectral information and known standard spectrum information being contrasted, measures the purity of institute's photometry material sample thus.
4. multifunctional optical material proving installation as claimed in claim 2, is characterized in that, the second sample chamber and and the second variable attenuation sheet between a laser beam expanding orthopedic systems is set, this laser beam expanding orthopedic systems is used for expanding and shaping laser beam; The optical material sample be placed in this second sample chamber can carry out laser pre-irradiation.
5. multifunctional optical material proving installation as claimed in claim 2, it is characterized in that, a laser contracting bundle orthopedic systems is set between the 3rd variable attenuation sheet and the 3rd sample chamber, this laser contracting bundle orthopedic systems is used for carrying out contracting bundle and shaping to laser, and the laser being irradiated to the sample in the 3rd sample chamber carries out damage threshold test for carrying out this sample.
6. multifunctional optical material proving installation as claimed in claim 5, it is characterized in that, between described 3rd variable attenuation sheet and the 3rd sample chamber, a Part III catoptron is also set, its for part be reflected into be mapped to the 3rd sample chamber laser to an energy meter, this energy meter is for measuring by the energy of this Part III catoptron reflection, by the reflectivity of known Part III catoptron, thus the energy density of the laser on the sample that is irradiated in the 3rd sample chamber can be calculated.
7. the multifunctional optical material proving installation according to any one of claim 1 to 6, is characterized in that, all placements at 45 ° with optical axis of described Part I catoptron and Part II catoptron.
8. the multifunctional optical material proving installation according to any one of claim 1 to 6, is characterized in that, described each sample room has laser entrance and laser exit, and is sealed by optical mirror slip at laser entrance and laser exit place.
9. multifunctional optical material proving installation as claimed in claim 8, it is characterized in that, the light transmitted from described each sample room is received by light absorbent or light barrier.
CN201520073076.7U 2015-02-02 2015-02-02 Multi -functional optical material testing arrangement Expired - Fee Related CN204758482U (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105548083A (en) * 2015-12-08 2016-05-04 电子科技大学 Double-optical-path terahertz time-domain spectrometer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105548083A (en) * 2015-12-08 2016-05-04 电子科技大学 Double-optical-path terahertz time-domain spectrometer

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C14 Grant of patent or utility model
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TR01 Transfer of patent right
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Effective date of registration: 20200904

Address after: 100029 Beijing city Chaoyang District Beitucheng West Road No. 3

Patentee after: Institute of Microelectronics of the Chinese Academy of Sciences

Address before: 100190, No. 19 West Fourth Ring Road, Beijing, Haidian District

Patentee before: Aerospace Information Research Institute,Chinese Academy of Sciences

Effective date of registration: 20200904

Address after: 100190, No. 19 West Fourth Ring Road, Beijing, Haidian District

Patentee after: Aerospace Information Research Institute,Chinese Academy of Sciences

Address before: 100094, No. 9 Deng Nan Road, Beijing, Haidian District

Patentee before: Academy of Opto-Electronics, Chinese Academy of Sciences

CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20151111

Termination date: 20220202